FR2586658B1 - Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre - Google Patents
Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvreInfo
- Publication number
- FR2586658B1 FR2586658B1 FR8513295A FR8513295A FR2586658B1 FR 2586658 B1 FR2586658 B1 FR 2586658B1 FR 8513295 A FR8513295 A FR 8513295A FR 8513295 A FR8513295 A FR 8513295A FR 2586658 B1 FR2586658 B1 FR 2586658B1
- Authority
- FR
- France
- Prior art keywords
- baskets
- nacelle
- silicon wafers
- implementing machine
- online transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8513295A FR2586658B1 (fr) | 1985-08-30 | 1985-08-30 | Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8513295A FR2586658B1 (fr) | 1985-08-30 | 1985-08-30 | Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2586658A1 FR2586658A1 (fr) | 1987-03-06 |
| FR2586658B1 true FR2586658B1 (fr) | 1987-12-24 |
Family
ID=9322703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8513295A Expired FR2586658B1 (fr) | 1985-08-30 | 1985-08-30 | Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2586658B1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19549490C2 (de) * | 1995-01-05 | 2001-01-18 | Steag Micro Tech Gmbh | Anlage zur chemischen Naßbehandlung |
| CN109279502A (zh) * | 2018-11-30 | 2019-01-29 | 江苏润阳悦达光伏科技有限公司 | 制绒槽式清洗机花篮的应急吊具 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2472446A1 (fr) * | 1979-12-27 | 1981-07-03 | Guy Mongodin | Appareil pour le transfert de plaquettes minces disposees verticalement dans un panier rainure de rangement |
| US4493606A (en) * | 1982-05-24 | 1985-01-15 | Proconics International, Inc. | Wafer transfer apparatus |
-
1985
- 1985-08-30 FR FR8513295A patent/FR2586658B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2586658A1 (fr) | 1987-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |