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GB9507930D0 - Inertial sensor assemblies - Google Patents

Inertial sensor assemblies

Info

Publication number
GB9507930D0
GB9507930D0 GBGB9507930.7A GB9507930A GB9507930D0 GB 9507930 D0 GB9507930 D0 GB 9507930D0 GB 9507930 A GB9507930 A GB 9507930A GB 9507930 D0 GB9507930 D0 GB 9507930D0
Authority
GB
United Kingdom
Prior art keywords
inertial sensor
sensor assemblies
assemblies
inertial
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9507930.7A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Smiths Group PLC
Original Assignee
Smiths Group PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smiths Group PLC filed Critical Smiths Group PLC
Priority to GBGB9507930.7A priority Critical patent/GB9507930D0/en
Publication of GB9507930D0 publication Critical patent/GB9507930D0/en
Priority to GB9604112A priority patent/GB2300047B/en
Priority to DE19610554A priority patent/DE19610554B4/en
Priority to FR9604294A priority patent/FR2733321A1/en
Priority to JP8096940A priority patent/JPH08304081A/en
Priority to US08/859,264 priority patent/US5880368A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0074—3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
    • G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
    • G01C21/166—Mechanical, construction or arrangement details of inertial navigation systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
GBGB9507930.7A 1995-04-19 1995-04-19 Inertial sensor assemblies Pending GB9507930D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB9507930.7A GB9507930D0 (en) 1995-04-19 1995-04-19 Inertial sensor assemblies
GB9604112A GB2300047B (en) 1995-04-19 1996-02-27 Inertial sensor assemblies
DE19610554A DE19610554B4 (en) 1995-04-19 1996-03-18 Acceleration sensor assembly
FR9604294A FR2733321A1 (en) 1995-04-19 1996-04-02 DETECTOR UNIT OF INERTIA
JP8096940A JPH08304081A (en) 1995-04-19 1996-04-18 Inertia sensor assembly
US08/859,264 US5880368A (en) 1995-04-19 1997-05-20 Inertial sensors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9507930.7A GB9507930D0 (en) 1995-04-19 1995-04-19 Inertial sensor assemblies

Publications (1)

Publication Number Publication Date
GB9507930D0 true GB9507930D0 (en) 1995-06-14

Family

ID=10773183

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9507930.7A Pending GB9507930D0 (en) 1995-04-19 1995-04-19 Inertial sensor assemblies

Country Status (4)

Country Link
JP (1) JPH08304081A (en)
DE (1) DE19610554B4 (en)
FR (1) FR2733321A1 (en)
GB (1) GB9507930D0 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6065339A (en) * 1996-03-29 2000-05-23 Ngk Insulators, Ltd. Vibration gyro sensor, combined sensor and method for producing vibration gyro sensor
US6003369A (en) * 1997-05-19 1999-12-21 Continental Teves, Inc. Method for manufacturing encapsulated semiconductor devices
JP2000097707A (en) * 1998-09-18 2000-04-07 Fujitsu Ltd Acceleration sensor
FR2861464B1 (en) 2003-10-28 2006-02-17 Commissariat Energie Atomique MOTION DETECTOR WITH SIX DEGREES OF FREEDOM WITH THREE POSITION SENSORS AND METHOD OF MANUFACTURING A SENSOR
SE528404C2 (en) 2004-10-20 2006-11-07 Imego Ab The sensor arrangement
JP5037819B2 (en) 2005-03-04 2012-10-03 ソニー株式会社 Electronics
DE102005023591A1 (en) * 2005-05-18 2006-11-30 Hl-Planar Technik Gmbh Field measuring device, measuring module for a field measuring device and method of production for a plurality of measuring modules
DE102005047873B4 (en) * 2005-10-06 2010-10-14 Günthner, Wolfgang, Dipl.-Ing. Miniaturized inertial measuring system
US7237437B1 (en) * 2005-10-27 2007-07-03 Honeywell International Inc. MEMS sensor systems and methods
FR2903812B1 (en) * 2006-07-13 2008-10-31 Commissariat Energie Atomique INTEGRATED CIRCUIT DISTRIBUTED TO AT LEAST TWO NON-PARALLEL PLANS AND METHOD FOR PRODUCING THE SAME
DE102009001247A1 (en) * 2009-02-27 2010-09-09 Sensordynamics Ag Micro-electro-mechanical sensor
DE102014207766A1 (en) * 2014-04-24 2015-10-29 Continental Teves Ag & Co. Ohg Monitor 3-axis inertial sensor with 2-axis inertial sensor
JP6519122B2 (en) * 2014-08-25 2019-05-29 セイコーエプソン株式会社 Sensor device, electronic device and mobile
DE102016122042B4 (en) 2015-11-20 2022-02-17 Jena Optronik Gmbh Sensor assembly for determining the position of an object
KR101724332B1 (en) * 2015-12-16 2017-04-07 국방과학연구소 Inertial measurement unit
US10473464B2 (en) 2018-01-17 2019-11-12 Cubic Corporation Cuboid inertial measurement unit
GB2571916A (en) * 2018-02-23 2019-09-18 Atlantic Inertial Systems Ltd Inertial measurement units
WO2020208670A1 (en) * 2019-04-08 2020-10-15 三菱電機株式会社 Outdoor unit for air-conditioner

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012316A (en) * 1989-03-28 1991-04-30 Cardiac Pacemakers, Inc. Multiaxial transducer interconnection apparatus
DE9113744U1 (en) * 1991-11-05 1992-01-16 SMT & Hybrid GmbH, O-8012 Dresden Three-dimensional micromechanical acceleration sensor with integrated electronics

Also Published As

Publication number Publication date
FR2733321A1 (en) 1996-10-25
DE19610554B4 (en) 2006-09-21
DE19610554A1 (en) 1996-10-24
JPH08304081A (en) 1996-11-22

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