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FR2300328A1 - Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects - Google Patents

Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects

Info

Publication number
FR2300328A1
FR2300328A1 FR7503884A FR7503884A FR2300328A1 FR 2300328 A1 FR2300328 A1 FR 2300328A1 FR 7503884 A FR7503884 A FR 7503884A FR 7503884 A FR7503884 A FR 7503884A FR 2300328 A1 FR2300328 A1 FR 2300328A1
Authority
FR
France
Prior art keywords
surface roughness
plane
coherent light
modulated
light waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7503884A
Other languages
French (fr)
Inventor
J C Perrin
D Leger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Electro Mecanique SA
Original Assignee
Compagnie Electro Mecanique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Electro Mecanique SA filed Critical Compagnie Electro Mecanique SA
Priority to FR7503884A priority Critical patent/FR2300328A1/en
Publication of FR2300328A1 publication Critical patent/FR2300328A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Method of measuring surface roughness involves luminating the surface (s) simultaneously with two plane coherent waves (1, 2) which are angularly separated ( THETA) from each other in the same plane of incidence. The surface is observed simulataneously from two directions (3, 4) in the same plane of incidence using an optical (I2) system which produces interference. The phase of one of the beams (1) is modulated and the global modulated illumination is measured in the interference plane and converted into a modulated electrical signal. The modulated depth determines the surface roughness.
FR7503884A 1975-02-07 1975-02-07 Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects Withdrawn FR2300328A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7503884A FR2300328A1 (en) 1975-02-07 1975-02-07 Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7503884A FR2300328A1 (en) 1975-02-07 1975-02-07 Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects

Publications (1)

Publication Number Publication Date
FR2300328A1 true FR2300328A1 (en) 1976-09-03

Family

ID=9150925

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7503884A Withdrawn FR2300328A1 (en) 1975-02-07 1975-02-07 Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects

Country Status (1)

Country Link
FR (1) FR2300328A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4139304A (en) * 1977-02-10 1979-02-13 National Research Development Corporation Methods and apparatus for measuring variations in distance to a surface
FR2784018A1 (en) * 1998-10-06 2000-04-07 Serobiologiques Lab Sa METHOD FOR MEASURING THE REFLECTION PROPERTIES OF A SURFACE AND DEVICE FOR IMPLEMENTING SAME
WO2024149944A1 (en) 2023-01-13 2024-07-18 Stellantis Auto Sas Processing method and device for vehicle software updating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4139304A (en) * 1977-02-10 1979-02-13 National Research Development Corporation Methods and apparatus for measuring variations in distance to a surface
FR2784018A1 (en) * 1998-10-06 2000-04-07 Serobiologiques Lab Sa METHOD FOR MEASURING THE REFLECTION PROPERTIES OF A SURFACE AND DEVICE FOR IMPLEMENTING SAME
WO2000019896A1 (en) * 1998-10-06 2000-04-13 Laboratoires Serobiologiques (Societe Anonyme) Method for measuring the reflective properties of a surface, and a device for carrying out the same
WO2024149944A1 (en) 2023-01-13 2024-07-18 Stellantis Auto Sas Processing method and device for vehicle software updating

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Legal Events

Date Code Title Description
AM Act modifying the rights related to an application or a patent
RE Withdrawal of published application