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FR1405264A - Manufacturing process of vacuum chambers - Google Patents

Manufacturing process of vacuum chambers

Info

Publication number
FR1405264A
FR1405264A FR974212A FR974212A FR1405264A FR 1405264 A FR1405264 A FR 1405264A FR 974212 A FR974212 A FR 974212A FR 974212 A FR974212 A FR 974212A FR 1405264 A FR1405264 A FR 1405264A
Authority
FR
France
Prior art keywords
manufacturing process
vacuum chambers
chambers
vacuum
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR974212A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR974212A priority Critical patent/FR1405264A/en
Priority to BE663311A priority patent/BE663311A/xx
Priority to CH619665A priority patent/CH436227A/en
Priority to US459978A priority patent/US3343999A/en
Priority to GB19701/65A priority patent/GB1066134A/en
Priority to LU48575A priority patent/LU48575A1/xx
Priority to DE19651521702D priority patent/DE1521702B1/en
Priority to ES312863A priority patent/ES312863A1/en
Priority to NL6506059A priority patent/NL6506059A/xx
Application granted granted Critical
Publication of FR1405264A publication Critical patent/FR1405264A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006Processes utilising sub-atmospheric pressure; Apparatus therefor
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10Oxidising
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10Oxidising
    • C23C8/12Oxidising using elemental oxygen or ozone
    • C23C8/14Oxidising of ferrous surfaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
FR974212A 1964-05-12 1964-05-12 Manufacturing process of vacuum chambers Expired FR1405264A (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR974212A FR1405264A (en) 1964-05-12 1964-05-12 Manufacturing process of vacuum chambers
BE663311A BE663311A (en) 1964-05-12 1965-04-30
CH619665A CH436227A (en) 1964-05-12 1965-05-04 Manufacturing process of vacuum chambers
GB19701/65A GB1066134A (en) 1964-05-12 1965-05-10 Method for the manufacture of vacuum containers
US459978A US3343999A (en) 1964-05-12 1965-05-10 Method for the manufacture of vacuum containers
LU48575A LU48575A1 (en) 1964-05-12 1965-05-11
DE19651521702D DE1521702B1 (en) 1964-05-12 1965-05-12 Process for the production of vacuum containers from steel
ES312863A ES312863A1 (en) 1964-05-12 1965-05-12 Method for the manufacture of vacuum containers
NL6506059A NL6506059A (en) 1964-05-12 1965-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR974212A FR1405264A (en) 1964-05-12 1964-05-12 Manufacturing process of vacuum chambers

Publications (1)

Publication Number Publication Date
FR1405264A true FR1405264A (en) 1965-07-09

Family

ID=8829855

Family Applications (1)

Application Number Title Priority Date Filing Date
FR974212A Expired FR1405264A (en) 1964-05-12 1964-05-12 Manufacturing process of vacuum chambers

Country Status (9)

Country Link
US (1) US3343999A (en)
BE (1) BE663311A (en)
CH (1) CH436227A (en)
DE (1) DE1521702B1 (en)
ES (1) ES312863A1 (en)
FR (1) FR1405264A (en)
GB (1) GB1066134A (en)
LU (1) LU48575A1 (en)
NL (1) NL6506059A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2436625A1 (en) * 1978-09-22 1980-04-18 Ulvac Corp VACUUM CONTAINER AND OTHER VACUUM EQUIPMENT PARTS
WO2017191408A1 (en) * 2016-05-04 2017-11-09 Institut D'optique Pumped-down optical apparatus and method for obtaining a pumped-down optical apparatus

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4216033A (en) * 1978-12-26 1980-08-05 United States Steel Corporation Method of nitriding steel
GB2129117B (en) * 1982-08-25 1985-12-18 Zojirushi Vacuum Bottle Co Stainless steel vacuum bottle and its production
US5906688A (en) * 1989-01-11 1999-05-25 Ohmi; Tadahiro Method of forming a passivation film
JPH02179867A (en) * 1988-12-29 1990-07-12 Tadahiro Omi Process gas supply system
JP2730695B2 (en) * 1989-04-10 1998-03-25 忠弘 大見 Tungsten film forming equipment
WO2011017495A1 (en) 2009-08-07 2011-02-10 Swagelok Company Low temperature carburization under soft vacuum
DK2804965T3 (en) 2012-01-20 2020-12-14 Swagelok Co Simultaneous flow of activating gas at low temperature carburization

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1144968A (en) * 1955-03-31 1957-10-21 Process for treating steel sheets to produce an oxide film on their surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2436625A1 (en) * 1978-09-22 1980-04-18 Ulvac Corp VACUUM CONTAINER AND OTHER VACUUM EQUIPMENT PARTS
WO2017191408A1 (en) * 2016-05-04 2017-11-09 Institut D'optique Pumped-down optical apparatus and method for obtaining a pumped-down optical apparatus
FR3051042A1 (en) * 2016-05-04 2017-11-10 Inst D'optique VACUUM OPTICAL INSTALLATION AND METHOD FOR OBTAINING VACUUM OPTICAL INSTALLATION

Also Published As

Publication number Publication date
BE663311A (en) 1965-08-17
ES312863A1 (en) 1969-08-16
DE1521702B1 (en) 1970-03-12
NL6506059A (en) 1965-11-15
CH436227A (en) 1967-05-31
US3343999A (en) 1967-09-26
LU48575A1 (en) 1965-07-12
GB1066134A (en) 1967-04-19

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