FR2571896B1 - Photodetecteur infrarouge comprenant une couche epitaxiale de tellurure de cadmium et de mercure et son procede de fabrication - Google Patents
Photodetecteur infrarouge comprenant une couche epitaxiale de tellurure de cadmium et de mercure et son procede de fabricationInfo
- Publication number
- FR2571896B1 FR2571896B1 FR8507085A FR8507085A FR2571896B1 FR 2571896 B1 FR2571896 B1 FR 2571896B1 FR 8507085 A FR8507085 A FR 8507085A FR 8507085 A FR8507085 A FR 8507085A FR 2571896 B1 FR2571896 B1 FR 2571896B1
- Authority
- FR
- France
- Prior art keywords
- mercury
- manufacturing
- epitaxial layer
- cadmium telluride
- infrared photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/465—Chemical or electrical treatment, e.g. electrolytic etching
-
- H01L31/02966—
-
- H01L31/1832—
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Light Receiving Elements (AREA)
- Glass Compositions (AREA)
- Measurement Of Radiation (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8324512 | 1983-09-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2571896A1 FR2571896A1 (fr) | 1986-04-18 |
FR2571896B1 true FR2571896B1 (fr) | 1988-07-22 |
Family
ID=10548717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8507085A Expired FR2571896B1 (fr) | 1983-09-13 | 1985-05-06 | Photodetecteur infrarouge comprenant une couche epitaxiale de tellurure de cadmium et de mercure et son procede de fabrication |
Country Status (8)
Country | Link |
---|---|
DE (1) | DE3447954A1 (fr) |
DK (1) | DK436984A (fr) |
FR (1) | FR2571896B1 (fr) |
GB (1) | GB2165089B (fr) |
IT (1) | IT8567524A0 (fr) |
NL (1) | NL8415005A (fr) |
NO (1) | NO843614L (fr) |
SE (1) | SE8504828D0 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2833757B1 (fr) * | 2001-12-13 | 2004-11-05 | Commissariat Energie Atomique | Dispositif d'emission de lumiere et procede de fabrication d'un tel dispositif |
CN115197705B (zh) * | 2022-05-30 | 2023-08-15 | 北京智创芯源科技有限公司 | 一种蚀刻液、一种碲镉汞红外焦平面混成芯片的减薄方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6910274A (fr) * | 1969-07-04 | 1971-01-06 | ||
US4037311A (en) * | 1976-07-14 | 1977-07-26 | U.S. Philips Corporation | Methods of manufacturing infra-red detector elements |
GB2027986B (en) * | 1978-07-31 | 1983-01-19 | Philips Electronic Associated | Infra-red detectors |
GB2027556B (en) * | 1978-07-31 | 1983-01-19 | Philips Electronic Associated | Manufacturing infra-red detectors |
-
1984
- 1984-09-12 NO NO843614A patent/NO843614L/no unknown
- 1984-09-13 GB GB08423175A patent/GB2165089B/en not_active Expired
- 1984-09-13 NL NL8415005A patent/NL8415005A/nl not_active Application Discontinuation
- 1984-09-13 DE DE19843447954 patent/DE3447954A1/de not_active Withdrawn
- 1984-09-13 DK DK436984A patent/DK436984A/da not_active Application Discontinuation
-
1985
- 1985-05-06 FR FR8507085A patent/FR2571896B1/fr not_active Expired
- 1985-06-06 IT IT8567524A patent/IT8567524A0/it unknown
- 1985-10-16 SE SE8504828A patent/SE8504828D0/xx unknown
Also Published As
Publication number | Publication date |
---|---|
DE3447954A1 (de) | 1987-01-02 |
DK436984A (da) | 1985-07-15 |
NL8415005A (nl) | 1986-07-01 |
NO843614L (no) | 1986-06-23 |
GB2165089B (en) | 1987-06-03 |
GB2165089A (en) | 1986-04-03 |
FR2571896A1 (fr) | 1986-04-18 |
SE8504828D0 (sv) | 1985-10-16 |
IT8567524A0 (it) | 1985-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |