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GB2144453B - Apparatus for forming thin films in vacuum - Google Patents

Apparatus for forming thin films in vacuum

Info

Publication number
GB2144453B
GB2144453B GB08419870A GB8419870A GB2144453B GB 2144453 B GB2144453 B GB 2144453B GB 08419870 A GB08419870 A GB 08419870A GB 8419870 A GB8419870 A GB 8419870A GB 2144453 B GB2144453 B GB 2144453B
Authority
GB
United Kingdom
Prior art keywords
vacuum
thin films
forming thin
forming
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08419870A
Other versions
GB2144453A (en
GB8419870D0 (en
Inventor
Yasutomo Sasanuma
Mitsugu Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Publication of GB8419870D0 publication Critical patent/GB8419870D0/en
Publication of GB2144453A publication Critical patent/GB2144453A/en
Application granted granted Critical
Publication of GB2144453B publication Critical patent/GB2144453B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB08419870A 1983-08-03 1984-08-03 Apparatus for forming thin films in vacuum Expired GB2144453B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58142143A JPS6033350A (en) 1983-08-03 1983-08-03 Vacuum film forming apparatus

Publications (3)

Publication Number Publication Date
GB8419870D0 GB8419870D0 (en) 1984-09-05
GB2144453A GB2144453A (en) 1985-03-06
GB2144453B true GB2144453B (en) 1986-06-11

Family

ID=15308361

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08419870A Expired GB2144453B (en) 1983-08-03 1984-08-03 Apparatus for forming thin films in vacuum

Country Status (4)

Country Link
JP (1) JPS6033350A (en)
KR (1) KR890004617B1 (en)
GB (1) GB2144453B (en)
HK (1) HK81587A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210272A (en) * 1985-07-05 1987-01-19 Seiko Electronic Components Ltd Rotary type vapor deposition device
JP2010095745A (en) * 2008-10-15 2010-04-30 Sumitomo Electric Ind Ltd Film-forming method and film-forming apparatus
KR101909810B1 (en) 2017-03-02 2018-12-18 박현철 Injection mold for molding products with thread

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146927A (en) * 1979-05-07 1980-11-15 Citizen Watch Co Ltd Film forming device
JPS5743983A (en) * 1980-08-30 1982-03-12 Shimadzu Corp Film preparing apparatus

Also Published As

Publication number Publication date
GB2144453A (en) 1985-03-06
GB8419870D0 (en) 1984-09-05
JPS6033350A (en) 1985-02-20
HK81587A (en) 1987-11-13
KR850002110A (en) 1985-05-06
KR890004617B1 (en) 1989-11-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20000803