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FR2301087A1 - Source d'ions a extracteur - Google Patents

Source d'ions a extracteur

Info

Publication number
FR2301087A1
FR2301087A1 FR7604326A FR7604326A FR2301087A1 FR 2301087 A1 FR2301087 A1 FR 2301087A1 FR 7604326 A FR7604326 A FR 7604326A FR 7604326 A FR7604326 A FR 7604326A FR 2301087 A1 FR2301087 A1 FR 2301087A1
Authority
FR
France
Prior art keywords
anode
cathode
grid
opening
equipotential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7604326A
Other languages
English (en)
Other versions
FR2301087B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19752506644 external-priority patent/DE2506644A1/de
Priority claimed from DE19752532667 external-priority patent/DE2532667A1/de
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2301087A1 publication Critical patent/FR2301087A1/fr
Application granted granted Critical
Publication of FR2301087B1 publication Critical patent/FR2301087B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
FR7604326A 1975-02-17 1976-02-17 Source d'ions a extracteur Granted FR2301087A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19752506644 DE2506644A1 (de) 1975-02-17 1975-02-17 Extraktor-ionenquelle
DE19752532667 DE2532667A1 (de) 1975-07-22 1975-07-22 Extraktor-ionenquelle

Publications (2)

Publication Number Publication Date
FR2301087A1 true FR2301087A1 (fr) 1976-09-10
FR2301087B1 FR2301087B1 (fr) 1979-05-18

Family

ID=25768509

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7604326A Granted FR2301087A1 (fr) 1975-02-17 1976-02-17 Source d'ions a extracteur

Country Status (1)

Country Link
FR (1) FR2301087A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3127441A1 (de) * 1981-07-11 1983-01-27 Leybold-Heraeus GmbH, 5000 Köln Ionenquelle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2672560A (en) * 1952-10-27 1954-03-16 Cons Eng Corp Ion source
US3705998A (en) * 1972-01-27 1972-12-12 Us Army Negative ion generator
US3718836A (en) * 1970-11-18 1973-02-27 Itt Multipactor ion generator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2672560A (en) * 1952-10-27 1954-03-16 Cons Eng Corp Ion source
US3718836A (en) * 1970-11-18 1973-02-27 Itt Multipactor ion generator
US3705998A (en) * 1972-01-27 1972-12-12 Us Army Negative ion generator

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF PHYSICS E: SCIENTIFIC INSTRUMENTS, VOLUME 7, NUMERO 8, AOUT 1974, LONDRES, GRANDE-BRETAGNE A. WYNTER ET J. HASTED: "MOLECULAR BEAM DETECTION USING ELECTRON IMPACT IONIZATION", PAGES 627 A 634 *
PROCEEDINGS OF THE FIFTH EUROPEAN CONGRESS ON ELECTRON MICROSCOPY, 5-12 SEPTEMBRE 1972, MANCHESTER, GRANDE-BRETAGNE R.K. FITCH ET AL.: "DEVELOPMENTS OF AN ELECTROSTATIC ION GUN FOR SPECIMEN THINNING", PAGES 296 ET 297 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3127441A1 (de) * 1981-07-11 1983-01-27 Leybold-Heraeus GmbH, 5000 Köln Ionenquelle

Also Published As

Publication number Publication date
FR2301087B1 (fr) 1979-05-18

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Legal Events

Date Code Title Description
ST Notification of lapse