FR2219320A1 - - Google Patents
Info
- Publication number
- FR2219320A1 FR2219320A1 FR7404943A FR7404943A FR2219320A1 FR 2219320 A1 FR2219320 A1 FR 2219320A1 FR 7404943 A FR7404943 A FR 7404943A FR 7404943 A FR7404943 A FR 7404943A FR 2219320 A1 FR2219320 A1 FR 2219320A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2309665A DE2309665C3 (de) | 1973-02-27 | 1973-02-27 | Turbomolekular-Vakuumpumpe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2219320A1 true FR2219320A1 (fr) | 1974-09-20 |
| FR2219320B3 FR2219320B3 (fr) | 1976-11-26 |
Family
ID=5873200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7404943A Expired FR2219320B3 (fr) | 1973-02-27 | 1974-02-08 |
Country Status (3)
| Country | Link |
|---|---|
| CH (1) | CH594138A5 (fr) |
| DE (1) | DE2309665C3 (fr) |
| FR (1) | FR2219320B3 (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0147015A2 (fr) * | 1983-10-07 | 1985-07-03 | Sargent-Welch Scientific Company | Pompe moléculaire et palier pour dito |
| US4767265A (en) * | 1983-10-07 | 1988-08-30 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
| US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4674952A (en) * | 1983-10-07 | 1987-06-23 | Sargent-Welch Scientific Company | Turbo molecular pump with improved bearing assembly |
| JPS62218692A (ja) * | 1986-03-18 | 1987-09-26 | Mitsubishi Electric Corp | タ−ボ分子ポンプ装置 |
| DE3926577A1 (de) * | 1989-08-11 | 1991-02-14 | Leybold Ag | Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen |
| DE102006049974A1 (de) * | 2006-10-24 | 2008-04-30 | Oerlikon Leybold Vacuum Gmbh | Turbomaschine |
| DE102007053979A1 (de) | 2007-11-13 | 2009-05-14 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Schmiermittelpumpe |
| DE102012220040A1 (de) * | 2012-11-02 | 2014-05-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| GB2588146A (en) * | 2019-10-09 | 2021-04-21 | Edwards Ltd | Vacuum pump |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB885954A (en) * | 1960-03-08 | 1962-01-03 | Arthur Pfeiffer G M B H | Improvements in or relating to molecular pumps |
| FR1475765A (fr) * | 1966-01-31 | 1967-04-07 | Snecma | Perfectionnements aux appareils à arbre vertical tournant à grande vitesse |
| US3399827A (en) * | 1967-05-19 | 1968-09-03 | Everett H. Schwartzman | Vacuum pump system |
| DE2119857A1 (de) * | 1971-04-23 | 1972-11-02 | Leybold-Heraeus GmbH & Co KG, 5000 Köln | Einrichtung zur Ölversorgung von Lagerstellen |
-
1973
- 1973-02-27 DE DE2309665A patent/DE2309665C3/de not_active Expired
-
1974
- 1974-02-08 FR FR7404943A patent/FR2219320B3/fr not_active Expired
- 1974-02-26 CH CH272574A patent/CH594138A5/xx not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0147015A2 (fr) * | 1983-10-07 | 1985-07-03 | Sargent-Welch Scientific Company | Pompe moléculaire et palier pour dito |
| EP0147015A3 (fr) * | 1983-10-07 | 1986-03-19 | Sargent-Welch Scientific Company | Pompe moléculaire et palier pour dito |
| US4767265A (en) * | 1983-10-07 | 1988-08-30 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
| US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2309665A1 (de) | 1974-09-05 |
| DE2309665B2 (de) | 1980-11-06 |
| DE2309665C3 (de) | 1981-07-09 |
| FR2219320B3 (fr) | 1976-11-26 |
| CH594138A5 (fr) | 1977-12-30 |