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FR2959345B1 - LINEAR ACTUATOR WITHOUT CONTACT WITH FLEXIBLE GUIDANCE AND APPLICATION TO A TRAVEL TABLE - Google Patents

LINEAR ACTUATOR WITHOUT CONTACT WITH FLEXIBLE GUIDANCE AND APPLICATION TO A TRAVEL TABLE

Info

Publication number
FR2959345B1
FR2959345B1 FR1001694A FR1001694A FR2959345B1 FR 2959345 B1 FR2959345 B1 FR 2959345B1 FR 1001694 A FR1001694 A FR 1001694A FR 1001694 A FR1001694 A FR 1001694A FR 2959345 B1 FR2959345 B1 FR 2959345B1
Authority
FR
France
Prior art keywords
linear actuator
contact
application
travel table
flexible guidance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1001694A
Other languages
French (fr)
Other versions
FR2959345A1 (en
Inventor
Mathieu Besnard
Paul Sauvageot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISP System
Original Assignee
ISP System
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISP System filed Critical ISP System
Priority to FR1001694A priority Critical patent/FR2959345B1/en
Priority to EP11721805A priority patent/EP2561522A1/en
Priority to PCT/FR2011/000238 priority patent/WO2011131863A1/en
Publication of FR2959345A1 publication Critical patent/FR2959345A1/en
Application granted granted Critical
Publication of FR2959345B1 publication Critical patent/FR2959345B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/066—Electromagnets with movable winding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Linear Motors (AREA)

Abstract

L'invention concerne un actionneur linéaire comprenant un moteur électromagnétique (2) composé d'un élément fixe (3) et d'un élément mobile (4) relativement au dit élément fixe (3). Le moteur électromagnétique (2) est d'un type sans contact entre l'élément fixe (3) et l'élément mobile (4) est à entraînement direct, et en ce que l'élément mobile (4) est guidé par un moyen de guidage (9) flexible disposé entre l'élément fixe (3) et l'élément mobile (4)The invention relates to a linear actuator comprising an electromagnetic motor (2) composed of a fixed element (3) and a movable element (4) relative to said fixed element (3). The electromagnetic motor (2) is of a non-contact type between the fixed member (3) and the movable member (4) is direct-driven, and in that the movable member (4) is guided by a means flexible guide (9) arranged between the fixed element (3) and the movable element (4)

FR1001694A 2010-04-21 2010-04-21 LINEAR ACTUATOR WITHOUT CONTACT WITH FLEXIBLE GUIDANCE AND APPLICATION TO A TRAVEL TABLE Expired - Fee Related FR2959345B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1001694A FR2959345B1 (en) 2010-04-21 2010-04-21 LINEAR ACTUATOR WITHOUT CONTACT WITH FLEXIBLE GUIDANCE AND APPLICATION TO A TRAVEL TABLE
EP11721805A EP2561522A1 (en) 2010-04-21 2011-04-20 Contactless linear actuator comprising a flexible guiding means and application thereof to a displacement table
PCT/FR2011/000238 WO2011131863A1 (en) 2010-04-21 2011-04-20 Contactless linear actuator comprising a flexible guiding means and application thereof to a displacement table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1001694A FR2959345B1 (en) 2010-04-21 2010-04-21 LINEAR ACTUATOR WITHOUT CONTACT WITH FLEXIBLE GUIDANCE AND APPLICATION TO A TRAVEL TABLE

Publications (2)

Publication Number Publication Date
FR2959345A1 FR2959345A1 (en) 2011-10-28
FR2959345B1 true FR2959345B1 (en) 2017-05-19

Family

ID=43446312

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1001694A Expired - Fee Related FR2959345B1 (en) 2010-04-21 2010-04-21 LINEAR ACTUATOR WITHOUT CONTACT WITH FLEXIBLE GUIDANCE AND APPLICATION TO A TRAVEL TABLE

Country Status (3)

Country Link
EP (1) EP2561522A1 (en)
FR (1) FR2959345B1 (en)
WO (1) WO2011131863A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7064770B2 (en) * 2015-11-02 2022-05-11 ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・ミシガン Axial dynamic response bearings for precise positioning
US11231070B2 (en) 2015-11-02 2022-01-25 The Regents Of The University Of Michigan Axially compliant bearing for precision positioning
EP3903129A2 (en) 2018-12-28 2021-11-03 Optotune Consumer AG Actuator for an optical device, particularly for tuning the optical power of a liquid lens

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552795Y2 (en) * 1975-10-31 1980-12-08
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
US6570720B2 (en) * 2000-03-29 2003-05-27 Tdk Corporation Objective lens drive device of optical pickup
JP2002323584A (en) * 2001-02-22 2002-11-08 Nikon Corp Actuator, stage, exposure device, method of manufacturing for device and base-isolating device
JP4407818B2 (en) * 2003-12-08 2010-02-03 信越化学工業株式会社 Compact linear actuator
US7706563B2 (en) * 2005-12-19 2010-04-27 Harman International Industries, Incorporated Concentric radial ring motor
KR100773545B1 (en) * 2006-02-15 2007-11-06 삼성전자주식회사 X-Y stage module with locking device and storage system having the same
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems

Also Published As

Publication number Publication date
EP2561522A1 (en) 2013-02-27
WO2011131863A1 (en) 2011-10-27
FR2959345A1 (en) 2011-10-28

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