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FR1476514A - Ion source - Google Patents

Ion source

Info

Publication number
FR1476514A
FR1476514A FR991423A FR991423A FR1476514A FR 1476514 A FR1476514 A FR 1476514A FR 991423 A FR991423 A FR 991423A FR 991423 A FR991423 A FR 991423A FR 1476514 A FR1476514 A FR 1476514A
Authority
FR
France
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR991423A
Other languages
French (fr)
Inventor
Terenzio Consoli
Richard Geller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR991423A priority Critical patent/FR1476514A/en
Priority to BE670351D priority patent/BE670351A/xx
Priority to US491699A priority patent/US3376469A/en
Priority to DE19651489777 priority patent/DE1489777B1/en
Priority to IL24399A priority patent/IL24399A/en
Priority to GB42034/65A priority patent/GB1063199A/en
Priority to NL6512861A priority patent/NL6512861A/xx
Priority to CH1366065A priority patent/CH444829A/en
Priority to LU49581A priority patent/LU49581A1/xx
Priority to ES0318459A priority patent/ES318459A1/en
Application granted granted Critical
Publication of FR1476514A publication Critical patent/FR1476514A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Plasma Technology (AREA)
  • Catalysts (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR991423A 1964-10-14 1964-10-14 Ion source Expired FR1476514A (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR991423A FR1476514A (en) 1964-10-14 1964-10-14 Ion source
BE670351D BE670351A (en) 1964-10-14 1965-09-30
US491699A US3376469A (en) 1964-10-14 1965-09-30 Positive ion-source having electron retaining means
DE19651489777 DE1489777B1 (en) 1964-10-14 1965-10-01 Device for generating a beam of positively charged ions of high energy
IL24399A IL24399A (en) 1964-10-14 1965-10-03 Source of positively charged particles
GB42034/65A GB1063199A (en) 1964-10-14 1965-10-04 A source of positively-charged particles
NL6512861A NL6512861A (en) 1964-10-14 1965-10-04
CH1366065A CH444829A (en) 1964-10-14 1965-10-04 Source of positively electrified particles
LU49581A LU49581A1 (en) 1964-10-14 1965-10-05
ES0318459A ES318459A1 (en) 1964-10-14 1965-10-14 Emitter device of positively electrified particles. (Machine-translation by Google Translate, not legally binding)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR991423A FR1476514A (en) 1964-10-14 1964-10-14 Ion source

Publications (1)

Publication Number Publication Date
FR1476514A true FR1476514A (en) 1967-04-14

Family

ID=8840338

Family Applications (1)

Application Number Title Priority Date Filing Date
FR991423A Expired FR1476514A (en) 1964-10-14 1964-10-14 Ion source

Country Status (10)

Country Link
US (1) US3376469A (en)
BE (1) BE670351A (en)
CH (1) CH444829A (en)
DE (1) DE1489777B1 (en)
ES (1) ES318459A1 (en)
FR (1) FR1476514A (en)
GB (1) GB1063199A (en)
IL (1) IL24399A (en)
LU (1) LU49581A1 (en)
NL (1) NL6512861A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2950330C2 (en) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Device for chemical analysis of samples
US4453086A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation Electron beam system with reduced charge buildup
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
JPS59113175A (en) * 1982-12-20 1984-06-29 Nisshin Haiboruteeji Kk Negative ion source
US4472174A (en) * 1983-04-25 1984-09-18 Raymond L. Chuan Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation
US6515426B1 (en) * 1998-12-15 2003-02-04 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor
US6441382B1 (en) 1999-05-21 2002-08-27 Axcelis Technologies, Inc. Deceleration electrode configuration for ultra-low energy ion implanter

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082326A (en) * 1954-03-08 1963-03-19 Schlumberger Well Surv Corp Neutron generating apparatus
GB816681A (en) * 1955-01-07 1959-07-15 Licentia Gmbh Ion source
DE1021963B (en) * 1955-04-01 1958-01-02 Messen Jaschin G A Device for the electrical charging of matter suspended in an air stream by means of radioactive preparations
US2934665A (en) * 1956-09-12 1960-04-26 Siemens Ag Ion source
US3279176A (en) * 1959-07-31 1966-10-18 North American Aviation Inc Ion rocket engine
US3287582A (en) * 1963-01-04 1966-11-22 Lionel V Baldwin Apparatus for increasing ion engine beam density

Also Published As

Publication number Publication date
CH444829A (en) 1967-10-15
DE1489777B1 (en) 1970-01-15
GB1063199A (en) 1967-03-30
US3376469A (en) 1968-04-02
BE670351A (en) 1966-01-17
LU49581A1 (en) 1965-12-06
ES318459A1 (en) 1967-05-16
IL24399A (en) 1969-05-28
NL6512861A (en) 1966-04-15

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