EP3842572A1 - Tin alloy electroplating bath and plating method using same - Google Patents
Tin alloy electroplating bath and plating method using same Download PDFInfo
- Publication number
- EP3842572A1 EP3842572A1 EP19852348.2A EP19852348A EP3842572A1 EP 3842572 A1 EP3842572 A1 EP 3842572A1 EP 19852348 A EP19852348 A EP 19852348A EP 3842572 A1 EP3842572 A1 EP 3842572A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- deposit
- nickel
- tin alloy
- plating
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009713 electroplating Methods 0.000 title claims abstract description 53
- 229910001128 Sn alloy Inorganic materials 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims description 31
- 238000007747 plating Methods 0.000 title description 110
- 239000002253 acid Substances 0.000 claims abstract description 22
- 150000003839 salts Chemical class 0.000 claims abstract description 18
- 239000004094 surface-active agent Substances 0.000 claims abstract description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical class [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 14
- 150000002815 nickel Chemical class 0.000 claims abstract description 11
- 150000001868 cobalt Chemical class 0.000 claims abstract description 9
- 229910021626 Tin(II) chloride Inorganic materials 0.000 claims abstract description 7
- 150000002391 heterocyclic compounds Chemical class 0.000 claims description 17
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 17
- 239000002280 amphoteric surfactant Substances 0.000 claims description 5
- 239000002736 nonionic surfactant Substances 0.000 claims description 5
- 150000003216 pyrazines Chemical class 0.000 claims description 4
- 150000003222 pyridines Chemical class 0.000 claims description 4
- 239000003945 anionic surfactant Substances 0.000 claims description 3
- 239000003093 cationic surfactant Substances 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 49
- 229910052759 nickel Inorganic materials 0.000 description 24
- -1 amine compound Chemical class 0.000 description 23
- 230000008021 deposition Effects 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 17
- 238000001556 precipitation Methods 0.000 description 17
- 238000002360 preparation method Methods 0.000 description 17
- 238000002845 discoloration Methods 0.000 description 16
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 16
- 229910017052 cobalt Inorganic materials 0.000 description 15
- 239000010941 cobalt Substances 0.000 description 15
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- FFDGPVCHZBVARC-UHFFFAOYSA-N N,N-dimethylglycine Chemical compound CN(C)CC(O)=O FFDGPVCHZBVARC-UHFFFAOYSA-N 0.000 description 14
- 238000000576 coating method Methods 0.000 description 14
- SIOXPEMLGUPBBT-UHFFFAOYSA-N picolinic acid Chemical compound OC(=O)C1=CC=CC=N1 SIOXPEMLGUPBBT-UHFFFAOYSA-N 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 13
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 12
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 11
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 9
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 8
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 8
- 235000011114 ammonium hydroxide Nutrition 0.000 description 8
- 229960003237 betaine Drugs 0.000 description 8
- 238000005342 ion exchange Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical compound [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 8
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 7
- 150000003973 alkyl amines Chemical class 0.000 description 7
- 235000019864 coconut oil Nutrition 0.000 description 7
- 239000003240 coconut oil Substances 0.000 description 7
- 229940081066 picolinic acid Drugs 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 150000007513 acids Chemical class 0.000 description 6
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 6
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 6
- 235000011130 ammonium sulphate Nutrition 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- WDHWFGNRFMPTQS-UHFFFAOYSA-N cobalt tin Chemical compound [Co].[Sn] WDHWFGNRFMPTQS-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000000174 gluconic acid Substances 0.000 description 6
- 235000012208 gluconic acid Nutrition 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229940098779 methanesulfonic acid Drugs 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000003760 tallow Substances 0.000 description 6
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 6
- 229910000531 Co alloy Inorganic materials 0.000 description 5
- 239000002585 base Substances 0.000 description 5
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 5
- CLDVQCMGOSGNIW-UHFFFAOYSA-N nickel tin Chemical compound [Ni].[Sn] CLDVQCMGOSGNIW-UHFFFAOYSA-N 0.000 description 5
- 229940005657 pyrophosphoric acid Drugs 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 5
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 description 4
- 238000013019 agitation Methods 0.000 description 4
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- RRIWRJBSCGCBID-UHFFFAOYSA-L nickel sulfate hexahydrate Chemical compound O.O.O.O.O.O.[Ni+2].[O-]S([O-])(=O)=O RRIWRJBSCGCBID-UHFFFAOYSA-L 0.000 description 4
- 229940116202 nickel sulfate hexahydrate Drugs 0.000 description 4
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 4
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical compound NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 3
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- MEYVLGVRTYSQHI-UHFFFAOYSA-L cobalt(2+) sulfate heptahydrate Chemical compound O.O.O.O.O.O.O.[Co+2].[O-]S([O-])(=O)=O MEYVLGVRTYSQHI-UHFFFAOYSA-L 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 239000001630 malic acid Substances 0.000 description 3
- 235000011090 malic acid Nutrition 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- VDXUUGGONYMWFW-UHFFFAOYSA-N 1,10-phenanthroline-2,3-dione Chemical compound C1=CN=C2C3=NC(=O)C(=O)C=C3C=CC2=C1 VDXUUGGONYMWFW-UHFFFAOYSA-N 0.000 description 2
- DBZAKQWXICEWNW-UHFFFAOYSA-N 2-acetylpyrazine Chemical compound CC(=O)C1=CN=CC=N1 DBZAKQWXICEWNW-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- GRFNBEZIAWKNCO-UHFFFAOYSA-N 3-pyridinol Chemical compound OC1=CC=CN=C1 GRFNBEZIAWKNCO-UHFFFAOYSA-N 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910001429 cobalt ion Inorganic materials 0.000 description 2
- XLJKHNWPARRRJB-UHFFFAOYSA-N cobalt(2+) Chemical compound [Co+2] XLJKHNWPARRRJB-UHFFFAOYSA-N 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- LAIZPRYFQUWUBN-UHFFFAOYSA-L nickel chloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Ni+2] LAIZPRYFQUWUBN-UHFFFAOYSA-L 0.000 description 2
- 229910001453 nickel ion Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 150000003233 pyrroles Chemical class 0.000 description 2
- XSCHRSMBECNVNS-UHFFFAOYSA-N quinoxaline Chemical compound N1=CC=NC2=CC=CC=C21 XSCHRSMBECNVNS-UHFFFAOYSA-N 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 229940071182 stannate Drugs 0.000 description 2
- 125000005402 stannate group Chemical group 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910001432 tin ion Inorganic materials 0.000 description 2
- 150000003852 triazoles Chemical class 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- XRLUJVFOGKUSMQ-ZVGUSBNCSA-L (2r,3r)-2,3-dihydroxybutanedioate;nickel(2+) Chemical compound [Ni+2].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O XRLUJVFOGKUSMQ-ZVGUSBNCSA-L 0.000 description 1
- LCALOJSQZMSPHJ-QMMMGPOBSA-N (2s)-2-amino-3-cyclohexa-1,5-dien-1-ylpropanoic acid Chemical compound OC(=O)[C@@H](N)CC1=CCCC=C1 LCALOJSQZMSPHJ-QMMMGPOBSA-N 0.000 description 1
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 1
- GEZAUFNYMZVOFV-UHFFFAOYSA-J 2-[(2-oxo-1,3,2$l^{5},4$l^{2}-dioxaphosphastannetan-2-yl)oxy]-1,3,2$l^{5},4$l^{2}-dioxaphosphastannetane 2-oxide Chemical compound [Sn+2].[Sn+2].[O-]P([O-])(=O)OP([O-])([O-])=O GEZAUFNYMZVOFV-UHFFFAOYSA-J 0.000 description 1
- UPPLJLAHMKABPR-UHFFFAOYSA-H 2-hydroxypropane-1,2,3-tricarboxylate;nickel(2+) Chemical compound [Ni+2].[Ni+2].[Ni+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O UPPLJLAHMKABPR-UHFFFAOYSA-H 0.000 description 1
- PURTUPNWTLPILZ-UHFFFAOYSA-N 2-hydroxypropanoic acid;nickel Chemical compound [Ni].CC(O)C(O)=O.CC(O)C(O)=O PURTUPNWTLPILZ-UHFFFAOYSA-N 0.000 description 1
- XXSPKSHUSWQAIZ-UHFFFAOYSA-L 36026-88-7 Chemical compound [Ni+2].[O-]P=O.[O-]P=O XXSPKSHUSWQAIZ-UHFFFAOYSA-L 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- XQABVLBGNWBWIV-UHFFFAOYSA-N 4-methoxypyridine Chemical compound COC1=CC=NC=C1 XQABVLBGNWBWIV-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 239000001888 Peptone Substances 0.000 description 1
- 108010080698 Peptones Proteins 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- RSBNPUNXBGVNNB-UHFFFAOYSA-M S(=O)(=O)([O-])[O-].[NH4+].[Co+] Chemical compound S(=O)(=O)([O-])[O-].[NH4+].[Co+] RSBNPUNXBGVNNB-UHFFFAOYSA-M 0.000 description 1
- KJJBCJPLAHUIIX-UHFFFAOYSA-N S(O)(O)(=O)=O.C1=C(C=CC2=CC=CC=C12)O Chemical compound S(O)(O)(=O)=O.C1=C(C=CC2=CC=CC=C12)O KJJBCJPLAHUIIX-UHFFFAOYSA-N 0.000 description 1
- 229910020810 Sn-Co Inorganic materials 0.000 description 1
- 229910020938 Sn-Ni Inorganic materials 0.000 description 1
- 229910018757 Sn—Co Inorganic materials 0.000 description 1
- 229910008937 Sn—Ni Inorganic materials 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- DFPAKSUCGFBDDF-ZQBYOMGUSA-N [14c]-nicotinamide Chemical compound N[14C](=O)C1=CC=CN=C1 DFPAKSUCGFBDDF-ZQBYOMGUSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- RUSUZAGBORAKPY-UHFFFAOYSA-N acetic acid;n'-[2-(2-aminoethylamino)ethyl]ethane-1,2-diamine Chemical compound CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O.NCCNCCNCCN RUSUZAGBORAKPY-UHFFFAOYSA-N 0.000 description 1
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 125000005210 alkyl ammonium group Chemical group 0.000 description 1
- 150000004996 alkyl benzenes Chemical class 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 150000008051 alkyl sulfates Chemical class 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 229960001040 ammonium chloride Drugs 0.000 description 1
- DAPUDVOJPZKTSI-UHFFFAOYSA-L ammonium nickel sulfate Chemical compound [NH4+].[NH4+].[Ni+2].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DAPUDVOJPZKTSI-UHFFFAOYSA-L 0.000 description 1
- 229940044197 ammonium sulfate Drugs 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- VCNSVJZBSHPMSH-UHFFFAOYSA-N azanium;cobalt;chloride Chemical compound [NH4+].[Cl-].[Co] VCNSVJZBSHPMSH-UHFFFAOYSA-N 0.000 description 1
- TYUIKFYBZFUSKL-UHFFFAOYSA-N azanium;nickel;chloride Chemical compound [NH4+].[Cl-].[Ni] TYUIKFYBZFUSKL-UHFFFAOYSA-N 0.000 description 1
- 159000000009 barium salts Chemical class 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 229940011182 cobalt acetate Drugs 0.000 description 1
- 229910021446 cobalt carbonate Inorganic materials 0.000 description 1
- GFHNAMRJFCEERV-UHFFFAOYSA-L cobalt chloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Co+2] GFHNAMRJFCEERV-UHFFFAOYSA-L 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- UFMZWBIQTDUYBN-UHFFFAOYSA-N cobalt dinitrate Chemical compound [Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O UFMZWBIQTDUYBN-UHFFFAOYSA-N 0.000 description 1
- 229910001981 cobalt nitrate Inorganic materials 0.000 description 1
- 229910000152 cobalt phosphate Inorganic materials 0.000 description 1
- 229940044175 cobalt sulfate Drugs 0.000 description 1
- 229910000361 cobalt sulfate Inorganic materials 0.000 description 1
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 description 1
- RECCKCFXMJNLFO-ZVGUSBNCSA-L cobalt(2+);(2r,3r)-2,3-dihydroxybutanedioate Chemical compound [Co+2].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O RECCKCFXMJNLFO-ZVGUSBNCSA-L 0.000 description 1
- VPUKOWSPRKCWBV-UHFFFAOYSA-L cobalt(2+);2-hydroxypropanoate Chemical compound [Co+2].CC(O)C([O-])=O.CC(O)C([O-])=O VPUKOWSPRKCWBV-UHFFFAOYSA-L 0.000 description 1
- ZOTKGJBKKKVBJZ-UHFFFAOYSA-L cobalt(2+);carbonate Chemical compound [Co+2].[O-]C([O-])=O ZOTKGJBKKKVBJZ-UHFFFAOYSA-L 0.000 description 1
- AVWLPUQJODERGA-UHFFFAOYSA-L cobalt(2+);diiodide Chemical compound [Co+2].[I-].[I-] AVWLPUQJODERGA-UHFFFAOYSA-L 0.000 description 1
- ZBDSFTZNNQNSQM-UHFFFAOYSA-H cobalt(2+);diphosphate Chemical compound [Co+2].[Co+2].[Co+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O ZBDSFTZNNQNSQM-UHFFFAOYSA-H 0.000 description 1
- WLQXLCXXAPYDIU-UHFFFAOYSA-L cobalt(2+);disulfamate Chemical compound [Co+2].NS([O-])(=O)=O.NS([O-])(=O)=O WLQXLCXXAPYDIU-UHFFFAOYSA-L 0.000 description 1
- AMFIJXSMYBKJQV-UHFFFAOYSA-L cobalt(2+);octadecanoate Chemical compound [Co+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O AMFIJXSMYBKJQV-UHFFFAOYSA-L 0.000 description 1
- MULYSYXKGICWJF-UHFFFAOYSA-L cobalt(2+);oxalate Chemical compound [Co+2].[O-]C(=O)C([O-])=O MULYSYXKGICWJF-UHFFFAOYSA-L 0.000 description 1
- SCNCIXKLOBXDQB-UHFFFAOYSA-K cobalt(3+);2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Co+3].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O SCNCIXKLOBXDQB-UHFFFAOYSA-K 0.000 description 1
- QAHREYKOYSIQPH-UHFFFAOYSA-L cobalt(II) acetate Chemical compound [Co+2].CC([O-])=O.CC([O-])=O QAHREYKOYSIQPH-UHFFFAOYSA-L 0.000 description 1
- BZRRQSJJPUGBAA-UHFFFAOYSA-L cobalt(ii) bromide Chemical compound Br[Co]Br BZRRQSJJPUGBAA-UHFFFAOYSA-L 0.000 description 1
- PFQLIVQUKOIJJD-UHFFFAOYSA-L cobalt(ii) formate Chemical compound [Co+2].[O-]C=O.[O-]C=O PFQLIVQUKOIJJD-UHFFFAOYSA-L 0.000 description 1
- FJDJVBXSSLDNJB-LNTINUHCSA-N cobalt;(z)-4-hydroxypent-3-en-2-one Chemical compound [Co].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O FJDJVBXSSLDNJB-LNTINUHCSA-N 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004649 discoloration prevention Methods 0.000 description 1
- NFDRPXJGHKJRLJ-UHFFFAOYSA-N edtmp Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CCN(CP(O)(O)=O)CP(O)(O)=O NFDRPXJGHKJRLJ-UHFFFAOYSA-N 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- MTNDZQHUAFNZQY-UHFFFAOYSA-N imidazoline Chemical compound C1CN=CN1 MTNDZQHUAFNZQY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 1
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910003002 lithium salt Inorganic materials 0.000 description 1
- 159000000002 lithium salts Chemical class 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- FIYXUOWXHWJDAM-UHFFFAOYSA-N methyl sulfamate Chemical compound COS(N)(=O)=O FIYXUOWXHWJDAM-UHFFFAOYSA-N 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 229940078494 nickel acetate Drugs 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 229910000159 nickel phosphate Inorganic materials 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229940053662 nickel sulfate Drugs 0.000 description 1
- BMGNSKKZFQMGDH-FDGPNNRMSA-L nickel(2+);(z)-4-oxopent-2-en-2-olate Chemical compound [Ni+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O BMGNSKKZFQMGDH-FDGPNNRMSA-L 0.000 description 1
- UQPSGBZICXWIAG-UHFFFAOYSA-L nickel(2+);dibromide;trihydrate Chemical compound O.O.O.Br[Ni]Br UQPSGBZICXWIAG-UHFFFAOYSA-L 0.000 description 1
- HZPNKQREYVVATQ-UHFFFAOYSA-L nickel(2+);diformate Chemical compound [Ni+2].[O-]C=O.[O-]C=O HZPNKQREYVVATQ-UHFFFAOYSA-L 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- JMWUYEFBFUCSAK-UHFFFAOYSA-L nickel(2+);octadecanoate Chemical compound [Ni+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O JMWUYEFBFUCSAK-UHFFFAOYSA-L 0.000 description 1
- DOLZKNFSRCEOFV-UHFFFAOYSA-L nickel(2+);oxalate Chemical compound [Ni+2].[O-]C(=O)C([O-])=O DOLZKNFSRCEOFV-UHFFFAOYSA-L 0.000 description 1
- JOCJYBPHESYFOK-UHFFFAOYSA-K nickel(3+);phosphate Chemical compound [Ni+3].[O-]P([O-])([O-])=O JOCJYBPHESYFOK-UHFFFAOYSA-K 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- BFSQJYRFLQUZKX-UHFFFAOYSA-L nickel(ii) iodide Chemical compound I[Ni]I BFSQJYRFLQUZKX-UHFFFAOYSA-L 0.000 description 1
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 235000019319 peptone Nutrition 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 159000000001 potassium salts Chemical class 0.000 description 1
- WSHYKIAQCMIPTB-UHFFFAOYSA-M potassium;2-oxo-3-(3-oxo-1-phenylbutyl)chromen-4-olate Chemical compound [K+].[O-]C=1C2=CC=CC=C2OC(=O)C=1C(CC(=O)C)C1=CC=CC=C1 WSHYKIAQCMIPTB-UHFFFAOYSA-M 0.000 description 1
- JIPRFNBGGBDGIY-UHFFFAOYSA-L potassium;cobalt(2+);sulfate Chemical compound [K+].[Co+2].[O-]S([O-])(=O)=O JIPRFNBGGBDGIY-UHFFFAOYSA-L 0.000 description 1
- JUOMHRRRIKTLFH-UHFFFAOYSA-L potassium;nickel(2+);sulfate Chemical compound [K+].[Ni+2].[O-]S([O-])(=O)=O JUOMHRRRIKTLFH-UHFFFAOYSA-L 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- NIPZZXUFJPQHNH-UHFFFAOYSA-N pyrazine-2-carboxylic acid Chemical compound OC(=O)C1=CN=CC=N1 NIPZZXUFJPQHNH-UHFFFAOYSA-N 0.000 description 1
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical compound C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- QZDWODWEESGPLC-UHFFFAOYSA-N pyridin-3-yl acetate Chemical compound CC(=O)OC1=CC=CN=C1 QZDWODWEESGPLC-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- WHMDPDGBKYUEMW-UHFFFAOYSA-N pyridine-2-thiol Chemical compound SC1=CC=CC=N1 WHMDPDGBKYUEMW-UHFFFAOYSA-N 0.000 description 1
- JWVCLYRUEFBMGU-UHFFFAOYSA-N quinazoline Chemical compound N1=CN=CC2=CC=CC=C21 JWVCLYRUEFBMGU-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- CVNKFOIOZXAFBO-UHFFFAOYSA-J tin(4+);tetrahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[Sn+4] CVNKFOIOZXAFBO-UHFFFAOYSA-J 0.000 description 1
- AECLSPNOPRYXFI-UHFFFAOYSA-J tin(4+);tetrasulfamate Chemical compound [Sn+4].NS([O-])(=O)=O.NS([O-])(=O)=O.NS([O-])(=O)=O.NS([O-])(=O)=O AECLSPNOPRYXFI-UHFFFAOYSA-J 0.000 description 1
- 239000005028 tinplate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 125000005270 trialkylamine group Chemical group 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 1
- 235000019801 trisodium phosphate Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/60—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of tin
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
- C25D5/611—Smooth layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/04—Electroplating with moving electrodes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
Definitions
- the present invention relates to a tin alloy electroplating bath and a plating method using the same.
- Electroplating of tin alloys such as tin-nickel and tin-cobalt has been used in the fields such as tin alloy electroplated coatings for soldering electronic parts and chip-type ceramic electronic parts.
- a supply source of tin is tetravalent ions due to an alkaline PH
- the deposition rate of the pyrophosphoric acid bath is 50% lower than that of an acidic to neutral bath in which the supply source is divalent ions.
- the pyrophosphoric acid bath has a working current density range of about 1 A/dm 2 at maximum and thus has poor productivity.
- the organic acid bath there has been developed, for example, an acidic tin-cobalt alloy electroplating bath ( Japanese Patent Application Publication No. 2006-9039 ) containing methanesulfonic acid.
- a tin-nickel alloy electroplating bath Japanese Patent Application Publication No.
- a high-speed electroplating apparatus In the case of such tin alloy electroplating, for example, a high-speed electroplating apparatus is used.
- a plating bath needs to allow deposition of a coating with a desired alloy ratio in a wide range of current density corresponding to demanded high speed.
- the deposited coating needs to be even, have excellent adhesion to a base material, and have a desired external appearance.
- the plating bath needs to be stable against oxidation due to agitation and air contact, and the like and has to maintain clearness and absence of turbidity.
- An object of the present invention is to provide tin-nickel and tin-cobalt alloy electroplating baths and a plating method using the same which allow deposition of a coating with a desired alloy ratio and in which a deposited coating has excellent adhesion to a base material and an even external appearance and a plating solution is stable against oxidation due to agitation and air contact, and the like and can maintain clearness and absence of turbidity.
- a tin alloy electroplating bath solving the aforementioned problems can be obtained when the tin alloy electroplating bath uses an oxycarboxylic acid or a salt thereof as a complexing agent and contains a nitrogen-containing unsaturated heterocyclic compound and a surfactant.
- the present invention provides a tin alloy electroplating bath comprising: (A) a soluble tin salt; (B) at least one of soluble nickel salts and soluble cobalt salts; (C) an oxycarboxylic acid or a salt thereof; (D) a nitrogen-containing unsaturated heterocyclic compound; and (E) a surfactant, wherein a pH of the tin alloy electroplating bath is 3 to 7.
- the present invention provides a method of electroplating an object with a tin alloy, comprising applying a DC current or a pulse current at a current density of 1 to 30 A/dm 2 to the object in the tin alloy electroplating bath.
- the tin alloy electroplating baths of the present invention are tin-nickel and tin-cobalt alloy electroplating baths: which allow deposition of a coating with a desired alloy ratio; in which a deposited coating has excellent adhesion to a base material and an even external appearance and a plating solution is stable against oxidation due to agitation and air contact, and the like and can maintain clearness and absence of turbidity; which is mild acidic or neutral with a pH of 3 to 7; and which use no glossing agent such as an amine compound or an amino carboxylic acid compound and enable easy bath management.
- a tin alloy electroplating bath of the present invention includes (A) a soluble tin salt, (B) at least one of soluble nickel salts and soluble cobalt salts, (C) an oxycarboxylic acid or a salt thereof, (D) a nitrogen-containing unsaturated heterocyclic compound, and (E) a surfactant.
- the soluble tin salt is basically an organic or inorganic tin salt that generates Sn 2+ in water and specifically includes, for example, salts of organic sulfonic acids such as methanesulfonic acid and 2-propanolsulfonate, tin pyrophosphate, tin sulfamate, stannous sulfate, stannous oxide, stannous chloride, stannous fluoborate, and the like.
- organic sulfonic acids such as methanesulfonic acid and 2-propanolsulfonate
- tin pyrophosphate tin sulfamate
- stannous sulfate stannous oxide
- stannous chloride stannous fluoborate
- stannous fluoborate stannous fluoborate
- One of the aforementioned soluble tin salts may be used alone or two or more of the soluble tin salts may be used in combination.
- the concentration of tin ions in the tin alloy electroplating bath is preferably 1 to 100 g/L, more preferably 5 to 80 g/L, and even more preferably 30 to 80 g/L in total.
- the soluble nickel salts are organic or inorganic nickel salts and specifically include, for example, nickel chloride, nickel nitrate, nickel sulfate, nickel bromide, nickel hypophosphite, nickel phosphate, nickel ammonium chloride, nickel ammonium sulfate, potassium nickel sulfate, nickel sulfamate, nickel acetate, nickel carbonate, nickel acetylacetonate, nickel formate, nickel iodide, nickel oxalate, nickel stearate, nickel citrate, nickel tartrate, nickel lactate, and the like.
- the inorganic nickel salts are preferable.
- One of the aforementioned soluble nickel salt may be used alone or two or more of the soluble nickel salts may be used in combination.
- the concentration of nickel ions in the tin alloy electroplating bath is preferably 0.05 to 20 g/L, and more preferably 0.1 to 10 g/L in total.
- the soluble cobalt salts are organic or inorganic cobalt salts and specifically include, for example, cobalt sulfate, cobalt chloride, cobalt nitrate, cobalt bromide, cobalt iodide, cobalt hypophosphite, cobalt phosphate, cobalt ammonium sulfate, cobalt ammonium chloride, potassium cobalt sulfate, cobalt sulfamate, cobalt acetate, cobalt carbonate, cobalt acetylacetonate, cobalt formate, cobalt oxalate, cobalt stearate, cobalt citrate, cobalt tartrate, cobalt lactate, and the like.
- the inorganic nickel salts are preferable.
- One of the aforementioned soluble cobalt salt may be used alone or two or more of the soluble cobalt salts may be used in combination.
- the concentration of cobalt ions in the tin alloy electroplating bath is preferably 0.05 to 20 g/L, and more preferably 0.1 to 10 g/L in total.
- the total concentration of the nickel ions and the cobalt ions contained in the tin alloy electroplating bath is preferably 0.05 to 20 g/L, and more preferably 0.1 to 10 g/L.
- the oxycarboxylic acid or the salt thereof is preferably an aliphatic oxycarboxylic acid, particularly an open-chain saturated aliphatic oxycarboxylic acid or a salt thereof.
- the oxycarboxylic acid specifically includes, for example, gluconic acid, tartaric acid, citric acid, glycolic acid, glucoheptonic acid, lactic acid, malic acid, and salicylic acid.
- the salt of the oxycarboxylic acid includes ammonium salts, alkali metal salts such as potassium salts and sodium salts, and similar salts of the aforementioned oxycarboxylic acids.
- one of the aforementioned oxycarboxylic acid and the salt thereof may be used alone or two or more of the aforementioned oxycarboxylic acids and the salts thereof may be used in combination.
- the concentration of the oxycarboxylic acid and the salt thereof in the tin alloy electroplating bath is preferably 50 to 500 g/L, and more preferably 100 to 300 g/L in total.
- concentration of the oxycarboxylic acid and the salt thereof is too low, the tin ions become unstable and tin hydroxide tends to be formed.
- concentration of the oxycarboxylic acid and the salt thereof is too high, the oxycarboxylic acid and the salt thereof cannot dissolve into the tin alloy electroplating bath in some cases.
- the nitrogen-containing unsaturated heterocyclic compound is preferably a nitrogen-containing six-membered unsaturated heterocyclic compound or a nitrogen-containing five-membered unsaturated heterocyclic compound.
- Specific examples of the nitrogen-containing six-membered unsaturated heterocyclic compound are pyridines such as pyridine, picolinic acid, 2,2'-bipyridyl, 4-methoxypyridine, nicotinamide, 3-pyridinol, 2-mercaptopyridine, 3-acetoxypyridine, quinoline, isoquinoline, and acridine acid, derivatives of these pyridines, pyrazines such as pyrazine, pyridazine, pyrimidine, quinoxaline, pyrazinecarboxylic acid, 2-acetylpyrazine, quinazoline, derivatives of these pyrazines, and the like.
- the nitrogen-containing five-membered unsaturated heterocyclic compounds include pyrroles such as pyrrole and indole, derivatives of these pyrroles, imidazoles such as imidazole and pyrazole, derivatives of these imidazoles, triazole, derivatives of triazole, and the like.
- pyrroles such as pyrrole and indole
- imidazoles such as imidazole and pyrazole
- derivatives of these imidazoles triazole, derivatives of triazole, and the like.
- one of the aforementioned nitrogen-containing unsaturated heterocyclic compounds may be used alone or two or more of the nitrogen-containing unsaturated heterocyclic compounds may be used in combination.
- the concentration of the nitrogen-containing unsaturated heterocyclic compound in the tin alloy electroplating bath is preferably 0.01 to 5 g/L, more preferably, 0.02 to 3 g/L, and most preferably 0.03 to 1 g/L in total.
- the surfactant various types of surfactants such as general anionic, cationic, nonionic, and amphoteric surfactants can be used for the purpose of improving the external appearance, denseness, smoothness, adhesion, and the like of a plated coating.
- general anionic, cationic, nonionic, and amphoteric surfactants can be used for the purpose of improving the external appearance, denseness, smoothness, adhesion, and the like of a plated coating.
- the anionic surfactants include alkyl sulfate, polyoxyethylene alkyl ether sulfate, polyoxyethylene alkyl phenyl ether sulfate, alkylbenzene sulfonete, alkylnaphthalene sulfonate, and the like.
- the cationic surfactants include mono- to tri-alkylamine salts, dimethyl dialkyl ammonium salt, trimethyl alkyl ammonium salt, and the like.
- the nonionic surfactants include condensation products obtained by adding 2 to 300 mols of ethylene oxide (EO) and/or propylene oxide (PO) to C 1 to C 20 alkanols, phenol, naphthol, bisphenols, C 1 to C 25 alkylphenols, arylalkylphenol, C 1 to C 25 alkylnaphthols, C 1 to C 25 alkoxyl phosphoric acids (salts), sorbitan ester, polyalkylene glycol, or C 1 to C 22 aliphatic amides, and the like.
- the amphoteric surfactants include carboxybetaine, imidazoline betaine, amino carboxylic acid, and the like.
- One of the aforementioned surfactants may be used alone or two or more of the surfactants may be used in combination.
- the surfactant is preferably an amphoteric or nonionic surfactant, particularly, for example, an alkylamidobetaine type amphoteric surfactant such as coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine or, for example, a polyoxyethylene alkylamine type nonionic surfactant such as polyoxyethylene tallow alkylamine.
- an alkylamidobetaine type amphoteric surfactant such as coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine
- a polyoxyethylene alkylamine type nonionic surfactant such as polyoxyethylene tallow alkylamine.
- the concentration of the surfactant in the tin alloy electroplating bath is preferably 0.1 to 50 g/L, and more preferably 0.5 to 10 g/L in total.
- concentration of the surfactant is too low, an effect of deposition suppression cannot be achieved and a deposit cannot form a smooth coating. Meanwhile, when the concentration is too high, the deposition suppression effect is too high and a sufficient deposition amount cannot be achieved.
- the tin alloy electroplating bath of the present invention may contain any of sulfuric acid, hydrochloric acid, sulfonic acid, sulfamic acid, pyrophosphoric acid, alkali metal salts (sodium, potassium, and lithium salts) of these acids, alkali earth metal salts (magnesium, calcium, and barium salts, and the like) of these acids, ammonium salts of these acids, organic amine salts (monomethylamine, dimethylamine, trimethylamine, ethylamine, isopropylamine, ethylenediamine, diethylenetriamine, and the like) of these acids, and the like to improve electric conductivity in plating.
- Specific components thereof include methanesulfonic acid, ammonium sulfate, ammonium chloride, sodium pyrophosphate, monomethyl sulfamate, and the like.
- the content of these compounds is 10 to 500 g/L, and preferably 30 to 400 g/L.
- additives such as, for example, a leveling agent and an anti-foaming agent may be added as necessary to the tin alloy electroplating bath of the present invention. Meanwhile, a brightener does not have to be added to the tin alloy electroplating bath of the present invention.
- the aforementioned leveling agent includes peptone, gelatin, or the like.
- An amount of the leveling agent or the like used is 0.1 to 20 g/L, and preferably 0.5 to 10 g/L and even and fine plating can be obtained by the addition of the leveling agent.
- the pH of the tin alloy electroplating bath in the present invention is 3 to 7, and preferably 4 to 6. In this pH range, the bath has good stability and the plated coating has excellent evenness.
- the pH may be adjusted by using inorganic acid such as sulfuric acid, hydrochloric acid, or acetic acid, hydroxide alkali such as sodium hydroxide, or the like as necessary.
- the remaining portion other than the aforementioned components in the tin alloy electroplating bath of the present invention is water.
- An electroplating method of the present invention is performed by applying a current to an object in the tin alloy electroplating bath.
- a DC direct current or a pulse current can be used to perform the electroplating and the pulse current is particularly preferable.
- a duty ratio (ON/OFF ratio) is preferably 0.1 to 0.9 and more preferably 0.5 to 0.8.
- Using the pulse current under conditions of ON time of 5 to 500 ms and OFF time of 5 to 500 ms is preferable because fine and smooth particles are electrically deposited.
- Bath temperature is generally within a range of 25 to 120 °C, and preferably in a range of 50 to 100°C.
- a current density is generally within a range of 0.1 to 30 A/dm 2 , and preferably 1 to 20 A/dm 2 .
- the electroplating may be performed by preferably using any of various types of publicly known high-speed plating apparatuses.
- the object to be plated for which the electroplating method of the present is used is any of copper, iron, nickel, and alloys thereof.
- the present invention is particularly effective when a composite of a metal and an insulating material such as ceramic, crystal glass, plastic, or ferrite is used.
- the object to be plated is used as a cathode.
- any of conductive objects including, but not limited to, electronic parts such as a printed circuit board, a lead frame, a resistor, a capacitor, a thermistor, a LED, a crystal oscillator, and a lead line can be used as the cathode.
- electronic parts such as a printed circuit board, a lead frame, a resistor, a capacitor, a thermistor, a LED, a crystal oscillator, and a lead line
- Any of tin metal, zinc metal, copper metal, lead metal, bismuth metal, indium metal, and alloys of these metals is used as an anode.
- an insoluble anode such as a titanium plate, a carbon plate, or the like plated with platinum may be used as the anode.
- the object to be plated is subjected to pretreatment in a normal method and then subjected to a plating step.
- the pretreatment step at least one of operations of immersion degreasing, pickling, and electrolytic cleaning and activation of the anode is performed. Water washing is performed between the operations. After the plating, the obtained coating only needs to be simply washed and dried. Moreover, discoloration prevention treatment (immersion treatment into trisodium phosphate and the like) after tin plating or tin-alloy plating may be performed.
- Ni (Ni/(Sn+Ni)) or Co (Co/(Sn+Co)) in the deposition alloy is preferably within a range of 5 to 50 wt, more preferably 10 to 40 mass%, and most preferably 10 to 30 mass%.
- Ni or Co in the deposition alloy is preferably within a range of 0.01 to 20 mass%, more preferably 0.02 to 10 mass%, even more preferably 0.03 to 7 mass%, and most preferably 0.05 to 3 mass%.
- the tin alloy electroplating bath of the present invention is particularly preferable in the case where a Sn-Ni or Sn-Co coating having a low alloy ratio in which the deposition ratio of Ni or Co is about 0.01 to 20 mass% is deposited at a desired alloy ratio by a high-speed plating apparatus.
- Ammonium citrate 150 g/L
- ammonium sulfate (170 g/L)
- stannous sulfate 80 g/L
- nickel sulfate hexahydrate 5 g/L
- coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine 1.5 g/L
- picolinic acid 0.2 g/L
- a tough pitch copper flat plate with a size of 1.0 cm by 3.0 cm was subjected to cathode electrolytic degreasing (electrolytic degreasing-cleaning agent NC-20 manufactured by Dipsol Chemicals Co. Ltd. was used), washed with water, subjected to acid activation treatment (10% sulfuric acid), washed with water again, and then immersed in the aforementioned plating solution.
- a current was applied for 100 seconds at a current density of 15 A/dm 2 by using a DC power supply device at a liquid temperature of 50°C in an environment involving liquid flow and cathode shaking.
- the copper flat plate was immediately taken out after the current application and sufficiently washed with water and the water was then completely removed by air blowing.
- the obtained deposit was visually observed.
- the deposit had an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the deposit was put into a 100 mL beaker and 20 mL of 6 mol/L hydrochloric acid and 0.4 mL of 35% hydrogen peroxide solution were added thereto. The deposit was removed until the base copper was completely exposed.
- the obtained solution was diluted to an appropriate amount and concentrations of tin and nickel were measured by using an atomic absorption spectrophotometer (AA-6300 manufactured by Shimadzu Corporation) to check deposition amounts.
- a co-deposition ratio of nickel was calculated by using a formula of nickel deposition amount ⁇ (tin deposition amount + nickel deposition amount) and the deposit was confirmed to contain 1.55 mass% of nickel.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Ammonium citrate 150 g/L
- ammonium sulfate (170 g/L)
- stannous sulfate 80 g/L
- nickel sulfate hexahydrate 5 g/L
- coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine 1.5 g/L
- polyoxyethylene tallow alkylamine 0.5 g/L
- picolinic acid 0.1 g/L
- Example 2 The same operations as those in Example 1 were performed except that the power supply device was changed to a pulse power supply.
- the ON time and OFF time of the pulse power supply were set to 0.4 seconds and 0.1 seconds, respectively, to achieve a duty ratio of 0.8.
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 2.40 mass% of nickel.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Ammonium citrate 150 g/L
- ammonium sulfate (170 g/L)
- stannous sulfate 80 g/L
- cobalt sulfate heptahydrate 15 g/L
- coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine 1.5 g/L
- polyoxyethylene tallow alkylamine 0.5 g/L
- picolinic acid 0.1 g/L
- Example 2 The same operations as those in Example 1 were performed except that the current density was changed to 5 A/dm 2 .
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- a co-deposition ratio of cobalt was checked in the same procedure as in Example 1 except that the nickel in Example 1 was changed to cobalt.
- the deposit was confirmed to contain 1.07 mass% of cobalt.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Ammonium citrate 150 g/L
- ammonium sulfate (170 g/L)
- stannous sulfate 80 g/L
- cobalt sulfate heptahydrate 15 g/L
- coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine 1.5 g/L
- polyoxyethylene tallow alkylamine 0.5 g/L
- picolinic acid 0.1 g/L
- Example 2 The same operations as those in Example 1 were performed except that the current density was changed to 10 A/dm 2 and the power supply device was changed to a pulse power supply.
- the ON time and OFF time of the pulse power supply were set to 0.4 seconds and 0.1 seconds, respectively, to achieve a duty ratio of 0.8.
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- a co-deposition ratio of cobalt was checked in the same procedure as in Example 1 except that the nickel in Example 1 was changed to cobalt. The deposit was confirmed to contain 1.46 mass% of cobalt.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Gluconic acid 190 g/L
- methanesulfonic acid 350 g/L
- stannous oxide 62 g/L
- nickel chloride hexahydrate 10 g/L
- polyoxyethylene bisphenol A ether 1.0 g/L
- pyrazine 0.2 g/L
- Example 2 The same operations as those in Example 1 were performed except that the current density was changed 1 to 10 A/dm 2 .
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 0.40 mass% of nickel.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Gluconic acid 190 g/L
- methanesulfonic acid 350 g/L
- stannous oxide 62 g/L
- nickel chloride hexahydrate 10 g/L
- polyoxyethylene ⁇ -naphthol ether 1.0 g/L
- pyrazine 0.2 g/L
- Example 1 The same operations as those in Example 1 were performed except that the current density was changed from that in Example 1 to 20 A/dm 2 and the power supply device was changed from that in Example 1 to a pulse power supply.
- the ON time and OFF time of the pulse power supply were set to 0.4 seconds and 0.1 seconds, respectively, to achieve a duty ratio of 0.8.
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 1.05 mass% of nickel.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Gluconic acid 190 g/L
- methanesulfonic acid 350 g/L
- stannous oxide 62 g/L
- cobalt chloride hexahydrate 20 g/L
- polyoxyethylene ⁇ -naphthol sulfuric acid ether 4.0 g/L
- pyrazine 0.2 g/L
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- a co-deposition ratio of cobalt was checked in the same procedure as in Example 1 except that the nickel in Example 1 was changed to cobalt. The deposit was confirmed to contain 1.92 mass% of cobalt.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Example 2 The same operations as those in Example 1 were performed except that the current density was changed to 10 A/dm 2 .
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 0.11 mass% of nickel.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared as in Example 1 except that the concentration of the nickel sulfate hexahydrate was changed from 5 g/L to 10 g/L.
- the plating solution after the preparation had a green external appearance.
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 2.80 mass% of nickel. In comparison with the result of Example 1, it can be determined that any nickel co-deposition ratio can be obtained by changing the concentration of the nickel salt in the plating bath. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared as in Example 4 except that the concentration of the cobalt sulfate heptahydrate was changed from 15 g/L to 10 g/L.
- the plating solution after the preparation had a purple external appearance.
- Example 1 The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of cobalt was checked in the same procedure as that in Example 4 and the deposit was confirmed to contain 1.07 mass% of cobalt. Judging from this result in view of the result of Example 4, it can be determined that any cobalt co-deposition ratio can be obtained by changing the concentration of the cobalt salt in the plating bath. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared by using the liquid composition of Example 1 excluding the picolinic acid and the same operations as those in Example 1 were performed under the same plating conditions.
- the plating solution after the preparation had a green external appearance.
- the obtained deposit was visually observed as in Example 1 and was confirmed to have unevenness formed therein and therefore have an external appearance with poor evenness.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared by using the liquid composition of Example 3 excluding the coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine and the polyoxyethylene tallow alkylamine and the same operations as those in Example 3 were performed under the same plating conditions.
- the plating solution after the preparation had a purple external appearance.
- the obtained deposit was black and dull and was easily peeled off from the base.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared by using the liquid composition of Example 5 excluding the gluconic acid without performing the pH adjustment (the obtained pH was 1.0) and the same operations as those in Example 5 were performed under the same plating conditions.
- the plating solution after the preparation had a green external appearance.
- the obtained deposit had a dark gray external appearance and was coarse.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared by using the liquid composition of Example 7 excluding the gluconic acid and by adding triethylenetetramine hexaacetic acid (250 g/L), and the same operations as those in Example 5 were performed under the same plating conditions.
- the plating solution after the preparation had a purple external appearance.
- the obtained deposit had a grayish white, dull external appearance.
- a cellotape registered trademark (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion.
- the co-deposition ratio of cobalt was checked in the same procedure as that in Example 7 and no deposition of cobalt was recognized. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was prepared by using the liquid composition of Example 2 excluding the picolinic acid and by adding pyrrolidine (0.1 g/L) instead, and the same operations as those in Example 2 were performed under the same plating conditions.
- the plating solution after the preparation had a green external appearance.
- the obtained deposit, the obtained deposition had a dark gray external appearance, was coarse, and easily peeled off.
- the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- a plating solution was attempted to be prepared by using the liquid composition of Example 8 excluding the malic acid and by adding ethylenediamine tetra(methylene phosphonic acid) (220 g/L) instead. When ammonium water was added, a white precipitation was formed and the plating solution failed to be obtained.
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Abstract
Description
- The present invention relates to a tin alloy electroplating bath and a plating method using the same.
- Electroplating of tin alloys such as tin-nickel and tin-cobalt has been used in the fields such as tin alloy electroplated coatings for soldering electronic parts and chip-type ceramic electronic parts.
- Various types of baths such as a fluoride bath, a pyrophosphoric acid bath, and an organic acid bath have been conventionally developed as baths for plating of a tin-nickel alloy or a tin-cobalt alloy by means of electrolysis. In a situation where the fluoride bath is used, work environment is poor and deterioration of facilities is significant because fluorides are discharge regulated substances and are hazardous. In the pyrophosphoric acid bath (
Japanese Patent Application Publication No. S60-29482 Japanese Patent Application Publication No. 2006-9039 Japanese Patent Application Publication No. 2013-44001 Japanese Patent Application Publication No. H09-241885 - In the case of such tin alloy electroplating, for example, a high-speed electroplating apparatus is used. In such an apparatus, a plating bath needs to allow deposition of a coating with a desired alloy ratio in a wide range of current density corresponding to demanded high speed. The deposited coating needs to be even, have excellent adhesion to a base material, and have a desired external appearance. Moreover, the plating bath needs to be stable against oxidation due to agitation and air contact, and the like and has to maintain clearness and absence of turbidity.
- However, in conventionally known tin alloy electroplating baths, particularly in tin alloy electroplating baths with high Sn ratios, these properties are not satisfactory and there is a demand for further improvements.
- An object of the present invention is to provide tin-nickel and tin-cobalt alloy electroplating baths and a plating method using the same which allow deposition of a coating with a desired alloy ratio and in which a deposited coating has excellent adhesion to a base material and an even external appearance and a plating solution is stable against oxidation due to agitation and air contact, and the like and can maintain clearness and absence of turbidity.
- As a result of earnest studies, the present inventors found that a tin alloy electroplating bath solving the aforementioned problems can be obtained when the tin alloy electroplating bath uses an oxycarboxylic acid or a salt thereof as a complexing agent and contains a nitrogen-containing unsaturated heterocyclic compound and a surfactant. Specifically, the present invention provides a tin alloy electroplating bath comprising: (A) a soluble tin salt; (B) at least one of soluble nickel salts and soluble cobalt salts; (C) an oxycarboxylic acid or a salt thereof; (D) a nitrogen-containing unsaturated heterocyclic compound; and (E) a surfactant, wherein a pH of the tin alloy electroplating bath is 3 to 7.
- Moreover, the present invention provides a method of electroplating an object with a tin alloy, comprising applying a DC current or a pulse current at a current density of 1 to 30 A/dm2 to the object in the tin alloy electroplating bath.
- The tin alloy electroplating baths of the present invention are tin-nickel and tin-cobalt alloy electroplating baths: which allow deposition of a coating with a desired alloy ratio; in which a deposited coating has excellent adhesion to a base material and an even external appearance and a plating solution is stable against oxidation due to agitation and air contact, and the like and can maintain clearness and absence of turbidity; which is mild acidic or neutral with a pH of 3 to 7; and which use no glossing agent such as an amine compound or an amino carboxylic acid compound and enable easy bath management.
- A tin alloy electroplating bath of the present invention includes (A) a soluble tin salt, (B) at least one of soluble nickel salts and soluble cobalt salts, (C) an oxycarboxylic acid or a salt thereof, (D) a nitrogen-containing unsaturated heterocyclic compound, and (E) a surfactant.
- (A) The soluble tin salt is basically an organic or inorganic tin salt that generates Sn2+ in water and specifically includes, for example, salts of organic sulfonic acids such as methanesulfonic acid and 2-propanolsulfonate, tin pyrophosphate, tin sulfamate, stannous sulfate, stannous oxide, stannous chloride, stannous fluoborate, and the like. Among these substances, the inorganic tin salts are preferable.
- One of the aforementioned soluble tin salts may be used alone or two or more of the soluble tin salts may be used in combination.
- The concentration of tin ions in the tin alloy electroplating bath is preferably 1 to 100 g/L, more preferably 5 to 80 g/L, and even more preferably 30 to 80 g/L in total.
- (B) The soluble nickel salts are organic or inorganic nickel salts and specifically include, for example, nickel chloride, nickel nitrate, nickel sulfate, nickel bromide, nickel hypophosphite, nickel phosphate, nickel ammonium chloride, nickel ammonium sulfate, potassium nickel sulfate, nickel sulfamate, nickel acetate, nickel carbonate, nickel acetylacetonate, nickel formate, nickel iodide, nickel oxalate, nickel stearate, nickel citrate, nickel tartrate, nickel lactate, and the like. Among these substances, the inorganic nickel salts are preferable.
- One of the aforementioned soluble nickel salt may be used alone or two or more of the soluble nickel salts may be used in combination.
- The concentration of nickel ions in the tin alloy electroplating bath is preferably 0.05 to 20 g/L, and more preferably 0.1 to 10 g/L in total.
- (B) The soluble cobalt salts are organic or inorganic cobalt salts and specifically include, for example, cobalt sulfate, cobalt chloride, cobalt nitrate, cobalt bromide, cobalt iodide, cobalt hypophosphite, cobalt phosphate, cobalt ammonium sulfate, cobalt ammonium chloride, potassium cobalt sulfate, cobalt sulfamate, cobalt acetate, cobalt carbonate, cobalt acetylacetonate, cobalt formate, cobalt oxalate, cobalt stearate, cobalt citrate, cobalt tartrate, cobalt lactate, and the like. Among these substances, the inorganic nickel salts are preferable.
- One of the aforementioned soluble cobalt salt may be used alone or two or more of the soluble cobalt salts may be used in combination.
- The concentration of cobalt ions in the tin alloy electroplating bath is preferably 0.05 to 20 g/L, and more preferably 0.1 to 10 g/L in total.
- Moreover, the total concentration of the nickel ions and the cobalt ions contained in the tin alloy electroplating bath is preferably 0.05 to 20 g/L, and more preferably 0.1 to 10 g/L.
- (C) The oxycarboxylic acid or the salt thereof is preferably an aliphatic oxycarboxylic acid, particularly an open-chain saturated aliphatic oxycarboxylic acid or a salt thereof. The oxycarboxylic acid specifically includes, for example, gluconic acid, tartaric acid, citric acid, glycolic acid, glucoheptonic acid, lactic acid, malic acid, and salicylic acid. The salt of the oxycarboxylic acid includes ammonium salts, alkali metal salts such as potassium salts and sodium salts, and similar salts of the aforementioned oxycarboxylic acids. In the present invention, one of the aforementioned oxycarboxylic acid and the salt thereof may be used alone or two or more of the aforementioned oxycarboxylic acids and the salts thereof may be used in combination.
- The concentration of the oxycarboxylic acid and the salt thereof in the tin alloy electroplating bath is preferably 50 to 500 g/L, and more preferably 100 to 300 g/L in total. When the concentration of the oxycarboxylic acid and the salt thereof is too low, the tin ions become unstable and tin hydroxide tends to be formed. On the other hand, when the concentration of the oxycarboxylic acid and the salt thereof is too high, the oxycarboxylic acid and the salt thereof cannot dissolve into the tin alloy electroplating bath in some cases.
- (D) The nitrogen-containing unsaturated heterocyclic compound is preferably a nitrogen-containing six-membered unsaturated heterocyclic compound or a nitrogen-containing five-membered unsaturated heterocyclic compound. Specific examples of the nitrogen-containing six-membered unsaturated heterocyclic compound are pyridines such as pyridine, picolinic acid, 2,2'-bipyridyl, 4-methoxypyridine, nicotinamide, 3-pyridinol, 2-mercaptopyridine, 3-acetoxypyridine, quinoline, isoquinoline, and acridine acid, derivatives of these pyridines, pyrazines such as pyrazine, pyridazine, pyrimidine, quinoxaline, pyrazinecarboxylic acid, 2-acetylpyrazine, quinazoline, derivatives of these pyrazines, and the like. The nitrogen-containing five-membered unsaturated heterocyclic compounds include pyrroles such as pyrrole and indole, derivatives of these pyrroles, imidazoles such as imidazole and pyrazole, derivatives of these imidazoles, triazole, derivatives of triazole, and the like. In the present invention, one of the aforementioned nitrogen-containing unsaturated heterocyclic compounds may be used alone or two or more of the nitrogen-containing unsaturated heterocyclic compounds may be used in combination.
- The concentration of the nitrogen-containing unsaturated heterocyclic compound in the tin alloy electroplating bath is preferably 0.01 to 5 g/L, more preferably, 0.02 to 3 g/L, and most preferably 0.03 to 1 g/L in total.
- As (E) the surfactant, various types of surfactants such as general anionic, cationic, nonionic, and amphoteric surfactants can be used for the purpose of improving the external appearance, denseness, smoothness, adhesion, and the like of a plated coating.
- The anionic surfactants include alkyl sulfate, polyoxyethylene alkyl ether sulfate, polyoxyethylene alkyl phenyl ether sulfate, alkylbenzene sulfonete, alkylnaphthalene sulfonate, and the like. The cationic surfactants include mono- to tri-alkylamine salts, dimethyl dialkyl ammonium salt, trimethyl alkyl ammonium salt, and the like. The nonionic surfactants include condensation products obtained by adding 2 to 300 mols of ethylene oxide (EO) and/or propylene oxide (PO) to C1 to C20 alkanols, phenol, naphthol, bisphenols, C1 to C25 alkylphenols, arylalkylphenol, C1 to C25 alkylnaphthols, C1 to C25 alkoxyl phosphoric acids (salts), sorbitan ester, polyalkylene glycol, or C1 to C22 aliphatic amides, and the like. The amphoteric surfactants include carboxybetaine, imidazoline betaine, amino carboxylic acid, and the like. One of the aforementioned surfactants may be used alone or two or more of the surfactants may be used in combination.
- In the present invention, the surfactant is preferably an amphoteric or nonionic surfactant, particularly, for example, an alkylamidobetaine type amphoteric surfactant such as coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine or, for example, a polyoxyethylene alkylamine type nonionic surfactant such as polyoxyethylene tallow alkylamine. The tin alloy electroplating bath containing any of these surfactants enables deposition of a fine alloy in a high-speed plating apparatus.
- The concentration of the surfactant in the tin alloy electroplating bath is preferably 0.1 to 50 g/L, and more preferably 0.5 to 10 g/L in total. When the concentration of the surfactant is too low, an effect of deposition suppression cannot be achieved and a deposit cannot form a smooth coating. Meanwhile, when the concentration is too high, the deposition suppression effect is too high and a sufficient deposition amount cannot be achieved.
- The tin alloy electroplating bath of the present invention may contain any of sulfuric acid, hydrochloric acid, sulfonic acid, sulfamic acid, pyrophosphoric acid, alkali metal salts (sodium, potassium, and lithium salts) of these acids, alkali earth metal salts (magnesium, calcium, and barium salts, and the like) of these acids, ammonium salts of these acids, organic amine salts (monomethylamine, dimethylamine, trimethylamine, ethylamine, isopropylamine, ethylenediamine, diethylenetriamine, and the like) of these acids, and the like to improve electric conductivity in plating. Specific components thereof include methanesulfonic acid, ammonium sulfate, ammonium chloride, sodium pyrophosphate, monomethyl sulfamate, and the like. The content of these compounds is 10 to 500 g/L, and preferably 30 to 400 g/L.
- In addition to the components described above, other publicly-known additives such as, for example, a leveling agent and an anti-foaming agent may be added as necessary to the tin alloy electroplating bath of the present invention. Meanwhile, a brightener does not have to be added to the tin alloy electroplating bath of the present invention.
- The aforementioned leveling agent includes peptone, gelatin, or the like. An amount of the leveling agent or the like used is 0.1 to 20 g/L, and preferably 0.5 to 10 g/L and even and fine plating can be obtained by the addition of the leveling agent.
- The pH of the tin alloy electroplating bath in the present invention is 3 to 7, and preferably 4 to 6. In this pH range, the bath has good stability and the plated coating has excellent evenness. The pH may be adjusted by using inorganic acid such as sulfuric acid, hydrochloric acid, or acetic acid, hydroxide alkali such as sodium hydroxide, or the like as necessary. The remaining portion other than the aforementioned components in the tin alloy electroplating bath of the present invention is water.
- An electroplating method of the present invention is performed by applying a current to an object in the tin alloy electroplating bath. A DC direct current or a pulse current can be used to perform the electroplating and the pulse current is particularly preferable. In the case of using the pulse current, a duty ratio (ON/OFF ratio) is preferably 0.1 to 0.9 and more preferably 0.5 to 0.8. Using the pulse current under conditions of ON time of 5 to 500 ms and OFF time of 5 to 500 ms is preferable because fine and smooth particles are electrically deposited. Bath temperature is generally within a range of 25 to 120 °C, and preferably in a range of 50 to 100°C. A current density is generally within a range of 0.1 to 30 A/dm2, and preferably 1 to 20 A/dm2. The electroplating may be performed by preferably using any of various types of publicly known high-speed plating apparatuses.
- It is desirable to agitate the tin alloy electroplating bath and/or shake an object to be plated.
- For example, use of jet flow, ultrasonic agitation, and the like enables an increase of the current density. Moreover, the object to be plated for which the electroplating method of the present is used is any of copper, iron, nickel, and alloys thereof. The present invention is particularly effective when a composite of a metal and an insulating material such as ceramic, crystal glass, plastic, or ferrite is used. In the electroplating method of the present invention, the object to be plated is used as a cathode. For example, any of conductive objects including, but not limited to, electronic parts such as a printed circuit board, a lead frame, a resistor, a capacitor, a thermistor, a LED, a crystal oscillator, and a lead line can be used as the cathode. Any of tin metal, zinc metal, copper metal, lead metal, bismuth metal, indium metal, and alloys of these metals is used as an anode. In some cases, an insoluble anode such as a titanium plate, a carbon plate, or the like plated with platinum may be used as the anode.
- In the plating, the object to be plated is subjected to pretreatment in a normal method and then subjected to a plating step.
- In the pretreatment step, at least one of operations of immersion degreasing, pickling, and electrolytic cleaning and activation of the anode is performed. Water washing is performed between the operations. After the plating, the obtained coating only needs to be simply washed and dried. Moreover, discoloration prevention treatment (immersion treatment into trisodium phosphate and the like) after tin plating or tin-alloy plating may be performed.
- An alloy ratio of a tin alloy deposition coating obtained from the plating solution of the present invention by the electroplating method can be adjusted to any ratio. In a low-speed plating apparatus, Ni (Ni/(Sn+Ni)) or Co (Co/(Sn+Co)) in the deposition alloy is preferably within a range of 5 to 50 wt, more preferably 10 to 40 mass%, and most preferably 10 to 30 mass%. In a high-speed plating apparatus, Ni or Co in the deposition alloy is preferably within a range of 0.01 to 20 mass%, more preferably 0.02 to 10 mass%, even more preferably 0.03 to 7 mass%, and most preferably 0.05 to 3 mass%. The tin alloy electroplating bath of the present invention is particularly preferable in the case where a Sn-Ni or Sn-Co coating having a low alloy ratio in which the deposition ratio of Ni or Co is about 0.01 to 20 mass% is deposited at a desired alloy ratio by a high-speed plating apparatus.
- Next, the present invention is described by demonstrating examples and comparative examples.
- Ammonium citrate (150 g/L), ammonium sulfate (170 g/L), stannous sulfate (80 g/L), nickel sulfate hexahydrate (5 g/L), coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine (1.5 g/L), and picolinic acid (0.2 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 6.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a green external appearance.
- A tough pitch copper flat plate with a size of 1.0 cm by 3.0 cm was subjected to cathode electrolytic degreasing (electrolytic degreasing-cleaning agent NC-20 manufactured by Dipsol Chemicals Co. Ltd. was used), washed with water, subjected to acid activation treatment (10% sulfuric acid), washed with water again, and then immersed in the aforementioned plating solution. Using the tough pitch copper flat plate as the cathode and a tin plate with a purity of 99.99% as the anode, a current was applied for 100 seconds at a current density of 15 A/dm2 by using a DC power supply device at a liquid temperature of 50°C in an environment involving liquid flow and cathode shaking. The copper flat plate was immediately taken out after the current application and sufficiently washed with water and the water was then completely removed by air blowing.
- The obtained deposit was visually observed. The deposit had an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. After the observation of the external appearance, the deposit was put into a 100 mL beaker and 20 mL of 6 mol/L hydrochloric acid and 0.4 mL of 35% hydrogen peroxide solution were added thereto. The deposit was removed until the base copper was completely exposed. The obtained solution was diluted to an appropriate amount and concentrations of tin and nickel were measured by using an atomic absorption spectrophotometer (AA-6300 manufactured by Shimadzu Corporation) to check deposition amounts. A co-deposition ratio of nickel was calculated by using a formula of nickel deposition amount ÷ (tin deposition amount + nickel deposition amount) and the deposit was confirmed to contain 1.55 mass% of nickel. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Ammonium citrate (150 g/L), ammonium sulfate (170 g/L), stannous sulfate (80 g/L), nickel sulfate hexahydrate (5 g/L), coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine (1.5 g/L), polyoxyethylene tallow alkylamine (0.5 g/L), and picolinic acid (0.1 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 6.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a green external appearance.
- The same operations as those in Example 1 were performed except that the power supply device was changed to a pulse power supply. The ON time and OFF time of the pulse power supply were set to 0.4 seconds and 0.1 seconds, respectively, to achieve a duty ratio of 0.8.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 2.40 mass% of nickel. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Ammonium citrate (150 g/L), ammonium sulfate (170 g/L), stannous sulfate (80 g/L), cobalt sulfate heptahydrate (15 g/L), coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine (1.5 g/L), polyoxyethylene tallow alkylamine (0.5 g/L), and picolinic acid (0.1 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 6.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a purple external appearance.
- The same operations as those in Example 1 were performed except that the current density was changed to 5 A/dm2.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. A co-deposition ratio of cobalt was checked in the same procedure as in Example 1 except that the nickel in Example 1 was changed to cobalt. The deposit was confirmed to contain 1.07 mass% of cobalt. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Ammonium citrate (150 g/L), ammonium sulfate (170 g/L), stannous sulfate (80 g/L), cobalt sulfate heptahydrate (15 g/L), coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine (1.5 g/L), polyoxyethylene tallow alkylamine (0.5 g/L), and picolinic acid (0.1 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 6.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a purple external appearance.
- The same operations as those in Example 1 were performed except that the current density was changed to 10 A/dm2 and the power supply device was changed to a pulse power supply. The ON time and OFF time of the pulse power supply were set to 0.4 seconds and 0.1 seconds, respectively, to achieve a duty ratio of 0.8.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. A co-deposition ratio of cobalt was checked in the same procedure as in Example 1 except that the nickel in Example 1 was changed to cobalt. The deposit was confirmed to contain 1.46 mass% of cobalt. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Gluconic acid (190 g/L), methanesulfonic acid (350 g/L), stannous oxide (62 g/L), nickel chloride hexahydrate (10 g/L), polyoxyethylene bisphenol A ether (1.0 g/L), and pyrazine (0.2 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 5.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a yellowish green external appearance.
- The same operations as those in Example 1 were performed except that the current density was changed 1 to 10 A/dm2.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 0.40 mass% of nickel. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Gluconic acid (190 g/L), methanesulfonic acid (350 g/L), stannous oxide (62 g/L), nickel chloride hexahydrate (10 g/L), polyoxyethylene β-naphthol ether (1.0 g/L), and pyrazine (0.2 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 5.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a yellowish green external appearance.
- The same operations as those in Example 1 were performed except that the current density was changed from that in Example 1 to 20 A/dm2 and the power supply device was changed from that in Example 1 to a pulse power supply. The ON time and OFF time of the pulse power supply were set to 0.4 seconds and 0.1 seconds, respectively, to achieve a duty ratio of 0.8.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 1.05 mass% of nickel. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Gluconic acid (190 g/L), methanesulfonic acid (350 g/L), stannous oxide (62 g/L), cobalt chloride hexahydrate (20 g/L), polyoxyethylene β-naphthol sulfuric acid ether (4.0 g/L), and pyrazine (0.2 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 5.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a purple external appearance.
- Treatment was performed in the same conditions as those in Example 1.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. A co-deposition ratio of cobalt was checked in the same procedure as in Example 1 except that the nickel in Example 1 was changed to cobalt. The deposit was confirmed to contain 1.92 mass% of cobalt. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- Malic acid (220 g/L), ammonium sulfate (170 g/L), stannous sulfate (60 g/L), nickel sulfate hexahydrate (10 g/L), coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine (0.3 g/L), polyoxyethylene tallow alkylamine (0.2 g/L), and 2,2'-bipyridyl (0.05 g/L) were dissolved into ion-exchange water and the pH thereof was adjusted to 5.0 by adding an appropriate amount of ammonia water. The plating solution after the preparation had a green external appearance.
- The same operations as those in Example 1 were performed except that the current density was changed to 10 A/dm2.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 0.11 mass% of nickel. The external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared as in Example 1 except that the concentration of the nickel sulfate hexahydrate was changed from 5 g/L to 10 g/L. The plating solution after the preparation had a green external appearance.
- Treatment was performed in the same conditions as those in Example 1.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and the deposit was confirmed to contain 2.80 mass% of nickel. In comparison with the result of Example 1, it can be determined that any nickel co-deposition ratio can be obtained by changing the concentration of the nickel salt in the plating bath. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared as in Example 4 except that the concentration of the cobalt sulfate heptahydrate was changed from 15 g/L to 10 g/L. The plating solution after the preparation had a purple external appearance.
- Treatment was performed in the same conditions as those in Example 4.
- The deposit was visually observed as in Example 1 and was confirmed to have an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of cobalt was checked in the same procedure as that in Example 4 and the deposit was confirmed to contain 1.07 mass% of cobalt. Judging from this result in view of the result of Example 4, it can be determined that any cobalt co-deposition ratio can be obtained by changing the concentration of the cobalt salt in the plating bath. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared by using the liquid composition of Example 1 excluding the picolinic acid and the same operations as those in Example 1 were performed under the same plating conditions. The plating solution after the preparation had a green external appearance. The obtained deposit was visually observed as in Example 1 and was confirmed to have unevenness formed therein and therefore have an external appearance with poor evenness. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared by using the liquid composition of Example 3 excluding the coconut oil fatty acid-amidopropyl dimethyl-amino acetic acid betaine and the polyoxyethylene tallow alkylamine and the same operations as those in Example 3 were performed under the same plating conditions. The plating solution after the preparation had a purple external appearance. As a result of visual observation in the same way as in Example 1, the obtained deposit was black and dull and was easily peeled off from the base. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared by using the liquid composition of Example 5 excluding the gluconic acid without performing the pH adjustment (the obtained pH was 1.0) and the same operations as those in Example 5 were performed under the same plating conditions. The plating solution after the preparation had a green external appearance. As a result of visual observation in the same way as in Example 1, the obtained deposit had a dark gray external appearance and was coarse. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- In the plating solution of Comparative Example 3, an amount of polyoxyethylene bisphenol A ether added was increased to 5.0 g/L and the same operations as those in Example 5 were performed under the same plating conditions. The plating solution after the preparation had a green external appearance. As a result of visual observation in the same way as in Example 1, the obtained deposit had an even, grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of nickel was checked in the same procedure as that in Example 1 and no deposition of nickel was recognized. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared by using the liquid composition of Example 7 excluding the gluconic acid and by adding triethylenetetramine hexaacetic acid (250 g/L), and the same operations as those in Example 5 were performed under the same plating conditions. The plating solution after the preparation had a purple external appearance. As a result of visual observation in the same way as in Example 1, the obtained deposit had a grayish white, dull external appearance. A cellotape (registered trademark) (CT-18 manufactured by Nichiban Co., Ltd.) was attached to a surface of the deposit and removed. No adherence of the deposit to the tape was observed and thus the deposit demonstrated good adhesion. The co-deposition ratio of cobalt was checked in the same procedure as that in Example 7 and no deposition of cobalt was recognized. Moreover, the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was prepared by using the liquid composition of Example 2 excluding the picolinic acid and by adding pyrrolidine (0.1 g/L) instead, and the same operations as those in Example 2 were performed under the same plating conditions. The plating solution after the preparation had a green external appearance. As a result of visual observation in the same way as in Example 1, the obtained deposit, the obtained deposition had a dark gray external appearance, was coarse, and easily peeled off. Moreover the external appearance of the plating solution after the plating was checked. No turbidity or precipitation was recognized and no change in color tone was confirmed.
- A plating solution was attempted to be prepared by using the liquid composition of Example 8 excluding the malic acid and by adding ethylenediamine tetra(methylene phosphonic acid) (220 g/L) instead. When ammonium water was added, a white precipitation was formed and the plating solution failed to be obtained.
- Results of Examples 1 to 10 and Comparative Examples 1 to 7 are summarized in Table 1 presented below.
[Table 1] Plating solution external appearance Plated coating external appearance Adhesion Co-deposition ratio After preparation After plating Example 1 Green No turbidity or discoloration Grayish white, dull, even Good Ni 1.55 mass% Example 2 Green No turbidity or discoloration Grayish white, dull, even Good Ni 2.40 mass% Example 3 Purple No turbidity or discoloration Grayish white, dull, even Good Co 1.07 mass% Example 4 Purple No turbidity or discoloration Grayish white, dull, even Good Co 1.46 mass% Example 5 Yellowish green No turbidity or discoloration Grayish white, dull, even Good Ni 0.40 mass% Example 6 Yellowish green No turbidity or discoloration Grayish white, dull, even Good Ni 1.05 mass% Example 7 Purple No turbidity or discoloration Grayish white, dull, even Good Co 1.92 mass% Example 8 Green No turbidity or discoloration Grayish white, dull, even Good Ni 0.11 mass% Example 9 Green No turbidity or discoloration Grayish white, dull, even Good Ni 2.80 mass% Example 10 Purple No turbidity or discoloration Grayish white, dull, even Good Co 1.07 mass% Comparative Example 1 Green No turbidity or discoloration Uneven - - Comparative Example 2 Purple No turbidity or discoloration Black, dull - - Comparative Example 3 Green No turbidity or discoloration Dark gray external appearance - - Comparative Example 4 Green No turbidity or discoloration Grayish white, dull, even Good Ni 0 mass% Comparative Example 5 Purple No turbidity or discoloration Gray Good Co 0 mass% Comparative Example 6 Green No turbidity or discoloration Dark gray - - Comparative Example 7 White turbid - - - -
Claims (5)
- A tin alloy electroplating bath comprising:(A) a soluble tin salt;(B) at least one of soluble nickel salts and soluble cobalt salts;(C) an oxycarboxylic acid or a salt thereof;(D) a nitrogen-containing unsaturated heterocyclic compound; and(E) a surfactant, whereina pH of the tin alloy electroplating bath is 3 to 7.
- The tin alloy electroplating bath according to claim 1, wherein the nitrogen-containing unsaturated heterocyclic compound is a nitrogen-containing six-membered unsaturated heterocyclic compound or a nitrogen-containing five-membered unsaturated heterocyclic compound.
- The tin alloy electroplating bath according to claim 1, wherein the nitrogen-containing unsaturated heterocyclic compound includes at least one nitrogen-containing six-membered unsaturated heterocyclic compound selected from the group consisting of pyridines, derivatives of pyridines, pyrazines, and derivatives of pyrazines.
- The tin alloy electroplating bath according to any one of claims 1 to 3, wherein the surfactant is selected from the group consisting of nonionic surfactants, anionic surfactants, cationic surfactants, amphoteric surfactants, and combinations of these surfactants.
- A method of electroplating an object with a tin alloy, comprising
applying a DC current or a pulse current at a current density of 0.1 to 30 A/dm2 to the object in the tin alloy electroplating bath according to any one of claims 1 to 4.
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JP3425645B2 (en) * | 1997-11-19 | 2003-07-14 | 石原薬品株式会社 | Tin and tin alloy plating baths, methods for managing and preparing the plating baths |
GB0106131D0 (en) * | 2001-03-13 | 2001-05-02 | Macdermid Plc | Electrolyte media for the deposition of tin alloys and methods for depositing tin alloys |
JP4441726B2 (en) * | 2003-01-24 | 2010-03-31 | 石原薬品株式会社 | Method for producing tin or tin alloy aliphatic sulfonic acid plating bath |
US20050173255A1 (en) | 2004-02-05 | 2005-08-11 | George Bokisa | Electroplated quaternary alloys |
JP2006009039A (en) | 2004-06-21 | 2006-01-12 | Rambo Chemicals (Hong Kong) Ltd | Tin based plating film in which growth of whisker is suppressed and forming method therefor |
JP5642928B2 (en) | 2007-12-12 | 2014-12-17 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | Bronze electroplating |
JP5396583B2 (en) | 2008-02-07 | 2014-01-22 | 石原ケミカル株式会社 | Electric tin or tin alloy plating bath, electronic parts on which the plating film is formed |
JP5150016B2 (en) | 2009-05-12 | 2013-02-20 | 石原薬品株式会社 | Tin or tin alloy plating bath and barrel plating method using the plating bath |
JP5412612B2 (en) | 2011-08-22 | 2014-02-12 | 石原ケミカル株式会社 | Tin and tin alloy plating baths, electronic parts with electrodeposited film formed by the bath |
JP6145671B2 (en) | 2012-12-24 | 2017-06-14 | 石原ケミカル株式会社 | A tin or tin alloy plating bath and an electronic component formed using the plating bath |
JP7009679B2 (en) | 2015-07-29 | 2022-01-26 | 石原ケミカル株式会社 | Electric tin and electric tin alloy plating bath, method of forming electrodeposits using the plating bath |
-
2018
- 2018-08-21 JP JP2018154703A patent/JP7121390B2/en active Active
-
2019
- 2019-07-12 US US17/264,405 patent/US20210317591A1/en active Pending
- 2019-07-12 KR KR1020217002953A patent/KR20210043567A/en unknown
- 2019-07-12 CN CN201980050898.4A patent/CN112513337A/en active Pending
- 2019-07-12 EP EP19852348.2A patent/EP3842572A4/en active Pending
- 2019-07-12 WO PCT/JP2019/027743 patent/WO2020039791A1/en unknown
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US20210317591A1 (en) | 2021-10-14 |
WO2020039791A1 (en) | 2020-02-27 |
JP2020029582A (en) | 2020-02-27 |
EP3842572A4 (en) | 2022-05-18 |
KR20210043567A (en) | 2021-04-21 |
CN112513337A (en) | 2021-03-16 |
JP7121390B2 (en) | 2022-08-18 |
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