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GB1522925A - High intensity glow discharge treatment - Google Patents

High intensity glow discharge treatment

Info

Publication number
GB1522925A
GB1522925A GB17067/77A GB1706777A GB1522925A GB 1522925 A GB1522925 A GB 1522925A GB 17067/77 A GB17067/77 A GB 17067/77A GB 1706777 A GB1706777 A GB 1706777A GB 1522925 A GB1522925 A GB 1522925A
Authority
GB
United Kingdom
Prior art keywords
glow discharge
fault signal
high intensity
discharge
discharge treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB17067/77A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IONIT ANSTALT BERNHARD BERGHAUS
Original Assignee
IONIT ANSTALT BERNHARD BERGHAUS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IONIT ANSTALT BERNHARD BERGHAUS filed Critical IONIT ANSTALT BERNHARD BERGHAUS
Publication of GB1522925A publication Critical patent/GB1522925A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)

Abstract

1522925 Glow discharge treatment IONIT ANSTALT BERNHARD BERGHAUS 25 April 1977 [7 May 1976] 17067/77 Heading H2K Apparatus for the treatment of workpieces by means of a high intensity glow discharge comprises a switch assembly (not shown) for detecting faulty discharges and temporarily interrupting the discharge, means (not shown) for producing a pulse each time a faulty discharge is detected, and means for producing a fault signal when the pulse rate exceeds a predetermined value. The pulses are fed to an RC circuit 2, 3, and comparator 4 produces the fault signal when the voltage on the capacitor exceeds a reference voltage. Alternatively the pulses may be fed to a counter which is cleared at regular intervals and which produces the fault signal at a given count.
GB17067/77A 1976-05-07 1977-04-25 High intensity glow discharge treatment Expired GB1522925A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2620164A DE2620164C2 (en) 1976-05-07 1976-05-07 Method and device for monitoring high-current glow discharges

Publications (1)

Publication Number Publication Date
GB1522925A true GB1522925A (en) 1978-08-31

Family

ID=5977282

Family Applications (1)

Application Number Title Priority Date Filing Date
GB17067/77A Expired GB1522925A (en) 1976-05-07 1977-04-25 High intensity glow discharge treatment

Country Status (9)

Country Link
JP (1) JPS5340644A (en)
BR (1) BR7702855A (en)
DD (1) DD129846A5 (en)
DE (1) DE2620164C2 (en)
FR (1) FR2350761A1 (en)
GB (1) GB1522925A (en)
IT (1) IT1084635B (en)
PL (1) PL197863A1 (en)
ZA (1) ZA772644B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1122981A2 (en) * 2000-02-02 2001-08-08 ALD Vacuum Technologies AG Device for identifying disturbances of the electrical heating of furnaces, in particular of smelt and sinter furnaces

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (en) * 1978-07-26 1980-02-13

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
NL232698A (en) * 1953-12-09
FR1127831A (en) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit with protection relay
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
CH389797A (en) * 1959-08-17 1965-03-31 Berghaus Elektrophysik Anst Device to avoid sudden changes in the state of discharge for discharge vessels operated with high-current glow discharges
DE1565364B2 (en) * 1966-04-02 1971-09-02 AEG Elotherm GmbH, 5630 Remscheid Hasten CIRCUIT FOR PROTECTION FOR THE HEATING DUCTS OF INDUCTORS
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
FR1541370A (en) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations
US3809955A (en) * 1973-03-26 1974-05-07 Graco Inc Safety circuit for electrostatic spray gun
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
DE2606395C3 (en) * 1976-02-18 1979-01-18 Ionit Anstalt Bernhard Berghaus, Vaduz Method and device for monitoring the electrical behavior of a high-current glow discharge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1122981A2 (en) * 2000-02-02 2001-08-08 ALD Vacuum Technologies AG Device for identifying disturbances of the electrical heating of furnaces, in particular of smelt and sinter furnaces
EP1122981A3 (en) * 2000-02-02 2005-11-16 ALD Vacuum Technologies AG Device for identifying disturbances of the electrical heating of furnaces, in particular of smelt and sinter furnaces

Also Published As

Publication number Publication date
JPS5526181B2 (en) 1980-07-11
DD129846A5 (en) 1978-02-08
DE2620164C2 (en) 1978-07-06
FR2350761A1 (en) 1977-12-02
JPS5340644A (en) 1978-04-13
PL197863A1 (en) 1978-01-02
ZA772644B (en) 1978-04-26
DE2620164B1 (en) 1977-11-10
BR7702855A (en) 1978-04-04
IT1084635B (en) 1985-05-25

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee