Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
  • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/67005—Apparatus not specifically provided for elsewhere
  • H01L21/67242—Apparatus for monitoring, sorting or marking
  • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
  • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
  • G01R31/302—Contactless testing
  • G01R31/305—Contactless testing using electron beams
  • G01R31/307—Contactless testing using electron beams of integrated circuits
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
  • H01L22/10—Measuring as part of the manufacturing process
  • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/26—Electron or ion microscopes
  • H01J2237/28—Scanning microscopes
  • H01J2237/2813—Scanning microscopes characterised by the application
  • H01J2237/2817—Pattern inspection

Landscapes

• Engineering & Computer Science (AREA)
• Manufacturing & Machinery (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Computer Hardware Design (AREA)
• General Physics & Mathematics (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• General Engineering & Computer Science (AREA)
• Testing Or Measuring Of Semiconductors Or The Like (AREA)
• Analysing Materials By The Use Of Radiation (AREA)
• Tests Of Electronic Circuits (AREA)

Applications Claiming Priority (1)

Publications (2)

Family

ID=19700921

Family Applications (1)

Country Status (7)

Families Citing this family (11)

Family Cites Families (8)

• 2000
  • 2000-11-23 KR KR1020000070009A patent/KR100351059B1/en not_active IP Right Cessation
• 2001
  • 2001-09-25 TW TW090123595A patent/TW503504B/en not_active IP Right Cessation
  • 2001-10-16 FR FR0113329A patent/FR2817621B1/en not_active Expired - Fee Related
  • 2001-10-16 CN CNB011364254A patent/CN1193419C/en not_active Expired - Fee Related
  • 2001-10-17 DE DE10151127A patent/DE10151127A1/en not_active Withdrawn
  • 2001-10-17 GB GB0124937A patent/GB2372629B/en not_active Expired - Fee Related
  • 2001-11-15 JP JP2001350215A patent/JP3833928B2/en not_active Expired - Fee Related

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