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GB2381589B - Wide range gas flow system with real time flow measurement and correction - Google Patents

Wide range gas flow system with real time flow measurement and correction

Info

Publication number
GB2381589B
GB2381589B GB0300312A GB0300312A GB2381589B GB 2381589 B GB2381589 B GB 2381589B GB 0300312 A GB0300312 A GB 0300312A GB 0300312 A GB0300312 A GB 0300312A GB 2381589 B GB2381589 B GB 2381589B
Authority
GB
United Kingdom
Prior art keywords
correction
real time
wide range
gas flow
range gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0300312A
Other versions
GB0300312D0 (en
GB2381589A (en
Inventor
Timothy R Brown
Daniel R Judd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CYBER INSTR TECHNOLOGY LLC
Original Assignee
CYBER INSTR TECHNOLOGY LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/318,880 external-priority patent/US6119710A/en
Application filed by CYBER INSTR TECHNOLOGY LLC filed Critical CYBER INSTR TECHNOLOGY LLC
Publication of GB0300312D0 publication Critical patent/GB0300312D0/en
Publication of GB2381589A publication Critical patent/GB2381589A/en
Application granted granted Critical
Publication of GB2381589B publication Critical patent/GB2381589B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
GB0300312A 1999-05-26 1999-12-04 Wide range gas flow system with real time flow measurement and correction Expired - Fee Related GB2381589B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/318,880 US6119710A (en) 1999-05-26 1999-05-26 Method for wide range gas flow system with real time flow measurement and correction
GB0122961A GB2365980B (en) 1999-05-26 1999-12-04 Wide range gas flow system with real time flow measurement and correction

Publications (3)

Publication Number Publication Date
GB0300312D0 GB0300312D0 (en) 2003-02-05
GB2381589A GB2381589A (en) 2003-05-07
GB2381589B true GB2381589B (en) 2003-09-10

Family

ID=26246573

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0300312A Expired - Fee Related GB2381589B (en) 1999-05-26 1999-12-04 Wide range gas flow system with real time flow measurement and correction
GB0125642A Expired - Fee Related GB2373054B (en) 1999-05-26 1999-12-04 Wide range gas flow system with real time flow measurement and correction

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB0125642A Expired - Fee Related GB2373054B (en) 1999-05-26 1999-12-04 Wide range gas flow system with real time flow measurement and correction

Country Status (1)

Country Link
GB (2) GB2381589B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100447537C (en) * 2004-09-24 2008-12-31 深圳市建恒工业自控系统有限公司 Dynamic transmission type capacity determining system and method
NL2002365C2 (en) * 2008-05-26 2011-04-05 Avantium Holding B V Flow splitter and reaction assembly.
US8528427B2 (en) 2010-10-29 2013-09-10 Becton, Dickinson And Company Dual feedback vacuum fluidics for a flow-type particle analyzer
US20200222647A1 (en) * 2017-07-07 2020-07-16 The Johns Hopkins University Barotrauma and volutrauma prevention device
US11073846B2 (en) * 2018-01-30 2021-07-27 Illinois Tool Works Inc. Mass flow controller with absolute and differential pressure transducer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997034208A1 (en) * 1996-03-11 1997-09-18 Applied Materials, Inc. Gas flow control method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997034208A1 (en) * 1996-03-11 1997-09-18 Applied Materials, Inc. Gas flow control method

Also Published As

Publication number Publication date
GB0125642D0 (en) 2001-12-19
GB0300312D0 (en) 2003-02-05
GB2373054A (en) 2002-09-11
GB2381589A (en) 2003-05-07
GB2373054B (en) 2003-03-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20071204