GB2280261A - Optical wavemeter - Google Patents
Optical wavemeter Download PDFInfo
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- GB2280261A GB2280261A GB9412891A GB9412891A GB2280261A GB 2280261 A GB2280261 A GB 2280261A GB 9412891 A GB9412891 A GB 9412891A GB 9412891 A GB9412891 A GB 9412891A GB 2280261 A GB2280261 A GB 2280261A
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- 230000003287 optical effect Effects 0.000 title claims description 69
- 239000011521 glass Substances 0.000 claims description 36
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 230000001131 transforming effect Effects 0.000 claims description 3
- 206010041662 Splinter Diseases 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
Optical Wavemeter Backzround of the Invention
Field of the Invention
2280261 The present invention relates to optical wavemeters, and more particularly, to optical wavemeters which measure the wavelength of light to be measured using an interferometer.
Background Art
An example of the structure of a conventional optical wavemeter will be explained with reference to Fig. 6. In Fig. 6. a beam splitter 1, fixed mirrors 2 and 3, a moving mirror 4, a moving stage 5, a guide rail 6, light receivers 7 and 8, a light source 9, a wavelength calculator 10, and a reference light source 11, are provided. The moving mirror 4 is fixed on the moving stage 5. The moving stage 5 and the guide rail 6 form a linear moving mechanism 12 which moves the moving mirror 4-in parallel with the direction of an optical axis of light injected into the moving mirror 4. The wavelength of light emitted from the light source 9 is to be measured.
A reference light LS with known wavelength from the reference light source 11 is divided into a reflected light LRl and a passing light Lp, by the beam splitter 1. The reflected light LRl is reflected by the fixed mirror 2, passing through the beam splitter 1, and is then received by the light receiver 7. The passing light Lp, is reflected by the moving mirror 4 and the beam splitter 1, and is then received by the light receiver 7.
1 When the reflected light LR, and the passing light Lp, are received by the light receiver 7, since the reflected light LRl and the passing light Lp, interfere with each other in the light receiver 7, an electric signal S1 in response to the intensity of an interference light is supplied from the light receiver 7 to the wavelength calculator 10.
A light Lm of unknown wavelength to be measured from the light source 9 is reflected by the fixed mirror 3, being divided into a reflected light LR2 and a passing light Lp2 by the beam splitter 1. The reflected light LR2 is reflected by the fixed mirror 2, passing through the beam splitter 1, and is then received by the light receiver 8. The passing light LP2 is reflected by the moving mirror 4 and the beam splitter 1, and is then received by the light receiver 8. When the reflected light LR2 and the passint light LP2 are received by the light receiver 8. since the reflected light LR2 and the passing light LP2 interfere with each other in the light receiver 8, an electric signal S2 in response to the intensity of an interference light is supplied from the light receiver 8 to the wavelength calculator 10.
When the moving stage 5 moves on the guide rail 6 in linear motion in the direction shown by an arrow in Fig. 6, the moving mirror 4 moves based on the motion of the moving stage 5, and the electric signals S, and S2 vary in response to periodic variation of the intensity of the interference lights caused by the motion of the moving mirror 4. Since each wavelength of the electric signals S, and S2 corresponds to each wavelength of the reference light LS and the light LM, respectively, when the moving distance of the linear moving mechanism 12 is optionally set, the 2 wavenumber of the electric signals S, and S2 are calculated in the wavelength calculator 10, and then the wavelength of the light LM can be obtained based on formulas (1) and (2).
L=1 lk=nl 2 (1) A l=n A 2/k (2) In formulas (1) and (2), L represents an optionally set moving distance, A 1 and 12 represent the wavelengths of the light Lm and the reference light Ls. and n and k represent the wavenumber of the electric signals S, and S2. Fig. 7 shows an example of the waveforms of the electric signals S, and S2. In Fig. 7, a vertical axis indicates a current and a horizontal axis indicates the moving distance of the moving stage 5. As shown by Fig. 7, the current of the electric signals S, and S2 vary in response to the moving distance L of the moving mechanism 12.
In the above-mentioned conventional optical wavemeter, in order to accurately measure the wavelength of a light to be measured, the reference light source 11 emitting the reference light LS with known wavelength must be used. However, since the length of a resonator in the present reference light source 11 is long, there is a drawback in that the overall apparatus is large. Moreover, in the above-mentioned conventional optical wavemeter, since both the reference light LS and the light LM are injected into the beam splitter 1, the adjustment of the optical axis is complex. In addition, since the diameter of the resonator in the reference light source 11 is also large, when both the reference light LS and the light LM are injected in the beam splitter 1, the optical path of the reference light LS or the light LM must be changed using the fixed mirror 3 and the like to inject.it into the beam splitter 1. Accordingly, the adjustment of the 3 optical axis is further complicated.
Summary of the Invention
In consideration of the above problems, it is an object of the present invention to provide an optical wavemeter which is able to easily adjust an optical axis of a light of unknown wavelength to be measured and which is of compact construction without a reference light source or a fixed mirror for changing the optical path.
To satisfy this object, the present invention provides an optical wavemeter comprising: a beam splitter for dividing a light having a wavelength to be measured into a first light and a second light; a fixed mirror for reflecting the first light so as to inject it back into the beam splitter; a moving mirror for reflecting the second light so as to inject it back into the beam splitter; a linear moving mechanism having a moving stage on which the moving mirror is secured and for moving the moving mirror in parallel with the direction of an optical axis of light injected into the moving mirror,; a light receiver for transforming an interference light generated by the synthesis of a light via the beam splitter and the fixed mirror and a light via the beam splitter and the moving mirror into an electric signal; a length measuring machine for detecting the moving distance of the moving stage; and a wavelength calculator for calculating the wavelength of the light to be measured based on the wavenumber of the electric signal and the moving distance.
According to the present invention, a positive effect is that an optical wavemeter can easily adjust an optical axis of a 4 light of unknown wavelength to be measured and can be of compact construction without a reference light source or a fixed mirror for changing an optical path.
Brief Explanation of the Drawings Fig. 1 shows a plan view of the structure of an optical wavemeter based on a first preferred embodiment of the present invention.
Fig. 2 shows a side view of the structure of an linear moving mechanism 23 shown in Fig. 1.
Fig. 3 shows a partial oblique view of the structure of length measuring machine 25.
Fig. 4 shows a plan view of the structure of an optical wavemeter based on a second preferred embodiment of the present invention.
Fig. 5 shows a partial magnified oblique view of the structure of a length measuring machine 40.
Fig. 6 shows a plan view of the structure of a conventional optical wavemeter.
Fig. 7 shows an example of the waveforms of the electric signals S, and S2.
Detailed Description of the Preferred Embodiment
Hereinafter, a first preferred embodiment of the present invention will be explained with reference to Figs. 1 through 3. Fig. 1 shows a plan view of the structure of an optical wavemeter based on the first preferred embodiment of the present invention. Fig. 2 shows a side view of the structure of an linear moving mechanism 23 shown in Fig. 1. In Figs. 1 and 2, a beam splitter 20. a fixed mirror 21, a moving mirror 22, a linear moving mechanism 23, a light receiver 24, a length measuring machine 25, a light source 26, and a wavelength calculator 27, are provided. The linear moving mechanism 23 which moves the moving mirror 22 in parallel with the direction of an optical axis of light with wavelength to be measured, consists of a moving stage 28, a guide rail 29, a ball screw mechanism 30, and a motor 31. The moving mirror 22 is fixed on the moving stage 28. One end of the ball screw mechanism 30 is fixed to a shaft of the motor 31. The other end of the ball screw mechanism 30 is engaged with a projection portion 28a projected from a left side of the moving stage 28 by means of a thread formed around ball screw mechanism 30 and a threaded hole formed in the projection portion 28a Therefore, when the motor 31 turns, the ball screw mechanism 30 transforms rotary motion of the motor 31 into linear motion of the moving stage 28. The wavelength of the light source 26 is to be measured.
Fig. 3 shows a partial magnified oblique view of the structure of the length measuring machine 25. In Figs. 1 through 3, the length measuring machine 25 consists of a fixed glass grating 32, a moving glass grating 33, a light source 34, a light receiver 35, and a distance calculator 36. In Fig. 3, the light source 34 is secured on the moving stage 28 so that an optical axis (see the chained line arrow shown in Fig. 3) of a light 6 emitted therefrom is vertically to the moving direction of the moving stage 28. The moving glass grating 33 and the light receiver 35 are vertically secured to the optical axis of the light emitted from the light source 34 on the moving stage 28. Furthermore, the fixed glass grating 32 Is vertically arranged to the optical axis of the light emitted from the light source 34 between the moving glass grating 33 and the light source 34 above the moving stage 28. A plurality of slits are formed at the required pitch along the longitudinal direction in the fixed glass grating 32. The moving glass grating 33 has a slit of the required size.
A light LM, of unknown wavelength to be measured from the light source 26 is divided into a reflected light LR3 and a passing light LP3 by the beam splitter 20. The reflected light LR3 is reflected by the fixed mirror 21, passing through the beam splitter 20, and is then received by the light receiver 24. The passing light Lp3 is reflected by the moving mirror 22 and the beam splitter 20, and is then received by the light receiver 24. When the reflected light LR3 and the passing light Lp3 are received by the light receiver 24, since the reflected light LR3 and the passing light LP3 interfere with each other in the light receiver 24, an electric signal S3 in response to the intensity of an interference light is supplied from the light receiver 24 to the wavelength calculator 27.
When the moving stage 28 moves on the guide rail 29 in linear motion toward the direction shown by an arrow in Fig. 1 by the rotation of the ball screw mechanism 30 using the motor 31, the moving mirror 22 moving based on the motion of the moving stage 28, the electric signal S3 varies in response to the 7 periodic variation of the intensity of the interference light caused by the motion of the moving mirror 22. The wavelength of the electric signal S3 corresponds to the wavelength of the light LM1 In Fig. 3, the light emitted from the light source 34 passes through the slit among the slits in the fixed glass grating 32 and the slit in the moving glass grating 33, and is then received by the light receiver 35. When the moving stage 28 moves toward the direction shown by the arrow in Fig. 3, the period of the electric signal S4 from the light receiver 35 corresponds to a pitch of the fixed glass grating 32. The distance calculator 36 calculates the moving distance L of the moving stage 28 based on the counted value of the wavenumber of the electric signal S4 and the distance between the adjacent slits in the fixed glass grating 32, and supplies the calculated result to the wavelength calculator 27. The wavelength calculator 27 calculates the wavelength of the light LM, based on the counted value of the wavenumber k of the electric signal S3 and the moving distance L supplied from the distance calculator 35 using formula (3).
11=LIk (3) In the formula (3), L represents the moving distance of the linear moving mechanism 23, 11 represents the wavelength of the light LM1, and k represents the wavenumber of the electric signal S3 Next, a second preferred embodiment of the present invention will be explained with reference to Figs. 4 and 5. Fig. 4 shows a plan view of the structure of an optical wavemeter based on the second preferred embodiment of the present invention. Fig. 5 shows a partial magnified oblique view of the structure of the 8 length measuring machine 40 shown in Fig. 4. In Figs. 4 and 5, structures in this second embodiment that are the same as structures in the first embodiment shown in Figs. 1 through 3 have the same numbers, and their explanations are not repeated. In Figs. 4 and 5, the length measuring machine 40 consists of a fixed glass grating 41, a moving glass grating 42, a light source 43, a light receiver 44, and a distance calculator 45. In Fig. 5, the light source 43 is secured on the moving stage 28 so that an optical axis of a light emitted therefrom is vertical to the moving direction of the moving stage 28. The moving glass grating 42 is vertically secured to the optical axis of the light emitted from the light source 43 on the moving stage 28. Furthermore, the fixed glass grating 41 is vertically arranged with respect to the optical axis of the light emitted from the light source 43 beyond the moving glass grating 42 above the moving stage 28. A plurality of stripes made up of opaque material are placed at the required pitch along the longitudinal direction on the fixed glass grating 41 and the moving glass grating 42. The area without the stripes on the surface of the fixed glass grating 41 can reflect the light. The area without the stripes on the surface of the moving glass grating 42 allows light to pass therethrough.
A light LM, of unknown wavelength to be measured from the light source 26 is divided into a reflected light LR3 and a passing light Lp3 by the beam splitter 20. The reflected light LR3 is reflected by the fixed mirror 21, passing through the beam splitter 20, and is then received by the light receiver 24. The passing light Lp3 is reflected by the moving mirror 22 and the beam splitter 20, and is then received by the light receiver 24.
9 When the reflected light LR3 and the passing light Lp3 are received by the light receiver 24, since the reflected light L R3 and the passing light LP3 interfere with each other in the light receiver 24, an electric signal S3 in response to the intensity of an interference light is supplied from the light receiver 24 to the wavelength calculator 27.
When the moving stage 28 moves on the guide rail 29 in linear motion shown by an arrow in Fig. 4 by the rotation of the ball screw mechanism 30 using the motor 31. the moving mirror 22 moving based on the motion of the moving stage 28. the electric signal S3 varies in response to the periodic variation of the intensity of the interference light caused by the motion of the moving mirror 22. The wavelength of the electric signal S3 corresponds to the wavelength of the light LM1 In Fig. 5, just when the light emitted from the li. ght source 43 passes through the moving glass grating 42 made up of transparent material, the light is diffracted by the moving glass grating 42 and thereby lights of zero and higher degrees in the diffraction degree thereof are generated. Next, the diffracted lights of zero and higher degrees are reflected and diffracted by the fixed glass grating 41 made up of reflective material, again passing through and being diffracted by the moving glass grating 42. and then are received by the light receiver 44. When the moving stage 28 moves toward the direction shown by the arrow in Fig. 5, the phase of the light of higher degrees varies, but the phase of the light of zero degree does not vary. Therefore, an electric- signal S5 with sine waveform corresponding to the phase difference between the lights of zero and higher degrees is output from the light receiver 44. The distance calculator 45 calculates the moving distance L of the moving stage 28 based on the counted value of the wavenumber of the electric signal SS and the wavelength of the light emitted from the light source 43 and supplies the calculated result to the wavelength calculator 27. The wavelength calculator 27 calculates the unknown wavelength of the light LM, based on the counted value of the wavenumber k of the electric signal S3 and the moving distance L supplied from the distance calculator 45 using the abovementioned formula (3).
11
Claims (23)
1. An optical wavemeter comprising: a beam splitter for dividing a light having wavelength to be measured into a first light and a second light; a fixed mirror for reflecting said first light so as to inject it back into said beam splitter; a moving mirror for reflecting said second light so as to inject it back into said beam splitter; a linear moving mechanism having a moving stage on which said moving mirror is secured and for moving said moving mirror in parallel with the direction of an optical axis of light injected into said moving mirror; a light receiver for transforming an interference light generated by the synthesis of a light via said beam spl-itter and said fixed mirror and a light via said beam splitter and said moving mirror into an electric signal; a length measuring machine for detecting the moving distance of said moving stage; and a wavelength calculator for calculating the wavelength of said light to be measured based on the wavenumber of said electric signal and said moving distance.
2. An optical wavemeter according to claim 1, wherein said length measuring machine comprising: a light source being secured on said moving stage so that an optical axis of a light therefrom is vertical to the moving direction of said moving stage; a moving glass grating being vertically secured to said 12 optical axis on said moving stage, into which said light is injected; a fixed glass grating being vertically arranged to said optical axis between said light source and said moving glass grating above said moving stage, of which a plurality of glass gratings are vertically arranged with respect to said moving direction with the required pitch on the surface thereof; a light receiver for receiving a light through said fixed glass grating and said moving glass grating from said light source and delivering an electric signal in response to the movement of said moving stage; and a distance calculator for calculating a moving distance of said moving stage based on the wavenumber of said electric signal.
3. An optical wavemeter according to claim 1, wherein said length measuring machine comprising: a light source being secured on said moving stage so that an optical axis of a light therefrom is vertical to the moving direction of said moving stage; a fixed glass grating being vertically arranged with respect to said optical axis above said moving stage, of which a plurality of glass gratings are vertically arranged to said moving direction with the required pitch on the surface thereof; a moving glass grating being vertically secured to said optical axis between said light source and said fixed glass grating on said moving stage, into which said light is injected; a light receiver for receiving a light emitted from said light source and diffracted by said fixed glass grating and said 13 moving glass grating and delivering an electric signal in response to the movement of said moving stage; and a distance calculator for calculating moving distance of said moving stage based on the wavenumber of said electric signal.
4. An optical wavemeter comprising: a beam splitter for dividing a light beam having wavelength to be measured into a first light beam and a second light beam; a fixed mirror for reflecting said first light beam so as to inject it back into said beam splitter; beam splitter; a moveable mirror for reflecting said second light so as to inject it back into said a linear moving mechanism having a movable stage on which said moveable mirror is secured and for moving said moveable mirror in parallel with the direction of an optical axis of light injected into said movable mirror; a light receiver for transforming an interference light beam generated by the synthesis of a light beam via said beam splitter and said fixed mirror and a light beam via said beam splitter and said moveable mirror into an electric signal; a length measuring machine for detecting a distance of movement of said moving stage; and a wavelength calculator for calculating the wavelength of said lightbearn to be measured based on the wavenumber of said electric signal and said distance of movement.
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5. An optical wavemeter according to claim 4, wherein said length measuring machine comprises: a light source being secured on said moveable stage so that an optical axis of a light beam therefrom is vertical to direction of movement of said moveable stage; a moveable grating being vertically secured to said optical axis on said moveable stage, into which said light beam is injected; a fixed grating being vertically arranged to said optical axis between said light source and said moveable grating above said moveable stage, of which a plurality of gratings are vertically arranged with respect to the direction of movement with the required pitch on the surface thereof; a light receiver for receiving a light beam through said fixed grating and said moveable grating from said light source and delivering an electric signal in response to the movement of said moveable stage; and a distance calculator for calculating a distance of movement of said moving stage based on the wavenumber of said electric signal.
6. An optical wavemeter according to claim 4, wherein said length measuring machine comprises: a light source being secured on said moveable stage so that an optical axis of a light beam therefrom is vertical to the direction of movement of said moveable stage; a fixed grating being vertically arranged with respect to said optical axis above said moveable stage, of which a plurality of gratings are vertically arranged to the direction of movement with the required pitch on the surface thereof; a moveable grating being vertically secured to said optical axis between said light source and said fixed grating on said moveable stage, into which said light is injected; a light receiver for receiving a light beam emitted from said light source and diffracted by said fixed grating and said moveable grating and delivering an electric signal in response to the movement of said moveable stage; and a distance calculator for calculating distance of movement of said moveable stage based on the wavenumber of said electric signal.
7. An optical wavemeter comprising: a beam splitter for dividing a light beam having a wavelength to be determined into a first light beam and a second light beam, optical means for passing the first light beam through a path of predetermined distance, a mirror movable with respect to the beam splitter to enable variation in the distance of the optical path of the second beam, means for determining the distance of movement of the movable mirror in use, means for combining both the first and second beams to enable an interference pattern to be detected by a detector which generates a signal representative of the interference pattern, and 16 a wavelength calculator which operably calculates the wavelength of the light beam based on the detector signal and the distance of movement of the movable mirror.
8. An optical wavemeter according to claim 7 wherein the optical means comprises a mirror of fixed separation from the beam splitter.
9. An optical wavemeter according to claim 7 or 8 wherein the combining means consists of the beam splitter.
10. An optical wavemeter according to any one of claims 7 to 9 wherein the movable mirror is mounted on a movable stage.
11. An optical wavemeter according to claim 10 wherein the movable stage is operably driven by a motor to cause movement thereof.
12. An optical wavemeter according to any one of claims 7 to 11 wherein the distance determining means comprises a light source associated with the movable mirror, a first grating having a fixed position relative to the light source, a movable grating, a light receiver for receiving a light beam having been refracted by the fixed and movable gratings which receiver operably produces a signal representative of the movement of the movable mirror, and a distance calculator for calculating the distance of movement of the movable mirror based on the signal from the light receiver.
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13. An optical wavemeter according to claim 12 wherein the light beam from the light source passes through the fixed. grating prior to passing through the movable grating and into the light receiver.
14. An optical wavemeter according to claim 12 wherein the light beam from the light source passes through the movable grating prior to being refracted by said fixed grating.
15. An optical wavemeter according to claim 14 wherein the light beam refracted by the fixed grating passes through the movable grating prior to being detected by the light receiver.
16. An optical wavemeter according to claim 14 or 15 wherein the fixed grating comprises a mirror having a series of non-reflecting strips.
17. An optical wavemeter substantially as described herein with reference to and as shown in Figures 1 to 3.
18. An optical wavemeter substantially as described herein with reference to and as shown in Figures 4 and 5.
19. A device for determining the distance of movement of a moveable mirror in an optical waverneter comprising a light source associated with the movable mirror, a first grating having a fixed position relative to the light source, a movable grating, a light receiver for 18 receiving a light beam having been refracted by the fixed and movable gratings which receiver operably produces a signal representative of the movement of the movable mirror, and a distance calculator for calculating the distance of movement of the movable mirror based on the signal from the light receiver.
20. A device according to claim 19 wherein the light beam from the light source passes through the fixed grating prior to passing through the movable grating and into the light receiver.
21. A device according to claim 19 wherein the light beam from the light source passes through the movable grating prior to being refracted by said fixed grating, and/or wherein the light beam refracted by the fixed grating passes through the moveable grating prior to being detected by the fight receiver, and/or wherein the fixed grating comprises a mirror having a series of non-reflecting strips.
22. A device for measuring the distance of movement of a moveable mirror in an optical 1 meter substantially as described herein with reference to and as shown in Figures 1 to 3.
23. A device for measuring the distance of movement of a moveable mirror in an optical meter substantially as described herein with reference to and as shown in Figures 4 and 5.
19
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18690493A JPH0719965A (en) | 1993-06-30 | 1993-06-30 | Light wavemeter |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB9412891D0 GB9412891D0 (en) | 1994-08-17 |
| GB2280261A true GB2280261A (en) | 1995-01-25 |
| GB2280261B GB2280261B (en) | 1997-05-21 |
Family
ID=16196722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB9412891A Expired - Fee Related GB2280261B (en) | 1993-06-30 | 1994-06-27 | Optical wavemeter |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH0719965A (en) |
| DE (1) | DE4422641C2 (en) |
| FR (1) | FR2708344B1 (en) |
| GB (1) | GB2280261B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| GB2280261B (en) | 1997-05-21 |
| DE4422641C2 (en) | 1996-11-21 |
| DE4422641A1 (en) | 1995-01-19 |
| GB9412891D0 (en) | 1994-08-17 |
| JPH0719965A (en) | 1995-01-20 |
| FR2708344B1 (en) | 1996-07-19 |
| FR2708344A1 (en) | 1995-02-03 |
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| Date | Code | Title | Description |
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| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19990627 |