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FR2983574B1 - Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur - Google Patents

Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

Info

Publication number
FR2983574B1
FR2983574B1 FR1103733A FR1103733A FR2983574B1 FR 2983574 B1 FR2983574 B1 FR 2983574B1 FR 1103733 A FR1103733 A FR 1103733A FR 1103733 A FR1103733 A FR 1103733A FR 2983574 B1 FR2983574 B1 FR 2983574B1
Authority
FR
France
Prior art keywords
sensor
balancing
masses
frame
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1103733A
Other languages
English (en)
Other versions
FR2983574A1 (fr
Inventor
Alain Jeanroy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1103733A priority Critical patent/FR2983574B1/fr
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to CN201280059912.5A priority patent/CN103998894B/zh
Priority to US14/362,195 priority patent/US9869551B2/en
Priority to EP12801523.7A priority patent/EP2788718B1/fr
Priority to RU2014127542/28A priority patent/RU2566534C1/ru
Priority to JP2014545200A priority patent/JP2015507176A/ja
Priority to BR112014013173A priority patent/BR112014013173A2/pt
Priority to KR1020147015347A priority patent/KR101700921B1/ko
Priority to PCT/EP2012/074290 priority patent/WO2013083534A2/fr
Priority to CA2856171A priority patent/CA2856171A1/fr
Publication of FR2983574A1 publication Critical patent/FR2983574A1/fr
Application granted granted Critical
Publication of FR2983574B1 publication Critical patent/FR2983574B1/fr
Priority to JP2017151849A priority patent/JP6503028B2/ja
Priority to JP2017003819U priority patent/JP3214304U/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/0025—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/003—Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0035—Testing
    • B81C99/0045—End test of the packaged device

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)

Abstract

Capteur angulaire inertiel de type MEMS comprenant un support (1) d'au moins deux masses (2) qui sont montées mobiles par rapport au support et qui sont associées à au moins un actionneur électrostatique (3) et à au moins un détecteur électrostatique (4). Les masses (2) sont suspendues dans un cadre (6) lui-même relié par des moyens de suspension au support. L'actionneur et le détecteur sont montés chacun entre une des masses et le cadre. Procédé d'équilibrage d'un tel capteur pourvu d'au moins un détecteur d'effort monté entre le cadre et le support et d'au moins un ressort électrostatique (8) placé entre le cadre et l'une des masses et asservi pour assurer un équilibrage dynamique du capteur en fonction d'un signal de mesure du capteur d'effort.
FR1103733A 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur Active FR2983574B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR1103733A FR2983574B1 (fr) 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur
PCT/EP2012/074290 WO2013083534A2 (fr) 2011-12-06 2012-12-03 Capteur angulaire inertiel du type à microsystème électromécanique équilibré et procédé d'équilibrage d'un tel capteur
EP12801523.7A EP2788718B1 (fr) 2011-12-06 2012-12-03 Capteur angulaire inertiel du type à microsystème électromécanique équilibré et procédé d'équilibrage d'un tel capteur
RU2014127542/28A RU2566534C1 (ru) 2011-12-06 2012-12-03 Инерциальный датчик угловой скорости типа балансной мэмс и способ балансировки такого датчика
JP2014545200A JP2015507176A (ja) 2011-12-06 2012-12-03 平衡化ｍｅｍｓ型慣性角度センサ及びそのようなセンサを平衡化するための方法
BR112014013173A BR112014013173A2 (pt) 2011-12-06 2012-12-03 sensor angular inercial do tipo mems balanceado e método para balancear tal sensor
CN201280059912.5A CN103998894B (zh) 2011-12-06 2012-12-03 平衡式mems类型惯性角传感器及用于使此类传感器平衡的方法
US14/362,195 US9869551B2 (en) 2011-12-06 2012-12-03 Inertial angular sensor of balanced MEMS type and method for balancing such a sensor
CA2856171A CA2856171A1 (fr) 2011-12-06 2012-12-03 Capteur angulaire inertiel du type a microsysteme electromecanique equilibre et procede d'equilibrage d'un tel capteur
KR1020147015347A KR101700921B1 (ko) 2011-12-06 2012-12-03 평형 ｍｅｍｓ 타입 관성 각 센서 및 그러한 센서의 평형을 유지하는 방법
JP2017151849A JP6503028B2 (ja) 2011-12-06 2017-08-04 平衡化ｍｅｍｓ型慣性角度センサ及びそのようなセンサを平衡化するための方法
JP2017003819U JP3214304U (ja) 2011-12-06 2017-08-21 平衡化ｍｅｍｓ型慣性角度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1103733A FR2983574B1 (fr) 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

Publications (2)

Publication Number Publication Date
FR2983574A1 FR2983574A1 (fr) 2013-06-07
FR2983574B1 true FR2983574B1 (fr) 2014-01-10

Family

ID=45926609

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1103733A Active FR2983574B1 (fr) 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

Country Status (10)

Country Link
US (1) US9869551B2 (fr)
EP (1) EP2788718B1 (fr)
JP (3) JP2015507176A (fr)
KR (1) KR101700921B1 (fr)
CN (1) CN103998894B (fr)
BR (1) BR112014013173A2 (fr)
CA (1) CA2856171A1 (fr)
FR (1) FR2983574B1 (fr)
RU (1) RU2566534C1 (fr)
WO (1) WO2013083534A2 (fr)

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US10828100B2 (en) 2009-08-25 2020-11-10 Covidien Lp Microwave ablation with tissue temperature monitoring
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
FR3013442B1 (fr) 2013-11-20 2015-12-18 Sagem Defense Securite Capteur comprenant des masses mobiles et des moyens de detection des mouvements relatifs des masses
FR3013441B1 (fr) * 2013-11-20 2015-12-18 Sagem Defense Securite Capteur inertiel a masses sismiques imbriquees et procede de fabrication d'un tel capteur
JP6211463B2 (ja) * 2014-05-23 2017-10-11 日立オートモティブシステムズ株式会社 慣性センサ
FR3022996B1 (fr) 2014-06-27 2017-12-01 Thales Sa Capteur inertiel angulaire mems fonctionnant en mode diapason
CA2959799C (fr) * 2014-08-04 2019-09-10 Faez BA-TIS Microactionneur electrostatique a piston
KR101693935B1 (ko) * 2014-11-07 2017-01-06 리치테크 테크놀로지 코포레이션 미세전자기계시스템(mems) 디바이스
FI127203B (en) * 2015-05-15 2018-01-31 Murata Manufacturing Co Vibrating micromechanical sensor for angular velocity
KR101673362B1 (ko) 2015-12-14 2016-11-07 현대자동차 주식회사 가속도 센서 및 그 제조 방법
FR3046223B1 (fr) * 2015-12-23 2018-02-16 Safran Systeme de suspension d'une masse mobile comprenant des moyens de liaison de la masse mobile a linearite optimisee
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
FR3063992B1 (fr) 2017-03-16 2021-07-16 Commissariat Energie Atomique Micro-dispositif comprenant au moins un element mobile
DE102017204669A1 (de) * 2017-03-21 2018-09-27 Robert Bosch Gmbh Sensoreinrichtung
FR3065800B1 (fr) 2017-04-27 2019-08-02 Safran Resonateur configure pour etre integre a un capteur angulaire inertiel
CN107192384B (zh) * 2017-07-24 2022-04-05 深迪半导体(绍兴)有限公司 一种mems三轴陀螺仪
FR3102240B1 (fr) * 2019-10-18 2021-10-01 Safran Electronics & Defense Capteur à compensation mécanique de l’anisotropie de fréquence
CN110779510B (zh) * 2019-11-14 2021-07-13 无锡莱斯能特科技有限公司 一种三轴mems陀螺仪
FR3114146B1 (fr) 2020-09-17 2022-08-12 Safran Electronics & Defense capteur vibrant avec unité d’hybridation
CN114264293B (zh) * 2021-11-22 2023-04-11 陕西华燕航空仪表有限公司 一种高抗振动型全对称mems陀螺仪传感器结构

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Also Published As

Publication number Publication date
JP2015507176A (ja) 2015-03-05
KR101700921B1 (ko) 2017-01-31
EP2788718B1 (fr) 2023-10-04
CN103998894A (zh) 2014-08-20
CN103998894B (zh) 2017-12-05
CA2856171A1 (fr) 2013-06-13
WO2013083534A2 (fr) 2013-06-13
FR2983574A1 (fr) 2013-06-07
WO2013083534A3 (fr) 2013-10-17
JP3214304U (ja) 2018-01-11
JP2018004653A (ja) 2018-01-11
US9869551B2 (en) 2018-01-16
BR112014013173A2 (pt) 2017-06-13
RU2566534C1 (ru) 2015-10-27
JP6503028B2 (ja) 2019-04-17
EP2788718A2 (fr) 2014-10-15
KR20140095537A (ko) 2014-08-01
US20140299947A1 (en) 2014-10-09

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