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EP3779556A4 - Optical illumination device - Google Patents

Optical illumination device Download PDF

Info

Publication number
EP3779556A4
EP3779556A4 EP19777620.6A EP19777620A EP3779556A4 EP 3779556 A4 EP3779556 A4 EP 3779556A4 EP 19777620 A EP19777620 A EP 19777620A EP 3779556 A4 EP3779556 A4 EP 3779556A4
Authority
EP
European Patent Office
Prior art keywords
illumination device
optical illumination
optical
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19777620.6A
Other languages
German (de)
French (fr)
Other versions
EP3779556B1 (en
EP3779556A1 (en
Inventor
Takayuki Kei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of EP3779556A1 publication Critical patent/EP3779556A1/en
Publication of EP3779556A4 publication Critical patent/EP3779556A4/en
Application granted granted Critical
Publication of EP3779556B1 publication Critical patent/EP3779556B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48—Laser speckle optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Microscoopes, Condenser (AREA)
EP19777620.6A 2018-03-28 2019-02-21 Optical illumination device Active EP3779556B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018061196A JP7056306B2 (en) 2018-03-28 2018-03-28 Irradiation optics
PCT/JP2019/006577 WO2019187832A1 (en) 2018-03-28 2019-02-21 Optical illumination device

Publications (3)

Publication Number Publication Date
EP3779556A1 EP3779556A1 (en) 2021-02-17
EP3779556A4 true EP3779556A4 (en) 2021-12-22
EP3779556B1 EP3779556B1 (en) 2024-06-26

Family

ID=68058139

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19777620.6A Active EP3779556B1 (en) 2018-03-28 2019-02-21 Optical illumination device

Country Status (4)

Country Link
US (1) US11506880B2 (en)
EP (1) EP3779556B1 (en)
JP (1) JP7056306B2 (en)
WO (1) WO2019187832A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7180707B2 (en) * 2021-03-15 2022-11-30 横河電機株式会社 Confocal scanner and confocal microscope
CN115282497B (en) * 2022-08-17 2023-05-23 上海瑞柯恩激光技术有限公司 Laser lattice hand tool and laser lattice treatment equipment
CN115657322B (en) * 2022-10-17 2024-10-15 中国科学院光电技术研究所 Vortex beam array generation method and device
KR102580415B1 (en) * 2023-03-20 2023-09-18 국방과학연구소 Laser homogenization device for laser illuminator

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1164789A (en) * 1997-08-15 1999-03-05 Sony Corp Laser display device
US6081381A (en) * 1998-10-26 2000-06-27 Polametrics, Inc. Apparatus and method for reducing spatial coherence and for improving uniformity of a light beam emitted from a coherent light source
EP1359452A1 (en) * 2002-05-03 2003-11-05 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Confocal microscope having two micro-lens arrays and a pinhole array
US20080165401A1 (en) * 2005-02-25 2008-07-10 Kenichi Kasazumi Two Dimensional Image Forming Device
WO2009087396A1 (en) * 2008-01-09 2009-07-16 Uws Ventures Ltd Projection display system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6934079B2 (en) * 2002-05-03 2005-08-23 Max-Planck-Gesellschaft zur Förderung der Wissen-schaften e. V. Confocal microscope comprising two microlens arrays and a pinhole diaphragm array
US8148663B2 (en) 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
GB201107556D0 (en) * 2011-05-06 2011-06-22 Sheblee Jafer Spatial resolution enhancements in multibeam confocal scanning systems
DE102013001238B4 (en) * 2013-01-25 2020-06-10 Carl Zeiss Microscopy Gmbh Light microscope and microscopy method
EP3032312B1 (en) 2014-12-08 2020-02-26 Yokogawa Electric Corporation Confocal scanner and confocal microscope
JP6090607B2 (en) * 2014-12-08 2017-03-08 横河電機株式会社 Confocal scanner, confocal microscope
JP2018061196A (en) 2016-10-07 2018-04-12 富士通株式会社 Driver circuit and control method of driver circuit
JP6772110B2 (en) * 2017-07-28 2020-10-21 株式会社ニューフレアテクノロジー Inspection equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1164789A (en) * 1997-08-15 1999-03-05 Sony Corp Laser display device
US6081381A (en) * 1998-10-26 2000-06-27 Polametrics, Inc. Apparatus and method for reducing spatial coherence and for improving uniformity of a light beam emitted from a coherent light source
EP1359452A1 (en) * 2002-05-03 2003-11-05 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Confocal microscope having two micro-lens arrays and a pinhole array
US20080165401A1 (en) * 2005-02-25 2008-07-10 Kenichi Kasazumi Two Dimensional Image Forming Device
WO2009087396A1 (en) * 2008-01-09 2009-07-16 Uws Ventures Ltd Projection display system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2019187832A1 *

Also Published As

Publication number Publication date
EP3779556B1 (en) 2024-06-26
WO2019187832A1 (en) 2019-10-03
EP3779556A1 (en) 2021-02-17
JP2019174586A (en) 2019-10-10
US20210109335A1 (en) 2021-04-15
JP7056306B2 (en) 2022-04-19
US11506880B2 (en) 2022-11-22

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