GB2625846A

GB2625846A - Scrubber burner

Info

Publication number: GB2625846A
Application number: GB2308186.2A
Authority: GB
Inventors: Lee Pil-Hyong; Kyoo Ko Chan; Soo Choi Yun; Kim Young-Kun
Original assignee: CSK Inc
Current assignee: CSK Inc
Priority date: 2022-12-27
Filing date: 2023-06-01
Publication date: 2024-07-03
Also published as: WO2024141838A1; TW202432991A; GB202308186D0

Abstract

A scrubber burner 10 comprises an inlet module 200 supplying waste gas to a burner module 100 and a guide module 300 to discharge incinerated waste gas. The burner module comprises a burner housing 110 and a porous cartridge (120, Fig. 7) surrounding a combustion area (S1, Fig. 7). A conduit 130 supplies cleaning gas to the porous cartridge to prevent powder being deposited onto an inner wall of the porous cartridge. The porous cartridge may comprise a porous plate (121, Fig. 7) with holes to guide cleaning gas in an inwardly radial direction. The inlet module may have a main inlet conduit 210, a cover inlet conduit 220, and a sub inlet conduit 230. The guide module may comprise a guide discharge duct 310 with an inclined surface (311, Fig. 7), and a guide member 320 connected to the burner housing. Discharge water may be supplied through a water flow passage (322, Fig. 7) and nozzle (324, Fig. 7). A nozzle assembly (140, Fig. 2) may supply fuel gas and an oxidant to the combustion area. The burner module may comprise a burner head 150 and a cooling member (160, Fig. 2).

Description

SCRUBBER BURNER

Technical Field

The present disclosure relates to a scrubber burner for implementing in a waste gas treatment apparatus.

Background

In general, a waste gas generated in an electronics industry process, such as a semiconductor production process, a LCD production process, or an OLED production process, is composed of a mixture of VOCs, PFC gases, moisture, and other foreign substances. The waste gas is mostly generated during a semiconductor etching process or a chemical vapor deposition process, and includes gases that contribute to global warming. Additionally, the PFC gases contained in the waste gas are known to be poorly degradable when treated. The PFC gases contained in the waste gas are treated by a scrubber using heating, adsorption, or plasma methods.

The scrubber using heating methods generally may include a burner for generating flame to heat the waste gas, a reaction chamber mounted at the lower of the burner to generate by-product particles by carrying out combustion and reaction of the waste gas, and a water tank of which one side is positioned at the lower of the reaction chamber to collect the by-product particles and aqueous waste gas. The burner may form a flame -2 -using an oxidant and fuel supplied thereto and heat the waste gas for decomposition. The waste gas may have different types and contents of discharged gas depending on the process.

Therefore, the burner is required to form an appropriate flame according to the type of the waste gas for more efficient combustion of the waste gas.

In addition, in the case of a general diffusion flame, fuel and oxygen are independently supplied to form a combustion flame. For such a diffusion flame, it is possible to form a high adiabatic flame temperature, but the high adiabatic flame temperature has drawbacks since it reacts with nitrogen gas (N2) discharged from semiconductor facilities, thereby causing exponential increase in the amount of NOx.

Summary

Embodiments of the present invention have been proposed in light of the above background to provide a scrubber burner capable of securing high waste gas decomposition efficiency and reducing the generation of byproducts, such as carbon monoxide and nitrogen oxides, under conditions of reducing fuel consumption.

According to an aspect of the invention, there is provided a scrubber burner, comprising: a burner module. an inlet module for supplying a waste gas to the burner module; and a guide module for guiding emissions discharge of the waste gas which has -3 -been incinerated, the burner module comprising: a burner housing providing a combustion area for incinerating the waste gas; a porous cartridge disposed in the burner housing to surround the combustion area. and a cleaning gas conduit for supplying a cleaning gas to the porous cartridge, thereby preventing a powder included in the waste gas from being adhered to an inner wall of the porous cartridge.

In another aspect, provided is the scrubber burner, wherein the porous cartridge comprises: a porous plate providing holes oriented in two-dimensions that guide the cleaning gas to unidirectionally flow in an inwardly radial direction of the burner housing; and a porous member tightly disposed on an inner circumferential surface of the porous plate, the porous member providing pores oriented in three-dimensions that guide the cleaning gas to be dispersed and to flow in multiple directions toward the combustion area. In another aspect, provided is the scrubber burner, wherein the inlet module comprises: a main inlet conduit disposed on an upper part of the burner housing to supply the waste gas to the burner housing in a vertically downward direction a cover inlet conduit connected in communication with the upper part of the burner housing to surround a discharge end of the main inlet conduit; and a sub inlet conduit connected in communication with a side part of the cover inlet conduit for allowing supply of an additional waste gas. In another aspect, provided is the scrubber burner, the sub inlet conduit is, when the inlet module is viewed from the top, connected to an edge portion of the cover inlet -4 -conduit in a tangential direction, and when the waste gas is supplied to the cover inlet conduit via the sub inlet conduit, the waste gas swirlingly flows along an inner wall of the cover inlet conduit.

In another aspect, provided is the scrubber burner, wherein the guide module comprises: a guide discharge duct providing a guide inclined surface whose inner diameter decreases in a downward direction; and a guide member connected to the burner housing and the guide discharge duct therebetween.

In another aspect, provided is the scrubber burner, wherein the guide member comprises: a guide body; a discharge water flow passage to which a guidance discharge water is supplied; a discharge water channel to which the guidance discharge water is supplied via the discharge water flow passage, the discharge water channel providing a flow path in a circumferential direction at an inner circumferential portion of the guide body, wherein the guidance discharge water can flow through the flow path; and a discharge water nozzle formed on a lower part of the discharge water channel such that the guidance discharge water is discharged towards the guide inclined surface.

In another aspect, provided is the scrubber burner, wherein the discharge water flow passage is, when the guide member is viewed from the top, formed at an edge portion of the discharge water channel in a tangential direction, and when the guidance discharge -5 -water is discharged through the discharge water nozzle, the guidance discharge water swirls on the guide inclined surface.

In another aspect, provided is the scrubber burner, wherein the guide member further comprises: a gas channel providing a flow path which can be supplied with a guidance gas dischargable to the guide inclined surface, the gas channel being disposed on an inner circumferential side than the discharge water channel; and a gas nozzle formed on a lower part of the gas channel to allow the guidance gas to be discharged towards the guide inclined surface.

In another aspect, provided is the scrubber burner, wherein the burner module further comprises a nozzle assembly for supplying a fuel gas and an oxidant to the combustion area, the nozzle assembly comprising: a first nozzle plate formed with a fuel flow path for supplying the fuel gas to the combustion area and an oxidant flow path for supplying the oxidant to the combustion area; a second nozzle plate disposed on an upper and inner circumferential side of the first nozzle plate, the second nozzle plate delivering the fuel gas to the fuel flow path; and a third nozzle plate disposed on an upper and outer circumferential side of the first nozzle plate, the third nozzle plate delivering the oxidant to the oxidant flow path, and wherein the fuel flow path is positioned closer to an inner circumferential side of the first nozzle plate than the oxidant flow path. -6 -

In another aspect, provided is the scrubber burner, wherein the first nozzle plate, the second nozzle plate, and the third nozzle plate are assembled in a manner that they can be disassembled.

In another aspect, provided is the scrubber burner, wherein the fuel flow path comprises: an inlet side wise nozzle formed on an upper part of the first nozzle plate to be in communication with the second channel; an outlet side wise nozzle formed on a lower part of the first nozzle plate to be in communication with the combustion area; and a connecting nozzle connected to the inlet side wise nozzle and the outlet side wise nozzle therebetween while forming a stepped portion of the connecting nozzle, the connecting nozzle having an inner diameter smaller than inner diameters of the inlet side wise nozzle and the outlet side wise nozzle.

In another aspect, provided is the scrubber burner, wherein the burner module comprises: a burner head disposed on an upper part of the burner housing; a cooling member disposed on an inner space of the burner head; a first cooling channel circumferentially extending at a lower edge portion of the burner head; and a second cooling channel connected to the first cooling channel, the second cooling channel circumferentially extending on the burner head such that heat is transferred through a contact with at least a portion of the cooling member. -7 -

The embodiments of the invention can achieve an advantageous effect that, with a combustor to which a partial premixed diffusion combustion method is applied, the partially premixed diffusion flame method for NOx reduction can be applied to advantages of diffusion flame.

Further, the embodiments of the invention can achieve an advantageous effect that CO and THC generated in a waste gas purification process can be additionally burned to minimize CO and THC emissions in the exhaust gas discharged.

Further, the embodiments of the invention can achieve an advantageous effect that high waste gas decomposition efficiency can be secured under conditions in which fuel consumption is reduced, and that the generation of byproducts, such as carbon monoxide and nitrogen oxides can be reduced.

Brief Description of the Drawings

The objects and features of the present disclosure will become apparent from the following description of embodiments, given in conjunction with the accompanying drawings, in which: Fig. 'I is a combined perspective view illustrating a scrubber burner being combined according to an embodiment of the invention. -8 -

Fig. 2 is an exploded perspective view of a separated scrubber burner, viewed from the top, according to an embodiment of the invention.

Fig. 3 is an exploded perspective view of a separated scrubber burner, viewed from the bottom, according to an embodiment of the invention.

Fig. 4 is a plan view showing an upper part of a scrubber burner according to an embodiment of the invention.

Fig. 5 is a side view showing a side part of a scrubber burner according to an embodiment of the invention.

Fig. 6 is a cross-sectional view of FIG. 4 cut along a line "A-A".

Fig. 7 is an enlarged view of part "B" of Fig. 6.

Fig. 8 is an enlarged view of part "B" of Fig. 6, according to another embodiment of the invention.

Detailed Description

Hereinafter, specific embodiments for implementing the technical concept of the invention are described in detail with reference to the accompanying drawings.

Besides, in describing the invention, detailed descriptions on certain features or functions known in the art may be omitted if they are considered to render the gist of the invention vague. -9 -

It shall be understood that, as employed herein, the statement that an element is "connected to" or "supplied to" another element may mean either that the element is directly connected or supplied to another element or that one or more intermediate parts are present therebetween.

The terms as employed herein are intended only to describe the specific embodiments of the invention, not to limit the disclosed concept of the invention. A singular expression is used to cover the corresponding plural expression, unless expressed otherwise in the context.

Further, in the accompanying drawings in this specification, some components are exaggerated, omitted, or schematically illustrated, and the size of each component does not entirely reflect the actual size.

As employed herein, the term "comprise" or "include" shall specify particular characteristics, areas, essence, steps, operations, elements and/or components, but shall not exclude existence or addition of other characteristics, areas, essence, steps, operations, elements, components and/or ground.

Hereinafter, specific features of a scrubber burner according to an embodiment of the invention are described. -1 -

With reference to Figs. 1 to 5, a scrubber burner 10 in accordance with an embodiment of the invention may comprise a burner module 100, an inlet module 200, and a guide module 300.

The burner module 100 may be supplied with a waste gas through the inlet module 200. The waste gas may be a waste gas generated from an electronics industry process (a semiconductor production process, an LCD production process, or an OLED production process, etc.). The burner module 100 may decompose the waste gas by incinerating the waste gas. The burner module 100 may include a burner housing 110, a porous cartridge 120, a cleaning gas conduit 130, a nozzle assembly 140, a burner head 150, and a cooling member 160.

The burner housing 110 may provide a combustion area Si for incinerating the waste gas. The combustion area Si may be a space in which the waste gas is heated and combusted. The combustion area Si may extend in an up-down direction of the burner housing 110. The porous cartridge 120 may be disposed in the burner housing 110 such that it surrounds the combustion area 51.

The cleaning gas conduit 130 for supplying a cleaning gas may be connected to the burner housing 110. The cleaning gas may include at least one of air, nitrogen, and oxygen. A cleaning area S2 communicating with the cleaning gas conduit 130 may be formed inside the burner housing 110. The cleaning area S2 may be a space formed between an inner circumferential surface of the burner housing 110 and an outer circumferential surface of the porous cartridge 120. The cleaning area 52 may be supplied with the cleaning gas from the cleaning gas conduit 130 through a cleaning flow hole 131. The cleaning area S2 may provide a flow path for the flow of cleaning gas.

After the cleaning gas of the cleaning gas conduit 130 being introduced into the cleaning area S2, it may pass through the porous cartridge 120 and move to the combustion area Si.

A coolant supply conduit 183-11 and a coolant outlet conduit 183-21 may be connected to the burner housing 110. The coolant supply conduit 183-11 may supply a coolant for cooling the burner housing 110 to the burner housing 110. The coolant outlet conduit 183-21 may discharge out the coolant supplied to the burner housing 110. A cooling channel 171 communicating with the coolant supply conduit 183-11 and the coolant outlet conduit 183-21 may be formed inside the burner housing 110. The cooling channel 171 may provide a flow path for the flow of the coolant. The cooling channel 171 may have a ring-shape that circumferentially extends at an upper edge portion of the burner housing 110, when viewed in a transverse cross-section. The coolant of the coolant supply conduit 183-11 may be discharged through the coolant outlet conduit 183-21, after moving on the edge portion of the burner housing 110 along the cooling channel 171.

-12 -A pilot burner conduit 192 may be connected to the burner housing 110. The pilot burner conduit 192 may provide air and fuel for ignition, for a combustion reaction of the waste gas in the combustion area. When the combustion reaction is in progress in the combustion area, the pilot burner conduit 192 can block the supply of air and fuel, and can supply nitrogen to prevent the flame from flowing backward.

A sensor socket 191 may be connected to the burner housing 110. A sensor (such as a UV sensor) for measuring temperature, pressure, or the like may be mounted on the sensor socket 191. Since the sensor socket 191 communicates with the combustion area Si, the sensor mounted on the sensor socket 191 can measure information on the combustion reaction occurring in the combustion area Si, and supply nitrogen to protect the sensor from flames and byproducts.

The porous cartridge 120 may be disposed between the combustion area Si and the cleaning area S2. When the cleaning gas passes through the porous cartridge 120 and moves to the combustion area Si, the cleaning gas can remove the powder adhered to an inner circumferential surface of the porous cartridge 120, and can prevent powder from adhering to the inner circumferential surface of the porous cartridge 120 in advance. The porous cartridge 120 may comprise a porous plate 121 and a porous member 122. The porous plate 121 may have a ring-shape disposed to surround the porous member 122. The porous plate 121 may be a metal plate providing a plurality of holes.

-13 -The holes of the porous plate 121 may be oriented in wo-dimensions, allowing the cleaning gas to unidirectionally flow therethrough in an inwardly radial direction of the burner housing 110.

The porous member 122 may be disposed in the burner housing 110 to surround the combustion area Si. An outer circumferential surface of the porous member 122 may be tightly disposed on an inner circumferential surface of the porous plate 121. The porous member 122 may be a porous material providing pores in the form of a sponge. The pores of the porous member 122 may be oriented in three-dimensions, which disperses the cleaning gas, thereby allowing the cleaning gas to flow in multiple directions toward the combustion area Si. When the cleaning gas passes through the porous cartridge 120 and moves to the combustion area Si, the flow velocity of the cleaning gas at the inner circumferential surface of the porous member 122 is greater than 0. Therefore, the powder adhered to the inner circumferential surface of the porous member 122 can be separated from the porous member 122 by the cleaning gas.

The nozzle assembly 140 may be supplied with a fuel gas and an oxidant from the fuel supply conduit 181 and the oxidant supply conduit 182. The nozzle assembly 140 may supply the fuel gas and the oxidant supplied from the fuel supply conduit 181 and the oxidant supply conduit 182 to the combustion area Si. The nozzle assembly 140 may -14 -include a first nozzle plate 141, a second nozzle plate 142, a third nozzle plate 143, a first nozzle channel 144 and a second nozzle channel 145.

The first nozzle plate 141 may be disposed under the second nozzle plate 142 and the third nozzle plate 143. The first nozzle plate 141 may be detachably assembled with the second nozzle plate 142 and the third nozzle plate 143 via a fastening member. A fuel flow path 141-1 and an oxidant flow path 141-2 may be formed on the first nozzle plate 141. The fuel flow path 141-1 may be a flow path for supplying the fuel gas supplied from the fuel supply conduit 181 to the combustion area Si. The fuel flow path 141-1 may connect the first nozzle channel 144 with the combustion area Si such that they are in communication with each other The fuel flow path 141-1 may be positioned closer to the inner circumferential side of the first nozzle plate 141 than the oxidant flow path 141-2. The fuel flow path 141-1 may include an inlet side wise nozzle 141-11, an outlet side wise nozzle 141-12, and a connecting nozzle 141-13.

The inlet side wise nozzle 141-11 may be formed to communicate with the second channel at an upper part of the first nozzle plate 141. The inlet side wise nozzle 141-11 may be a flow path having a larger inner diameter than that of the connecting nozzle 14113. The outlet side wise nozzle 141-12 may be formed to communicate with the combustion area Si at a lower part of the first nozzle plate 141. The outlet side wise nozzle 141-12 may be a flow path having a larger inner diameter than that of the connecting -15 -nozzle 141-13. The outlet side wise nozzle 141-12 may have the same inner diameter as or a larger inner diameter than that of the inlet side wise nozzle 141-11. The connecting nozzle 141-13 may be connected to the inlet side wise nozzle 141-11 and the outlet side wise nozzle 141-12 therebetween while forming a stepped portion. The connecting nozzle 141-13 may be a flow path having an inner diameter smaller than those of the inlet side wise nozzle 141-11 and the outlet side wise nozzle 141-12.

When the fuel gas of the fuel supply conduit 181 passes from the connecting nozzle 141-13 to the outlet side wise nozzle 141-12, a swirl may be generated at a connection part (corner part) between the connecting nozzle 141-13 and the outlet side wise nozzle 141-12. The swirl transfers heat energy of the flame due to combustion to the connection part, thereby heating the periphery of the outlet side wise nozzle 141-12. When the periphery of the outlet side wise nozzle 141-12 is heated, it can result in the effect of pre-heating the outlet side wise nozzle 141-12, inducing more effective combustion, and maximizing the flame stability.

The oxidant flow path 141-2 may be formed to supply the oxidant supplied from the oxidant supply conduit 182 to the combustion area Si. The oxidant flow path 141-2 may connect the second nozzle channel 145 with the combustion area Si such that they are in communication with each other. The oxidant flow path 141-2 may be positioned -16 -closer to the outer circumferential side of the first nozzle plate 141 than the fuel flow path 141-1.

The second nozzle plate 142 may be disposed on an upper and inner circumferential side of the first nozzle plate 141. The second nozzle plate 142 may provide a flow path through which the fuel gas supplied from the fuel supply conduit 181 is delivered to the fuel flow path 141-1. The second nozzle plate 142 may be detachably assembled to the inner circumferential side of the first nozzle plate 141 via a fastening member.

The third nozzle plate 143 may be disposed on an upper and outer circumferential side of the first nozzle plate 141. The third nozzle plate 143 may provide a flow path through which the oxidant supplied from the oxidant supply conduit 182 is delivered to the oxidant flow path 141-2. The third nozzle plate 143 may be detachably assembled to the inner circumferential side of the first nozzle plate 141 via a fastening member.

The first nozzle channel 144 may be formed between the first nozzle plate 141 and the second nozzle plate 142. When viewed in a transverse cross-section, the first nozzle channel 144 may have a ring-shape that circumferentially extends at an edge portion of the inner circumferential side of the nozzle assembly 140. The second nozzle channel 145 may be formed between the first nozzle plate 141 and the third nozzle plate 143. When viewed in a transverse cross-section, the second nozzle channel 145 may -17 -have a ring-shape that circumferentially extends at an edge portion of the outer circumferential side of the nozzle assembly 140.

The burner head 150 may be disposed on an upper part of the burner housing 110.

The inlet module 200 may be connected to an upper part of the burner head 150. The burner head 150 may be connected with a coolant inlet conduit 183-12 for supplying the coolant and a coolant outlet conduit 183-22 for discharging the coolant.

The cooling member 160 may be disposed in an inner space of the burner head 150. The cooling member 160 may be made of a material with excellent heat transfer.

At least a portion of the cooling member 160 may be disposed to contact a second cooling channel 173. The cooling member 160 may cool the burner head 150 through heat exchange with the burner head 150 and the second cooling channel 173.

A first cooling channel 172 may be a flow path circumferentially extending at a lower edge portion of the burner head 150. The first cooling channel 172 may communicate with the coolant inlet conduit 183-12. The coolant supplied from the coolant inlet conduit 183-12 may be moved to the first cooling channel 172. The first cooling channel 172 may communicate with the second cooling channel 173 in the up-down direction. When the coolant of the coolant inlet conduit 183-12 is supplied to the first cooling channel 172, the coolant may be moved to the second cooling channel 173 while -18 -exchanging heat with an inner wall of the first cooling channel 172, in other words, an inner wall of the burner head 150.

The second cooling channel 173 may be a flow path circumferentially extending at an upper edge portion of the burner head 150. The second cooling channel 173 may communicate with the coolant discharge conduit 183-22. The first cooling channel 172 may contact at least a portion of the cooling member 160 to enable heat transfer with the cooling member 160. When the coolant of the first cooling channel 172 moves to the second cooling channel 173, the coolant exchanges heat with an inner wall of the second cooling channel 173 and an inner wall of the cooling member 160, and then the coolant is discharged out through the coolant discharge conduit 183-22.

The inlet module 200 may supply the waste gas to the burner module 100. The inlet module 200 may be connected to an upper part of the burner module 100. The inlet module 200 may include a main inlet conduit 210, a cover inlet conduit 220 and a sub inlet conduit 230.

The main inlet conduit 210 may be disposed on an upper part of the burner housing 110 to supply the waste gas to the burner housing 110. The main inlet conduit 210 may be perpendicularly connected to the upper part of the burner housing 110 in a vertically downward direction. A discharge end of the main inlet conduit 210 through which the waste gas is discharged may be inserted into the cover inlet conduit 220.

-19 -The cover inlet conduit 220 may be connected to the upper part of the burner housing 110 in communication therewith so as to surround the discharge end of the main inlet conduit 210. The inner diameter of the cover inlet conduit 220 may be larger than that of the outer diameter of the main inlet conduit 210. A separation space may be formed between an inner circumferential surface of the cover inlet conduit 220 and an outer circumferential surface of the discharge end of the main inlet conduit 210. A side part of the cover inlet conduit 220 may be connected with the sub inlet conduit 230.

The sub inlet conduit 230 may be connected to the side part of the cover inlet conduit 220 to be in communication therewith. When an emergency situation occurs, the sub inlet conduit 230 may supply additional waste gas. When the inlet module 200 is viewed from the top, the sub inlet conduit 230 may be connected to an edge portion of the cover inlet conduit 220 in a tangential direction. If the sub inlet conduit 230 is connected to the edge portion of the cover inlet conduit 220 in the tangential direction, when the waste gas is supplied through the sub inlet conduit 230, the waste gas is moved to the combustion area of the burner housing 110 while swirlingly flowing along the inner circumferential surface of the cover inlet conduit 220. As a result, when the waste gas is supplied, stabilization of the flow can be secured.

-20 -Referring to Figs. 6 and 7, the guide module 300 may guidance discharge of the waste gas which has been incinerated in the burner module 100. The guide module 300 may include a guide discharge duct 310 and a guide member 320.

The guide discharge duct 310 may be assembled to the lower part of the burner module 100 via the guide member 320. The guide discharge duct 310 may provide a passage through which the waste gas incinerated in the burner module 100 is discharged out. The guide discharge duct 310 may provide a guide inclined surface 311 whose inner diameter gradually decreases in a downward direction.

The guide member 320 may be coupled to the lower part of the burner module 100. This guide member 320 may include a guide body 321, a discharge water flow passage 322, a discharge water channel 323, and a discharge water nozzle 324.

The guide body 321 may connect to the burner housing 110 and the guide discharge duct 310 therebetween. A discharge water supply conduit 331 may be connected to the guide body 321. The discharge water supply conduit 331 may provide the guide discharge duct 310 with guidance discharge water capable of preventing the powder from adhering to the guide inclined surface 311. In case the discharge water supply conduit 331 is connected to the guide body 321, the discharge water supply conduit 331 may be connected to an edge portion of an outer circumferential side of the guide body -21 - 321 in a tangential direction. The discharge water channel 323 and the discharge water nozzle 324 may be formed on an inner circumferential portion of the guide body 321.

The discharge water flow passage 322 may be formed to pass through an inner wall of the discharge water channel 323. The discharge water flow passage 322 may communicate with the discharge water supply conduit 331. The discharge water flow passage 322 may deliver the guidance discharge water supplied from the discharge water supply conduit 331 to the discharge water channel 323. When the guide member 320 is viewed from the top, the discharge water flow passage 322 may be formed to extend in a tangential direction on an edge portion of the discharge water channel 323. If the discharge water flow passage 322 is formed to extend in the tangential direction on the edge portion of the discharge water channel 323, when the guidance discharge water is discharged through the guide discharge duct 310, the guidance discharge water can move downwards, while swirlingly flowing L1 along the guide inclined surface 311 of the guide discharge duct 310. The guidance discharge water that swirlingly flows along the guide inclined surface 311 can prevent the powder contained in the waste gas from adhering to the guide inclined surface 311 of the guide discharge duct 310 when the waste gas is discharged through the guide discharge duct 310.

The discharge water channel 323 may be supplied with the guidance discharge water from the discharge water supply conduit 331 When viewed in a transverse cross- -22 -section, the discharge water channel 323 may have a ring-shape that circumferentially extends at an edge portion of the guide body 321.

The discharge water nozzle 324 may be an opening formed on a lower part of the discharge water channel 323. When a certain amount of guidance discharge water is received in the discharge water channel 323, the discharge water nozzle 324 can allow the guidance discharge water to be discharged toward the guide inclined surface 311. Meanwhile, referring to Fig. 8, in the scrubber burner 10 according to another embodiment of the invention, the guide member 320 may comprise a guide body 321, a discharge water flow passage 322, a discharge water channel 323, a discharge water nozzle 324, a gas channel 326, and a gas nozzle 327.

In describing another embodiment of the invention, when compared to the above-described embodiment, there is a difference in that the guide member 320 further comprises the gas channel 326 and the gas nozzle 327. This difference is mainly explained, and reference is made to the above-described embodiment for the same

descriptions and reference numerals.

The gas channel 326 may be disposed on an inner circumferential side than the discharge water channel 323. When viewed in a transverse cross-section, the gas channel 326 may have a ring-shape that circumferentially extends at an edge portion of the guide body 321.

-23 -The gas channel 326 may provide a flow path through which a guidance gas may be supplied and delivered to the gas nozzle 327. When the guidance discharge water flows along the guide inclined surface 311, the guidance gas can move downwards while swirlingly flowing L2 along the guide inclined surface 311 over the guidance discharge water.

When the guidance discharge water flows along the guide inclined surface 311, the guidance gas can block the guidance discharge water flowing upwards in the form of mist, thereby preventing in advance the phenomenon where powder from the waste gas adheres to the guidance discharge water from occurring, which could occur if a portion of the guidance discharge water adhered to the inner wall of the porous cartridge 120. The guidance gas may be nitrogen gas (N2). Certainly, in addition to nitrogen gas (N2), the guidance gas may include various types of inert gases capable of blocking the guidance discharge water in the form of mist.

The gas nozzle 327 may be an opening formed on a lower part of the gas channel 326. When the internal pressure of the gas channel 326 exceeds a predetermined pressure, the gas nozzle 327 can guide the guidance gas to be discharged toward the guide inclined surface 311.

Hereinafter, the operation and effect of the scrubber burner having the above-described configurations will be explained.

-24 -The scrubber burner 10 according to the invention has an advantage of diffusion flame, while being able to apply a partially premixed diffusion flame method for NOx reduction.

The scrubber burner 10 according to the invention can additionally burn carbon monoxide (CO) and total hydrocarbons generated in a waste gas purification process by applying OFA (Overfield Air) to the lower part thereof. As a result, emissions of carbon monoxide (CO) and total hydrocarbons (THC) can be minimized. In addition, powder generated in the process of incinerating waste gas can be reduced.

By configuring the inlet module 200 to which the waste gas is supplied, the nozzle assembly 140 of the burner module 100, and the guide module 300 to be assembled in a modular manner, disassembling and assembling thereof can be easily performed as needed. Besides, a pilot burner conduit 192 and a UV sensor may be installed in the burner module 100.

As for the inlet module 200, it is configured such that the waste gas can pass through the center of the combustion area Si via the main inlet conduit 210 and that the waste gas swirlingly flows in the cover inlet conduit 220 through the sub inlet conduit 230, and therefore, stabilization of the flow can be secured even when the flow rate of nitrogen increases due to a bypass.

-25 -As for the nozzle assembly 140, by applying a partially premixed diffusion flame that mixes the fuel gas and the oxidant, the amount of nitrogen oxides (N0x) generated can be minimized while securing the stability of the diffusion flame. In addition, through a stepwise shape with changes in inner diameter of the fuel flow path 141-1, it is possible to implement a recirculation effect in the fuel flow path 141-1 and maximize the stability of the flame.

By applying a porous material (metal fiber, foam, perforated plate, etc.) to the porous cartridge 120, the problems invoked from the powder generated during the waste gas treatment process in the burner module 100 being accumulated inside the burner module 100 can be resolved.

Furthermore, by using the guidance discharge water to form a guidance wall on the guide discharge duct 310 and supplying the guidance gas to the guide discharge duct 310, the problems with splashing of the water generated on the guide inclined surface 311 of the guide discharge duct 310 and abnormal flow of water can be solved.

Although the examples of the present invention have been described as specific embodiments, they are merely an example, and the present invention is not limited thereto. The present invention should be construed to have the broadest scope according to the technical idea disclosed herein. A person skilled in the art may perform a pattern of a shape not indicated by combining/substituting the disclosed embodiments, but this also -26 -does not depart from the scope of the present invention. In addition, the disclosed embodiments may be easily modified or changed by those skilled in the art based on this specification, and in it is obvious that such a modification or change should fall within the scope of the invention.

The presently disclosed embodiments are considered in all respect to be illustrative and not restrictive, and should be construed to have the broadest scope according to the technical concept disclosed herein. The above-described embodiments can be embodied in various forms. Further, the above-described embodiment may be omitted, replaced, or changed in various forms without departing from the scope of the appended claims and the gist thereof, and it is obvious that these various modifications and alternatives to the disclosed embodiments should fall within the scope of the invention.

Reference numerals 10: scrubber burner 100: burner module 110: burner housing 120: porous cartridge 130: cleaning gas conduit 140: nozzle assembly 150: burner head 160: cooling member 200: inlet module 210: main inlet conduit -27 - 220: cover inlet conduit 230: sub inlet conduit 300: guide module 310: guide discharge duct 320: guide member

Claims

-28 -CLAIMS1. A scrubber burner, comprising: a burner module; an inlet module for supplying a waste gas to the burner module; and a guide module for guiding discharge of the waste gas which has been incinerated, the burner module comprising: a burner housing providing a combustion area for incinerating the waste gas; a porous cartridge disposed in the burner housing to surround the combustion area; and a cleaning gas conduit for supplying a cleaning gas to the porous cartridge, thereby preventing a powder included in the waste gas from being adhered to an inner wall of the porous cartridge.
2. The scrubber burner according to claim 1, the porous cartridge comprising: a porous plate providing holes oriented in two-dimensions that guide the cleaning gas to unidirectionally flow in an inwardly radial direction of the burner housing; and a porous member tightly disposed on an inner circumferential surface of the porous plate, the porous member providing pores oriented in three-dimensions that guide the cleaning gas to be dispersed and to flow in multiple directions toward the combustion area.
-29 - 3. The scrubber burner according to claim 1, the inlet module comprising: a main inlet conduit disposed on an upper part of the burner housing to supply the waste gas to the burner housing in a vertically downward direction; a cover inlet conduit connected in communication with the upper part of the burner housing to surround a discharge end of the main inlet conduit; and a sub inlet conduit connected in communication with a side part of the cover inlet conduit for allowing supply of an additional waste gas.
4. The scrubber burner according to claim 3, wherein the sub inlet conduit is, when the inlet module is viewed from the top, connected to an edge portion of the cover inlet conduit in a tangential direction, and when the waste gas is supplied to the cover inlet conduit via the sub inlet conduit, the waste gas swirlingly flows along an inner wall of the cover inlet conduit.
5. The scrubber burner according to claim 1, the guide module comprising: a guide discharge duct providing a guide inclined surface whose inner diameter decreases in a downward direction; and a guide member connected to the burner housing and the guide discharge duct therebetween.
6. The scrubber burner according to claim 5, the guide member comprising: a guide body; -30 -a discharge water flow passage to which a guidance discharge water is supplied; a discharge water channel to which the guidance discharge water is supplied via the discharge water flow passage, the discharge water channel providing a flow path in a circumferential direction at an inner circumferential portion of the guide body, wherein the guidance discharge water can flow through the flow path; and a discharge water nozzle formed on a lower part of the discharge water channel such that the guidance discharge water is discharged towards the guide inclined surface.
7. The scrubber burner according to claim 6, wherein the discharge water flow passage is, when the guide member is viewed from the top, formed at an edge portion of the discharge water channel in a tangential direction, and when the guidance discharge water is discharged through the discharge water nozzle, the guidance discharge water swirls on the guide inclined surface.
8. The scrubber burner according to claim 6, the guide member further comprising: a gas channel providing a flow path which can be supplied with a guidance gas dischargable to the guide inclined surface, the gas channel being disposed on an inner circumferential side than the discharge water channel; and a gas nozzle formed on a lower part of the gas channel to allow the guidance gas to be discharged towards the guide inclined surface.
-31 - 9. The scrubber burner according to claim 1, wherein the burner module further comprises a nozzle assembly for supplying a fuel gas and an oxidant to the combustion area, the nozzle assembly comprising: a first nozzle plate formed with a fuel flow path for supplying the fuel gas to the combustion area and an oxidant flow path for supplying the oxidant to the combustion area; a second nozzle plate disposed on an upper and inner circumferential side of the first nozzle plate, the second nozzle plate delivering the fuel gas to the fuel flow path; and a third nozzle plate disposed on an upper and outer circumferential side of the first nozzle plate, the third nozzle plate delivering the oxidant to the oxidant flow path, and wherein the fuel flow path is positioned closer to an inner circumferential side of the first nozzle plate than the oxidant flow path.
10. The scrubber burner according to claim 9, wherein the first nozzle plate, the second nozzle plate, and the third nozzle plate are assembled in a manner that they can be disassembled.
11. The scrubber burner according to claim 9, the fuel flow path comprising: an inlet side wise nozzle formed on an upper part of the first nozzle plate to be in communication with the second channel; an outlet side wise nozzle formed on a lower part of the first nozzle plate to be in communication with the combustion area; and -32 -a connecting nozzle connected to the inlet side wise nozzle and the outlet side wise nozzle therebetween while forming a stepped portion of the connecting nozzle, the connecting nozzle having an inner diameter smaller than inner diameters of the inlet side wise nozzle and the outlet side wise nozzle.
12. The scrubber burner according to claim 1, the burner module comprising: a burner head disposed on an upper part of the burner housing; a cooling member disposed on an inner space of the burner head; a first cooling channel circumferentially extending at a lower edge portion of the burner head; and a second cooling channel connected to the first cooling channel, the second cooling channel circumferentially extending on the burner head such that heat is transferred through a contact with at least a portion of the cooling member.