FR2942660B1 - SENSOR DEVICE BASED ON NANOWLAS - Google Patents

SENSOR DEVICE BASED ON NANOWLAS

Info

Publication number: FR2942660B1
Authority: FR; France
Prior art keywords: nanowlas; sensor device; device based; sensor
Prior art date: 2009-02-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR0951251A

Other languages

French (fr)

Other versions

FR2942660A1 (en

Inventor

Laurent Duraffourg

Philippe Andreucci

Thomas Ernst

Sebastien Hentz

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

Original Assignee

Commissariat a lEnergie Atomique CEA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-02-27

Filing date

2009-02-27

Publication date

2011-04-01

2009-02-27 Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA

2009-02-27 Priority to FR0951251A priority Critical patent/FR2942660B1/en

2010-02-24 Priority to EP18187837.2A priority patent/EP3424874B1/en

2010-02-24 Priority to EP18187843.0A priority patent/EP3424875B1/en

2010-02-24 Priority to EP10154557.2A priority patent/EP2223887B1/en

2010-02-26 Priority to US12/713,909 priority patent/US9382108B2/en

2010-02-26 Priority to JP2010041878A priority patent/JP2010204098A/en

2010-09-03 Publication of FR2942660A1 publication Critical patent/FR2942660A1/en

2011-04-01 Application granted granted Critical

2011-04-01 Publication of FR2942660B1 publication Critical patent/FR2942660B1/en

Status Expired - Fee Related legal-status Critical Current

2029-02-27 Anticipated expiration legal-status Critical

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0214—Biosensors; Chemical sensors
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges

Landscapes

Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Micromachines (AREA)
Pressure Sensors (AREA)

FR0951251A 2009-02-27 2009-02-27 SENSOR DEVICE BASED ON NANOWLAS Expired - Fee Related FR2942660B1 (en)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
FR0951251A FR2942660B1 (en)	2009-02-27	2009-02-27	SENSOR DEVICE BASED ON NANOWLAS
EP18187837.2A EP3424874B1 (en)	2009-02-27	2010-02-24	Sensor device based on nanowires with mobile mass
EP18187843.0A EP3424875B1 (en)	2009-02-27	2010-02-24	Sensor device based on nanowires of increasing length
EP10154557.2A EP2223887B1 (en)	2009-02-27	2010-02-24	Sensor using nanowires
US12/713,909 US9382108B2 (en)	2009-02-27	2010-02-26	Nanowire sensor device
JP2010041878A JP2010204098A (en)	2009-02-27	2010-02-26	Nanowire sensor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR0951251A FR2942660B1 (en)	2009-02-27	2009-02-27	SENSOR DEVICE BASED ON NANOWLAS

Publications (2)

Publication Number	Publication Date
FR2942660A1 FR2942660A1 (en)	2010-09-03
FR2942660B1 true FR2942660B1 (en)	2011-04-01

Family

ID=41465391

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR0951251A Expired - Fee Related FR2942660B1 (en)	2009-02-27	2009-02-27	SENSOR DEVICE BASED ON NANOWLAS

Country Status (4)

Country	Link
US (1)	US9382108B2 (en)
EP (3)	EP2223887B1 (en)
JP (1)	JP2010204098A (en)
FR (1)	FR2942660B1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2923646A1 (en) *	2007-11-09	2009-05-15	Commissariat Energie Atomique	MEMORY CELL SRAM WITH TRANSISTORS WITH VERTICAL MULTI-CHANNEL STRUCTURE
FR2995691B1 (en) *	2012-09-19	2014-10-10	Commissariat Energie Atomique	THERMAL FLOW SENSOR, GAS SENSOR COMPRISING AT LEAST ONE SUCH SENSOR AND PIRANI GAUGE COMPRISING AT LEAST ONE SUCH SENSOR
WO2014169960A1 (en) *	2013-04-19	2014-10-23	Koc Universitesi	A nanomechanical resonator array and production method thereof
FR3017463B1 (en) *	2014-02-13	2020-11-13	Commissariat Energie Atomique	SUSPENDED-STRUCTURE GAS CONCENTRATION SENSOR
WO2017170748A1 (en) *	2016-03-31	2017-10-05	京セラ株式会社	Stress sensor
KR101919344B1 (en)	2016-12-26	2018-11-20	한양대학교 에리카산학협력단	METHOD FOR FABRICATING ZnO HUMIDITY SENSOR DEVICE
FR3086386B1 (en) *	2018-09-21	2020-12-04	Commissariat Energie Atomique	MEASURING DEVICE CONTAINING A SUSPENDED SEMICONDUCTOR WIRE
FR3110284B1 (en) *	2020-05-14	2023-01-13	Commissariat Energie Atomique	Detection device using piezoresistive transduction

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6803840B2 (en) *	2001-03-30	2004-10-12	California Institute Of Technology	Pattern-aligned carbon nanotube growth and tunable resonator apparatus
US7051945B2 (en) *	2002-09-30	2006-05-30	Nanosys, Inc	Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
US7302856B2 (en) *	2003-05-07	2007-12-04	California Institute Of Technology	Strain sensors based on nanowire piezoresistor wires and arrays
US7473943B2 (en) *	2004-10-15	2009-01-06	Nanosys, Inc.	Gate configuration for nanowire electronic devices
FR2884648B1 (en) *	2005-04-13	2007-09-07	Commissariat Energie Atomique	STRUCTURE AND METHOD FOR PRODUCING A MICROELECTRONIC DEVICE HAVING ONE OR MORE QUANTUM THREADS FOR FORMING A CHANNEL OR MORE CHANNELS OF TRANSISTORS
AT503995B1 (en) *	2006-08-07	2009-03-15	Arc Seibersdorf Res Gmbh	MINIATURE SENSOR ACCELERATION
US7819005B2 (en) *	2007-06-25	2010-10-26	Micron Technology, Inc.	Sensor and transducer devices comprising carbon nanotubes, methods of making and using the same

2009
- 2009-02-27 FR FR0951251A patent/FR2942660B1/en not_active Expired - Fee Related
2010
- 2010-02-24 EP EP10154557.2A patent/EP2223887B1/en active Active
- 2010-02-24 EP EP18187843.0A patent/EP3424875B1/en active Active
- 2010-02-24 EP EP18187837.2A patent/EP3424874B1/en active Active
- 2010-02-26 US US12/713,909 patent/US9382108B2/en active Active
- 2010-02-26 JP JP2010041878A patent/JP2010204098A/en active Pending

Also Published As

Publication number	Publication date
EP3424874B1 (en)	2020-09-30
EP2223887B1 (en)	2018-09-12
EP3424874A1 (en)	2019-01-09
FR2942660A1 (en)	2010-09-03
EP3424875A1 (en)	2019-01-09
JP2010204098A (en)	2010-09-16
US9382108B2 (en)	2016-07-05
EP3424875B1 (en)	2020-04-15
EP2223887A1 (en)	2010-09-01
US20100219489A1 (en)	2010-09-02

Publication	Publication Date	Title
FR2954502B1 (en)	2014-05-16	SENSOR CONTROL DEVICE
FR2949008B1 (en)	2011-09-16	CAPACITIVE DETECTION DEVICE WITH FUNCTION INTEGRATION.
BRPI0916736A2 (en)	2016-11-29	pressure sensing device
SE0801894L (en)	2008-09-03	Sensor device
BRPI0914874A2 (en)	2015-11-24	pressure sensor device
BRPI0915675A2 (en)	2014-02-04	MEASURING DEVICE
BRPI0914258A2 (en)	2015-11-03	device pressure sensor
DE602006012799D1 (en)	2010-04-22	Image acquisition device with distance measurement function
DE112009005292B8 (en)	2015-04-02	Object detecting device
FR2942660B1 (en)	2011-04-01	SENSOR DEVICE BASED ON NANOWLAS
BRPI0813440A2 (en)	2014-12-23	MEASURING DEVICE
DE112010004949T8 (en)	2013-01-24	Operation amount detecting device
BR112012015646A2 (en)	2017-09-12	measuring device
BRPI0914413A2 (en)	2015-09-01	Device including a motion detection circuit
FR2948436B1 (en)	2016-07-22	OPTOELECTRONIC SENSOR
FR2948455B1 (en)	2016-12-16	PRESSURE SENSOR DEVICE
FR2953818B1 (en)	2012-06-01	FILLING DEVICE
FR2914428B1 (en)	2012-12-14	LEAK DETECTION DEVICE
FR2915566B3 (en)	2009-08-07	DEVICE FOR MEASURING DISTANCE.
FR2945667B1 (en)	2011-12-16	INTEGRATED IMAGE SENSOR WITH VERY HIGH SENSITIVITY.
FR2943266B1 (en)	2013-07-05	SUDOBRASING DEVICE
FR2903435B1 (en)	2008-08-29	DEVICE FOR MEASURING MICROPOWER RESISTANCE
FR2934895B1 (en)	2010-08-27	RADIAL POSITION SENSOR DEVICE EXTENDED BY MORE THAN 90 °
FR2948974B1 (en)	2011-10-14	PRECONTRAINT DEVICE WITH RADIAL ACTION
DE502008000634D1 (en)	2010-06-24	Optoelectronic sensor device

Legal Events

Date	Code	Title	Description
2016-02-29	PLFP	Fee payment	Year of fee payment: 8
2017-02-28	PLFP	Fee payment	Year of fee payment: 9
2018-02-26	PLFP	Fee payment	Year of fee payment: 10
2020-02-28	PLFP	Fee payment	Year of fee payment: 12
2021-02-26	PLFP	Fee payment	Year of fee payment: 13
2022-11-04	ST	Notification of lapse	Effective date: 20221005