FR1405264A - Manufacturing process of vacuum chambers - Google Patents
Manufacturing process of vacuum chambersInfo
- Publication number
- FR1405264A FR1405264A FR974212A FR974212A FR1405264A FR 1405264 A FR1405264 A FR 1405264A FR 974212 A FR974212 A FR 974212A FR 974212 A FR974212 A FR 974212A FR 1405264 A FR1405264 A FR 1405264A
- Authority
- FR
- France
- Prior art keywords
- manufacturing process
- vacuum chambers
- chambers
- vacuum
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/12—Oxidising using elemental oxygen or ozone
- C23C8/14—Oxidising of ferrous surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR974212A FR1405264A (en) | 1964-05-12 | 1964-05-12 | Manufacturing process of vacuum chambers |
BE663311A BE663311A (en) | 1964-05-12 | 1965-04-30 | |
CH619665A CH436227A (en) | 1964-05-12 | 1965-05-04 | Manufacturing process of vacuum chambers |
GB19701/65A GB1066134A (en) | 1964-05-12 | 1965-05-10 | Method for the manufacture of vacuum containers |
US459978A US3343999A (en) | 1964-05-12 | 1965-05-10 | Method for the manufacture of vacuum containers |
LU48575A LU48575A1 (en) | 1964-05-12 | 1965-05-11 | |
DE19651521702D DE1521702B1 (en) | 1964-05-12 | 1965-05-12 | Process for the production of vacuum containers from steel |
ES312863A ES312863A1 (en) | 1964-05-12 | 1965-05-12 | Method for the manufacture of vacuum containers |
NL6506059A NL6506059A (en) | 1964-05-12 | 1965-05-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR974212A FR1405264A (en) | 1964-05-12 | 1964-05-12 | Manufacturing process of vacuum chambers |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1405264A true FR1405264A (en) | 1965-07-09 |
Family
ID=8829855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR974212A Expired FR1405264A (en) | 1964-05-12 | 1964-05-12 | Manufacturing process of vacuum chambers |
Country Status (9)
Country | Link |
---|---|
US (1) | US3343999A (en) |
BE (1) | BE663311A (en) |
CH (1) | CH436227A (en) |
DE (1) | DE1521702B1 (en) |
ES (1) | ES312863A1 (en) |
FR (1) | FR1405264A (en) |
GB (1) | GB1066134A (en) |
LU (1) | LU48575A1 (en) |
NL (1) | NL6506059A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2436625A1 (en) * | 1978-09-22 | 1980-04-18 | Ulvac Corp | VACUUM CONTAINER AND OTHER VACUUM EQUIPMENT PARTS |
WO2017191408A1 (en) * | 2016-05-04 | 2017-11-09 | Institut D'optique | Pumped-down optical apparatus and method for obtaining a pumped-down optical apparatus |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4216033A (en) * | 1978-12-26 | 1980-08-05 | United States Steel Corporation | Method of nitriding steel |
GB2129117B (en) * | 1982-08-25 | 1985-12-18 | Zojirushi Vacuum Bottle Co | Stainless steel vacuum bottle and its production |
US5906688A (en) * | 1989-01-11 | 1999-05-25 | Ohmi; Tadahiro | Method of forming a passivation film |
JPH02179867A (en) * | 1988-12-29 | 1990-07-12 | Tadahiro Omi | Process gas supply system |
JP2730695B2 (en) * | 1989-04-10 | 1998-03-25 | 忠弘 大見 | Tungsten film forming equipment |
WO2011017495A1 (en) | 2009-08-07 | 2011-02-10 | Swagelok Company | Low temperature carburization under soft vacuum |
DK2804965T3 (en) | 2012-01-20 | 2020-12-14 | Swagelok Co | Simultaneous flow of activating gas at low temperature carburization |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1144968A (en) * | 1955-03-31 | 1957-10-21 | Process for treating steel sheets to produce an oxide film on their surface |
-
1964
- 1964-05-12 FR FR974212A patent/FR1405264A/en not_active Expired
-
1965
- 1965-04-30 BE BE663311A patent/BE663311A/xx unknown
- 1965-05-04 CH CH619665A patent/CH436227A/en unknown
- 1965-05-10 GB GB19701/65A patent/GB1066134A/en not_active Expired
- 1965-05-10 US US459978A patent/US3343999A/en not_active Expired - Lifetime
- 1965-05-11 LU LU48575A patent/LU48575A1/xx unknown
- 1965-05-12 DE DE19651521702D patent/DE1521702B1/en active Pending
- 1965-05-12 NL NL6506059A patent/NL6506059A/xx unknown
- 1965-05-12 ES ES312863A patent/ES312863A1/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2436625A1 (en) * | 1978-09-22 | 1980-04-18 | Ulvac Corp | VACUUM CONTAINER AND OTHER VACUUM EQUIPMENT PARTS |
WO2017191408A1 (en) * | 2016-05-04 | 2017-11-09 | Institut D'optique | Pumped-down optical apparatus and method for obtaining a pumped-down optical apparatus |
FR3051042A1 (en) * | 2016-05-04 | 2017-11-10 | Inst D'optique | VACUUM OPTICAL INSTALLATION AND METHOD FOR OBTAINING VACUUM OPTICAL INSTALLATION |
Also Published As
Publication number | Publication date |
---|---|
BE663311A (en) | 1965-08-17 |
ES312863A1 (en) | 1969-08-16 |
DE1521702B1 (en) | 1970-03-12 |
NL6506059A (en) | 1965-11-15 |
CH436227A (en) | 1967-05-31 |
US3343999A (en) | 1967-09-26 |
LU48575A1 (en) | 1965-07-12 |
GB1066134A (en) | 1967-04-19 |
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