GB2085156B - Profile measuring apparatus - Google Patents

Profile measuring apparatus

Info

Publication number: GB2085156B
Authority: GB; United Kingdom
Prior art keywords: measuring apparatus; profile measuring; profile; measuring
Prior art date: 1980-09-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB8128313A

Other versions

GB2085156A (en

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Koninklijke Philips NV

Original Assignee

Philips Gloeilampenfabrieken NV

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1980-09-22

Filing date

1981-09-18

Publication date

1984-07-04

1981-09-18 Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV

1982-04-21 Publication of GB2085156A publication Critical patent/GB2085156A/en

1984-07-04 Application granted granted Critical

1984-07-04 Publication of GB2085156B publication Critical patent/GB2085156B/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Length Measuring Devices With Unspecified Measuring Means (AREA)

GB8128313A 1980-09-22 1981-09-18 Profile measuring apparatus Expired GB2085156B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NL8005259A NL8005259A (en)	1980-09-22	1980-09-22	DEVICE FOR MEASURING THE SURFACE OF AN OBJECT.

Publications (2)

Publication Number	Publication Date
GB2085156A GB2085156A (en)	1982-04-21
GB2085156B true GB2085156B (en)	1984-07-04

Family

ID=19835909

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB8128313A Expired GB2085156B (en)	1980-09-22	1981-09-18	Profile measuring apparatus

Country Status (6)

Country	Link
US (1)	US4347441A (en)
JP (1)	JPS5784303A (en)
DE (1)	DE3136993A1 (en)
FR (1)	FR2490809B1 (en)
GB (1)	GB2085156B (en)
NL (1)	NL8005259A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4541717A (en) *	1983-12-08	1985-09-17	Fuji Photo Optical Co., Ltd.	Attraction holding device
DE3511564A1 (en) *	1985-03-29	1986-10-02	Hommelwerke GmbH, 7730 Villingen-Schwenningen	DEVICE FOR MEASURING THE CIRCULAR DIFFERENCE OF ECCENTRIC BEARING AREAS, IN PARTICULAR CONNECTING BEARINGS
US4902123A (en) *	1987-11-25	1990-02-20	Taunton Technologies, Inc.	Topography measuring apparatus
DE3801889A1 (en) *	1988-01-23	1989-08-03	Rodenstock Optik G	Method for measuring spectacle lenses
DE3920716C1 (en) *	1989-06-24	1990-11-29	Wild Leitz Gmbh, 6330 Wetzlar, De
EP0415579A1 (en) *	1989-08-30	1991-03-06	Renishaw plc	Touch probe
US5174039A (en) *	1990-08-17	1992-12-29	Kabushiki Kaisha Toshiba	Displacement-measuring apparatus, and static-pressure bearing device for use in the displacement-measuring apparatus
GB2256476B (en) *	1991-05-30	1995-09-27	Rank Taylor Hobson Ltd	Positional measurement
US5351125A (en) *	1993-03-29	1994-09-27	Moore Products, Inc.	Gaging finger for precision measuring instruments
DE10025461A1 (en) *	2000-05-23	2001-12-06	Mahr Gmbh	Measurement device, especially for measuring workpiece surface roughness and/or contour has probe with diffraction grating for +1, 0 and -1 orders
US6771375B2 (en) *	2001-06-20	2004-08-03	Zygo Corporation	Apparatus and method for measuring aspherical optical surfaces and wavefronts
US6717679B2 (en) *	2001-11-15	2004-04-06	Zygo Corporation	Dispersive null-optics for aspheric surface and wavefront metrology
WO2003044455A1 (en)	2001-11-15	2003-05-30	Zygo Corporation	Rapid in situ mastering of an aspheric fizeau
DE10224761B3 (en) *	2002-06-04	2004-03-25	Carl Zeiss Jena Gmbh	Laser beam interferometer has radiation divider feeding measurement arm, reference branch, beam combiner superimposing individual beams from reference branch, measurement arm onto detector in pairs
WO2005043073A2 (en)	2003-10-20	2005-05-12	Zygo Corporation	Reconfigureable interferometer system
CN114910014B (en) *	2022-04-24	2023-07-07	浙江大学	Measurement system and method for surface shape measurement of high-aspect-ratio curved surface component

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2048154A (en) *	1935-05-27	1936-07-21	Univ Michigan	Apparatus for determining roughness of surfaces
US2633020A (en) *	1947-11-19	1953-03-31	Marion E Abbott	Apparatus for investigating surface profiles
BE522652A (en) *	1952-09-10
US3370613A (en) *	1965-10-15	1968-02-27	True Trace Corp	Hydraulically-centered spool valve
DE1623340A1 (en) *	1967-06-08	1971-04-15	Wenczler & Heidenhain	Device for the precision measurement of test specimens with conical, cylindrical or flat boundary surfaces
FR2094282A5 (en) *	1970-06-16	1972-02-04	Commissariat Energie Atomique
US3869947A (en) *	1973-08-20	1975-03-11	La Salle Machine Tool	Piston turning machine
NL7403468A (en) *	1974-03-15	1975-09-17	Philips Nv	DEVICE FOR DETERMINING THE MOVEMENT OF A PART OF A TOOL.
US4043671A (en) *	1976-07-13	1977-08-23	The United States Of America As Represented By The United States Energy Research And Development Administration	Laser system preset unit
US4153370A (en) *	1977-12-05	1979-05-08	The United States Of America As Represented By The United States Department Of Energy	Microinterferometer transducer
JPS5485678A (en) *	1977-12-20	1979-07-07	Canon Inc	High accuracy alignment method for air bearing guide system xy stage
US4276480A (en) *	1979-09-28	1981-06-30	Accuray Corporation	Sensor position independent material property determination using radiant energy

1980
- 1980-09-22 NL NL8005259A patent/NL8005259A/en not_active Application Discontinuation
- 1980-10-06 US US06/193,972 patent/US4347441A/en not_active Expired - Lifetime
1981
- 1981-09-17 DE DE19813136993 patent/DE3136993A1/en active Granted
- 1981-09-18 FR FR8117666A patent/FR2490809B1/en not_active Expired
- 1981-09-18 GB GB8128313A patent/GB2085156B/en not_active Expired
- 1981-09-22 JP JP56148928A patent/JPS5784303A/en active Granted

Also Published As

Publication number	Publication date
DE3136993A1 (en)	1982-04-29
NL8005259A (en)	1982-04-16
DE3136993C2 (en)	1993-01-28
FR2490809A1 (en)	1982-03-26
JPH0145842B2 (en)	1989-10-05
GB2085156A (en)	1982-04-21
US4347441A (en)	1982-08-31
FR2490809B1 (en)	1986-05-09
JPS5784303A (en)	1982-05-26

Publication	Publication Date	Title
DE3071910D1 (en)	1987-04-02	Dimension measuring apparatus
DE3274495D1 (en)	1987-01-15	Measurement apparatus
JPS56143903A (en)	1981-11-10	Distance determining apparatus
GB2110367B (en)	1985-10-09	Profile measurement apparatus
DE3176738D1 (en)	1988-06-16	Stress sensing apparatus
JPS5786730A (en)	1982-05-29	Pressure measuring apparatus
EP0119844A3 (en)	1986-02-19	Measuring apparatus utilizing spectrum profile
JPS57136141A (en)	1982-08-23	Measuring apparatus
GB2090411B (en)	1985-09-18	Object detecting apparatus
JPS5791422A (en)	1982-06-07	Temperature measuring apparatus
JPS5786731A (en)	1982-05-29	Pressure measuring apparatus
JPS57116229A (en)	1982-07-20	Temperature measuring apparatus
JPS57120198A (en)	1982-07-27	Remote measuring apparatus
GB2086569B (en)	1984-08-30	Torque measuring apparatus
DE3275315D1 (en)	1987-03-05	Electromagnetic-acoustic measuring apparatus
JPS57118130A (en)	1982-07-22	Torque measuring apparatus
GB2085156B (en)	1984-07-04	Profile measuring apparatus
JPS56128427A (en)	1981-10-07	Electrical measuring apparatus
JPS57157110A (en)	1982-09-28	Measuring apparatus
JPS56138215A (en)	1981-10-28	Measuring apparatus
GB8327564D0 (en)	1983-11-16	Auxological measuring apparatus
JPS5716301A (en)	1982-01-27	Measuring apparatus
GB2082778B (en)	1984-02-01	Volume measuring apparatus
JPS5794642A (en)	1982-06-12	Potential difference measuring apparatus
JPS5784334A (en)	1982-05-26	Measuring apparatus

Legal Events

Date	Code	Title	Description
1999-05-05	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 19980918