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FR2952426B1 - Resonateur a couche metallisee partielle - Google Patents

Resonateur a couche metallisee partielle

Info

Publication number
FR2952426B1
FR2952426B1 FR0905424A FR0905424A FR2952426B1 FR 2952426 B1 FR2952426 B1 FR 2952426B1 FR 0905424 A FR0905424 A FR 0905424A FR 0905424 A FR0905424 A FR 0905424A FR 2952426 B1 FR2952426 B1 FR 2952426B1
Authority
FR
France
Prior art keywords
bell
resonator
metallized layer
annular edge
partially metallized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0905424A
Other languages
English (en)
Other versions
FR2952426A1 (fr
Inventor
Paul Vandebeuque
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0905424A priority Critical patent/FR2952426B1/fr
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to EP10787997.5A priority patent/EP2499458B1/fr
Priority to RU2012123942/28A priority patent/RU2498218C1/ru
Priority to ES10787997T priority patent/ES2765746T3/es
Priority to US13/503,767 priority patent/US9103675B2/en
Priority to KR1020127012144A priority patent/KR20120069761A/ko
Priority to KR1020147026328A priority patent/KR101733719B1/ko
Priority to PCT/EP2010/006834 priority patent/WO2011057767A1/fr
Priority to CN201080050715.8A priority patent/CN102686977B/zh
Publication of FR2952426A1 publication Critical patent/FR2952426A1/fr
Application granted granted Critical
Publication of FR2952426B1 publication Critical patent/FR2952426B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
FR0905424A 2009-11-12 2009-11-12 Resonateur a couche metallisee partielle Expired - Fee Related FR2952426B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0905424A FR2952426B1 (fr) 2009-11-12 2009-11-12 Resonateur a couche metallisee partielle
RU2012123942/28A RU2498218C1 (ru) 2009-11-12 2010-11-10 Частично металлизированный резонатор
ES10787997T ES2765746T3 (es) 2009-11-12 2010-11-10 Resonador con una capa metalizada parcial
US13/503,767 US9103675B2 (en) 2009-11-12 2010-11-10 Resonator with a partial metal-plated layer
EP10787997.5A EP2499458B1 (fr) 2009-11-12 2010-11-10 Résonateur avec une couche métallisée partielle
KR1020127012144A KR20120069761A (ko) 2009-11-12 2010-11-10 부분적인 금속 도금층을 가진 공진기
KR1020147026328A KR101733719B1 (ko) 2009-11-12 2010-11-10 부분적인 금속 도금층을 가진 공진기
PCT/EP2010/006834 WO2011057767A1 (fr) 2009-11-12 2010-11-10 Résonateur avec une couche métallisée partielle
CN201080050715.8A CN102686977B (zh) 2009-11-12 2010-11-10 具有部分镀金属层的谐振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0905424A FR2952426B1 (fr) 2009-11-12 2009-11-12 Resonateur a couche metallisee partielle

Publications (2)

Publication Number Publication Date
FR2952426A1 FR2952426A1 (fr) 2011-05-13
FR2952426B1 true FR2952426B1 (fr) 2012-10-05

Family

ID=42664622

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0905424A Expired - Fee Related FR2952426B1 (fr) 2009-11-12 2009-11-12 Resonateur a couche metallisee partielle

Country Status (8)

Country Link
US (1) US9103675B2 (fr)
EP (1) EP2499458B1 (fr)
KR (2) KR20120069761A (fr)
CN (1) CN102686977B (fr)
ES (1) ES2765746T3 (fr)
FR (1) FR2952426B1 (fr)
RU (1) RU2498218C1 (fr)
WO (1) WO2011057767A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2936049B1 (fr) * 2008-09-16 2010-09-17 Sagem Defense Securite Resonateur a metallisation partielle pour detecteur de parametre angulaire.
CN104197914B (zh) * 2014-08-08 2017-01-25 上海交通大学 一种微型吹塑半球谐振器陀螺及其制备方法
US10119820B2 (en) * 2015-02-10 2018-11-06 Northrop Grumman Systems Corporation Wide rim vibratory resonant sensors
CN105509724B (zh) * 2015-11-30 2019-09-24 上海新跃仪表厂 集成化金属振动陀螺仪
CN105540530B (zh) * 2015-12-18 2017-03-15 东南大学 微玻璃半球谐振陀螺及其圆片级制备方法
WO2017101813A1 (fr) * 2015-12-18 2017-06-22 东南大学 Micro-gyroscope résonnant de type coque tridimensionnelle
CN107055457A (zh) * 2016-12-12 2017-08-18 北京自动化控制设备研究所 一种熔融石英微半球陀螺敏感结构
JP7456412B2 (ja) * 2021-03-30 2024-03-27 株式会社デンソー 慣性センサ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2792722B1 (fr) * 1999-04-23 2001-07-27 Sagem Capteur gyroscopique et appareil de mesure de rotation en comportant application
RU2166734C1 (ru) * 2000-06-05 2001-05-10 Химический факультет МГУ им. М.В. Ломоносова Чувствительный элемент волнового твердотельного гироскопа
US6647785B2 (en) * 2001-07-27 2003-11-18 Litton Systems, Inc. Nuclear radiation hard high accuracy rotation sensor system
FR2851040B1 (fr) * 2003-02-06 2005-03-18 Sagem Resonateur hemispherique a electrode de garde divisee
FR2851041B1 (fr) * 2003-02-06 2005-03-18 Sagem Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
FR2857445B1 (fr) * 2003-07-10 2005-09-02 Sagem Resonateur, notamment pour gyroscope vibrant
US7607350B2 (en) * 2005-10-06 2009-10-27 Northrop Grumman Guidance And Electronics Company, Inc. Circuit board mounting for temperature stress reduction
RU2362975C1 (ru) * 2008-01-09 2009-07-27 Сергей Михайлович Бражнев Твердотельный волновой гироскоп
FR2932563B1 (fr) * 2008-06-13 2010-06-18 Sagem Defense Securite Capteur de rotation inertiel a derive compensee.
FR2936049B1 (fr) * 2008-09-16 2010-09-17 Sagem Defense Securite Resonateur a metallisation partielle pour detecteur de parametre angulaire.
US8631702B2 (en) * 2010-05-30 2014-01-21 Honeywell International Inc. Hemitoroidal resonator gyroscope

Also Published As

Publication number Publication date
KR20140126396A (ko) 2014-10-30
FR2952426A1 (fr) 2011-05-13
CN102686977A (zh) 2012-09-19
EP2499458A1 (fr) 2012-09-19
US9103675B2 (en) 2015-08-11
KR20120069761A (ko) 2012-06-28
US20120204641A1 (en) 2012-08-16
ES2765746T3 (es) 2020-06-10
WO2011057767A1 (fr) 2011-05-19
RU2498218C1 (ru) 2013-11-10
EP2499458B1 (fr) 2019-07-31
KR101733719B1 (ko) 2017-05-10
CN102686977B (zh) 2015-07-22

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Legal Events

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Year of fee payment: 7

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Effective date: 20170111

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Effective date: 20210705