FR2924232A1 - SUBSTRATE EQUIPPED WITH A THERMAL PROPERTY STACK - Google Patents
SUBSTRATE EQUIPPED WITH A THERMAL PROPERTY STACK Download PDFInfo
- Publication number
- FR2924232A1 FR2924232A1 FR0759223A FR0759223A FR2924232A1 FR 2924232 A1 FR2924232 A1 FR 2924232A1 FR 0759223 A FR0759223 A FR 0759223A FR 0759223 A FR0759223 A FR 0759223A FR 2924232 A1 FR2924232 A1 FR 2924232A1
- Authority
- FR
- France
- Prior art keywords
- substrate
- stack
- layer
- coating
- torr
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 97
- 239000010410 layer Substances 0.000 claims abstract description 130
- 238000000576 coating method Methods 0.000 claims abstract description 90
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 79
- 239000011248 coating agent Substances 0.000 claims abstract description 76
- 239000002346 layers by function Substances 0.000 claims abstract description 50
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 41
- 230000008021 deposition Effects 0.000 claims abstract description 25
- 239000006117 anti-reflective coating Substances 0.000 claims abstract description 17
- 239000011521 glass Substances 0.000 claims abstract description 15
- 239000004332 silver Substances 0.000 claims abstract description 15
- 229910052709 silver Inorganic materials 0.000 claims abstract description 14
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910001092 metal group alloy Inorganic materials 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 56
- 238000000151 deposition Methods 0.000 claims description 25
- 230000005540 biological transmission Effects 0.000 claims description 23
- 238000005452 bending Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 238000010791 quenching Methods 0.000 claims description 11
- 230000000171 quenching effect Effects 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 9
- 229910001120 nichrome Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910003087 TiOx Inorganic materials 0.000 claims description 4
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910001000 nickel titanium Inorganic materials 0.000 claims description 3
- 238000005478 sputtering type Methods 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 20
- 230000003287 optical effect Effects 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000003086 colorant Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005496 tempering Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 238000007705 chemical test Methods 0.000 description 2
- 239000005038 ethylene vinyl acetate Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 101150067361 Aars1 gene Proteins 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000009964 serging Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
- G02B1/116—Multilayers including electrically conducting layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Laminated Bodies (AREA)
Abstract
L'invention se rapporte Ă un substrat (10) verrier muni sur une face principale d'un empilement de couches minces comportant une couche fonctionnelle (40) mĂ©tallique Ă propriĂ©tĂ©s de rĂ©flexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment Ă base d'argent ou d'alliage mĂ©tallique contenant de l'argent, et deux revĂȘtements antireflet (20, 60), lesdits revĂȘtements comportant chacun au moins une couche diĂ©lectrique (24, 64) Ă base de nitrure de silicium, ladite couche fonctionnelle (40) Ă©tant disposĂ©e entre les deux revĂȘtements antireflet (20, 60), la couche fonctionnelle (40) Ă©tant dĂ©posĂ©e directement sur un revĂȘtement de sous-blocage (30) disposĂ© entre la couche fonctionnelle (40) et le revĂȘtement antireflet (20) sous-jacent et la couche fonctionnelle (40) Ă©tant dĂ©posĂ©e directement sous un revĂȘtement de sur-blocage (50) disposĂ© entre la couche fonctionnelle (40) et le revĂȘtement antireflet (60) susjacent, caractĂ©risĂ© en ce que pour que ledit substrat soit bombable et/ou trempable aprĂšs le dĂ©pĂŽt de l'empilement de couches minces, l'empilement comporte une couche fine Ă base de nickel dans le revĂȘtement de sous-blocage (30) et/ou dans le revĂȘtement de sur-blocage (50), ladite couche fine Ă base de nickel Ă©tant dĂ©posĂ©e Ă une haute pression de vide, Ă©gale ou supĂ©rieure Ă 2.10<-3> Torr, et de prĂ©fĂ©rence comprise entre 2,5.10<-3> Torr et 5.10<-3> Torr.The invention relates to a glass substrate (10) provided on a main face with a stack of thin layers comprising a functional metallic layer (40) with reflection properties in the infrared and / or in solar radiation, in particular at base of silver or a metal alloy containing silver, and two anti-reflective coatings (20, 60), said coatings each comprising at least one dielectric layer (24, 64) based on silicon nitride, said functional layer ( 40) being disposed between the two anti-reflective coatings (20, 60), the functional layer (40) being deposited directly on a sub-blocking coating (30) disposed between the functional layer (40) and the anti-reflective coating (20) under -jacent and the functional layer (40) being deposited directly under an over-blocking coating (50) disposed between the functional layer (40) and the overlying antireflection coating (60), characterized in that for said substrate to be bendable and / or tr stackable after the deposition of the stack of thin layers, the stack comprises a thin nickel-based layer in the underblocking coating (30) and / or in the overblocking coating (50), said thin layer nickel-based being deposited at a high vacuum pressure, equal to or greater than 2.10 <-3> Torr, and preferably between 2.5.10 <-3> Torr and 5.10 <-3> Torr.
Description
SUBSTRAT MUNI D'UN EMPILEMENT A PROPRIETES THERMIQUES SUBSTRATE EQUIPPED WITH A THERMAL PROPERTY STACK
L'invention concerne un substrat transparent en matĂ©riau rigide minĂ©ral comme le verre, ledit substrat Ă©tant revĂȘtu d'un empilement de couches minces comprenant une couche fonctionnelle de type mĂ©tallique pouvant agir sur le rayonnement solaire et/ou le rayonnement infrarouge de grande longueur d'onde. L'invention concerne plus particuliĂšrement l'utilisation de tels substrats pour fabriquer des vitrages d'isolation thermique et/ou de protection solaire. Ces vitrages peuvent ĂȘtre destinĂ©s aussi bien Ă Ă©quiper les bĂątiments que les vĂ©hicules, en vue notamment de diminuer l'effort de climatisation et/ou d'empĂȘcher une surchauffe excessive (vitrages dits de contrĂŽle solaire ) et/ou diminuer la quantitĂ© d'Ă©nergie dissipĂ©e vers l'extĂ©rieur (vitrages dits bas Ă©missifs ) entraĂźnĂ©s par l'importance toujours croissante des surfaces vitrĂ©es dans les bĂątiments et les habitacles de vĂ©hicules. Ces vitrages peuvent par ailleurs ĂȘtre intĂ©grĂ©s dans des vitrages prĂ©sentant des fonctionnalitĂ©s particuliĂšres, comme par exemple des vitrages chauffants ou des vitrages Ă©lectrochromes. The invention relates to a transparent substrate made of a rigid mineral material such as glass, said substrate being coated with a stack of thin layers comprising a functional layer of metallic type capable of acting on solar radiation and / or infrared radiation of great length. wave. The invention relates more particularly to the use of such substrates for manufacturing thermal insulation and / or solar protection glazing. These glazing can be intended both to equip buildings and vehicles, in particular with a view to reducing the air conditioning effort and / or preventing excessive overheating (so-called solar control glazing) and / or reducing the quantity of energy. dissipated to the outside (so-called low-emissive glazing) caused by the ever-increasing importance of glazed surfaces in buildings and vehicle interiors. These glazings can moreover be integrated into glazings having particular functionalities, such as, for example, heated glazing or electrochromic glazing.
Un type d'empilement de couches connu pour conférer aux substrats de telles propriétés est constitué d'une couche métallique fonctionnelle à propriétés de réflexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment une couche fonctionnelle métallique à base d'argent ou d'alliage métallique contenant de l'argent. A type of stack of layers known to give substrates such properties consists of a functional metallic layer with reflection properties in the infrared and / or in solar radiation, in particular a metallic functional layer based on silver or metal alloy containing silver.
Le type d'empilement connu auquel se rapporte l'invention est appelĂ© empilement Ă sous et sur bloqueur car il prĂ©sente la structure suivante, dans cet ordre : Substrat / revĂȘtement antireflet sous-jacent / revĂȘtement sous-bloqueur / couche mĂ©tallique fonctionnelle / revĂȘtement sur-bloqueur / revĂȘtement 30 antireflet sus-jacent + Ă©ventuellement une couche de protection. -2- La couche fonctionnelle se trouve ainsi disposĂ©e entre deux revĂȘtements antireflets comportant chacun en gĂ©nĂ©ral une seule couche qui est en un matĂ©riau diĂ©lectrique du type nitrure de silicium. Le but de ces revĂȘtements qui encadrent la couche fonctionnelle mĂ©tallique est d'antireflĂ©ter cette couche fonctionnelle mĂ©tallique. Un revĂȘtement de blocage est toutefois intercalĂ© entre chaque revĂȘtement antireflet et la couche mĂ©tallique fonctionnelle. Le revĂȘtement de blocage disposĂ© sous la couche fonctionnelle en direction du substrat favorise la croissance cristalline de cette couche et la protĂšge lors d'un Ă©ventuel traitement thermique Ă haute tempĂ©rature, du type bombage et/ou trempe. Le revĂȘtement de blocage disposĂ© sur la couche fonctionnelle Ă l'opposĂ© du substrat protĂšge cette couche d'une Ă©ventuelle dĂ©gradation lors du dĂ©pĂŽt du revĂȘtement antireflet supĂ©rieur et lors d'un Ă©ventuel traitement thermique Ă haute tempĂ©rature, du type bombage et/ou trempe. La prĂ©sente invention vise plus prĂ©cisĂ©ment un empilement du type de celui prĂ©sentĂ© ci-avant qui rĂ©siste bien au traitement thermique de bombage et/ou trempe appliquĂ© aux substrats verriers pour permettre de les bomber et/ou de les tremper. The known type of stack to which the invention relates is referred to as a slot and blocker stack because it has the following structure, in this order: Substrate / underlying anti-reflective coating / sub-blocker coating / functional metal layer / coating on -blocker / overlying anti-reflective coating + optionally a protective layer. -2- The functional layer is thus placed between two antireflection coatings each generally comprising a single layer which is made of a dielectric material of the silicon nitride type. The purpose of these coatings which surround the metallic functional layer is to antireflect this metallic functional layer. However, a blocking coating is interposed between each anti-reflective coating and the functional metal layer. The blocking coating placed under the functional layer in the direction of the substrate promotes the crystal growth of this layer and protects it during any heat treatment at high temperature, of the bending and / or tempering type. The blocking coating placed on the functional layer opposite the substrate protects this layer from possible degradation during the deposition of the upper antireflection coating and during a possible high temperature heat treatment, of the bending and / or toughening type. The present invention relates more specifically to a stack of the type of that presented above which is resistant to the heat treatment of bending and / or toughening applied to the glass substrates in order to allow them to be bulged and / or to be soaked.
L'homme du mĂ©tier distingue deux catĂ©gories d'empilements rĂ©sistant au traitement thermique (ou supportant un traitement thermique) de bombage et/ou trempe : 1- les empilements dits Ă tremper qui ne prĂ©sentent pas avant le traitement thermique les caractĂ©ristiques souhaitĂ©es et attendues, en particulier de transmission lumineuse, de couleur, de rĂ©sistivitĂ©, ... et qui les acquiĂšrent lors de ce traitement thermique ; les substrats revĂȘtus de ce type d'empilement ne sont donc pas utilisables en tant que tels par l'utilisateur final (lors du conditionnement des substrats pour former des vitrages par exemple), mais seulement aprĂšs avoir subi un traitement thermique ; 2- les empilements dits bombables et/ou trempables qui prĂ©sentent avant le traitement thermique des caractĂ©ristiques acceptables et -3- qui prĂ©sentent aprĂšs traitement thermique des caractĂ©ristiques similaires ou quasi-identiques, c'est-Ă -dire qui prĂ©sentent des variations de caractĂ©ristiques au traitement thermique qui sont acceptables et telles qu'il sera difficile pour un observateur de distinguer par observation visuelle des substrats revĂȘtus de l'empilement qui ont subi un traitement thermique des substrats revĂȘtus du mĂȘme empilement qui n'ont pas subi de traitement thermique. Il n'est pas possible pour l'homme du mĂ©tier de dĂ©finir plus prĂ©cisĂ©ment ces deux catĂ©gories car par exemple un empilement Ă tremper peut prĂ©senter une variation de transmission lumineuse dans le visible au traitement thermique aussi faible qu'un empilement trempable mais prĂ©senter par exemple une plus forte variation de rĂ©flexion lumineuse dans le visible ou une plus forte variation de couleur. Toutefois les documents de l'art antĂ©rieur et les documentations techniques des verriers font bien cette distinction et la prĂ©sente invention ne 15 s'intĂ©resse qu'Ă la deuxiĂšme catĂ©gorie d'empilement, les empilements bombables et/ou trempables . L'invention s'applique ainsi aux substrats dits trempables dans la mesure oĂč il est difficile de distinguer sur une mĂȘme façade de bĂątiment par exemple prĂ©sentant Ă proximitĂ© les uns des autres des vitrages intĂ©grant des 20 substrats Ă empilement de couches minces trempĂ©s aprĂšs le dĂ©pĂŽt des couches et des substrats avec le mĂȘme empilement de couches minces non trempĂ©s, par une simple observation visuelle globale des vitrages intĂ©grant en particulier la transmission lumineuse dans le visible, la couleur en rĂ©flexion et la rĂ©flexion lumineuse dans le visible du vitrage. 25 Pour l'homme du mĂ©tier, il existe des empilements qui ne supportent aucun traitement thermique. Il est ainsi connu de la demande de brevet europĂ©en N ° EP 567 735, un empilement du type prĂ©sentĂ© ci-avant en termes de structure d'empilement 30 qui ne peut pas subir un traitement thermique. -4- Dans ce document EP 567 735 il est expliquĂ© qu'il est important que chaque revĂȘtement de blocage, Ă base de nickel, prĂ©sente une Ă©paisseur infĂ©rieure Ă 0,7 nanomĂštre. Il est aussi connu de la demande de brevet europĂ©en N ° EP 646 551, un empilement du mĂȘme type (mĂȘme succession de couche, mĂȘme matĂ©riau pour chaque couche) qui, lui, peut subir un traitement thermique ; il s'agit d'un empilement Ă tremper car il prĂ©sente de fortes variations, en particuliers optiques, lors du traitement thermique de bombage ou trempe. Il est expliquĂ© dans le document EP 646 551 que la solution du document prĂ©cĂ©dant (EP 567 735) ne peut pas subir de traitement thermique vraisemblablement parce que l'Ă©paisseur de chaque revĂȘtement de blocage n'est pas suffisante pour protĂ©ger correctement la couche mĂ©tallique fonctionnelle Ă base d'argent. Le document EP 646 551 prĂ©conise ainsi indirectement, pour rĂ©aliser un empilement du mĂȘme type mais qui supporte le traitement thermique, que le revĂȘtement de sous-blocage soit vraiment plus Ă©pais (de prĂ©fĂ©rence 2 Ă 4 fois l'Ă©paisseur du revĂȘtement de sur-blocage) et il expose en particulier qu'il est prĂ©fĂ©rable que ce revĂȘtement de sous-blocage prĂ©sente une Ă©paisseur supĂ©rieure Ă 2 nm et conseille une Ă©paisseur d'environ 4,5 nm. A person skilled in the art distinguishes two categories of stacks resistant to the heat treatment (or supporting a heat treatment) of bending and / or tempering: 1- the so-called toughening stacks which do not exhibit the desired and expected characteristics before the heat treatment, in particular of light transmission, color, resistivity, etc. and which acquire them during this heat treatment; the substrates coated with this type of stack cannot therefore be used as such by the end user (when conditioning the substrates to form glazing, for example), but only after having undergone a heat treatment; 2- the so-called bendable and / or hardenable stacks which have acceptable characteristics before the heat treatment and -3- which after heat treatment have similar or almost identical characteristics, that is to say which have variations in characteristics at heat treatments which are acceptable and such that it will be difficult for an observer to distinguish by visual observation coated substrates of the stack which have undergone heat treatment from substrates coated with the same stack which have not undergone heat treatment. It is not possible for those skilled in the art to define these two categories more precisely because, for example, a dipping stack may exhibit a variation in light transmission in the visible to heat treatment as low as a quenching stack but for example a greater variation in light reflection in the visible or a greater variation in color. However, the documents of the prior art and the technical documentations of glassmakers clearly make this distinction and the present invention is only concerned with the second category of stacking, bending and / or hardenable stacks. The invention thus applies to so-called hardenable substrates insofar as it is difficult to distinguish, on the same building facade, for example having glazings in proximity to one another integrating substrates with a stack of thin layers soaked after deposition. layers and substrates with the same stack of unhardened thin layers, by a simple global visual observation of the glazing integrating in particular the light transmission in the visible, the color in reflection and the light reflection in the visible part of the glazing. For those skilled in the art, there are stacks which do not withstand any heat treatment. It is thus known from European patent application No. EP 567 735, a stack of the type presented above in terms of stack structure 30 which cannot undergo heat treatment. -4- In this document EP 567 735 it is explained that it is important for each nickel-based blocking coating to have a thickness of less than 0.7 nanometers. It is also known from European patent application No. EP 646 551, a stack of the same type (same succession of layer, same material for each layer) which, for its part, can undergo heat treatment; it is a stack to be quenched because it exhibits strong variations, in particular optical variations, during the heat treatment of bending or quenching. It is explained in document EP 646 551 that the solution of the preceding document (EP 567 735) cannot undergo heat treatment, probably because the thickness of each blocking coating is not sufficient to properly protect the functional metal layer. silver-based. Document EP 646 551 thus indirectly recommends, in order to produce a stack of the same type but which withstands the heat treatment, that the underblocking coating be really thicker (preferably 2 to 4 times the thickness of the overblocking coating ) and he states in particular that it is preferable that this underblocking coating has a thickness greater than 2 nm and advises a thickness of about 4.5 nm.
D'ailleurs, l'invention objet du EP 646 551 est comparée à un empilement Standard dont les caractéristiques optiques et thermiques sont acceptables et présentant sous la couche fonctionnelle métallique une couche de bloqueur d'une épaisseur de 0,7 nm déposée sous une pression de 2.10-3 Torr et dont il est dit qu'il ne supporte aucun traitement thermique. Moreover, the invention which is the subject of EP 646 551 is compared with a Standard stack whose optical and thermal characteristics are acceptable and which has, under the metallic functional layer, a blocker layer with a thickness of 0.7 nm deposited under a pressure. of 2.10-3 Torr and which it is said that it does not withstand any heat treatment.
Il est expliquĂ© que cette Ă©paisseur est insuffisante et engendre des trous dans la couche mĂ©tallique fonctionnelle lors du traitement thermique. Il est important de noter que cette Ă©paisseur du revĂȘtement de sous-blocage Ă base de nickel du Standard de EP 646 551 est identique Ă celle de l'empilement de EP 567 735, soit 0,7 nm pour chacun des revĂȘtements de sous et sur-blocage. Dans EP 567 735, la pression de dĂ©pĂŽt dans la chambre de dĂ©pĂŽt du revĂȘtement de sous-blocage Ă base de nickel n'est pas connue, mais -5- dans EP 646 551 le revĂȘtement de sous-blocage Ă base de nickel est dĂ©posĂ© Ă trĂšs faible pression (1,5.10-3 Torr) et il est dit dans ce document que l'empilement du EP 567 735 est reproduit dans les mĂȘmes conditions que l'empilement Ă tremper de l'invention. It is explained that this thickness is insufficient and generates holes in the functional metal layer during the heat treatment. It is important to note that this thickness of the nickel-based subblocking coating of the Standard of EP 646 551 is identical to that of the stack of EP 567 735, i.e. 0.7 nm for each of the under and over coatings. -blocking. In EP 567 735 the deposition pressure in the deposition chamber of the nickel-based underblocking coating is not known, but in EP 646,551 the nickel-based subblocking coating is deposited. at very low pressure (1.5.10-3 Torr) and it is stated in this document that the stack of EP 567 735 is reproduced under the same conditions as the stack to be soaked of the invention.
Il a Ă©tĂ© dĂ©couvert que d'une maniĂšre surprenante, il est possible de rendre cet empilement standard capable de subir un traitement thermique, c'est-Ă -dire de rendre l'empilement Ă tremper alors mĂȘme que l'Ă©paisseur du revĂȘtement de sous-blocage reste faible, notamment supĂ©rieure Ă 0,7 nm, et en tout cas bien infĂ©rieure Ă 2 nm. It has been discovered that, surprisingly, it is possible to make this standard stack capable of undergoing heat treatment, that is to say of making the stack to be soaked even when the thickness of the coating is under. -blocking remains low, in particular greater than 0.7 nm, and in any case much less than 2 nm.
Non seulement l'empilement peut alors subir un traitement thermique mais en outre, la variation de ces propriĂ©tĂ©s essentielles est si faible qu'il est mĂȘme possible de le rendre trempable . Not only can the stack then undergo a heat treatment, but in addition, the variation of these essential properties is so small that it is even possible to make it hardenable.
Le but de l'invention est de parvenir Ă remĂ©dier aux inconvĂ©nients de l'art antĂ©rieur, en mettant au point un nouveau type d'empilement de couches du type de ceux dĂ©crits prĂ©cĂ©demment, empilement qui prĂ©sente une faible rĂ©sistance par carrĂ©, une transmission lumineuse Ă©levĂ©e et une couleur relativement neutre, en particulier en rĂ©flexion cĂŽtĂ© couches, et que ces propriĂ©tĂ©s soient conservĂ©es dans une plage restreinte que l'empilement subisse ou non, un (ou des) traitement(s) thermique(s) Ă haute tempĂ©rature du type bombage et/ou trempe et/ou recuit. L'invention a ainsi pour objet, dans son acception la plus large, un substrat verrier muni sur une face principale d'un empilement de couches minces comportant une couche fonctionnelle mĂ©tallique Ă propriĂ©tĂ©s de rĂ©flexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment Ă base d'argent ou d'alliage mĂ©tallique contenant de l'argent, et deux revĂȘtements antireflet, lesdits revĂȘtements comportant chacun au moins une couche diĂ©lectrique Ă base de nitrure de silicium, ladite couche fonctionnelle Ă©tant disposĂ©e entre les deux revĂȘtements antireflet, la couche fonctionnelle etant dĂ©posĂ©e directement sur un revĂȘtement de sous-blocage dispose entre la couche fonctionnelle et le revĂȘtement antireflet sous-jacent et la couche -6- fonctionnelle Ă©tant dĂ©posĂ©e directement sous un revĂȘtement de sur-blocage disposĂ© entre la couche fonctionnelle et le revĂȘtement antireflet sus-jacent, caractĂ©risĂ© en ce que pour que ledit substrat soit bombable et/ou trempable aprĂšs le dĂ©pĂŽt de l'empilement de couches minces, l'empilement comporte une couche fine Ă base de nickel dans le revĂȘtement de sous-blocage (30) et/ou dans le revĂȘtement de sur-blocage (50), ladite couche fine Ă base de nickel Ă©tant dĂ©posĂ©e Ă une haute pression de vide, Ă©gale ou supĂ©rieure Ă 2.10-Torr, et de prĂ©fĂ©rence comprise entre 2,5.10-3 Torr et 5.10-3 Torr. L'invention consiste ainsi Ă permettre de fabriquer un empilement Ă tremper , Ă partir d'un empilement Standard, du type de l'empilement Standard du EP 646 551, qui ne supporte pas de traitement thermique, avec une lĂ©gĂšre augmentation des Ă©paisseurs des couches des revĂȘtements de blocage et en particulier de l'Ă©paisseur du revĂȘtement de sous-blocage. Cet avantage est tel qu'il devient possible de concevoir un empilement du type de l'empilement Standard qui est trempable , c'est-Ă -dire dont les caractĂ©ristiques et en particulier les caractĂ©ristiques optiques essentielles, restent quasiment inchangĂ©es lors du traitement thermique. Au sens de la prĂ©sente invention lorsqu'il est prĂ©cisĂ© qu'un dĂ©pĂŽt de couche ou de revĂȘtement (comportant une ou plusieurs couches) est effectuĂ© directement sous ou directement sur un autre dĂ©pĂŽt, c'est qu'il ne peut y avoir interposition d'aucune couche entre ces deux dĂ©pĂŽts. La couche Ă base de nitrure de silicium du revĂȘtement antireflet sous-jacent, est au contact du substrat, directement ou indirectement par l'intermĂ©diaire d'une couche de contact par exemple Ă base d'oxyde de titane (TiO2). L'indice de cette couche Ă base de nitrure est, de prĂ©fĂ©rence, infĂ©rieur ou Ă©gal Ă 2,3, alors que celui de la couche de contact est, de prĂ©fĂ©rence supĂ©rieur Ă 2,3. La couche Ă base de nitrure de silicium est constituĂ©e de prĂ©fĂ©rence de 30 Si3N4. Bien que la formule prĂ©cĂ©dente constitue la stoechiomĂ©trie visĂ©e, il -7- n'est pas exclu que cette stoechiomĂ©trie ne soit pas tout Ă fait atteinte dans la couche finalement dĂ©posĂ©e. La ou chaque couche fine Ă base de nickel prĂ©sentant, de prĂ©fĂ©rence, une Ă©paisseur e telle que 1,5 nm e 5 nm, et de prĂ©fĂ©rence encore 0,8 nm e 1,8 nm. Dans une variante particuliĂšre, la couche fine Ă base de nickel du revĂȘtement de sous-blocage et la couche fine Ă base de nickel du revĂȘtement de sur-blocage prĂ©sentent des Ă©paisseurs identiques ou quasi-identiques, i.e. : identiques Ă 0,2 nm prĂšs (Ă©paisseur physique). The aim of the invention is to overcome the drawbacks of the prior art, by developing a new type of stack of layers of the type of those described above, a stack which has a low resistance per square, a light transmission. high and a relatively neutral color, in particular in reflection on the layer side, and that these properties are kept within a restricted range whether the stack undergoes or not, one (or more) heat treatment (s) at high temperature of the type bending and / or tempering and / or annealing. The subject of the invention is thus, in its broadest sense, a glass substrate provided on a main face with a stack of thin layers comprising a metallic functional layer with reflection properties in the infrared and / or in solar radiation. , in particular based on silver or a metal alloy containing silver, and two antireflection coatings, said coatings each comprising at least one dielectric layer based on silicon nitride, said functional layer being arranged between the two antireflection coatings, the functional layer being deposited directly on an underblocking coating disposed between the functional layer and the underlying antireflection coating and the functional layer being deposited directly under an overblocking coating disposed between the functional layer and the coating overlying antireflection, characterized in that for said substrate to be bendable and / or hardenable after deposition of the stack t of thin layers, the stack comprises a thin nickel-based layer in the underblocking coating (30) and / or in the overblocking coating (50), said thin nickel-based layer being deposited at a high vacuum pressure, equal to or greater than 2.10-Torr, and preferably between 2.5.10-3 Torr and 5.10-3 Torr. The invention thus consists in making it possible to manufacture a stack to be soaked, from a Standard stack, of the type of the Standard stack of EP 646 551, which does not withstand heat treatment, with a slight increase in the thicknesses of the layers. blocking coatings and in particular the thickness of the underlocking coating. This advantage is such that it becomes possible to design a stack of the Standard stack type which is hardenable, that is to say whose characteristics and in particular the essential optical characteristics, remain virtually unchanged during the heat treatment. For the purposes of the present invention, when it is specified that a deposit of a layer or coating (comprising one or more layers) is carried out directly under or directly on another deposit, it means that there can be no interposition of 'no layer between these two deposits. The silicon nitride-based layer of the underlying antireflection coating is in contact with the substrate, directly or indirectly via a contact layer, for example based on titanium oxide (TiO2). The index of this nitride-based layer is preferably less than or equal to 2.3, while that of the contact layer is preferably greater than 2.3. The silicon nitride-based layer preferably consists of Si3N4. Although the preceding formula constitutes the target stoichiometry, it is not excluded that this stoichiometry is not completely achieved in the layer finally deposited. The or each thin nickel-based layer preferably having a thickness e such as 1.5 nm e 5 nm, and more preferably 0.8 nm e 1.8 nm. In a particular variant, the thin nickel-based layer of the underblocking coating and the thin nickel-based layer of the overblocking coating have identical or almost identical thicknesses, ie: identical to within 0.2 nm (physical thickness).
La couche fine Ă base de nickel du revĂȘtement de sous-blocage est, de prĂ©fĂ©rence, directement au contact de la couche fonctionnelle et la couche fine Ă base de nickel du revĂȘtement de sur-blocage est, de prĂ©fĂ©rence, directement au contact de la couche fonctionnelle. Il n'est pas exclu que le revĂȘtement de sous-blocage et/ou le revĂȘtement de sur-blocage contient (ou contiennent) d'autre(s) couche(s), mais alors, ces autres couches seront de prĂ©fĂ©rence plus Ă©loignĂ©es de la couche fonctionnelle que la couche fine Ă base de nickel. La couche fonctionnelle est, de prĂ©fĂ©rence, dĂ©posĂ©e Ă une haute pression de vide, Ă©gale ou supĂ©rieure Ă 2.10-3 Torr mais toutefois infĂ©rieure Ă 10-2 Torr, et de prĂ©fĂ©rence comprise entre 2,5.10-3 Torr et 5.10-3 Torr. En effet, la (ou les) couche(s) fine(s) Ă base de nickel et la couche fonctionnelle sont de prĂ©fĂ©rence dĂ©posĂ©es dans la mĂȘme atmosphĂšre, sous la mĂȘme pression. Dans une variante particuliĂšre, la haute pression de vide est comprise entre 3.10-3 Torr et 4,5.10-3 Torr, et est de prĂ©fĂ©rence de l'ordre de 3,5.10-3 Torr. De prĂ©fĂ©rence, la ou chaque couche fine Ă base de nickel comprend au moins 50 % en proportion atomique de Ni. Dans une version particuliĂšre, au moins une couche fine Ă base de nickel, 30 et notamment celle du revĂȘtement de sur-blocage, comprend du chrome, de prĂ©fĂ©rence dans des quantitĂ©s atomiques de 80 % de Ni et 20 % de Cr. -8- Dans cette version particuliĂšre, au moins une couche fine Ă base de nickel, et notamment celle du revĂȘtement de sur-blocage, est constituĂ©e d'un alliage de NiCr prĂ©sent sous forme mĂ©tallique si le substrat muni de l'empilement de couches minces n'a pas subi de traitement thermique de bombage et/ou trempe aprĂšs le dĂ©pĂŽt de l'empilement, ledit alliage Ă©tant au moins partiellement oxydĂ© si le substrat muni de l'empilement de couches minces a subi au moins un traitement thermique de bombage et/ou trempe aprĂšs le dĂ©pĂŽt de l'empilement. Dans une autre version particuliĂšre, au moins une couche fine Ă base de nickel, et notamment celle du revĂȘtement de sur-blocage, comprend du titane, de prĂ©fĂ©rence dans des quantitĂ©s atomiques de 80 % de Ni et 20 % de Ti. Dans cette autre version particuliĂšre, au moins une couche fine Ă base de nickel, et notamment celle du revĂȘtement de sur-blocage, est constituĂ©e d'un alliage de NiTi prĂ©sent sous forme mĂ©tallique si le substrat muni de l'empilement de couches minces n'a pas subi de traitement thermique de bombage et/ou trempe aprĂšs le dĂ©pĂŽt de l'empilement, ledit alliage Ă©tant au moins partiellement oxydĂ© si le substrat muni de l'empilement de couches minces a subi au moins un traitement thermique de bombage et/ou trempe aprĂšs le dĂ©pĂŽt de l'empilement. Le substrat comporte par ailleurs, de prĂ©fĂ©rence une derniĂšre couche ( overcoat en anglais), c'est-Ă -dire une couche de protection la plus Ă©loignĂ©e du substrat, Ă base d'oxyde, dĂ©posĂ©e de prĂ©fĂ©rence sous stoechiomĂ©trique, et notamment Ă base de TiOX (oĂč x est un nombre infĂ©rieur Ă 2). Cette couche se retrouve oxydĂ©e pour l'essentiel stoechiomĂ©triquement dans l'empilement aprĂšs le dĂ©pĂŽt. Cette couche de protection prĂ©sente, de prĂ©fĂ©rence, une Ă©paisseur comprise entre 1 et 10 nm. Les revĂȘtements antireflets disposĂ©s l'un au-dessous de la couche 30 fonctionnelle mĂ©tallique et l'autre au-dessus prĂ©sentent chacun une Ă©paisseur -9- physique comprise entre 10 et 50 nm et la ouche fonctionnelle mĂ©tallique prĂ©sente une Ă©paisseur physique comprise entre 5 et 20 nm. The nickel-based thin layer of the underblock coating is preferably directly in contact with the functional layer and the nickel-based thin layer of the overblock coating is preferably directly in contact with the layer. functional. It is not excluded that the underblocking coating and / or the overblocking coating contains (or contains) other layer (s), but then, these other layers will preferably be further away from the functional layer than the thin nickel-based layer. The functional layer is preferably deposited at a high vacuum pressure, equal to or greater than 2.10-3 Torr but however less than 10-2 Torr, and preferably between 2.5.10-3 Torr and 5.10-3 Torr. In fact, the thin layer (s) based on nickel and the functional layer are preferably deposited in the same atmosphere, under the same pressure. In a particular variant, the high vacuum pressure is between 3.10-3 Torr and 4.5.10-3 Torr, and is preferably of the order of 3.5.10-3 Torr. Preferably, the or each thin nickel-based layer comprises at least 50% in atomic proportion of Ni. In a particular version, at least one thin nickel-based layer, and in particular that of the overblocking coating, comprises chromium, preferably in atomic amounts of 80% Ni and 20% Cr. -8- In this particular version, at least one thin nickel-based layer, and in particular that of the overblocking coating, consists of an NiCr alloy present in metallic form if the substrate provided with the stack of layers thin films has not undergone any heat treatment of bending and / or quenching after the deposition of the stack, said alloy being at least partially oxidized if the substrate provided with the stack of thin layers has undergone at least one heat treatment of bending and / or quenching after deposition of the stack. In another particular version, at least one thin nickel-based layer, and in particular that of the overblocking coating, comprises titanium, preferably in atomic amounts of 80% Ni and 20% Ti. In this other particular version, at least one thin nickel-based layer, and in particular that of the overblocking coating, consists of an NiTi alloy present in metallic form if the substrate provided with the stack of thin layers n 'has not undergone any heat treatment of bending and / or quenching after the deposition of the stack, said alloy being at least partially oxidized if the substrate provided with the stack of thin layers has undergone at least one heat treatment of bending and / or quenching after deposition of the stack. The substrate also preferably comprises a last layer (overcoat in English), that is to say a protective layer furthest from the substrate, based on oxide, preferably deposited under stoichiometric, and in particular based of TiOX (where x is a number less than 2). This layer is found essentially stoichiometrically oxidized in the stack after deposition. This protective layer preferably has a thickness of between 1 and 10 nm. The anti-reflective coatings disposed one below the metallic functional layer and the other above each have a physical thickness of between 10 and 50 nm and the metallic functional layer has a physical thickness of between 5 and 50 nm. 20 nm.
Le vitrage selon l'invention incorpore au moins le substrat porteur de l'empilement selon l'invention, Ă©ventuellement associĂ© Ă au moins un autre substrat. Chaque substrat peut ĂȘtre clair ou colorĂ©. Un des substrats au moins notamment peut ĂȘtre en verre colorĂ© dans la masse. Le choix du type de coloration va dĂ©pendre du niveau de transmission lumineuse et/ou de l'aspect colorimĂ©trique recherchĂ©s pour le vitrage une fois sa fabrication achevĂ©e. The glazing according to the invention incorporates at least the substrate carrying the stack according to the invention, optionally associated with at least one other substrate. Each substrate can be clear or colored. At least one of the substrates, in particular, may be of glass colored in the mass. The choice of the type of coloring will depend on the level of light transmission and / or the colorimetric appearance desired for the glazing once its manufacture has been completed.
Ainsi pour des vitrages destinés à équiper des véhicules, certaines normes imposent que le pare-brise présente une transmission lumineuse TL d'environ 75% et d'autres normes imposent une transmission lumineuse TL d'environ 65% ; un tel niveau de transmission n'étant pas exigé pour les vitrages latéraux ou le toit-auto, par exemple. Les verres teintés que l'on peut retenir sont par exemple ceux qui, pour une épaisseur de 4 mm, présentent une TL de 65 % à 95 %, une transmission énergétique TE de 40 % à 80 %, une longueur d'onde dominante en transmission de 470 nm à 525 nm associée à une pureté de transmission de 0,4 % à 6 % selon l'Illuminant D65i ce que l'on peut traduire dans le systÚme de colorimétrie (L, a*, b*) par des valeurs de a* et b* en transmission respectivement comprises entre -9 et 0 et entre -8 et +2. Pour des vitrages destinés à équiper des bùtiments, le vitrage présente, de préférence, une transmission lumineuse TL d'au moins 75% voire plus pour des applications vitrage bas-émissif , et une transmission lumineuse TL d'au moins 40% voire plus pour des applications vitrage de contrÎle solaire . Thus for glazing intended to equip vehicles, certain standards require that the windshield has a light transmission TL of approximately 75% and other standards require a light transmission TL of approximately 65%; such a level of transmission is not required for the side windows or the car roof, for example. The tinted glasses that can be used are for example those which, for a thickness of 4 mm, have a TL of 65% to 95%, an energy transmission TE of 40% to 80%, a dominant wavelength in transmission from 470 nm to 525 nm associated with a transmission purity of 0.4% to 6% according to Illuminant D65i which can be translated in the colorimetry system (L, a *, b *) by values of a * and b * in transmission respectively between -9 and 0 and between -8 and +2. For glazing intended to equip buildings, the glazing preferably has a light transmission TL of at least 75% or more for low-emissive glazing applications, and a light transmission TL of at least 40% or more for solar control glazing applications.
Le vitrage selon l'invention peut prĂ©senter une structure feuilletĂ©e, associant notamment au moins deux substrats rigides du type verre par au moins une feuille de polymĂšre thermoplastique, afin de prĂ©senter une structure de type verre/empilement de couches minces/feuille(s)/verre. Le polymĂšre peut notamment ĂȘtre Ă base de polyvinylbutyral PVB, Ă©thylĂšne vinylacĂ©tate EVA, polyĂ©thylĂšne tĂ©rĂ©phtalate PET, polychlorure de vinyle PVC. -10- Le vitrage peut aussi prĂ©senter une structure de vitrage feuilletĂ© dit asymĂ©trique, associant un substrat rigide de type verre Ă au moins une feuille de polymĂšre de type polyurĂ©thane Ă propriĂ©tĂ©s d'absorbeur d'Ă©nergie, Ă©ventuellement associĂ©e Ă une autre couche de polymĂšres Ă propriĂ©tĂ©s auto- cicatrisantes . Pour plus de dĂ©tails sur ce type de vitrage, il est possible de se reporter notamment aux brevets EP-0 132 198, EP-0 131 523, EP-0 389 354. Le vitrage peut alors prĂ©senter une structure de type verre/empilement de couches minces/feuille(s) de polymĂšre. Les vitrages selon l'invention sont aptes Ă subir un traitement thermique 10 sans dommage pour l'empilement de couches minces. Ils sont donc Ă©ventuellement bombĂ©s et/ou trempĂ©s. Le vitrage peut ĂȘtre bombĂ© et/ou trempĂ© en Ă©tant constituĂ© d'un seul substrat, celui muni de l'empilement. Il s'agit alors d'un vitrage dit monolithique . Dans le cas oĂč ils sont bombĂ©s, notamment en vue de 15 constituer des vitrages pour vĂ©hicules, l'empilement de couches minces se trouve de prĂ©fĂ©rence sur une face au moins partiellement non plane. Le vitrage peut aussi ĂȘtre un vitrage multiple, notamment un double-vitrage, au moins le substrat porteur de l'empilement pouvant ĂȘtre bombĂ© et/ou trempĂ©. Il est prĂ©fĂ©rable dans une configuration de vitrage multiple que 20 l'empilement soit disposĂ© de maniĂšre Ă ĂȘtre tournĂ© du cĂŽtĂ© de la lame de gaz intercalaire. Dans une structure feuilletĂ©e, le substrat porteur de l'empilement peut ĂȘtre en contact avec la feuille de polymĂšre. Lorsque le vitrage est monolithique ou multiple du type double-vitrage ou vitrage feuilletĂ©, au moins le substrat porteur de l'empilement peut ĂȘtre en 25 verre bombĂ© ou trempĂ©, ce substrat pouvant ĂȘtre bombĂ© ou trempĂ© avant ou aprĂšs le dĂ©pĂŽt de l'empilement. L'invention concerne Ă©galement le procĂ©dĂ© de fabrication des substrats selon l'invention, qui consiste Ă dĂ©poser l'empilement de couches minces sur son substrat par une technique sous vide du type pulvĂ©risation cathodique 30 Ă©ventuellement assistĂ©e par champ magnĂ©tique. -11- Il n'est toutefois pas exclu que la premiĂšre (ou les premiĂšres) couche(s) de l'empilement puisse(nt) ĂȘtre dĂ©posĂ©e(s) par une autre technique, par exemple par une technique de dĂ©composition thermique de type pyrolyse. The glazing according to the invention can have a laminated structure, combining in particular at least two rigid substrates of the glass type with at least one sheet of thermoplastic polymer, in order to present a structure of the glass / stack of thin layers / sheet (s) / type. glass. The polymer may in particular be based on polyvinylbutyral PVB, ethylene vinyl acetate EVA, polyethylene terephthalate PET, polyvinyl chloride PVC. The glazing may also have a so-called asymmetric laminated glazing structure, associating a rigid substrate of the glass type with at least one sheet of polyurethane-type polymer with energy-absorbing properties, optionally combined with another layer of polymers. with self-healing properties. For more details on this type of glazing, it is possible to refer in particular to patents EP-0 132 198, EP-0 131 523, EP-0 389 354. The glazing can then have a structure of the glass / stack type. thin films / sheet (s) of polymer. The glazing according to the invention is suitable for undergoing a heat treatment without damage to the stack of thin layers. They are therefore possibly convex and / or hardened. The glazing can be curved and / or toughened by being made up of a single substrate, that provided with the stack. It is then a so-called monolithic glazing. In the case where they are curved, in particular with a view to constituting glazing for vehicles, the stack of thin layers is preferably located on an at least partially non-planar face. The glazing can also be a multiple glazing, in particular a double glazing, at least the substrate carrying the stack being able to be curved and / or toughened. It is preferable in a multiple glazing configuration that the stack is arranged so as to face the side of the interlayer gas knife. In a laminated structure, the substrate carrying the stack may be in contact with the polymer sheet. When the glazing is monolithic or multiple of the double glazing or laminated glazing type, at least the substrate carrying the stack may be of curved or tempered glass, this substrate possibly being curved or tempered before or after the deposition of the stack. . The invention also relates to the process for manufacturing the substrates according to the invention, which consists in depositing the stack of thin layers on its substrate by a vacuum technique of the cathode sputtering type, optionally assisted by a magnetic field. -11- It is however not excluded that the first (or the first) layer (s) of the stack may (s) be deposited by another technique, for example by a thermal decomposition technique of the type pyrolysis.
L'invention concerne en outre un procĂ©dĂ© de fabrication d'un substrat verrier muni sur une face principale d'un empilement de couches minces, notamment du substrat selon l'invention, l'empilement comportant une couche fonctionnelle mĂ©tallique Ă propriĂ©tĂ©s de rĂ©flexion dans l'infrarouge et/ou dans le rayonnement solaire, notamment Ă base d'argent ou d'alliage mĂ©tallique contenant de l'argent, et deux revĂȘtements antireflet, lesdits revĂȘtements comportant chacun au moins une couche diĂ©lectrique Ă base de nitrure de silicium, ladite couche fonctionnelle Ă©tant disposĂ©e entre les deux revĂȘtements antireflet, la couche fonctionnelle etant dĂ©posĂ©e directement sur un revĂȘtement de sous-blocage disposĂ© entre la couche fonctionnelle et le revĂȘtement antireflet sous-jacent et la couche fonctionnelle Ă©tant dĂ©posĂ©e directement sous un revĂȘtement de sur-blocage disposĂ© entre la couche fonctionnelle et le revĂȘtement antireflet sus-jacent. Ce procĂ©dĂ© est remarquable en ce que l'empilement de couches minces est dĂ©posĂ© sur le substrat par une technique sous vide du type pulvĂ©risation cathodique Ă©ventuellement assistĂ©e par champ magnĂ©tique et en ce que pour que ledit substrat soit bombable et/ou trempable aprĂšs le dĂ©pĂŽt de l'empilement de couches minces, une couche fine Ă base de nickel est dĂ©posĂ©e dans le revĂȘtement de sous-blocage et/ou dans le revĂȘtement de sur-blocage Ă une haute pression de vide, Ă©gale ou supĂ©rieure Ă 2.10-3 Torr, et de prĂ©fĂ©rence comprise entre 2,5.10-3 Torr et 5.10-3 Torr. En outre, la couche fonctionnelle est Ă©galement de prĂ©fĂ©rence, dĂ©posĂ©e Ă une haute pression de vide, Ă©gale ou supĂ©rieure Ă 2.10-3 Torr mais toutefois infĂ©rieure Ă 10-2 Torr, et de prĂ©fĂ©rence comprise entre 2,5.10-3 Torr et 5.10-3 Torr. En effet, la (ou les) couche(s) fine(s) Ă base de nickel et la couche fonctionnelle sont de prĂ©fĂ©rence dĂ©posĂ©es dans la mĂȘme atmosphĂšre, sous la mĂȘme pression. - 12 -Cette haute pression de vide est, de prĂ©fĂ©rence, comprise entre 3.10-3 Torr et 4,5.10-3 Torr, et est de prĂ©fĂ©rence encore de l'ordre de 3,5.10-3 Torr. La ou chaque couche fine Ă base de nickel prĂ©sentant, de prĂ©fĂ©rence, une Ă©paisseur e telle que 1,5 nm e 5 nm, et de prĂ©fĂ©rence encore 0,8 nm e 1,8 nm. The invention further relates to a method of manufacturing a glass substrate provided on a main face with a stack of thin layers, in particular with the substrate according to the invention, the stack comprising a metallic functional layer with reflection properties in the glass. 'infrared and / or in solar radiation, in particular based on silver or a metal alloy containing silver, and two antireflection coatings, said coatings each comprising at least one dielectric layer based on silicon nitride, said layer functional layer being disposed between the two antireflection coatings, the functional layer being deposited directly on an underblocking coating disposed between the functional layer and the underlying antireflection coating and the functional layer being deposited directly under an overblocking coating disposed between the functional layer and the overlying anti-reflective coating. This process is remarkable in that the stack of thin layers is deposited on the substrate by a vacuum technique of the cathode sputtering type optionally assisted by a magnetic field and in that for said substrate to be bendable and / or hardenable after the deposition of the stack of thin layers, a thin nickel-based layer is deposited in the underblocking coating and / or in the overblocking coating at a high vacuum pressure equal to or greater than 2.10-3 Torr, and preferably between 2.5.10-3 Torr and 5.10-3 Torr. In addition, the functional layer is also preferably deposited at a high vacuum pressure, equal to or greater than 2.10-3 Torr but however less than 10-2 Torr, and preferably between 2.5.10-3 Torr and 5.10- 3 Torr. In fact, the thin layer (s) based on nickel and the functional layer are preferably deposited in the same atmosphere, under the same pressure. This high vacuum pressure is preferably between 3.10-3 Torr and 4.5.10-3 Torr, and is more preferably of the order of 3.5.10-3 Torr. The or each thin nickel-based layer preferably having a thickness e such as 1.5 nm e 5 nm, and more preferably 0.8 nm e 1.8 nm.
L'invention concerne en outre l'utilisation du substrat selon l'invention, pour réaliser un substrat qui est bombable et/ou trempable aprÚs le dépÎt de l'empilement de couches minces et qui présente, de préférence, au traitement thermique une variation de transmission lumineuse dans le visible ATL 5, et de préférence ATL 4,5, voire ATL 4 et/ou une variation colorimétrique en réflexion cÎté empilement et/ou cÎté substrat : AE 6, et de préférence AE 5, voire AE 4,5. The invention further relates to the use of the substrate according to the invention, to produce a substrate which is bendable and / or hardenable after the deposition of the stack of thin layers and which preferably exhibits a variation of light transmission in the visible ATL 5, and preferably ATL 4.5, or even ATL 4 and / or a colorimetric variation in reflection on the stack side and / or on the substrate side: AE 6, and preferably AE 5, or even AE 4.5.
Les dĂ©tails et caractĂ©ristiques avantageuses de l'invention ressortent des exemples non limitatifs suivants, illustrĂ©s Ă l'aide des figures ci-jointes : La figure 1 illustre un empilement monocouche fonctionnelle selon l'invention, la couche fonctionnelle Ă©tant pourvue d'un revĂȘtement de sous-blocage et d'un revĂȘtement de sur-blocage et l'empilement Ă©tant en outre pourvu d'un revĂȘtement de protection optionnel ; La figure 2 illustre un tableau rĂ©capitulatif des caractĂ©ristiques optiques et thermiques essentielles des exemples rĂ©alisĂ©s et les variations de ces caractĂ©ristiques aprĂšs traitement thermique, ainsi que les caractĂ©ristiques mĂ©caniques et chimiques de ces exemples ; et La figure 3 illustre un tableau rĂ©capitulatif des caractĂ©ristiques optiques et thermiques essentielles des exemples rĂ©alisĂ©s aprĂšs montage en unitĂ© de double vitrage et les variations de ces caractĂ©ristiques aprĂšs traitement thermique puis montage en unitĂ© de double vitrage de structure identique.30 - 13 - Dans la figure illustrant des empilements de couches, les proportions entre les Ă©paisseurs des diffĂ©rents matĂ©riaux ne sont pas rigoureusement respectĂ©es afin de faciliter leur lecture. Par ailleurs, dans tous les exemples ci-aprĂšs l'empilement de couches minces est dĂ©posĂ© sur un substrat 10 en verre sodo-calcique d'une Ă©paisseur de 4 mm. En outre, pour ces exemple, dans tous les cas oĂč un traitement thermique a Ă©tĂ© appliquĂ© au substrat, il s'agissait d'un recuit pendant environ 5 minutes Ă une tempĂ©rature d'environ 660 °C suivi d'un refroidissement Ă l'air ambiant (environ 20 °C), afin de simuler un traitement thermique de bombage ou de trempe. Ainsi, pour chacun des exemples, lorsqu'une caractĂ©ristique a Ă©tĂ© mesurĂ©e avant ce traitement thermique elle est classĂ©e dans la colonne : BHT et lorsqu'elle a Ă©tĂ© mesurĂ©e aprĂšs ce traitement thermique elle est classĂ©e dans la colonne : AHT. La variation de cette caractĂ©ristique au traitement thermique est alors indiquĂ©e par la lettre A Une sĂ©rie d'essai a Ă©tĂ© rĂ©alisĂ©e. Trois exemples, numĂ©rotĂ©s 1 Ă 3, ont d'abord Ă©tĂ© rĂ©alisĂ©s sur la base de la structure d'empilement monocouche fonctionnelle illustrĂ©e figure 1 dans laquelle la couche fonctionnelle 40 est pourvue d'un revĂȘtement de sous-blocage 30 et d'un revĂȘtement de sur-blocage 50 respectivement immĂ©diatement sous et immĂ©diatement sur la couche fonctionnelle 40. Dans cet empilement par ailleurs, un revĂȘtement antireflet 20 infĂ©rieur est dĂ©posĂ© immĂ©diatement sous le revĂȘtement de sous-blocage 30 et au contact du substrat 10 et un revĂȘtement antireflet 60 supĂ©rieur est dĂ©posĂ© immĂ©diatement sur le revĂȘtement de sur-blocage 50. Sur la figure 1 on constate que le revĂȘtement antireflet 20 infĂ©rieur comporte une couche antireflet unique 24 et que le revĂȘtement antireflet 60 supĂ©rieur comporte une couche antireflet unique 64, mais que le revĂȘtement antireflet 60 peut ĂȘtre surmontĂ© d'un revĂȘtement de protection optionnelle 70 comportant une couche fine, en particulier d'oxyde. - 14 - Le tableau 1 ci-aprĂšs illustre les Ă©paisseurs physiques (et non pas les Ă©paisseurs optiques) en nanomĂštres de chacune des couches des exemples 1 Ă 3: Couche MatĂ©riau Ex. 1 Ex. 2 Ex. 3 70 TiOX 2 2 2 64 Si3N4 45 45 45 50 NiCr 1,5 1,5 2,8 40 Ag 7 7 8, 5 30 NiCr 1,5 3,5 4,2 24 Si3N4 37 37 37 Tableau 1 L'installation de dĂ©pĂŽt utilisĂ©e pour rĂ©aliser ces essais comprend quatre chambres de pulvĂ©risation munies de cathodes et Ă©quipĂ©es de cibles en matĂ©riaux appropriĂ©s sous lesquels le substrat 11 passe successivement. Ces conditions de dĂ©pĂŽt pour chacune des chambres sont les suivantes : -Chambre 1 : la couche 24 Ă base de Si3N4 est dĂ©posĂ©es par pulvĂ©risation rĂ©active Ă l'aide d'une cible en silicium dopĂ©e au Ă l'aluminium, sous une pression de 2,5 mTorr dans une atmosphĂšre composĂ©e Ă 40 % d'argon et Ă 60 d'azote, - Chambre 2 : la couche en NiCr du revĂȘtement de blocage sous-jacent 30 et la couche en NiCr du revĂȘtement de blocage sous-jacent 50 sont dĂ©posĂ©es chacune Ă l'aide d'une cible en alliage de NiCr et la couche 40 Ă base d'argent est dĂ©posĂ©e Ă l'aide d'une cible en argent, la pression de dĂ©pĂŽt Ă l'intĂ©rieur de cette chambre N° 2 Ă©tant de 3,5 mTorr et l'atmosphĂšre Ă©tant d'argon pur, - Chambre 3 : comme en chambre 1, la couche 64 Ă base de Si3N4 est dĂ©posĂ©e par pulvĂ©risation rĂ©active Ă l'aide d'une cible en silicium dopĂ©e au Ă l'aluminium, sous une pression de 2,5 mTorr dans une atmosphĂšre composĂ©e Ă 40 % d'argon et Ă 60 % d'azote, -Chambre 4 : la couche de protection 70 en TiOX est dĂ©posĂ©e Ă l'aide d'une cible cĂ©ramique dans une atmosphĂšre Ă 90 % d'argon et 10 % d'oxygĂšne. - 15 - La stoechiomĂ©trie finale de la couche n'est pas connue exactement car cette couche subi une oxydation supplĂ©mentaire une fois que le substrat revĂȘtu est sorti de la machine de dĂ©pĂŽt et est soumis Ă l'air libre et a fortiori lors de l'Ă©ventuel traitement thermique. The details and advantageous characteristics of the invention emerge from the following non-limiting examples, illustrated with the aid of the attached figures: FIG. 1 illustrates a functional monolayer stack according to the invention, the functional layer being provided with a coating of underlocking and an overlocking coating and the stack further being provided with an optional protective coating; FIG. 2 illustrates a summary table of the essential optical and thermal characteristics of the examples produced and the variations of these characteristics after heat treatment, as well as the mechanical and chemical characteristics of these examples; and FIG. 3 illustrates a summary table of the essential optical and thermal characteristics of the examples produced after installation in a double glazing unit and the variations of these characteristics after heat treatment then installation in a double glazing unit of identical structure. 30 - 13 - In the figure illustrating stacks of layers, the proportions between the thicknesses of the different materials are not strictly observed in order to facilitate their reading. Moreover, in all the examples below, the stack of thin layers is deposited on a substrate 10 made of soda-lime glass with a thickness of 4 mm. Further, for these examples, in all cases where heat treatment was applied to the substrate, it was annealing for about 5 minutes at a temperature of about 660 ° C followed by cooling down. ambient air (around 20 ° C), in order to simulate a bending or quenching heat treatment. Thus, for each of the examples, when a characteristic was measured before this heat treatment it is classified in the column: BHT and when it was measured after this heat treatment it is classified in the column: AHT. The variation of this characteristic during heat treatment is then indicated by the letter A. A series of tests were carried out. Three examples, numbered 1 to 3, were first made on the basis of the functional single-layer stacking structure illustrated in Figure 1 in which the functional layer 40 is provided with an underblock coating 30 and a coating. 50 respectively immediately below and immediately on the functional layer 40. In this stack, moreover, a lower antireflection coating 20 is deposited immediately under the subblock coating 30 and in contact with the substrate 10 and an upper antireflection coating 60 is deposited immediately on the over-blocking coating 50. In Figure 1 it can be seen that the lower anti-reflective coating 20 has a single anti-reflective layer 24 and the upper anti-reflective coating 60 has a single anti-reflective layer 64, but the anti-reflective coating 60 may be topped with an optional protective coating 70 comprising a thin layer, in particular of oxide. - 14 - Table 1 below illustrates the physical thicknesses (and not the optical thicknesses) in nanometers of each of the layers of Examples 1 to 3: Layer Material Ex. 1 Ex. 2 Ex. 3 70 TiOX 2 2 2 64 Si3N4 45 45 45 50 NiCr 1.5 1.5 2.8 40 Ag 7 7 8, 5 30 NiCr 1.5 3.5 4.2 24 Si3N4 37 37 37 Table 1 The deposition facility used to perform these tests comprises four sputtering chambers fitted with cathodes and fitted with targets made of suitable materials under which the substrate 11 passes successively. These deposition conditions for each of the chambers are as follows: Chamber 1: the layer 24 based on Si3N4 is deposited by reactive sputtering using a silicon target doped with aluminum, under a pressure of 2 , 5 mTorr in an atmosphere composed of 40% argon and 60% nitrogen, - Chamber 2: the NiCr layer of the underlying blocking coating 30 and the NiCr layer of the underlying blocking coating 50 are each deposited using a NiCr alloy target and the silver-based layer 40 is deposited using a silver target, the deposition pressure inside this chamber No. 2 being 3.5 mTorr and the atmosphere being pure argon, - Chamber 3: as in chamber 1, the layer 64 based on Si3N4 is deposited by reactive sputtering using a silicon target doped with aluminum, under a pressure of 2.5 mTorr in an atmosphere composed of 40% argon and 60% nitrogen, - Chamber 4: the protective layer 70 in TiOX is deposited at the using a ceramic target in an atmosphere of 90% argon and 10% oxygen. - 15 - The final stoichiometry of the layer is not known exactly because this layer undergoes additional oxidation once the coated substrate has left the deposition machine and is subjected to the open air and a fortiori during the coating. possible heat treatment.
Les densités de puissance et les vitesses de défilement du substrat 10 sont ajustées de maniÚre connue pour obtenir les épaisseurs de couches voulues. Il est à noter que chaque couche en NiCr est déposée sous forme métallique à partir d'une cible métallique contenant 80% atomique de Ni et 20 % atomique de Cr, dans une atmosphÚre neutre, et que chaque couche se trouve dans un état partiellement oxydée dans l'empilement aprÚs que celui-ci ait subi l'éventuel traitement thermique. The power densities and the running speeds of the substrate 10 are adjusted in a known manner to obtain the desired layer thicknesses. It should be noted that each NiCr layer is deposited in metallic form from a metallic target containing 80 atomic% of Ni and 20 atomic% of Cr, in a neutral atmosphere, and that each layer is in a partially oxidized state. in the stack after it has undergone the possible heat treatment.
Les caractĂ©ristiques optiques, mĂ©caniques et chimiques des substrats de ces exemples sont reportĂ©es dans le tableau 2 de la figure 2 et les caractĂ©ristiques optiques de ces substrats montĂ©s en double vitrage sont reportĂ©es dans le tableau 3 de la figure 3. La structure de l'unitĂ© de double vitrage ( DGU ) est dite 6-15-6 , c'est-Ă -dire que le vitrage est constituĂ© d'un substrat selon l'invention d'Ă©paisseur 6 mm associĂ© avec un autre substrat clair non revĂȘtu d'une Ă©paisseur de 6 mm, ces substrats Ă©tant sĂ©parĂ©s par un espace intercalaire d'une Ă©paisseur de 15mm constituĂ©e Ă 90 % d'argon, la face du substrat selon l'invention Ă©tant tournĂ©e vers l'espace intercalaire. Dans ce tableau, les caractĂ©ristiques optiques prĂ©sentĂ©es consistent en : TLV;S, transmission lumineuse TL dans le visible en %, mesurĂ©es selon l'illuminant D65, A TLV;S, variation au traitement thermique de la transmission lumineuse TL dans le visible, couleurs en transmission LT*, aT*et bT* dans le systĂšme LAB mesurĂ©es selon l'illuminant D65, -16- AET, variation au traitement thermique de couleur en rĂ©flexion cĂŽtĂ© couches = (AaT*2 + ObT*z + OLT*z) rz RLVĂSC, rĂ©flexion lumineuse RL dans le visible en %, mesurĂ©e cĂŽtĂ© couches, selon l'illuminant D65, couleurs en rĂ©flexion LRC*, aRc* et bRc* dans le systĂšme LAB mesurĂ©es selon l'illuminant D65, cĂŽtĂ© couches, AERC, variation au traitement thermique de couleur en rĂ©flexion cĂŽtĂ© couches = (AaRC*2 + AbRC*2 + OLRC*2)Y2 RLV;SS, rĂ©flexion lumineuse RL dans le visible en %, mesurĂ©e cĂŽtĂ© substrat (cĂŽtĂ© opposĂ© Ă l'empilement de couches, selon l'illuminant D65, couleurs en rĂ©flexion LRS*, aRs* et bRs* dans le systĂšme LAB mesurĂ©es selon l'illuminant D65, cĂŽtĂ© couches, AERS, variation au traitement thermique de couleur en rĂ©flexion cĂŽtĂ© substrat = (AaRS*2 + AbRS*2 + OLRS*2)Y2 FS, facteur solaire, calculĂ© selon la norme EN 410. The optical, mechanical and chemical characteristics of the substrates of these examples are reported in Table 2 of Figure 2 and the optical characteristics of these substrates mounted in double glazing are reported in Table 3 of Figure 3. The structure of the unit of double glazing (DGU) is called 6-15-6, that is to say that the glazing consists of a substrate according to the invention of 6 mm thickness associated with another clear substrate not coated with a thickness of 6 mm, these substrates being separated by an intermediate space with a thickness of 15 mm consisting of 90% argon, the face of the substrate according to the invention being turned towards the intermediate space. In this table, the optical characteristics presented consist of: TLV; S, light transmission TL in the visible in%, measured according to the illuminant D65, A TLV; S, variation in heat treatment of the light transmission TL in the visible, colors in transmission LT *, aT * and bT * in the LAB system measured according to illuminant D65, -16- AET, variation in color heat treatment in reflection on the layer side = (AaT * 2 + ObT * z + OLT * z) rz RLVĂSC, light reflection RL in the visible in%, measured side layers, according to illuminant D65, colors in reflection LRC *, aRc * and bRc * in the LAB system measured according to illuminant D65, layer side, AERC, variation to color heat treatment in reflection on the layer side = (AaRC * 2 + AbRC * 2 + OLRC * 2) Y2 RLV; SS, light reflection RL in the visible in%, measured on the substrate side (side opposite to the stack of layers, according to illuminant D65, reflective colors LRS *, aRs * and bRs * in the LAB system measured according to illuminant D65, layer side, AERS, variation in color heat treatment in reflection on substrate side = (AaRS * 2 + AbRS * 2 + OLRS * 2) Y2 FS, solar factor, calculated according to standard EN 410.
Les essais ont subi un certain nombre de tests mĂ©caniques et chimiques dont la rĂ©alisation est dĂ©taillĂ©e ci-aprĂšs : - EBT = Test Erichsen Ă la Brosse : il s'agit de frotter l'empilement Ă l'aide d'une brosse Ă poil en matĂ©riau polymĂšre, l'empilement Ă©tant recouvert d'eau ; l'Ă©chantillon a satisfait au test si aucune marque n'est visible Ă l'oeil nu et il porte la mention OK . EST = Test Erichsen Ă la Pointe : il s'agit de reporter la valeur de la force nĂ©cessaire, en Newton, pour rĂ©aliser une rayure dans l'empilement lors de la rĂ©alisation du test (pointe de Van Laar, bille d'acier) ; ici, deux tests ont Ă©tĂ© rĂ©alisĂ©s, soit Ă 1 N, soit Ă 10 N ; Taber 500g 100t : il s'agit de reporter la quantitĂ© d'empilement restant en % de surface restante aprĂšs un test Taber opĂ©rĂ© aprĂšs avoir appliquĂ© un rouleau abrasif de 500 g pendant 100 tours ; -17- HCL = test Ă l'acide chlorhydrique : il s'agit de plonger un Ă©chantillon de 5x10 cm pendant 8 minutes dans une solution de HCl (concentration= 0,01M/L) portĂ©e Ă 36°C (sans agitation). L'Ă©chantillon est ensuite rincĂ© Ă l'eau dĂ©ionisĂ©e, sĂ©chĂ©, puis observĂ© Ă l'oeil et au microscope optique et ses propriĂ©tĂ©s optiques en rĂ©flexion dans le visible cĂŽtĂ© couches sont mesurĂ©es Ă l'aide d'un spectrophotomĂštre et comparĂ©es Ă celles mesurĂ©es avant test. Si les observations Ă l'oeil et au microscope ne rĂ©vĂšlent pas de dĂ©fauts et que la variation optique AE(RL,;Sc) lors du test est infĂ©rieure Ă 2, alors on considĂšre que l'Ă©chantillon rĂ©siste Ă ce test et il porte la mention OK . HH = Test Ă haute humiditĂ© : il s'agit de placer un Ă©chantillon de 10x10cm pendant 5 jours dans une enceinte climatique Ă atmosphĂšre contrĂŽlĂ©e (100 % d'humiditĂ© et 40 °C). Les observations (oeil, microscope) et la mesure des propriĂ©tĂ©s optiques aprĂšs test renseignent de la mĂȘme maniĂšre que pour le test HCl sur la rĂ©sistance ou non de l'Ă©chantillon au test HH et la notation s'opĂšre de la mĂȘme maniĂšre. The tests underwent a certain number of mechanical and chemical tests, the performance of which is detailed below: - EBT = Erichsen brush test: this involves rubbing the stack using a bristle brush. polymeric material, the stack being covered with water; the sample has passed the test if no mark is visible to the naked eye and is marked OK. EST = Erichsen test at the Point: this involves reporting the value of the force necessary, in Newton, to produce a scratch in the stack during the performance of the test (Van Laar point, steel ball); here, two tests were carried out, either at 1 N or at 10 N; Taber 500g 100t: this involves transferring the amount of stacking remaining in% of surface area remaining after a Taber test operated after having applied an abrasive roller of 500 g for 100 revolutions; -17- HCL = hydrochloric acid test: this involves immersing a 5x10 cm sample for 8 minutes in an HCl solution (concentration = 0.01M / L) brought to 36 ° C (without stirring). The sample is then rinsed with deionized water, dried, then observed with the eye and with an optical microscope and its optical properties in reflection in the visible side of the layers are measured using a spectrophotometer and compared to those measured. before test. If the observations with the eye and under the microscope do not reveal any defects and the optical variation AE (RL,; Sc) during the test is less than 2, then the sample is considered to resist this test and it carries the mention OK. HH = High humidity test: this involves placing a 10x10cm sample for 5 days in a climatic chamber with a controlled atmosphere (100% humidity and 40 ° C). The observations (eye, microscope) and the measurement of the optical properties after test provide information in the same way as for the HCl test on the resistance or not of the sample to the HH test and the scoring is carried out in the same way.
Les empilements des exemples 1 Ă 3 sont des empilements trempables au sens de l'invention puisque pour chaque exemple la variation de transmission lumineuse dans le visible ATLV;S des substrats est infĂ©rieure 5 et mĂȘme Ă©gale ou infĂ©rieure Ă 2, la variation de couleur en rĂ©flexion cĂŽtĂ© couches AERC des substrats est infĂ©rieure ou Ă©gale Ă 6 et la variation de couleur en rĂ©flexion cĂŽtĂ© substrat AERS est infĂ©rieure ou Ă©gale Ă 3. Il est donc difficile de distinguer des substrats selon l'un des exemples 1 Ă 3 ayant subi un traitement thermique des substrats respectivement de ce mĂȘme exemple n'ayant pas subi de traitement thermique, lorsqu'ils sont disposĂ©s cĂŽte Ă cĂŽte. - 18 - L'analyse du tableau 2 de la figure 2 montre que la transmission lumineuse dans le visible des exemples 1 Ă 3 n'est certes pas trĂšs Ă©levĂ©e, mais elle est toutefois suffisante pour les applications visĂ©es. The stacks of Examples 1 to 3 are hardenable stacks within the meaning of the invention since for each example the variation in light transmission in the visible ATLV; S of the substrates is less than 5 and even equal to or less than 2, the variation in color in reflection on the AERC layer side of the substrates is less than or equal to 6 and the color variation in reflection on the AERS substrate side is less than or equal to 3. It is therefore difficult to distinguish the substrates according to one of Examples 1 to 3 having undergone a treatment. thermal substrates respectively of this same example not having undergone heat treatment, when they are placed side by side. The analysis of Table 2 of FIG. 2 shows that the light transmission in the visible range of Examples 1 to 3 is certainly not very high, but it is nevertheless sufficient for the targeted applications.
Il a été constaté que la résistance mécanique, tant au test Taber qu'aux tests EBT et EST des exemples 1 à 3 est trÚs bonne. La résistance aux tests chimiques HCl et HH de ces exemples est également trÚs bonne. It was found that the mechanical strength, both in the Taber test and in the EBT and EST tests of Examples 1 to 3 is very good. The resistance to HCl and HH chemical tests of these examples is also very good.
La rĂ©sistance mĂ©canique de l'empilement selon l'invention peut encore ĂȘtre amĂ©liorĂ©e si une couche de protection 70 est prĂ©vue. The mechanical strength of the stack according to the invention can be further improved if a protective layer 70 is provided.
Un exemple supplĂ©mentaire numĂ©rotĂ© 1' a Ă©tĂ© rĂ©alisĂ©. L'empilement de cet exemple est identique Ă celui de l'exemple 1 sauf en ce que la couche fine Ă base de nickel du revĂȘtement de sur-blocage 50 n'est pas en NiCr mais en NiTi. Comme pour l'exemple 1, elle est dĂ©posĂ©e sous forme mĂ©tallique Ă partir d'une cible mĂ©tallique contenant 80% atomique de Ni, dans une atmosphĂšre neutre, mais Ă la diffĂ©rence de l'exemple 1, la cible contient 20 % atomique de Ti. Comme pour l'exemple 1, la couche se trouve Ă un Ă©tat partiellement oxydĂ© dans l'empilement aprĂšs que celui-ci ait subi un traitement thermique. Avant traitement thermique, la transmission lumineuse dans le visible de l'exemple supplĂ©mentaire est lĂ©gĂšrement plus faible que celle de l'exemple 1, mais la variation de couleur en transmission exprimĂ©e par AET de l'exemple supplĂ©mentaire est plus faible que dans le cas de l'exemple 1. Il est donc encore plus difficile de distinguer des substrats de l'exemple supplĂ©mentaire ayant subi un traitement thermique des substrats de l'exemple supplĂ©mentaire n'ayant pas subi de traitement thermique lorsqu'ils sont disposĂ©s cĂŽte Ă cĂŽte. - 19 -Par ailleurs, la tenue mĂ©canique gĂ©nĂ©rale de cet empilement de l'exemple supplĂ©mentaire est globalement aussi bonne que celle de l'exemple 1 voire mĂȘme lĂ©gĂšrement meilleure en ce qui concerne le test EST. Ceci est d'autant plus Ă©tonnant qu'il est connu que pour les revĂȘtements de blocage monocouches (la couche Ă©tant Ă un ou plusieurs constituants) les couches mĂ©talliques en Ti engendrent, pour l'essentiel, des problĂšmes de tenue mĂ©canique de l'empilement, notamment aprĂšs traitement thermique ; des rayures peuvent se produire en particulier lors du transport entre le lieu oĂč est opĂ©rĂ© le dĂ©pĂŽt de l'empilement sur le substrat et le lieu est opĂ©rĂ© l'intĂ©gration de ce substrat dans un vitrage, notamment un vitrage multiple (double vitrage, vitrage feuilletĂ©, ...). Par ailleurs, la tenue chimique gĂ©nĂ©rale de cet empilement de l'exemple supplĂ©mentaire est globalement aussi bonne que celle de l'exemple 1. An additional example numbered 1 'has been produced. The stack of this example is identical to that of example 1 except in that the thin nickel-based layer of the overblocking coating 50 is not made of NiCr but of NiTi. As for example 1, it is deposited in metallic form from a metallic target containing 80 atomic% of Ni, in a neutral atmosphere, but unlike example 1, the target contains 20 atomic% of Ti . As in Example 1, the layer is in a partially oxidized state in the stack after the latter has undergone a heat treatment. Before heat treatment, the light transmission in the visible range of the additional example is slightly lower than that of example 1, but the color variation in transmission expressed by AET of the additional example is lower than in the case of Example 1. It is therefore even more difficult to distinguish substrates of the additional example which have undergone heat treatment from the substrates of the additional example which have not undergone heat treatment when they are placed side by side. Furthermore, the general mechanical strength of this stack of the additional example is overall as good as that of example 1 or even slightly better with regard to the EST test. This is all the more astonishing since it is known that for monolayer blocking coatings (the layer having one or more constituents) the metallic layers in Ti generate, for the most part, problems of mechanical strength of the stack. , in particular after heat treatment; scratches may occur in particular during transport between the place where the deposition of the stack on the substrate is operated and the place where the integration of this substrate into a glazing, in particular multiple glazing (double glazing, laminated glazing) is carried out , ...). Furthermore, the general chemical resistance of this stack of the additional example is overall as good as that of example 1.
La prĂ©sente invention est dĂ©crite dans ce qui prĂ©cĂšde Ă titre d'exemple. Il est entendu que l'homme du mĂ©tier est Ă mĂȘme de rĂ©aliser diffĂ©rentes variantes de l'invention sans pour autant sortir du cadre du brevet tel que dĂ©fini par les revendications. The present invention is described in the above by way of example. It is understood that a person skilled in the art is able to produce different variants of the invention without, however, departing from the scope of the patent as defined by the claims.
Claims (19)
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FR0759223A FR2924232B1 (en) | 2007-11-22 | 2007-11-22 | SUBSTRATE PROVIDED WITH A STACK WITH THERMAL PROPERTIES |
PCT/FR2008/052096 WO2009071810A2 (en) | 2007-11-22 | 2008-11-20 | Substrate provided with a multilayer stack having thermal properties |
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US8790783B2 (en) | 2011-03-03 | 2014-07-29 | Guardian Industries Corp. | Barrier layers comprising Ni and/or Ti, coated articles including barrier layers, and methods of making the same |
US8709604B2 (en) | 2011-03-03 | 2014-04-29 | Guardian Industries Corp. | Barrier layers comprising Ni-inclusive ternary alloys, coated articles including barrier layers, and methods of making the same |
US10487010B2 (en) | 2011-03-03 | 2019-11-26 | Guardian Glass, Llc. | Barrier layers comprising Ni and/or Ti, coated articles including barrier layers, and methods of making the same |
US8679633B2 (en) | 2011-03-03 | 2014-03-25 | Guardian Industries Corp. | Barrier layers comprising NI-inclusive alloys and/or other metallic alloys, double barrier layers, coated articles including double barrier layers, and methods of making the same |
Also Published As
Publication number | Publication date |
---|---|
FR2924232B1 (en) | 2009-11-27 |
WO2009071810A3 (en) | 2009-07-23 |
WO2009071810A2 (en) | 2009-06-11 |
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