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FR3120700B1 - Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres - Google Patents

Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres Download PDF

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Publication number
FR3120700B1
FR3120700B1 FR2102248A FR2102248A FR3120700B1 FR 3120700 B1 FR3120700 B1 FR 3120700B1 FR 2102248 A FR2102248 A FR 2102248A FR 2102248 A FR2102248 A FR 2102248A FR 3120700 B1 FR3120700 B1 FR 3120700B1
Authority
FR
France
Prior art keywords
gyrometers
realization
high quality
force sensors
bending vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2102248A
Other languages
English (en)
Other versions
FR3120700A1 (fr
Inventor
Traon Olivier Le
Raphaël Levy
Jean Guerard
Thomas Perrier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR2102248A priority Critical patent/FR3120700B1/fr
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to JP2023555321A priority patent/JP2024510190A/ja
Priority to US18/546,396 priority patent/US20240133691A1/en
Priority to EP22712960.8A priority patent/EP4305752A1/fr
Priority to CN202280018803.2A priority patent/CN117044104A/zh
Priority to PCT/FR2022/050381 priority patent/WO2022189734A1/fr
Priority to CA3211041A priority patent/CA3211041A1/fr
Publication of FR3120700A1 publication Critical patent/FR3120700A1/fr
Application granted granted Critical
Publication of FR3120700B1 publication Critical patent/FR3120700B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • G01L5/042—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands by measuring vibrational characteristics of the flexible member
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/045—Oscillators acting by spring tension with oscillating blade springs
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H03H2009/02307—Dog-bone-like structure, i.e. the elongated part of the "bone" is doubly clamped
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/0233—Vibrating means comprising perforations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)

Abstract

Un résonateur est adapté pour réduire ou supprimer une force qui est transmise par une portion vibrante du résonateur à une partie de support (Pf). Pour cela, la portion vibrante comporte deux extensions (P1, P2) qui ont chacune une forme de méandre, de sorte que deux segments de chaque extension aient des composantes respectives de vitesse qui sont orientées en sens inverses. Un tel résonateur, qui est équilibré, peut être utilisé avantageusement au sein d’un gyromètre ou d’un capteur de force.Figure d’abrégé : Figure 4a
FR2102248A 2021-03-10 2021-03-10 Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres Active FR3120700B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR2102248A FR3120700B1 (fr) 2021-03-10 2021-03-10 Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres
US18/546,396 US20240133691A1 (en) 2021-03-10 2022-03-03 High-quality-factor flexural-vibration resonator for producing time references, force sensors or gyrometers
EP22712960.8A EP4305752A1 (fr) 2021-03-10 2022-03-03 Résonateur en vibration de flexion à haut facteur de qualité pour la réalisation de références de temps, de capteurs de force ou de gyromètres
CN202280018803.2A CN117044104A (zh) 2021-03-10 2022-03-03 用于产生时间参考的高质量因数挠曲振动谐振器、力传感器或陀螺测试仪
JP2023555321A JP2024510190A (ja) 2021-03-10 2022-03-03 時間基準、力センサまたはジャイロメータを製造するための高品質係数の屈曲振動共振子
PCT/FR2022/050381 WO2022189734A1 (fr) 2021-03-10 2022-03-03 Résonateur en vibration de flexion à haut facteur de qualité pour la réalisation de références de temps, de capteurs de force ou de gyromètres
CA3211041A CA3211041A1 (fr) 2021-03-10 2022-03-03 Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2102248A FR3120700B1 (fr) 2021-03-10 2021-03-10 Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres
FR2102248 2021-03-10

Publications (2)

Publication Number Publication Date
FR3120700A1 FR3120700A1 (fr) 2022-09-16
FR3120700B1 true FR3120700B1 (fr) 2023-02-10

Family

ID=80225739

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2102248A Active FR3120700B1 (fr) 2021-03-10 2021-03-10 Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres

Country Status (7)

Country Link
US (1) US20240133691A1 (fr)
EP (1) EP4305752A1 (fr)
JP (1) JP2024510190A (fr)
CN (1) CN117044104A (fr)
CA (1) CA3211041A1 (fr)
FR (1) FR3120700B1 (fr)
WO (1) WO2022189734A1 (fr)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR841587A (fr) 1938-01-25 1939-05-23 étau de précision à mors réglables
US3683213A (en) 1971-03-09 1972-08-08 Statek Corp Microresonator of tuning fork configuration
US4215570A (en) 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
US4524619A (en) 1984-01-23 1985-06-25 Piezoelectric Technology Investors, Limited Vibratory angular rate sensor system
FR2739190B1 (fr) 1995-09-26 1997-11-28 Onera (Off Nat Aerospatiale) Transducteur monolithique d'acceleration
US6437483B2 (en) * 1996-11-26 2002-08-20 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
FR2789171B1 (fr) 1999-02-01 2001-03-02 Onera (Off Nat Aerospatiale) Structure monolithique de gyrometre vibrant
FR2805344B1 (fr) 2000-02-22 2002-04-05 Onera (Off Nat Aerospatiale) Transducteur de force a vibration de flexion
JP4082508B2 (ja) 2003-08-20 2008-04-30 株式会社河本建築事務所 石炭灰コンクリートの製造方法および石炭灰使用の舗装構造の製造方法
FR2944102B1 (fr) 2009-04-03 2011-06-10 Onera (Off Nat Aerospatiale) Element vibrant sur deux modes decouples et application a un gyrometre vibrant.
FR2954489B1 (fr) 2009-12-23 2014-08-01 Onera (Off Nat Aerospatiale) Electrodes et circuits electroniques associes pour gyrometre vibrant pizoelectrique
US9923545B2 (en) * 2014-10-22 2018-03-20 Microchip Technology Incorporated Compound spring MEMS resonators for frequency and timing generation
FI130145B (en) * 2019-04-15 2023-03-13 Tikitin Oy MICROELECTROMECHANICAL RESONATOR

Also Published As

Publication number Publication date
WO2022189734A1 (fr) 2022-09-15
FR3120700A1 (fr) 2022-09-16
JP2024510190A (ja) 2024-03-06
CA3211041A1 (fr) 2022-09-15
US20240133691A1 (en) 2024-04-25
EP4305752A1 (fr) 2024-01-17
CN117044104A (zh) 2023-11-10

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