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FR2818376B1 - Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale - Google Patents

Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale

Info

Publication number
FR2818376B1
FR2818376B1 FR0016529A FR0016529A FR2818376B1 FR 2818376 B1 FR2818376 B1 FR 2818376B1 FR 0016529 A FR0016529 A FR 0016529A FR 0016529 A FR0016529 A FR 0016529A FR 2818376 B1 FR2818376 B1 FR 2818376B1
Authority
FR
France
Prior art keywords
visualization
ellipsometric
bidimensional
sample
spatial resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0016529A
Other languages
English (en)
Other versions
FR2818376A1 (fr
Inventor
Dominique Ausserre
Marie Pierre Valignat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0016529A priority Critical patent/FR2818376B1/fr
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to IL15648001A priority patent/IL156480A0/xx
Priority to PL363425A priority patent/PL204813B1/pl
Priority to CNB018220800A priority patent/CN1275030C/zh
Priority to AU2810802A priority patent/AU2810802A/xx
Priority to CA2431943A priority patent/CA2431943C/fr
Priority to AU2002228108A priority patent/AU2002228108B8/en
Priority to JP2002551364A priority patent/JP4163951B2/ja
Priority to US10/450,958 priority patent/US7209232B2/en
Priority to PCT/FR2001/004046 priority patent/WO2002050513A1/fr
Priority to EP01989637A priority patent/EP1346201A1/fr
Priority to KR1020037008184A priority patent/KR100923271B1/ko
Publication of FR2818376A1 publication Critical patent/FR2818376A1/fr
Application granted granted Critical
Publication of FR2818376B1 publication Critical patent/FR2818376B1/fr
Priority to HK04107934A priority patent/HK1065102A1/xx
Priority to US11/783,476 priority patent/US7307726B2/en
Priority to JP2007314460A priority patent/JP4863979B2/ja
Priority to IL193361A priority patent/IL193361A0/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0016529A 2000-12-18 2000-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale Expired - Fee Related FR2818376B1 (fr)

Priority Applications (16)

Application Number Priority Date Filing Date Title
FR0016529A FR2818376B1 (fr) 2000-12-18 2000-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale
EP01989637A EP1346201A1 (fr) 2000-12-18 2001-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale
CNB018220800A CN1275030C (zh) 2000-12-18 2001-12-18 用于样品椭圆偏振光二维显示的装置,显示方法及具有空间分辨率的椭圆偏振光测量方法
AU2810802A AU2810802A (en) 2000-12-18 2001-12-18 Device for ellipsometric two-dimensional display of a sample, display method andellipsometric measurement method with spatial resolution
CA2431943A CA2431943C (fr) 2000-12-18 2001-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale
AU2002228108A AU2002228108B8 (en) 2000-12-18 2001-12-18 Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution
JP2002551364A JP4163951B2 (ja) 2000-12-18 2001-12-18 サンプルの偏光解析二次元表示装置、およびこの表示装置を用いた測定方法
US10/450,958 US7209232B2 (en) 2000-12-18 2001-12-18 Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution
IL15648001A IL156480A0 (en) 2000-12-18 2001-12-18 Device for ellipsometric two-dimensional display of sample, display method and ellipsometric measurement method with spatial resolution
PL363425A PL204813B1 (pl) 2000-12-18 2001-12-18 Zespół optyczny do elipsometrycznego, dwuwymiarowego obrazowania obiektu umieszczonego w ośrodku padania światła i sposób elipsometrycznego, dwuwymiarowego obrazowania obiektu umieszczonego w ośrodku padania światła
KR1020037008184A KR100923271B1 (ko) 2000-12-18 2001-12-18 샘플의 엘립소메트릭 2차원 디스플레이용 장치,디스플레이 방법, 및 공간 분해능을 갖는 엘립소메트릭측정 방법
PCT/FR2001/004046 WO2002050513A1 (fr) 2000-12-18 2001-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale
HK04107934A HK1065102A1 (en) 2000-12-18 2004-10-14 Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution
US11/783,476 US7307726B2 (en) 2000-12-18 2007-04-10 Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution
JP2007314460A JP4863979B2 (ja) 2000-12-18 2007-12-05 偏光解析測定方法および装置
IL193361A IL193361A0 (en) 2000-12-18 2008-08-11 Device for ellipsometric two-dimensional display of sample, display method and ellipsometric measurement method with spatial resolution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0016529A FR2818376B1 (fr) 2000-12-18 2000-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale

Publications (2)

Publication Number Publication Date
FR2818376A1 FR2818376A1 (fr) 2002-06-21
FR2818376B1 true FR2818376B1 (fr) 2003-03-28

Family

ID=8857823

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0016529A Expired - Fee Related FR2818376B1 (fr) 2000-12-18 2000-12-18 Dispositif de visualisation bidimensionnelle ellipsometrique d'un echantillon, procede de visualisation et procede de mesure ellipsometrique avec resolution spatiale

Country Status (12)

Country Link
US (2) US7209232B2 (fr)
EP (1) EP1346201A1 (fr)
JP (2) JP4163951B2 (fr)
KR (1) KR100923271B1 (fr)
CN (1) CN1275030C (fr)
AU (2) AU2002228108B8 (fr)
CA (1) CA2431943C (fr)
FR (1) FR2818376B1 (fr)
HK (1) HK1065102A1 (fr)
IL (2) IL156480A0 (fr)
PL (1) PL204813B1 (fr)
WO (1) WO2002050513A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2841339B1 (fr) * 2002-06-19 2004-09-10 Centre Nat Rech Scient Supports anti-reflechissants et supports amplificateurs de contraste pour la lumiere polarisee en reflexion
KR20040047343A (ko) * 2002-11-29 2004-06-05 학교법인 서강대학교 복소 반사 계수비의 국지적인 차이를 이용한 고체표면에서의 단백질 결합 검출방법
DE102004012125B3 (de) * 2004-03-12 2005-09-01 Nanofilm Technologie Gmbh Ellipsometrisches Messverfahren mit ROI-gestützter Bildkorrektur
EP1584914A1 (fr) * 2004-04-08 2005-10-12 Sony Deutschland GmbH Méthode de détection par ellipsométrie d'hybride comprenant au moins deux espèces, fixé sur un substrat
FR2872910B1 (fr) * 2004-07-07 2006-10-13 Nanoraptor Sa Composant optique pour l'observation d'un echantillon nanometrique, systeme comprenant un tel composant, procede d'analyse mettant en oeuvre ce composant, et leurs applications
US7453577B2 (en) * 2004-12-14 2008-11-18 Asml Netherlands B.V. Apparatus and method for inspecting a patterned part of a sample
US7511293B2 (en) * 2005-02-25 2009-03-31 Nanometrics Incorporated Scatterometer having a computer system that reads data from selected pixels of the sensor array
WO2009030889A1 (fr) * 2007-09-04 2009-03-12 Aberystwyth University Ellipsomètre d'imagerie
JP5751470B2 (ja) * 2008-08-20 2015-07-22 国立大学法人東北大学 形状・傾斜検知及び／又は計測光学装置及び方法並びにその関連装置
JP5895305B2 (ja) * 2011-12-06 2016-03-30 シーシーエス株式会社 検査用照明装置及び検査用照明方法
JP6029684B2 (ja) * 2011-12-31 2016-11-24 ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッドＪ．Ａ．Ｗｏｏｌｌａｍ Ｃｏ．，Ｉｎｃ． テラヘルツエリプソメーターシステム及びその使用方法
FR2993987B1 (fr) * 2012-07-26 2016-12-09 Centre Nat Rech Scient Procedes optiques pour l'observation d'echantillons et pour la detection ou le dosage d'especes chimiques ou biologiques.
GB201308434D0 (en) * 2013-05-10 2013-06-19 Innovia Films Sarl Authentication apparatus and method
US9546943B1 (en) * 2015-03-21 2017-01-17 J.A. Woollam Co., Inc System and method for investigating change in optical properties of a porous effective substrate surface as a function of a sequence of solvent partial pressures at atmospheric pressure
CN109141224B (zh) * 2018-10-08 2020-05-22 电子科技大学 一种基于结构光的干涉反射式光学薄膜显微测量方法
CN114674193B (zh) * 2022-03-04 2024-05-07 海克斯康制造智能技术(青岛)有限公司 自定心测量装置及测量机
CN114994058A (zh) * 2022-06-09 2022-09-02 杭州利珀科技有限公司 硅片堆叠检测系统及方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL96483A (en) * 1990-11-27 1995-07-31 Orbotech Ltd Optical inspection method and apparatus
JP2787678B2 (ja) * 1992-04-24 1998-08-20 聡 河田 偏光顕微鏡
IL104708A (en) * 1993-02-12 1995-12-31 Orbotech Ltd Device and method for optical inspection of items
DE4311726C2 (de) * 1993-04-08 1996-02-08 Fraunhofer Ges Forschung Verfahren und Vorrichtun zur Erweiterung des Meßbereichs bei Nomarski-Mikroskopen
JP3106790B2 (ja) * 1993-09-01 2000-11-06 株式会社日立製作所 薄膜特性値測定方法及び装置
JP3394811B2 (ja) * 1994-03-22 2003-04-07 浜松ホトニクス株式会社 偏光顕微鏡システム
GB9610471D0 (en) * 1996-05-18 1996-07-24 Univ Nottingham Optical measurement
DE19708036C2 (de) * 1997-02-27 2000-06-29 Gunther Elender Ellipsometrisches Mikroskop
EP1012571A1 (fr) * 1997-07-11 2000-06-28 Therma-Wave Inc. Dispositif permettant d'analyser des couches minces empilees sur des semi-conducteurs
FR2779825B1 (fr) * 1998-06-16 2000-09-01 Centre Nat Rech Scient Procede et dispositif de commande de la fabrication d'un composant en couche mince a partir d'une dissociation de gaz

Also Published As

Publication number Publication date
US20070188755A1 (en) 2007-08-16
AU2002228108B2 (en) 2005-12-01
KR20030061006A (ko) 2003-07-16
AU2002228108B8 (en) 2006-02-16
US20040085537A1 (en) 2004-05-06
FR2818376A1 (fr) 2002-06-21
CN1275030C (zh) 2006-09-13
US7307726B2 (en) 2007-12-11
CA2431943A1 (fr) 2002-06-27
IL193361A0 (en) 2011-08-01
JP4863979B2 (ja) 2012-01-25
CN1489688A (zh) 2004-04-14
EP1346201A1 (fr) 2003-09-24
PL204813B1 (pl) 2010-02-26
AU2810802A (en) 2002-07-01
US7209232B2 (en) 2007-04-24
WO2002050513A1 (fr) 2002-06-27
IL156480A0 (en) 2004-01-04
CA2431943C (fr) 2010-05-04
JP2008122394A (ja) 2008-05-29
HK1065102A1 (en) 2005-02-08
JP2004516469A (ja) 2004-06-03
KR100923271B1 (ko) 2009-10-23
PL363425A1 (en) 2004-11-15
JP4163951B2 (ja) 2008-10-08

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Legal Events

Date Code Title Description
TQ Partial transmission of property
CL Concession to grant licences
PLFP Fee payment

Year of fee payment: 16

PLFP Fee payment

Year of fee payment: 17

PLFP Fee payment

Year of fee payment: 18

ST Notification of lapse

Effective date: 20190906