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GB1325551A - Ion beam microprobes - Google Patents

Ion beam microprobes

Info

Publication number
GB1325551A
GB1325551A GB3298770A GB3298770A GB1325551A GB 1325551 A GB1325551 A GB 1325551A GB 3298770 A GB3298770 A GB 3298770A GB 3298770 A GB3298770 A GB 3298770A GB 1325551 A GB1325551 A GB 1325551A
Authority
GB
United Kingdom
Prior art keywords
ions
lens
magnetic field
diaphragm
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3298770A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Plasmaphysik GmbH
Original Assignee
Institut fuer Plasmaphysik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Plasmaphysik GmbH filed Critical Institut fuer Plasmaphysik GmbH
Priority to GB1298670A priority Critical patent/GB1325552A/en
Publication of GB1325551A publication Critical patent/GB1325551A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

1325551 Ion beam apparatus INSTITUT FUR PLASMAPHYSIK GmbH 7 July 1970 [23 July 1969] 32987/70 Heading H1D An ion beam microprobe comprises an ion source 10, Fig. 1, and an ion lens 12 adapted to produce a parallel beam which passes through a 180 degree homogeneous magnetic field 14 to emerge as a parallel beam which is focused by a condenser lens 18 and an objective lens 22 on to the test object 24 to produce secondary ions which are analyzed by a mass spectrometer 26, and after 90 degree deflection the magnetic field 14 is adapted to produce a mass spectrum (shown by a dashed line) from which ions of a desired mass may be selected by a diaphragm 16 provided with a slit; the slit may be of variable width and/or the diaphragm 16 may be movable parallel to the spectrum. Preferably the apparatus also includes an electron beam generating system 30, a second 180 degree magnetic field 32 which has little effect on the ions but deflects electrons into the same path as the ions, and an X-ray spectrometer 34 for analysis of X-rays generated by electron bombardment of the specimen. Lenses.-The lens 18 and/or the lens 22 may comprise earthed magnetic polepieces 40, 42, Fig. 2, provided with central apertures and an apertured diaphragm 44. It is shown that the electrostatic lens so formed can simultaneously focus ions of 10KV energy and electrons of 4KV energy. For electrons of higher energy the magnetic field is energized to provide the required additional focusing power; the effect of the magnetic field on the ions is small and may be compensated by adjustment of the potential U L of the diaphragm 44.
GB3298770A 1969-07-23 1970-07-07 Ion beam microprobes Expired GB1325551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1298670A GB1325552A (en) 1969-07-23 1970-07-07 Combined magnetic and electrostatic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1937482A DE1937482C3 (en) 1969-07-23 1969-07-23 Microbeam probe

Publications (1)

Publication Number Publication Date
GB1325551A true GB1325551A (en) 1973-08-01

Family

ID=5740684

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3298770A Expired GB1325551A (en) 1969-07-23 1970-07-07 Ion beam microprobes

Country Status (4)

Country Link
US (1) US3617739A (en)
DE (1) DE1937482C3 (en)
FR (1) FR2056144A5 (en)
GB (1) GB1325551A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2225156A (en) * 1988-11-01 1990-05-23 Seiko Instr Inc Ion beam apparatus and method for preparing and observing a sample

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878392A (en) * 1973-12-17 1975-04-15 Etec Corp Specimen analysis with ion and electrom beams
US4352985A (en) * 1974-01-08 1982-10-05 Martin Frederick W Scanning ion microscope
US4236073A (en) * 1977-05-27 1980-11-25 Martin Frederick W Scanning ion microscope
JPS583588B2 (en) * 1978-02-03 1983-01-21 株式会社日立製作所 Ion↓-electronic combined analyzer
JPS57191950A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Charged-particle source
JPS58110956U (en) * 1982-01-22 1983-07-28 株式会社日立製作所 Charged particle irradiation device
GB2115976A (en) * 1982-02-26 1983-09-14 Philips Electronic Associated Charged particle beam apparatus
EP0107320A3 (en) * 1982-09-17 1986-11-20 Dubilier Scientific Limited Improvements relating to ion-beam apparatus
GB8401471D0 (en) * 1984-01-19 1984-02-22 Cleaver J R A Ion and electron beam electrostatic lens systems
GB8401578D0 (en) * 1984-01-19 1984-02-22 Cleaver J R A Ion and electron beam electrostatic and magnetic lens systems
FR2575597B1 (en) * 1984-12-28 1987-03-20 Onera (Off Nat Aerospatiale) APPARATUS FOR VERY HIGH RESOLUTION ION MICROANALYSIS OF A SOLID SAMPLE
US4829179A (en) * 1986-07-12 1989-05-09 Nissin Electric Company, Limited Surface analyzer
US5204530A (en) * 1991-12-27 1993-04-20 Philippe Chastagner Noise reduction in negative-ion quadrupole mass spectrometry
US5849252A (en) * 1995-03-06 1998-12-15 Mitsubishi Jukogyo Kabushiki Kaisha Charged particle accelerator apparatus and electronic sterilizer apparatus using the same
IL122770A0 (en) 1997-12-25 1998-08-16 Gotit Ltd Automatic spray dispenser
EP1388883B1 (en) * 2002-08-07 2013-06-05 Fei Company Coaxial FIB-SEM column
GB2428868B (en) * 2005-10-28 2008-11-19 Thermo Electron Corp Spectrometer for surface analysis and method therefor
CN103107056B (en) * 2011-11-10 2014-07-16 北京中科信电子装备有限公司 Broadband ion beam analyzer
CN107843775B (en) * 2017-12-20 2024-02-27 中国科学院大气物理研究所 Three-dimensional electric field sonde capable of sensing thunderstorm cloud in gesture

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2591998A (en) * 1947-07-29 1952-04-08 Atomic Energy Commission Leak detector
US2975279A (en) * 1958-06-23 1961-03-14 Vickers Electrical Co Ltd Mass spectrometers
NL285301A (en) * 1961-11-15
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2225156A (en) * 1988-11-01 1990-05-23 Seiko Instr Inc Ion beam apparatus and method for preparing and observing a sample
GB2225156B (en) * 1988-11-01 1993-06-09 Seiko Instr Inc Method and apparatus for the preparation and observation of a topographic section

Also Published As

Publication number Publication date
DE1937482C3 (en) 1974-10-10
DE1937482B2 (en) 1974-02-14
US3617739A (en) 1971-11-02
DE1937482A1 (en) 1971-02-04
FR2056144A5 (en) 1971-05-14

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee