GB2442857B - Measuring apparatus - Google Patents

Measuring apparatus

Info

Publication number: GB2442857B
Authority: GB; United Kingdom
Prior art keywords: measuring apparatus; measuring
Prior art date: 2006-10-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

GB0719645A

Other versions

GB0719645D0 (en

GB2442857A (en

Inventor

Robert John Wilby

Adrian Kiermasz

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Metryx Ltd

Original Assignee

Metryx Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2006-10-11

Filing date

2007-10-05

Publication date

2009-01-21

2007-10-05 Application filed by Metryx Ltd filed Critical Metryx Ltd

2007-11-14 Publication of GB0719645D0 publication Critical patent/GB0719645D0/en

2008-04-16 Publication of GB2442857A publication Critical patent/GB2442857A/en

2009-01-21 Application granted granted Critical

2009-01-21 Publication of GB2442857B publication Critical patent/GB2442857B/en

Status Expired - Fee Related legal-status Critical Current

2027-10-05 Anticipated expiration legal-status Critical

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G17/00—Apparatus for or methods of weighing material of special form or property
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G19/00—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G21/00—Details of weighing apparatus
- G01G21/28—Frames, Housings

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)

GB0719645A 2006-10-11 2007-10-05 Measuring apparatus Expired - Fee Related GB2442857B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GBGB0620196.6A GB0620196D0 (en)	2006-10-11	2006-10-11	Measuring apparatus

Publications (3)

Publication Number	Publication Date
GB0719645D0 GB0719645D0 (en)	2007-11-14
GB2442857A GB2442857A (en)	2008-04-16
GB2442857B true GB2442857B (en)	2009-01-21

Family

ID=37491343

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
GBGB0620196.6A Ceased GB0620196D0 (en)	2006-10-11	2006-10-11	Measuring apparatus
GB0719645A Expired - Fee Related GB2442857B (en)	2006-10-11	2007-10-05	Measuring apparatus

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
GBGB0620196.6A Ceased GB0620196D0 (en)	2006-10-11	2006-10-11	Measuring apparatus

Country Status (2)

Country	Link
US (2)	US7892863B2 (en)
GB (2)	GB0620196D0 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB0620196D0 (en) *	2006-10-11	2006-11-22	Metryx Ltd	Measuring apparatus
GB0719460D0 (en) *	2007-10-04	2007-11-14	Metryx Ltd	Measurement apparatus and method
CN102842518B (en) *	2011-06-20	2016-03-23	中国科学院微电子研究所	Monitoring method after removing polysilicon dummy gate
US8501500B2 (en) *	2011-06-20	2013-08-06	The Institute of Microelectronics, Chinese Academy of Science	Method for monitoring the removal of polysilicon pseudo gates
US8901947B2 (en)	2012-09-28	2014-12-02	Electro Scientific Industries, Inc.	Probe out-of-position sensing for automated test equipment
GB201315715D0 (en) *	2013-09-04	2013-10-16	Metryx Ltd	Method and device for determining information relating to the mass of a semiconductor wafer
DE102014209342A1 (en) *	2014-05-16	2015-11-19	Carl Zeiss Microscopy Gmbh	Method for determining geometric data of an object using a measuring microscope and a measuring microscope
US9478408B2 (en)	2014-06-06	2016-10-25	Lam Research Corporation	Systems and methods for removing particles from a substrate processing chamber using RF plasma cycling and purging
US10047438B2 (en)	2014-06-10	2018-08-14	Lam Research Corporation	Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas
US10081869B2 (en)	2014-06-10	2018-09-25	Lam Research Corporation	Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates
JP6464345B2 (en) *	2015-02-02	2019-02-06	学校法人工学院大学	Weight distribution acquisition device, weight distribution acquisition method and program

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4811596A (en) *	1986-11-18	1989-03-14	Volkswagen Ag	Arrangement for tank content measurement of an operating-medium tank of a vehicle
DE29622132U1 (en) *	1996-12-23	1998-03-19	KUKA Schweissanlagen GmbH, 86165 Augsburg	Measuring device for determining mass ratios
JPH11293354A (en) *	1998-04-06	1999-10-26	Daido Steel Co Ltd	Instrument for measuring and monitoring weight of melting electrode
US6284986B1 (en) *	1999-03-15	2001-09-04	Seh America, Inc.	Method of determining the thickness of a layer on a silicon substrate
US20030034184A1 (en) *	2001-08-20	2003-02-20	Ostermann Jerry L.	Tipping balance scale for weighing moving objects
GB2380609A (en) *	2000-07-05	2003-04-09	Metryx Ltd	Apparatus and method for investigating semiconductor wafers
WO2003034003A1 (en) *	2001-10-17	2003-04-24	G-Net Limited	Pivoting base weighing apparatus for gas cylinder

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Publication number	Priority date	Publication date	Assignee	Title
US4875434A (en) *	1987-04-02	1989-10-24	Mitsubishi Denki Kabushiki Kaisha	Apparatus for coating a substrate with a coating material
US5476176A (en) *	1994-05-23	1995-12-19	Empak, Inc.	Reinforced semiconductor wafer holder
TW318255B (en) *	1995-05-30	1997-10-21	Philips Electronics Nv
TW316874B (en) *	1995-05-30	1997-10-01	Philips Electronics Nv
US6149506A (en) *	1998-10-07	2000-11-21	Keltech Engineering	Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US6102777A (en) *	1998-03-06	2000-08-15	Keltech Engineering	Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US7349223B2 (en) *	2000-05-23	2008-03-25	Nanonexus, Inc.	Enhanced compliant probe card systems having improved planarity
US6917525B2 (en) *	2001-11-27	2005-07-12	Nanonexus, Inc.	Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs
US6262582B1 (en) *	1999-10-15	2001-07-17	International Business Machines Corporation	Mechanical fixture for holding electronic devices under test showing adjustments in multiple degrees of freedom
JP2001264050A (en) *	2000-03-14	2001-09-26	Mitsutoyo Corp	Minute shape measuring apparatus
US7952373B2 (en) *	2000-05-23	2011-05-31	Verigy (Singapore) Pte. Ltd.	Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US6922603B1 (en) *	2002-09-26	2005-07-26	Lam Research Corporation	System and method for quantifying uniformity patterns for tool development and monitoring
WO2008039372A2 (en) *	2006-09-22	2008-04-03	Carnegie Mellon University	Assembling and applying nano-electro-mechanical systems
GB0620196D0 (en) *	2006-10-11	2006-11-22	Metryx Ltd	Measuring apparatus
US7728427B2 (en) *	2007-12-07	2010-06-01	Lctank Llc	Assembling stacked substrates that can form cylindrical inductors and adjustable transformers
US8289674B2 (en) *	2009-03-17	2012-10-16	Cavendish Kinetics, Ltd.	Moving a free-standing structure between high and low adhesion states

2006
- 2006-10-11 GB GBGB0620196.6A patent/GB0620196D0/en not_active Ceased
2007
- 2007-10-05 GB GB0719645A patent/GB2442857B/en not_active Expired - Fee Related
- 2007-10-08 US US11/868,746 patent/US7892863B2/en not_active Expired - Fee Related
2011
- 2011-01-18 US US13/008,312 patent/US8200447B2/en not_active Expired - Fee Related

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4811596A (en) *	1986-11-18	1989-03-14	Volkswagen Ag	Arrangement for tank content measurement of an operating-medium tank of a vehicle
DE29622132U1 (en) *	1996-12-23	1998-03-19	KUKA Schweissanlagen GmbH, 86165 Augsburg	Measuring device for determining mass ratios
JPH11293354A (en) *	1998-04-06	1999-10-26	Daido Steel Co Ltd	Instrument for measuring and monitoring weight of melting electrode
US6284986B1 (en) *	1999-03-15	2001-09-04	Seh America, Inc.	Method of determining the thickness of a layer on a silicon substrate
GB2380609A (en) *	2000-07-05	2003-04-09	Metryx Ltd	Apparatus and method for investigating semiconductor wafers
US20030034184A1 (en) *	2001-08-20	2003-02-20	Ostermann Jerry L.	Tipping balance scale for weighing moving objects
WO2003034003A1 (en) *	2001-10-17	2003-04-24	G-Net Limited	Pivoting base weighing apparatus for gas cylinder

Also Published As

Publication number	Publication date
US20080087106A1 (en)	2008-04-17
GB0719645D0 (en)	2007-11-14
US7892863B2 (en)	2011-02-22
GB2442857A (en)	2008-04-16
US8200447B2 (en)	2012-06-12
GB0620196D0 (en)	2006-11-22
US20110119009A1 (en)	2011-05-19

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Legal Events

Date	Code	Title	Description
2023-06-28	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 20221005