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GB1417721A - Detection apparatus - Google Patents

Detection apparatus

Info

Publication number
GB1417721A
GB1417721A GB5352872A GB5352872A GB1417721A GB 1417721 A GB1417721 A GB 1417721A GB 5352872 A GB5352872 A GB 5352872A GB 5352872 A GB5352872 A GB 5352872A GB 1417721 A GB1417721 A GB 1417721A
Authority
GB
United Kingdom
Prior art keywords
boundary
elements
pattern
defects
buffer memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5352872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9243371A external-priority patent/JPS5112492B2/ja
Priority claimed from JP46097122A external-priority patent/JPS4861030A/ja
Priority claimed from JP47018083A external-priority patent/JPS4888843A/ja
Priority claimed from JP47030759A external-priority patent/JPS4898886A/ja
Priority claimed from JP47075069A external-priority patent/JPS4934385A/ja
Priority claimed from JP8372072A external-priority patent/JPS543638B2/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1417721A publication Critical patent/GB1417721A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Image Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Analysis (AREA)

Abstract

1417721 Image analysis HITACHI Ltd 20 Nov 1972 [19 Nov 1971 3 Dec 1971 23 Feb 1972 29 March 1972 28 July 1972 23 Aug 1972] 53528/72 Heading G1A In an arrangement for processing a portion of a pattern, a video signal is provided from the pattern, a binary signal corresponding to selected picture elements is derived by sampling and quantizing tehniques and this signal is stored in a two dimensional buffer memory which is connected to the processing circuitry. The binary conversion (quantization) may be by means of a fixed threshold level or, preferably, by a floating threshold arrangement Fig. 5. The conversion may be performed before or after sampling. The signals may be stored in the buffer memory via shift registers or analogue delay lines. SIGNAL PROCESSING 1. Boundary space method. Defects or "cogs" in a two level pattern are identified by small signal extracting logic circuits which produce an output if the state of a selected element is opposite to those of a pair of elements one adjacent to one side of the element and one spaced from the opposite side of the element Figs. 17 and 18. The defects are differentiated from "cogs" or boundary lines produced by the quantization process by a boundary extraction method in which elements displaced on either side of a selected element are examined to determine whether they are the same, indicating a possible defect, or different indicating a boundary. This may be achieved by appropriate logic gating circuits Figs. 19 and 20. The outputs of the boundary extracting circuit and small signal extracting circuit are compared. 2 Expansion-contraction method. If the dark areas of the pattern are expanded any small light defects are filled-in so that when contracted the original pattern less the light defects is obtained. Similarly if the light areas are expanded and then contracted any dark faults are eliminated. Logic circuits for comparing the elements surrounding a selected element may be used to generate expanded or contracted patterns from elements stored in the buffer memory, the outputs being stored in a second buffer memory Fig.26. These patterns are returned to their original size by a complementary contraction or expansion to produce patterns in a third buffer memory which can be compared element-by-element with the original pattern by exclusive OR circuits to produce outputs corresponding only to defects Fig. 28. 3 Boundary averaging method. Elements may be detected as part of a boundary by considering the surrounding elements and determining whether or not the majority are of the same state as the selected element. This may be achieved by a plurality of majority logic gates connected between two stores Fig. 32A or by a single such gate processing each row (or column) of the stored data on a sequential basis Fig. 32B. 4 Small portion extraction method. A selected element may be considered to be on a boundary if, on analyzing each of a plurality of fields which together completely surround the element, there is at least one field all the elements of which have the same state as the selected element. This function may be achieved by suitably connected logic circuits and its inverse (every field contains at least one element whose state differs from that of the selected element) indicates the presence of a defect. In each case the extracted defects may operate an alarm or be displayed for example on a colour TV if desired together with the complete pattern in another colour.
GB5352872A 1971-11-19 1972-11-20 Detection apparatus Expired GB1417721A (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP9243371A JPS5112492B2 (en) 1971-11-19 1971-11-19
JP46097122A JPS4861030A (en) 1971-12-03 1971-12-03
JP47018083A JPS4888843A (en) 1972-02-23 1972-02-23
JP47030759A JPS4898886A (en) 1972-03-29 1972-03-29
JP47075069A JPS4934385A (en) 1972-07-28 1972-07-28
JP8372072A JPS543638B2 (en) 1972-08-23 1972-08-23

Publications (1)

Publication Number Publication Date
GB1417721A true GB1417721A (en) 1975-12-17

Family

ID=27548765

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5352872A Expired GB1417721A (en) 1971-11-19 1972-11-20 Detection apparatus

Country Status (2)

Country Link
DE (1) DE2256617C3 (en)
GB (1) GB1417721A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4486777A (en) * 1981-10-14 1984-12-04 Fuji Electric Company, Ltd. Defect detecting apparatus and method
US7546236B2 (en) 2002-03-22 2009-06-09 British Telecommunications Public Limited Company Anomaly recognition method for data streams
US7570815B2 (en) 2002-03-22 2009-08-04 British Telecommunications Plc Comparing patterns
US7574051B2 (en) 2005-06-10 2009-08-11 British Telecommunications Plc Comparison of patterns
US7593602B2 (en) 2002-12-19 2009-09-22 British Telecommunications Plc Searching images
US7620249B2 (en) 2004-09-17 2009-11-17 British Telecommunications Public Limited Company Analysis of patterns
US7653238B2 (en) 2003-12-05 2010-01-26 British Telecommunications Plc Image filtering based on comparison of pixel groups
US8040428B2 (en) 2005-12-19 2011-10-18 British Telecommunications Public Limited Company Method for focus control
US8135210B2 (en) 2005-07-28 2012-03-13 British Telecommunications Public Limited Company Image analysis relating to extracting three dimensional information from a two dimensional image

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3963354A (en) * 1975-05-05 1976-06-15 Bell Telephone Laboratories, Incorporated Inspection of masks and wafers by image dissection
JPS5371563A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Automatic inspection correcting method for mask
GB1564181A (en) * 1977-02-11 1980-04-02 Paabo M Device for examination of distances in a picture
US4692690A (en) * 1983-12-26 1987-09-08 Hitachi, Ltd. Pattern detecting apparatus
JPH0616013B2 (en) * 1984-11-22 1994-03-02 肇産業株式会社 Automatic inspection device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4486777A (en) * 1981-10-14 1984-12-04 Fuji Electric Company, Ltd. Defect detecting apparatus and method
US7546236B2 (en) 2002-03-22 2009-06-09 British Telecommunications Public Limited Company Anomaly recognition method for data streams
US7570815B2 (en) 2002-03-22 2009-08-04 British Telecommunications Plc Comparing patterns
US7593602B2 (en) 2002-12-19 2009-09-22 British Telecommunications Plc Searching images
US7653238B2 (en) 2003-12-05 2010-01-26 British Telecommunications Plc Image filtering based on comparison of pixel groups
US7620249B2 (en) 2004-09-17 2009-11-17 British Telecommunications Public Limited Company Analysis of patterns
US7574051B2 (en) 2005-06-10 2009-08-11 British Telecommunications Plc Comparison of patterns
US8135210B2 (en) 2005-07-28 2012-03-13 British Telecommunications Public Limited Company Image analysis relating to extracting three dimensional information from a two dimensional image
US8040428B2 (en) 2005-12-19 2011-10-18 British Telecommunications Public Limited Company Method for focus control

Also Published As

Publication number Publication date
DE2256617B2 (en) 1978-01-05
DE2256617A1 (en) 1973-06-07
DE2256617C3 (en) 1978-08-31

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years