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GB0021754D0 - Improvements in and relating to magnetron sputtering - Google Patents

Improvements in and relating to magnetron sputtering

Info

Publication number
GB0021754D0
GB0021754D0 GB0021754A GB0021754A GB0021754D0 GB 0021754 D0 GB0021754 D0 GB 0021754D0 GB 0021754 A GB0021754 A GB 0021754A GB 0021754 A GB0021754 A GB 0021754A GB 0021754 D0 GB0021754 D0 GB 0021754D0
Authority
GB
United Kingdom
Prior art keywords
relating
magnetron sputtering
magnetron
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0021754A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0021754A priority Critical patent/GB0021754D0/en
Publication of GB0021754D0 publication Critical patent/GB0021754D0/en
Priority to CNB018109861A priority patent/CN100437886C/en
Priority to AU2001272643A priority patent/AU2001272643A1/en
Priority to PCT/GB2001/003229 priority patent/WO2002011176A1/en
Priority to DE10196150T priority patent/DE10196150B4/en
Priority to US10/275,439 priority patent/US7378001B2/en
Priority to GB0224233A priority patent/GB2377228C/en
Priority to TW090118300A priority patent/TWI296813B/en
Ceased legal-status Critical Current

Links

GB0021754A 2000-07-27 2000-09-05 Improvements in and relating to magnetron sputtering Ceased GB0021754D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB0021754A GB0021754D0 (en) 2000-09-05 2000-09-05 Improvements in and relating to magnetron sputtering
CNB018109861A CN100437886C (en) 2000-07-27 2001-07-18 Magnetron sputtering
AU2001272643A AU2001272643A1 (en) 2000-07-27 2001-07-18 Magnetron sputtering
PCT/GB2001/003229 WO2002011176A1 (en) 2000-07-27 2001-07-18 Magnetron sputtering
DE10196150T DE10196150B4 (en) 2000-07-27 2001-07-18 A magnetron sputtering apparatus and method for controlling such apparatus
US10/275,439 US7378001B2 (en) 2000-07-27 2001-07-18 Magnetron sputtering
GB0224233A GB2377228C (en) 2000-07-27 2001-07-18 Magnetron sputtering
TW090118300A TWI296813B (en) 2000-07-27 2001-07-26 Improvements in and relating to magnetron sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0021754A GB0021754D0 (en) 2000-09-05 2000-09-05 Improvements in and relating to magnetron sputtering

Publications (1)

Publication Number Publication Date
GB0021754D0 true GB0021754D0 (en) 2000-10-18

Family

ID=9898863

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0021754A Ceased GB0021754D0 (en) 2000-07-27 2000-09-05 Improvements in and relating to magnetron sputtering

Country Status (1)

Country Link
GB (1) GB0021754D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)