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FR2443054A1 - Transducteur capacitif de force - Google Patents

Transducteur capacitif de force

Info

Publication number
FR2443054A1
FR2443054A1 FR7929520A FR7929520A FR2443054A1 FR 2443054 A1 FR2443054 A1 FR 2443054A1 FR 7929520 A FR7929520 A FR 7929520A FR 7929520 A FR7929520 A FR 7929520A FR 2443054 A1 FR2443054 A1 FR 2443054A1
Authority
FR
France
Prior art keywords
electrodes
diaphragm
plate
force transducer
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7929520A
Other languages
English (en)
Other versions
FR2443054B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BESCO IND Inc
Original Assignee
BESCO IND Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BESCO IND Inc filed Critical BESCO IND Inc
Publication of FR2443054A1 publication Critical patent/FR2443054A1/fr
Application granted granted Critical
Publication of FR2443054B1 publication Critical patent/FR2443054B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un transducteur capacitif différentiel de force. Ce transducteur comporte un diaphragme flexible 18 destiné à se déformer sous l'effet d'une force, et une plaque mobile 50 qui est reliée au diaphragme. Ce diaphragme porte deux électrodes séparées l'une de l'autre et disposées face à deux électrodes correspondantes portées par la plaque Ces deux paires d'électrodes forment deux éléments capacitifs. Les organes de liaison entre la plaque et le diaphragme sont situés entre les électrodes, de manière qu'une flexion du diaphragme provoque un rapprochement des électrodes d'une première paire et un éloignement des électrodes de l'autre paire. Domaine d'application : mesures de forces, de pressions, de déplacements, etc.
FR7929520A 1978-12-01 1979-11-30 Transducteur capacitif de force Granted FR2443054A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/965,604 US4295376A (en) 1978-12-01 1978-12-01 Force responsive transducer

Publications (2)

Publication Number Publication Date
FR2443054A1 true FR2443054A1 (fr) 1980-06-27
FR2443054B1 FR2443054B1 (fr) 1984-02-10

Family

ID=25510208

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7929520A Granted FR2443054A1 (fr) 1978-12-01 1979-11-30 Transducteur capacitif de force

Country Status (7)

Country Link
US (1) US4295376A (fr)
JP (1) JPS5578228A (fr)
CA (1) CA1134164A (fr)
DE (1) DE2948165C2 (fr)
FR (1) FR2443054A1 (fr)
GB (1) GB2038487B (fr)
IT (1) IT1126466B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993005370A1 (fr) * 1991-08-28 1993-03-18 Soehnle-Waagen Gmbh & Co. Cellule de pesage pour une balance electronique

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH652823A5 (de) * 1980-03-26 1985-11-29 Bosch Gmbh Robert Weg-frequenz-messgroessenwandler.
US4493219A (en) * 1982-08-02 1985-01-15 Illinois Tool Works, Inc. Force transducer
EP0114239A3 (fr) * 1982-11-25 1985-05-15 Schoppe & Faeser GmbH Capsule de mesure pour un transducteur capacitif de différence de pression
DE3310643C2 (de) * 1983-03-24 1986-04-10 Karlheinz Dr. 7801 Schallstadt Ziegler Drucksensor
US4523474A (en) * 1983-08-12 1985-06-18 Borg-Warner Corporation Capacitive pressure sensor
US4507973A (en) * 1983-08-31 1985-04-02 Borg-Warner Corporation Housing for capacitive pressure sensor
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
JPS61229195A (ja) * 1985-04-03 1986-10-13 株式会社日本自動車部品総合研究所 信号伝送システム
US4625560A (en) * 1985-05-13 1986-12-02 The Scott & Fetzer Company Capacitive digital integrated circuit pressure transducer
JPS6217530A (ja) * 1985-07-15 1987-01-26 Matsushita Electric Ind Co Ltd 重量検出機能付加熱調理器
KR900006282B1 (ko) * 1986-02-03 1990-08-27 마쓰시다 뎅끼 상교오 가부시기가이샤 중량검출장치
JPS62174249U (fr) * 1986-04-24 1987-11-05
US4732043A (en) * 1986-08-11 1988-03-22 Bell Microsensors, Inc. System and method for obtaining digital outputs from multiple transducers
US4741214A (en) * 1986-09-19 1988-05-03 Combustion Engineering, Inc. Capacitive transducer with static compensation
DE3634742A1 (de) * 1986-10-11 1988-04-21 Bosch Gmbh Robert Druckmessdose
US4719538A (en) * 1986-12-02 1988-01-12 Cox John D Force responsive capacitive transducer
JPH0743625Y2 (ja) * 1987-10-13 1995-10-09 株式会社トーキン 静電容量式荷重センサ
JPH0542353Y2 (fr) * 1987-11-13 1993-10-26
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
DE3820878A1 (de) * 1988-06-21 1989-12-28 Wolfgang Dipl Phys Scholl Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
US5019783A (en) * 1989-01-30 1991-05-28 Dresser Industries, Inc. Precision transducer circuit and linearization method
US5048165A (en) * 1989-01-30 1991-09-17 Dresser Industries, Inc. Method for controlling the sensitivity and linearity of capacitive transducer systems
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
US5165281A (en) * 1989-09-22 1992-11-24 Bell Robert L High pressure capacitive transducer
DE4108609A1 (de) * 1991-03-16 1992-09-24 Bosch Gmbh Robert Mess- oder schaltvorrichtung fuer druckfuehrende systeme
US5174158A (en) * 1991-06-07 1992-12-29 Maclean-Fogg Company Resistive strain gauge pressure sensor
US5224384A (en) * 1991-06-07 1993-07-06 Maclean-Fogg Company Resistive strain gauge pressure sensor
US5319980A (en) * 1991-06-07 1994-06-14 Maclean-Fogg Company Board construction for resistive strain gauge pressure sensors
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
GB2259147A (en) * 1991-08-15 1993-03-03 Burreng Limited Pressure sensor
US5317921A (en) * 1992-05-05 1994-06-07 Maclean Fogg Company Resistive strain gauge pressure sensor
US5351548A (en) * 1992-12-02 1994-10-04 Walbro Corporation Capacitive pressure sensor
US5902933A (en) * 1993-02-22 1999-05-11 Omron Corporation Pressure sensor and its application
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor
US5571970A (en) * 1993-03-30 1996-11-05 Honda Motor Co., Ltd. Pressure sensor
US5500509A (en) * 1994-03-01 1996-03-19 Borg-Warner Automotive, Inc. Microprocessor based universal digital pressure sensor
US5753820A (en) * 1996-10-25 1998-05-19 Arthur D. Little, Inc. Fluid pressure sensing unit incorporating diaphragm deflection sensing array
WO1998048254A1 (fr) * 1997-04-21 1998-10-29 Michael Van Bergen Detecteur de force
US6499348B1 (en) 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US7007553B2 (en) * 2000-11-06 2006-03-07 Toyoda Koki Kabushiki Kaisha Mechanical quantity sensor element, load sensor element, acceleration sensor element, and pressure sensor element
US6828801B1 (en) * 2001-10-26 2004-12-07 Welch Allyn, Inc. Capacitive sensor
US6634210B1 (en) * 2002-04-17 2003-10-21 Delphi Technologies, Inc. Particulate sensor system
DE102006023102A1 (de) * 2006-05-16 2007-11-22 Grammer Ag Kopfstütze für einen Fahrzeugsitz
ITUD20130068A1 (it) * 2013-05-22 2014-11-23 Eliwell Controls S R L Con Unico S Ocio Sensore digitale di pressione, procedimento di assemblaggio ed elettrodomestico provvisto di detto sensore digitale di pressione
ITUD20130071A1 (it) * 2013-05-23 2014-11-24 Eliwell Controls S R L Con Unico S Ocio Sensore digitale di pressione per un elettrodomestico ed elettrodomestico provvisto di detto sensore digitale di pressione
JP6122354B2 (ja) * 2013-06-25 2017-04-26 京セラ株式会社 圧力検出装置用基体および圧力検出装置
CN104706340A (zh) * 2015-03-30 2015-06-17 南京林业大学 基于电活性聚合物的电子血压计
GB2571724B (en) * 2018-03-05 2023-03-08 Pragmatic Printing Ltd Measurement apparatus
CN111174962B (zh) * 2020-01-08 2021-09-24 哈尔滨工业大学 一种可调量程的电容式三维力传感器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2230987A1 (fr) * 1973-05-24 1974-12-20 Bunker Ramo
FR2346704A1 (fr) * 1976-03-29 1977-10-28 Setra Systems Inc Detecteur capacitif de pression
US4125027A (en) * 1977-11-04 1978-11-14 Geophysical Research Corporation Gauge for remotely indicating the pressure of a subterranean formation
FR2417887A1 (fr) * 1978-02-15 1979-09-14 Bendix Corp Ensemble comportant un capteur capacitif et un circuit de demodulation

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3140450A (en) * 1961-02-13 1964-07-07 Edcliff Instr Inc Force controlled variable reactance transducer
US3595084A (en) * 1970-02-27 1971-07-27 Continental Can Co Digital transducer system
FR2172802A1 (fr) * 1972-02-22 1973-10-05 Herve Marcel
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
SE412956B (sv) * 1974-04-04 1980-03-24 Rosemount Inc Kapacitiv avkenningsanordning
CA1038644A (fr) * 1974-04-04 1978-09-19 Rosemount Inc. Cellule a charge capacitive
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2230987A1 (fr) * 1973-05-24 1974-12-20 Bunker Ramo
FR2346704A1 (fr) * 1976-03-29 1977-10-28 Setra Systems Inc Detecteur capacitif de pression
US4125027A (en) * 1977-11-04 1978-11-14 Geophysical Research Corporation Gauge for remotely indicating the pressure of a subterranean formation
FR2417887A1 (fr) * 1978-02-15 1979-09-14 Bendix Corp Ensemble comportant un capteur capacitif et un circuit de demodulation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993005370A1 (fr) * 1991-08-28 1993-03-18 Soehnle-Waagen Gmbh & Co. Cellule de pesage pour une balance electronique

Also Published As

Publication number Publication date
CA1134164A (fr) 1982-10-26
JPS5578228A (en) 1980-06-12
GB2038487B (en) 1983-05-05
DE2948165A1 (de) 1980-06-26
US4295376A (en) 1981-10-20
IT1126466B (it) 1986-05-21
GB2038487A (en) 1980-07-23
FR2443054B1 (fr) 1984-02-10
DE2948165C2 (de) 1986-01-02
IT7927775A0 (it) 1979-11-30
JPS632046B2 (fr) 1988-01-16

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Legal Events

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TP Transmission of property
TP Transmission of property
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ST Notification of lapse