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GB916703A - Improvements in or relating to ion sources - Google Patents

Improvements in or relating to ion sources

Info

Publication number
GB916703A
GB916703A GB1761960A GB1761960A GB916703A GB 916703 A GB916703 A GB 916703A GB 1761960 A GB1761960 A GB 1761960A GB 1761960 A GB1761960 A GB 1761960A GB 916703 A GB916703 A GB 916703A
Authority
GB
United Kingdom
Prior art keywords
cathode
parallel
magnetic field
slit
arc chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1761960A
Inventor
James Harry Freeman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB1761960A priority Critical patent/GB916703A/en
Priority to FR862000A priority patent/FR1289265A/en
Publication of GB916703A publication Critical patent/GB916703A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

916,703. Ion sources. UNITED KINGDOM ATOMIC ENERGY AUTHORITY. May 2, 1961 [May 18, 1960], No. 17619/60. Class 39 (1). In an arc discharge ion source the directly heated cathode 3 is arranged within the arc chamber 1 parallel to the ion extraction slit 2 the region between the cathode and the slit being free of any interposed grids. A magnetic field may be set up parallel to the cathode, as shown between magnet poles 6, 7. An electron reflecting plete 8 may be fitted at each end of the cathode. Solid material is vaporized in the oven 9 by a heater winding 10, but gaseous source material may also be used. The ribbontype cathode 3 shown may be replaced by one of circular cross-section or by a helical coil. This last cathode is preferably used without a magnetic field. A flat cathode may be used which is of sufficient area effectively to divide the arc chamber into two parts, apertures in the cathode allowing the passage of gas. In one arrangement of this type the cathode consists of a plurality of parallel wires mounted between two transverse supporting bars. Dimensions are given.
GB1761960A 1960-05-18 1960-05-18 Improvements in or relating to ion sources Expired GB916703A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1761960A GB916703A (en) 1960-05-18 1960-05-18 Improvements in or relating to ion sources
FR862000A FR1289265A (en) 1960-05-18 1961-05-16 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1761960A GB916703A (en) 1960-05-18 1960-05-18 Improvements in or relating to ion sources

Publications (1)

Publication Number Publication Date
GB916703A true GB916703A (en) 1963-01-23

Family

ID=10098308

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1761960A Expired GB916703A (en) 1960-05-18 1960-05-18 Improvements in or relating to ion sources

Country Status (1)

Country Link
GB (1) GB916703A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
US4760262A (en) * 1987-05-12 1988-07-26 Eaton Corporation Ion source
US4891525A (en) * 1988-11-14 1990-01-02 Eaton Corporation SKM ion source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
US4760262A (en) * 1987-05-12 1988-07-26 Eaton Corporation Ion source
US4891525A (en) * 1988-11-14 1990-01-02 Eaton Corporation SKM ion source

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