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GB1163670A - Semiconductive Electromechanical Transducers. - Google Patents

Semiconductive Electromechanical Transducers.

Info

Publication number
GB1163670A
GB1163670A GB1443067A GB1443067A GB1163670A GB 1163670 A GB1163670 A GB 1163670A GB 1443067 A GB1443067 A GB 1443067A GB 1443067 A GB1443067 A GB 1443067A GB 1163670 A GB1163670 A GB 1163670A
Authority
GB
United Kingdom
Prior art keywords
protrusions
emitter regions
march
raised portion
top surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1443067A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of GB1163670A publication Critical patent/GB1163670A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

1,163,670. Semi-conductor devices. TOKYO SHIBAURA ELECTRIC CO. Ltd. 30 March, 1967 [31 March, 1966; 9 April, 1966], No. 14430/67. Heading H1K. An electromechanical transducer has several protrusions 12-14 on the top face of the semiconductor body 15 of a transistor which includes a collector region 16, into which are diffused a base region 17, and several emitter regions 18-20. The emitter regions 18-20 cover at least the top surfaces 12a-14a of the protrusions, and a force applicator 24 engages these top surfaces. The applicator 24 may be of sapphire, tungsten or iron and may be coated with gold which is alloyed to the emitter regions 18-20 to provide the emitter contact. Other forms of conductive bonding may alternatively be used. The base electrode 22 is applied through an insulating coating 23 which covers the entire upper surface except the protrusions. In an alternative embodiment the protrusions (212-214), Fig. 6 (not shown), are provided on a raised portion (200) of the upper device surface, the base electrode (222), being connected to the upper surface to one side of the raised portion.
GB1443067A 1965-12-21 1967-03-30 Semiconductive Electromechanical Transducers. Expired GB1163670A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP7822965 1965-12-21
JP2858766 1966-03-31
JP3214866 1966-04-09
JP5697966 1966-08-31

Publications (1)

Publication Number Publication Date
GB1163670A true GB1163670A (en) 1969-09-10

Family

ID=27458911

Family Applications (2)

Application Number Title Priority Date Filing Date
GB5654466A Expired GB1111209A (en) 1965-12-21 1966-12-16 Semiconductive transducers and method of fabricating the same
GB1443067A Expired GB1163670A (en) 1965-12-21 1967-03-30 Semiconductive Electromechanical Transducers.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB5654466A Expired GB1111209A (en) 1965-12-21 1966-12-16 Semiconductive transducers and method of fabricating the same

Country Status (1)

Country Link
GB (2) GB1111209A (en)

Also Published As

Publication number Publication date
GB1111209A (en) 1968-04-24

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees