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FR2711820B1 - Système d'inspection optique automatique à base pondérée de données de transmission. - Google Patents

Système d'inspection optique automatique à base pondérée de données de transmission.

Info

Publication number
FR2711820B1
FR2711820B1 FR9412826A FR9412826A FR2711820B1 FR 2711820 B1 FR2711820 B1 FR 2711820B1 FR 9412826 A FR9412826 A FR 9412826A FR 9412826 A FR9412826 A FR 9412826A FR 2711820 B1 FR2711820 B1 FR 2711820B1
Authority
FR
France
Prior art keywords
transmission data
data based
automatic transmission
inspection system
optical inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9412826A
Other languages
English (en)
Other versions
FR2711820A1 (fr
Inventor
Heinz Joseph Gerber
Ronald J Straayer
Bruce L Davidson
Scott P Snietka
James P Kohler
Peter M Walsh
Dana W Seniff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gerber Systems Corp
Original Assignee
Gerber Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gerber Systems Corp filed Critical Gerber Systems Corp
Publication of FR2711820A1 publication Critical patent/FR2711820A1/fr
Application granted granted Critical
Publication of FR2711820B1 publication Critical patent/FR2711820B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0005—Apparatus or processes for manufacturing printed circuits for designing circuits by computer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Quality & Reliability (AREA)
  • General Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
FR9412826A 1993-10-26 1994-10-26 Système d'inspection optique automatique à base pondérée de données de transmission. Expired - Fee Related FR2711820B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/143,434 US5517234A (en) 1993-10-26 1993-10-26 Automatic optical inspection system having a weighted transition database

Publications (2)

Publication Number Publication Date
FR2711820A1 FR2711820A1 (fr) 1995-05-05
FR2711820B1 true FR2711820B1 (fr) 1996-06-28

Family

ID=22504061

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9412826A Expired - Fee Related FR2711820B1 (fr) 1993-10-26 1994-10-26 Système d'inspection optique automatique à base pondérée de données de transmission.

Country Status (5)

Country Link
US (2) US5517234A (fr)
JP (1) JP2733202B2 (fr)
DE (1) DE4438278C2 (fr)
FR (1) FR2711820B1 (fr)
GB (1) GB2283317B (fr)

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KR101647010B1 (ko) * 2008-06-19 2016-08-10 케이엘에이-텐코어 코오포레이션 웨이퍼의 하나 이상의 특성들을 결정하기 위한 컴퓨터-구현 방법들, 컴퓨터-판독 가능 매체, 및 시스템들
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Also Published As

Publication number Publication date
FR2711820A1 (fr) 1995-05-05
JPH07182521A (ja) 1995-07-21
DE4438278C2 (de) 1997-08-28
GB2283317A (en) 1995-05-03
US5608453A (en) 1997-03-04
JP2733202B2 (ja) 1998-03-30
GB2283317B (en) 1998-04-22
DE4438278A1 (de) 1995-04-27
US5517234A (en) 1996-05-14
GB9421447D0 (en) 1994-12-07

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