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FR3109466B1 - Dispositif de support d’une puce électronique et procédé de fabrication correspondant - Google Patents

Dispositif de support d’une puce électronique et procédé de fabrication correspondant Download PDF

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Publication number
FR3109466B1
FR3109466B1 FR2003845A FR2003845A FR3109466B1 FR 3109466 B1 FR3109466 B1 FR 3109466B1 FR 2003845 A FR2003845 A FR 2003845A FR 2003845 A FR2003845 A FR 2003845A FR 3109466 B1 FR3109466 B1 FR 3109466B1
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FR
France
Prior art keywords
electronic chip
supporting
mounting face
support substrate
corresponding manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2003845A
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English (en)
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FR3109466A1 (fr
Inventor
Fabien Quercia
Jean-Michel Riviere
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Grenoble 2 SAS
Original Assignee
STMicroelectronics Grenoble 2 SAS
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Filing date
Publication date
Application filed by STMicroelectronics Grenoble 2 SAS filed Critical STMicroelectronics Grenoble 2 SAS
Priority to FR2003845A priority Critical patent/FR3109466B1/fr
Priority to US17/229,710 priority patent/US11916353B2/en
Publication of FR3109466A1 publication Critical patent/FR3109466A1/fr
Priority to US18/408,149 priority patent/US20240146019A1/en
Application granted granted Critical
Publication of FR3109466B1 publication Critical patent/FR3109466B1/fr
Active legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0233—Mounting configuration of laser chips
    • H01S5/02345—Wire-bonding
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Die Bonding (AREA)
  • Led Device Packages (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Dispositif électronique (DIS) comprenant un substrat de support (SS) comportant une face de montage (FM) et une puce électronique (PE) comportant une face arrière (FAR) collée sur la face de montage (FM) par un volume de colle (C), dans lequel le substrat de support (SS) comprend une pluralité d’éléments de calage (EC1A) faisant saillie sur la face de montage (FM) de façon à maintenir la puce en appui sur des zones de contact des éléments de calage (EC1A) dans une position parallèle à la face de montage (FM) du substrat de support (SS). Figure pour l’abrégé : Fig 1A
FR2003845A 2020-04-16 2020-04-16 Dispositif de support d’une puce électronique et procédé de fabrication correspondant Active FR3109466B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2003845A FR3109466B1 (fr) 2020-04-16 2020-04-16 Dispositif de support d’une puce électronique et procédé de fabrication correspondant
US17/229,710 US11916353B2 (en) 2020-04-16 2021-04-13 Electronic chip support device and corresponding manufacturing method
US18/408,149 US20240146019A1 (en) 2020-04-16 2024-01-09 Electronic chip support device and corresponding manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2003845A FR3109466B1 (fr) 2020-04-16 2020-04-16 Dispositif de support d’une puce électronique et procédé de fabrication correspondant
FR2003845 2020-04-16

Publications (2)

Publication Number Publication Date
FR3109466A1 FR3109466A1 (fr) 2021-10-22
FR3109466B1 true FR3109466B1 (fr) 2024-05-17

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FR2003845A Active FR3109466B1 (fr) 2020-04-16 2020-04-16 Dispositif de support d’une puce électronique et procédé de fabrication correspondant

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US (2) US11916353B2 (fr)
FR (1) FR3109466B1 (fr)

Family Cites Families (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58207645A (ja) 1982-05-28 1983-12-03 Fujitsu Ltd 半導体装置
JPH02146757A (ja) 1988-11-28 1990-06-05 Mitsubishi Electric Corp 半導体装置
JPH03149864A (ja) 1989-11-07 1991-06-26 Matsushita Electron Corp リードフレーム
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