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FR2735225B1 - Capteur de position optoelectronique et systeme de compensation pour un tel capteur - Google Patents

Capteur de position optoelectronique et systeme de compensation pour un tel capteur

Info

Publication number
FR2735225B1
FR2735225B1 FR9506902A FR9506902A FR2735225B1 FR 2735225 B1 FR2735225 B1 FR 2735225B1 FR 9506902 A FR9506902 A FR 9506902A FR 9506902 A FR9506902 A FR 9506902A FR 2735225 B1 FR2735225 B1 FR 2735225B1
Authority
FR
France
Prior art keywords
sensor
compensation system
optoelectronic position
position sensor
optoelectronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9506902A
Other languages
English (en)
Other versions
FR2735225A1 (fr
Inventor
Marc Osajda
Arnaud Delpoux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Freescale Semiconducteurs France SAS
Original Assignee
Motorola Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconducteurs SA filed Critical Motorola Semiconducteurs SA
Priority to FR9506902A priority Critical patent/FR2735225B1/fr
Priority to US08/656,997 priority patent/US5773820A/en
Priority to EP96108833A priority patent/EP0749003A1/fr
Priority to JP8173022A priority patent/JPH09105645A/ja
Publication of FR2735225A1 publication Critical patent/FR2735225A1/fr
Application granted granted Critical
Publication of FR2735225B1 publication Critical patent/FR2735225B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/001—Calibrating encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR9506902A 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur Expired - Fee Related FR2735225B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9506902A FR2735225B1 (fr) 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur
US08/656,997 US5773820A (en) 1995-06-12 1996-05-29 Rotary position sensor with reference and grey scales
EP96108833A EP0749003A1 (fr) 1995-06-12 1996-06-03 Capteurs opto-électronique et système de compensation
JP8173022A JPH09105645A (ja) 1995-06-12 1996-06-11 光電子センサおよびその補償システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9506902A FR2735225B1 (fr) 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur

Publications (2)

Publication Number Publication Date
FR2735225A1 FR2735225A1 (fr) 1996-12-13
FR2735225B1 true FR2735225B1 (fr) 1997-09-05

Family

ID=9479851

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9506902A Expired - Fee Related FR2735225B1 (fr) 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur

Country Status (4)

Country Link
US (1) US5773820A (fr)
EP (1) EP0749003A1 (fr)
JP (1) JPH09105645A (fr)
FR (1) FR2735225B1 (fr)

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DE10056605A1 (de) 2000-11-15 2002-05-23 Kostal Leopold Gmbh & Co Kg Verfahren zur Signalauswertung einer optoelektronischen Weg-oder Winkelmeßeinrichtung sowie Verwendung eines solchen Verfahrens
US7390689B2 (en) * 2001-05-25 2008-06-24 President And Fellows Of Harvard College Systems and methods for light absorption and field emission using microstructured silicon
US7057256B2 (en) 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
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US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
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WO2011035188A2 (fr) * 2009-09-17 2011-03-24 Sionyx, Inc. Dispositifs d'imagerie photosensibles et procédés associés
US9911781B2 (en) 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
US9673243B2 (en) 2009-09-17 2017-06-06 Sionyx, Llc Photosensitive imaging devices and associated methods
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US8309906B2 (en) 2010-06-10 2012-11-13 Mitutoyo Corporation Absolute optical encoder with long range intensity modulation on scale
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US9091569B2 (en) 2011-04-19 2015-07-28 Caterpillar Inc. Opacity-based rotary position sensor and method
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WO2013010127A2 (fr) 2011-07-13 2013-01-17 Sionyx, Inc. Dispositifs de prise d'images biométriques et procédés associés
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US8941052B2 (en) 2011-12-23 2015-01-27 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
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JP6199596B2 (ja) 2012-12-17 2017-09-20 株式会社ミツトヨ 光学エンコーダ用の照明部
EP2743650B1 (fr) 2012-12-17 2017-05-31 Mitutoyo Corporation Partie d'éclairage pour un codeur optique à résolution adaptable
WO2014127376A2 (fr) 2013-02-15 2014-08-21 Sionyx, Inc. Capteur d'images cmos à plage dynamique étendue ayant des propriétés anti-éblouissement, et procédés associés
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JP5821109B2 (ja) * 2013-06-17 2015-11-24 株式会社安川電機 エンコーダ付きモータ
WO2014209421A1 (fr) 2013-06-29 2014-12-31 Sionyx, Inc. Régions texturées formées de tranchées peu profondes et procédés associés.
DE102015209716B4 (de) 2014-05-29 2023-04-20 Mitutoyo Corporation Optischer Codierer mit anpassbarer Auflösung
US9267819B2 (en) 2014-06-12 2016-02-23 Mitutoyo Corporation Absolute position encoder scale having plates alternating with varying recesses
US9435663B2 (en) 2014-08-22 2016-09-06 Mitutoyo Corporation Absolute position encoder scale having layers in a stacked configuration
US9612136B1 (en) 2015-09-30 2017-04-04 Mitutoyo Corporation Absolute position encoder including a redundant spatial phase signal
US9958294B2 (en) 2016-06-30 2018-05-01 Mitutoyo Corporation Absolute position encoder including scale with varying spatial characteristic and utilizing Fourier transform or other signal processing
US9772202B1 (en) * 2016-07-01 2017-09-26 Mitutoyo Corporation Absolute position encoder combining signals of two widely separated wavelengths
US10422666B2 (en) 2016-12-23 2019-09-24 Mitutoyo Corporation Electronic position encoder and method for reducing short range errors
US10168189B1 (en) 2017-06-29 2019-01-01 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis
US10648838B2 (en) 2017-06-29 2020-05-12 Mitutoyo Corporation Contamination and defect resistant rotary optical encoder configuration including a rotary scale with yawed scale grating bars and structured illumination generating arrangement with a beam deflector configuration
US10295378B2 (en) 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals
US10295648B2 (en) 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals
US10302466B2 (en) 2017-06-29 2019-05-28 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including first and second illumination source diffraction gratings arranged in first and second parallel planes for providing displacement signals
US10724877B2 (en) 2017-10-23 2020-07-28 Mitutoyo Corporation Compact pseudorandom scale and read head for an inductive type absolute position encoder
DE102018251727A1 (de) 2017-12-29 2019-07-04 Mitutoyo Corporation Verschmutzungs- und defektbeständige optische Drehpositionsgeberkonfiguration zum Bereitstellen von Verschiebungssignalen
CN207963923U (zh) * 2018-01-17 2018-10-12 歌尔科技有限公司 一种产品性能测试系统
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FR3126491B1 (fr) 2021-09-01 2023-07-21 Codechamp Dispositif de reglage d’un cœur optique a photodetecteurs et procede de reglage

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Also Published As

Publication number Publication date
JPH09105645A (ja) 1997-04-22
US5773820A (en) 1998-06-30
FR2735225A1 (fr) 1996-12-13
EP0749003A1 (fr) 1996-12-18

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