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FR3037652B1 - Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication - Google Patents

Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication Download PDF

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Publication number
FR3037652B1
FR3037652B1 FR1555605A FR1555605A FR3037652B1 FR 3037652 B1 FR3037652 B1 FR 3037652B1 FR 1555605 A FR1555605 A FR 1555605A FR 1555605 A FR1555605 A FR 1555605A FR 3037652 B1 FR3037652 B1 FR 3037652B1
Authority
FR
France
Prior art keywords
pirani
manufacture
design
effect
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1555605A
Other languages
English (en)
Other versions
FR3037652A1 (fr
Inventor
Philippe Lecoeur
Elie Lefeuvre
Guillaume Agnus
Ruben Guerrero
David Le Bourdais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Paris Saclay
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Paris Sud
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Paris Sud filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1555605A priority Critical patent/FR3037652B1/fr
Priority to PCT/EP2016/064047 priority patent/WO2016202998A1/fr
Publication of FR3037652A1 publication Critical patent/FR3037652A1/fr
Application granted granted Critical
Publication of FR3037652B1 publication Critical patent/FR3037652B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR1555605A 2015-06-18 2015-06-18 Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication Expired - Fee Related FR3037652B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1555605A FR3037652B1 (fr) 2015-06-18 2015-06-18 Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication
PCT/EP2016/064047 WO2016202998A1 (fr) 2015-06-18 2016-06-17 Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1555605A FR3037652B1 (fr) 2015-06-18 2015-06-18 Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication
FR1555605 2015-06-18

Publications (2)

Publication Number Publication Date
FR3037652A1 FR3037652A1 (fr) 2016-12-23
FR3037652B1 true FR3037652B1 (fr) 2018-07-13

Family

ID=55072751

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555605A Expired - Fee Related FR3037652B1 (fr) 2015-06-18 2015-06-18 Capteur de pression atmospherique par effet pirani, et procede de conception et fabrication

Country Status (2)

Country Link
FR (1) FR3037652B1 (fr)
WO (1) WO2016202998A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2736736C1 (ru) * 2019-09-17 2020-11-19 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Датчик аэрометрических давлений

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107014551A (zh) * 2017-06-01 2017-08-04 东南大学 一种利用热电阻原理的压力传感器及其工作方法
CN107966226B (zh) * 2017-11-23 2020-09-11 蚌埠市勇创机械电子有限公司 一种双标校正型压力传感器
CN116036973B (zh) * 2023-04-03 2023-06-09 汕头市印得好科技有限公司 基于原料特性转速自调整的胶印油墨分散装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1455623A (fr) 1965-11-25 1966-04-01 Procédé d'exploitation d'une bobineuse automatique, plus particulièrement d'une bobineuse automatique à fil croisé
US6860153B2 (en) 2000-02-22 2005-03-01 Simon Fraser University Gas pressure sensor based on short-distance heat conduction and method for fabricating same
EP1772717B1 (fr) * 2005-10-04 2011-05-11 Sensirion Holding AG Capteur de pression ou capteur de gaz et méthode de mesure utilisant des nanopores
EP2637007B1 (fr) * 2012-03-08 2020-01-22 ams international AG Capteur de pression capacitif MEMS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2736736C1 (ru) * 2019-09-17 2020-11-19 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Датчик аэрометрических давлений

Also Published As

Publication number Publication date
WO2016202998A1 (fr) 2016-12-22
FR3037652A1 (fr) 2016-12-23

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20161223

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

TQ Partial transmission of property

Owner name: UNIVERSITE PARIS-SACLAY, FR

Effective date: 20220224

Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR

Effective date: 20220224

ST Notification of lapse

Effective date: 20230205