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FR2131987A1 - - Google Patents

Info

Publication number
FR2131987A1
FR2131987A1 FR7207018A FR7207018A FR2131987A1 FR 2131987 A1 FR2131987 A1 FR 2131987A1 FR 7207018 A FR7207018 A FR 7207018A FR 7207018 A FR7207018 A FR 7207018A FR 2131987 A1 FR2131987 A1 FR 2131987A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7207018A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2131987A1 publication Critical patent/FR2131987A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7207018A 1971-03-15 1972-03-01 Withdrawn FR2131987A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH377771A CH540349A (en) 1971-03-15 1971-03-15 Vacuum system with two chambers that can be evacuated separately for treating goods

Publications (1)

Publication Number Publication Date
FR2131987A1 true FR2131987A1 (en) 1972-11-17

Family

ID=4263258

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7207018A Withdrawn FR2131987A1 (en) 1971-03-15 1972-03-01

Country Status (5)

Country Link
CH (1) CH540349A (en)
DE (1) DE2207957A1 (en)
FR (1) FR2131987A1 (en)
GB (1) GB1329397A (en)
NL (1) NL7106818A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4002141A (en) * 1975-11-26 1977-01-11 Airco, Inc. System for handling substrate holders for vacuum coating
US4226208A (en) * 1977-08-04 1980-10-07 Canon Kabushiki Kaisha Vapor deposition apparatus
DE2940064A1 (en) * 1979-10-03 1981-04-16 Leybold-Heraeus GmbH, 5000 Köln VACUUM EVAPORATION SYSTEM WITH A VALVE CHAMBER, A STEAMING CHAMBER AND AN EVAPORATOR CHAMBER
GB8413776D0 (en) * 1984-05-30 1984-07-04 Dowty Electronics Ltd Sputtering process
JPS61291032A (en) * 1985-06-17 1986-12-20 Fujitsu Ltd Vacuum apparatus
CN113862631A (en) * 2021-09-13 2021-12-31 江苏瑞尔光学有限公司 Vacuum coating machine with buffer bin

Also Published As

Publication number Publication date
NL7106818A (en) 1972-09-19
DE2207957A1 (en) 1972-09-28
CH540349A (en) 1973-08-15
GB1329397A (en) 1973-09-05

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Legal Events

Date Code Title Description
ST Notification of lapse