FR2300328A1 - Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects - Google Patents
Optical technique for surface roughness measurement - using two plane coherent light waves and interference effectsInfo
- Publication number
- FR2300328A1 FR2300328A1 FR7503884A FR7503884A FR2300328A1 FR 2300328 A1 FR2300328 A1 FR 2300328A1 FR 7503884 A FR7503884 A FR 7503884A FR 7503884 A FR7503884 A FR 7503884A FR 2300328 A1 FR2300328 A1 FR 2300328A1
- Authority
- FR
- France
- Prior art keywords
- surface roughness
- plane
- coherent light
- modulated
- light waves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Method of measuring surface roughness involves luminating the surface (s) simultaneously with two plane coherent waves (1, 2) which are angularly separated ( THETA) from each other in the same plane of incidence. The surface is observed simulataneously from two directions (3, 4) in the same plane of incidence using an optical (I2) system which produces interference. The phase of one of the beams (1) is modulated and the global modulated illumination is measured in the interference plane and converted into a modulated electrical signal. The modulated depth determines the surface roughness.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7503884A FR2300328A1 (en) | 1975-02-07 | 1975-02-07 | Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7503884A FR2300328A1 (en) | 1975-02-07 | 1975-02-07 | Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2300328A1 true FR2300328A1 (en) | 1976-09-03 |
Family
ID=9150925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7503884A Withdrawn FR2300328A1 (en) | 1975-02-07 | 1975-02-07 | Optical technique for surface roughness measurement - using two plane coherent light waves and interference effects |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2300328A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4139304A (en) * | 1977-02-10 | 1979-02-13 | National Research Development Corporation | Methods and apparatus for measuring variations in distance to a surface |
FR2784018A1 (en) * | 1998-10-06 | 2000-04-07 | Serobiologiques Lab Sa | METHOD FOR MEASURING THE REFLECTION PROPERTIES OF A SURFACE AND DEVICE FOR IMPLEMENTING SAME |
WO2024149944A1 (en) | 2023-01-13 | 2024-07-18 | Stellantis Auto Sas | Processing method and device for vehicle software updating |
-
1975
- 1975-02-07 FR FR7503884A patent/FR2300328A1/en not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4139304A (en) * | 1977-02-10 | 1979-02-13 | National Research Development Corporation | Methods and apparatus for measuring variations in distance to a surface |
FR2784018A1 (en) * | 1998-10-06 | 2000-04-07 | Serobiologiques Lab Sa | METHOD FOR MEASURING THE REFLECTION PROPERTIES OF A SURFACE AND DEVICE FOR IMPLEMENTING SAME |
WO2000019896A1 (en) * | 1998-10-06 | 2000-04-13 | Laboratoires Serobiologiques (Societe Anonyme) | Method for measuring the reflective properties of a surface, and a device for carrying out the same |
WO2024149944A1 (en) | 2023-01-13 | 2024-07-18 | Stellantis Auto Sas | Processing method and device for vehicle software updating |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AM | Act modifying the rights related to an application or a patent | ||
RE | Withdrawal of published application |