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GB2232205A - Molecular vacuum pump - Google Patents

Molecular vacuum pump

Info

Publication number
GB2232205A
GB2232205A GB8917441A GB8917441A GB2232205A GB 2232205 A GB2232205 A GB 2232205A GB 8917441 A GB8917441 A GB 8917441A GB 8917441 A GB8917441 A GB 8917441A GB 2232205 A GB2232205 A GB 2232205A
Authority
GB
United Kingdom
Prior art keywords
stator
facing
rotor
axial opening
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8917441A
Other versions
GB8917441D0 (en
GB2232205B (en
Inventor
Konstantin Evgenievic Demikhov
Vladimir Pavlovich Sergeev
Vladimir Iliich Vikhrev
Sergei Nikolaevich Sharshin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB8917441D0 publication Critical patent/GB8917441D0/en
Publication of GB2232205A publication Critical patent/GB2232205A/en
Application granted granted Critical
Publication of GB2232205B publication Critical patent/GB2232205B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Furnace Details (AREA)

Abstract

A molecular vacuum pump comprises a hollow stator (1) in the axial opening (2) of which is mounted a rotor (3). The internal surface (4) of the stator (1) is provided with grooves (5) oriented along a helicoidal line and forming, together with the external surface (6) of the rotor (3) facing the stator (1), channels for pumping out the gas. A part of the axial opening (2) of the stator (1) widens in the direction of its butt end (7) facing the suction side, whereas the external surface (6) of the rotor (3) is provided with ribs (13) constituting a multiple-thread screw. Each rib (13) widens in the direction of the butt-end (7) of the stator (1) facing the suction side so that the gap between its edge (15) facing the internal surface (4) of the stator (1) and said surface (4) is constant along the length of the edge (15). The inlet openings (9) of the suction channels are located on the internal surface of the stator (1) in the wide part of its axial opening (2).
GB8917441A 1987-12-25 1987-12-25 Molecular vacuum pump Expired - Lifetime GB2232205B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1987/000155 WO1989006319A1 (en) 1987-12-25 1987-12-25 Molecular vacuum pump

Publications (3)

Publication Number Publication Date
GB8917441D0 GB8917441D0 (en) 1990-08-22
GB2232205A true GB2232205A (en) 1990-12-05
GB2232205B GB2232205B (en) 1991-11-13

Family

ID=21617166

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8917441A Expired - Lifetime GB2232205B (en) 1987-12-25 1987-12-25 Molecular vacuum pump

Country Status (6)

Country Link
JP (1) JPH02502743A (en)
DE (1) DE3791053T1 (en)
FI (1) FI893826A0 (en)
FR (1) FR2629877B1 (en)
GB (1) GB2232205B (en)
WO (1) WO1989006319A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
US6168374B1 (en) 1996-08-16 2001-01-02 Leybold Vakuum Gmbh Friction vacuum pump
US6422829B1 (en) * 1997-09-24 2002-07-23 Leybold Vakuum Gmbh Compound pump

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408791B1 (en) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Drag pump with a bell-shaped rotor
DE4438812A1 (en) * 1994-10-31 1996-05-02 Leybold Ag Friction vacuum pump with cooling
DE19806507B4 (en) * 1998-02-17 2010-08-19 Wobben, Aloys, Dipl.-Ing. Sogpumpe
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
JP2001248587A (en) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk Composite vacuum pump
DE10046766A1 (en) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-friction vacuum pump
DE10111525A1 (en) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Screw vacuum pump with rotor inlet and rotor outlet
DE10224604B4 (en) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh evacuation device
DE102013203421A1 (en) 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618A1 (en) * 1971-11-16 1973-05-24 Cit Alcatel STANDING PIN OR PIVOT PIN FOR ROTATING MOLECULAR PUMPS
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
NL8303927A (en) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618A1 (en) * 1971-11-16 1973-05-24 Cit Alcatel STANDING PIN OR PIVOT PIN FOR ROTATING MOLECULAR PUMPS
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
US6168374B1 (en) 1996-08-16 2001-01-02 Leybold Vakuum Gmbh Friction vacuum pump
US6422829B1 (en) * 1997-09-24 2002-07-23 Leybold Vakuum Gmbh Compound pump

Also Published As

Publication number Publication date
GB8917441D0 (en) 1990-08-22
FR2629877A1 (en) 1989-10-13
FR2629877B1 (en) 1992-04-17
DE3791053T1 (en) 1989-12-21
WO1989006319A1 (en) 1989-07-13
GB2232205B (en) 1991-11-13
FI893826A0 (en) 1989-08-14
JPH02502743A (en) 1990-08-30

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931225