EP3555687A1

EP3555687A1 - Device for deflecting and/or modulating laser radiation, in particular a plurality of laser beams

Info

Publication number: EP3555687A1
Application number: EP17822560.3A
Authority: EP
Inventors: Vitalij Lissotschenko; Iouri Mikliaev
Original assignee: Lilas GmbH
Current assignee: Lilas GmbH
Priority date: 2016-12-14
Filing date: 2017-12-01
Publication date: 2019-10-23
Also published as: CN110073270A; DE102016124408A1; US20190339510A1; RU2019121883A; CN110073270B; WO2018108583A1; US10921582B2

Abstract

The invention relates to a device for deflecting and/or modulating laser radiation, in particular a plurality of laser beams (2), comprising a plurality of deflecting means, which are designed, for example, as mirror elements (1) or transparent components, and movement means, which can move the plurality of deflecting means individually or in groups, wherein the movement means comprise a plurality of actuators, in particular piezoelectric actuators (5), which can perform a translatory motion.

Description

Device for deflecting and / or modulating a

Laser radiation, in particular a plurality of laser beams "

The present invention relates to a device for deflecting and / or modulating a plurality of laser beams according to the preamble of claim 1.

Definitions: In the propagation direction of the laser radiation means mean propagation direction of the laser radiation, especially if this is not a plane wave or at least partially divergent. By laser beam, light beam, sub-beam or beam is, unless expressly stated otherwise, not an idealized beam of geometric optics meant, but a real light beam, such as a laser beam, which has no infinitesimal small, but an extended beam cross-section.

A device of the type mentioned is known.

For example, galvanometer-based deflection mirrors are used. A disadvantage of these systems is usually that only comparatively small laser powers can be used. In particular, in 3D printing systems, however, high

Services are modulated quickly. The problem underlying the present invention is the provision of a device of the type mentioned, which can be used for larger laser powers. A method for the smile compensation of a laser diode bar should furthermore be specified. This is inventively achieved by a device of the type mentioned above with the characterizing features of claim 1 and a method having the features of claim 14. The dependent claims relate to preferred embodiments of

Invention.

According to claim 1, it is provided that the movement means comprise at least one actuator, preferably a plurality of actuators, in particular at least one piezoactuator, which can perform a translatory movement. As a result, rapid movements can be transmitted to the deflection means, which can then modulate the laser radiation suitable. Due to the selected drive principle, the deflection means can be designed to deflect or modulate high laser powers, as is required, for example, in 3D printing devices.

It can be provided that an actuator is associated with each of the deflection means, which can move the deflection means associated with it. In particular, the deflection means can be displaced and / or pivoted about an axis.

For example, the deflection means are designed as mirror elements. Mirror elements which can be pivoted by a piezoactuator can be designed in such a way that even laser beams with very high power can be deflected without destroying the mirror element.

Additionally or alternatively, the deflection means may be formed as a transparent component through which the laser radiation to be deflected, in particular the laser beam to be deflected, can pass.

For example, the transparent component may be a plane-parallel plate. This can be pivoted so that this results in a variable beam offset. Alternatively, the transparent member may be a lens or a

Be a lens segment. By moving a lens or a lens segment, a beam deflection can also be effectively achieved.

There is the possibility that each of the deflection means comprises two opposing transparent components through which the laser radiation to be deflected, in particular the laser beam to be deflected, can pass, wherein the two components can be moved relative to each other, in particular in a direction perpendicular to the propagation direction of the laser radiation, in particular of the laser beam. Preferably, the components may have mutually corresponding contours, which are arranged in particular on opposite sides of the components. By moving the components against each other can also be effectively achieved a beam deflection.

It can be provided that the deflection means are arranged side by side, in particular in a direction perpendicular to the propagation direction of the laser radiation, in particular the

Laser beams. Furthermore, there is the possibility that the

Laser radiation, in particular the laser beams, from a

Starting laser diode bars, in particular, each of the emitters of the laser diode bar emits one of the laser beams. By arranging the deflection means side by side, for example, in the slow-axis direction, the laser beams of a laser diode bar arranged next to one another can be deflected or modulated simultaneously.

It can be provided that the device for

Smilekompensation a laser diode bar can be used. There is a possibility that the deflection means two

Mirror elements which are arranged so that in each case a part of a laser beam is reflected at each of the two mirror elements during operation of the device, wherein a second of the

Mirror elements of an actuator relative to a first of the

Mirror elements is movable, so that with a corresponding position of the mirror elements to each other, the intensity of the laser beam is reduced in a working plane by destructive interference. Thus, the intensity of individual laser beams in a working plane can be reduced significantly or completely from the mirror elements, so that a total of one of a plurality of laser beams

existing laser radiation can be suitably modulated. As a result, this embodiment of a device according to the invention is also suitable, for example, for use in a 3D printing device.

According to claim 14 it is provided that a plurality of

Deflection means of movement means are transferred individually or in groups in such a position and / or position that thereby the smile distortion of the laser diode bar is corrected.

For example, an apparatus according to the invention can be used to carry out the method.

It may be provided that the plurality of deflection means are determined after the transfer into the smile-compensating position and / or position, so that the movement means are no longer needed. This way you can with a

Device according to the invention a plurality of laser diode bars are smile-compensated. Other features and advantages of the present invention will become more apparent from the following description

Embodiments with reference to the accompanying

Illustrations. Show:

Fig. 1 is a schematic side view of a first

Embodiment of a device according to the invention;

Fig. 2 is a perspective view of the embodiment according to

1 with a laser device;

Fig. 3 is a Fig. 2 corresponding view of the embodiment

according to Figure 1, wherein three laser beams are deflected;

4 shows a Fig. 2 and Fig. 3 corresponding view of

Embodiment of Figure 1, wherein two laser beams are deflected.

Fig. 5 is a Fig. 2 corresponding view of the embodiment

as shown in FIG. 1, wherein the device for

Smile compensation is used;

Fig. 6 is a Fig. 5 corresponding view, in which the

Movement were removed after the smile compensation;

Fig. 7 is a perspective view of a second

Embodiment of a device according to the invention;

Fig. 8 is a schematic side view of the embodiment

in accordance with FIG. 7; Fig. 9 is a schematic side view of a third

Embodiment of a device according to the invention;

Fig. 10 is a schematic side view of a fourth

Embodiment of a device according to the invention; Fig. 11 is a schematic side view of a fifth

Embodiment of a device according to the invention;

Fig. 12 is a diagram in which the deflection with the fifth

Embodiment of a device against the

Entry angle is plotted; Fig. 13 is a diagram in which the deflection with the fifth

Embodiment of a device is plotted against the change in the entrance angle;

Fig. 14 is a perspective view of the embodiment according to

11 with a laser device; Fig. 15a is a schematic plan view of a sixth

Embodiment of a device according to the invention in a position of the deflection means in which a laser beam is not deflected;

Fig. 15b is a schematic plan view of the device according to

Fig. 15a in a position of the deflection means, in which a laser beam is deflected;

Fig. 16 is a schematic plan view of a seventh

Embodiment of a device according to the invention; Fig. 17 is a schematic plan view of an eighth

Embodiment of a device according to the invention;

Fig. 18 is a schematic plan view of a ninth

Embodiment of a device according to the invention;

Fig. 19 is a schematic plan view of a tenth

Embodiment of a device according to the invention;

Fig. 20 is a schematic plan view of an eleventh

Embodiment of a device according to the invention;

Fig. 21 is a perspective view of a detail of a twelfth

Embodiment of a device according to the invention;

Fig. 22 is a schematic side view of the embodiment

as shown in FIG. 21;

Fig. 23 is a perspective view of a thirteenth

Embodiment of a device according to the invention;

Fig. 24a is a schematic side view of the embodiment

in accordance with FIG. 23 before the smile compensation is carried out;

Fig. 24b is a schematic side view of the embodiment

according to FIG. 23 after the implementation of the smile compensation;

Fig. 25 is a perspective view of the embodiment according to

FIG. 23 after performing the smile compensation and removing the moving means. FIG Fig. 26 is a schematic plan view of a fourteenth

Embodiment of a device according to the invention in a first position of a deflection means;

Fig. 27 is a schematic plan view of the device according to

Fig. 26 in a second position of a deflection means.

In the figures, identical or functionally identical parts are provided with the same reference numerals.

From Fig. 1, a device can be seen, which has a plurality of deflection elements formed as mirror elements 1. A coming from the left in Fig. 1 laser beam 2 impinges at an angle α on a reflective surface 3 of the mirror element 1 and is reflected by this. The mirror element 1 is about an axis 4th

pivotable.

A piezoelectric actuator 5 engages at a distance from the axis 4 on a surface 6 opposite the reflective surface 3. By changing the length of the piezoelectric actuator 5, for example by small distances in the range of 1 μηπ to 3 μηπ, the mirror element 1 is pivoted about the axis 4. FIG. 1 shows that a change in the angle between the laser beam 2 and the surface 6 by an angle Δα leads to a deflection by an angle 2 * Δα.

Fig. 2 illustrates how the emitter 7 of a

Laser diode bar 8 outgoing laser beams 2 at a

A plurality of mirror elements 1 are reflected. In this case, each of the emitter 7 or each of the emanating from one emitter 7 laser beam 2 is assigned exactly one serving as a deflection mirror elements 1. In the position in Fig. 2, all laser beams 2 are reflected in the same direction. In some of the figures are the slow axis and the fast axis of the

Laser diode bar 8 indicated.

In the position in Fig. 3, three laser beams 2 'in a

Reflected direction, which differs from the direction in which the other laser beams 2 are reflected. For example, these three laser beams 2 'can be directed into a beam trap so that they do not contribute to the process to be performed. For example, a 3D printer equipped with the device in this way can not apply laser radiation to locations where no solidification of a starting material is to take place in this way.

In Fig. 4, two laser beams 2 'are reflected in a direction different from the direction in which the other laser beams 2 are reflected. In contrast to FIG. 3, in FIG. 4 the laser beams 2 'which do not contribute to the process are deflected to the right, whereas in FIG. 3 they are deflected to the left.

Fig. 5 shows the use of a device according to the invention for the compensation of a smile distortion which frequently occurs in laser diode bars 8. The individual emitters 7 assigned

Mirror elements 1 are in such angular positions that the smile distortion is optimally compensated. This can

be achieved, for example, that of the

Mirror elements 1 outgoing laser beams 2 are detected and in response to the detection, the piezoelectric actuators 5 are selectively controlled so that all the laser beams 2 of the

Mirror elements 1 are reflected in the same direction.

In Fig. 5 is a fastener 9 in the form of a rod

indicated. After setting the suitable for the smile compensation inclinations of the mirror elements 1, these are through Established connection with the fastening element 9, for example by gluing. Thereafter, the piezo actuators 5 can be removed (see Fig. 6).

In FIG. 7, a fast-axis collimating lens 10 is arranged behind the laser diode bar 8. Behind this, deflecting means designed as lens segments 11, 12 are arranged. In particular, a plurality of first lens segments 11 arranged next to one another in the slow-axis direction and a plurality of second lens segments 12 arranged next to one another in the direction of the slow axis are provided. The first and the second lens segments 11, 12 are spaced apart in the direction of propagation of the laser beams 2 in such a way that a telescope arrangement is formed.

The shape of the first and the second lens segments 11, 12

corresponds in each case to the shape of the fast-axis collimation lens 10.

In particular, they are like the fast-axis collimating lens 10 as

Cylindrical lenses formed whose cylinder axes extend in the slow-axis direction.

Each of the second lens segments 12 is associated with a piezoelectric actuator 5, which can move the corresponding lens segment 12 upwards and / or downwards in FIG. 8 or in the fast-axis direction. Again, a very small displacement from the non-deflecting position shown in the upper figure of Fig. 8 in a direction indicated in the lower figure of FIG. 8 deflecting position sufficient to deflect the laser beam 2 'so that he, for example, from the boundaries of a in Fig. 8 indicated aperture 43 is intercepted. A displacement of, for example, 1 μηπ to 3 μηπ may well be sufficient to achieve the deflection indicated in the lower illustration of FIG. 8. In the embodiment according to FIG. 9, the fast-axis collimating lens 10 is subdivided into individual segments, wherein the individual segments of the fast-axis collimating lens 10 can likewise be moved upwards and downwards in FIG. 9 by a respective piezoactuator 5. In this way, by targeted positioning of the individual segments of the fast-axis collimating lens 10, a smile compensation can be achieved, whereas by the targeted positioning of the second lens segments 12 a targeted

Distraction of individual laser beams 2 'or one

Modulation of the laser radiation can be achieved.

In the embodiment according to FIG. 10, the fast-axis collimating lens 10 is not subdivided into individual segments. For the smile compensation in this embodiment, the connection of each of the first lens segments 11 is used with a piezoelectric actuator 5, which can position each of the first lens segments 11 targeted. As in FIG. 9, the targeted positioning of the second lens segments 12 allows a targeted deflection of the individual

Laser beams 2 'and a modulation of the

Laser radiation can be achieved.

From Fig. 11, a device can be seen, which has a plurality of formed as transparent components 13 deflection means. The components 13 are in particular plane-parallel plates. A coming from the left in Fig. 11 laser beam 2 enters at an angle α through a first surface 14 of the component 13 in this and from the

opposite second surface 15 again from the component 13. In this case, the laser beam 2 experiences a beam offset ΔΧ.

The component 13 is pivotable about an axis 4. A piezoelectric actuator 5 engages at a distance from the axis 4 on the first surface 14. By changing the length of the piezoelectric actuator 5, for example by small Stretching in the range of 1 μηπ to 3 μηπ, the component 13 is pivoted about the axis 4. FIG. 12 shows that the beam offset ΔΧ is essentially linear from the angle α between the laser beam 2 and the first surface 14. FIG. 13 illustrates that a change Δα in the angle α between the laser beam 2 and the first surface 14 leads to a change in the beam offset ΔΧ.

FIG. 14 illustrates how laser beams 2 pass through a plurality of components 13. In this case, each laser beam 2 is assigned exactly one component 13 serving as a deflection means. In the position in FIG. 14, three laser beams 2 'are displaced differently than the other laser beams 2. For example, these three differently offset laser beams 2' can be directed into a beam trap so that they do not contribute to the process to be performed. For example, a 3D printer equipped with the device in this way can not apply laser radiation to locations where no solidification of a starting material is to take place in this way.

From Fig. 15a and Fig. 15b, a device can be seen which a plurality of transparent components 16, 17 formed

Having deflection. In this case, each of the deflection means comprises two mutually opposite transparent components 16, 17, through which the laser beam 2 to be deflected can pass. The components 16, 17 have corresponding contours 18, 19 which

in particular on opposite sides of the components 16, 17 are arranged. In the illustrated embodiment, for example, it is a sinusoidal contour 18, 19th

The two components 16, 17 can be moved relative to each other, in particular in a direction perpendicular to the propagation direction of the laser beam 2. This can be done in each case by means of a piezoelectric actuator, for example, on the left in Fig. 15a and 15b side of the first component 16 attacks. The change in length of the

Piezoactors may, for example, also be between 1 μηπ to 10 μηπ, in particular between 1 μηπ and 3 μηπ.

Fig. 15a shows a position in which the components 16, 17 not

are shifted against each other. In this position is a

Wellenberg the contour 18 of the first component 16 exactly one

Wavy valley of the contour 19 of the second component opposite. This ensures that the laser beam 2 passes through the two components 16, 17 without being deflected and, for example, passes through a downstream aperture 43.

Fig. 15b shows a position in which the components 16, 17 are shifted from each other. In this position, a wave crest of the contour 18 of the first component 16 is located exactly opposite a crest of the contour 19 of the second component. This ensures that the

Laser beam 2 deflected by the two components 16, 17 passes and, for example, does not pass through a downstream aperture 43.

In particular, this can be explained by the fact that the components 16, 17 act as diffraction gratings. Not against each other

shifted components 16, 17, a diffraction occurs almost

only in the zeroth order, so that the laser beam 2 passes through the assembly unhindered. In mutually shifted components 16, 17, a diffraction occurs almost

only in higher orders, so that a plurality of deflected laser beams 2 'emerge from the assembly.

16 shows an application example of the device according to FIGS. 15 a and 15 b, in which the components 16, 17 are housed in a housing 20

are arranged. The housing 20 has an inlet opening 21 for the laser beam 2 and an outlet opening 22, in front of the

Aperture 43 is arranged. In the state shown in FIG. 16, the second component 17 has been moved by a piezoactuator 5 relative to the first component 16 such that a plurality of

deflected laser beams 2 'leave the components 16, 17

At the same time, however, no laser beam 2 passes through the aperture 43.

In this case, the deflected laser beams 2 'in a dashed line in Fig. 16 indicated beam trap 23 are directed so that they do not contribute to the process to be carried out. For example, a 3D printer equipped with the device in this way can not apply laser radiation to locations where no solidification of a starting material is to take place in this way.

FIG. 17 shows the staggered arrangement of deflection means formed as transparent components 13. In each case, the components 13 adjacent in the direction of the slow axis are offset in their longitudinal direction by more than one length of the components 13 relative to one another, so that they are arranged offset one behind the other. As a result, the laser beams 2 arriving from the left in FIG. 17 can be arranged closer to one another. The components 13 are on their long sides 24 with a

highly reflective coating and on their serving as entry and exit surfaces end faces 14, 15 with a

provided reflection-reducing coating.

FIG. 18 shows the staggered arrangement of deflection means formed as mirror elements 25, 26. The mirror elements 25, 26 are like the mirror element 1 shown in FIG. 1 about an axis

pivoted or pivotable, so that the incident from the left in Fig. 18 laser beams 2 from the plane of FIG. 18 to be distracted out. In each case, the mirror elements 25, 26 adjacent in the slow-axis direction are offset in their longitudinal direction by more than one length of the mirror elements 25, 26 relative to one another, so that they are arranged offset one behind the other.

As a result, the laser beams 2 arriving from the left in FIG. 18 can be arranged closer to one another.

The mirror elements 25 arranged on the left side in FIG. 18 are on their upper and lower longitudinal sides 24 in FIG. 18

at least partially provided with a highly reflective coating. The arranged in Fig. 18 on the left side

Mirror elements 25 have on their left side an entrance surface 27, which is provided with a reflection-reducing coating. On the right in Fig. 18 side of the mirror elements 25, a highly reflective coating 28 is provided. Of this

Coating the respective laser beam 2 from the plane of FIG. 18 is reflected out.

The mirror elements 26 arranged on the right-hand side in FIG. 18 have, on their left-hand side in FIG. 18, a highly reflective coating 29, from which the respective laser beam 2 is reflected out of the plane of the drawing in FIG. By the

different design of the mirror elements 25, 26 is

ensures that the reflected from the different mirror elements 25, 26 out of the plane of Fig. 18 out

Laser beams 2 are reflected in about the same area (see the dot-dash line 30 shown in Fig. 18).

Fig. 19 shows an embodiment of the invention in which

On the input side not a plurality of laser beams, but a laser radiation 31 is present with a linear intensity distribution, wherein the line of the linear intensity distribution extends in the vertical direction of Fig. 19. The device comprises a lens array 32, of which the laser radiation 31 in individual

Partial beams 34 split and a corresponding number of deflection means 33 is supplied. These deflection means 33 may be formed, for example, as mirror elements or as transparent components.

Of the deflection means 33 can thus specifically individual

Partial beams 34 are deflected differently than others, so that

Overall, the laser radiation 31 can be suitably modulated. As a result, this embodiment is also suitable

Device according to the invention, for example, for use in a 3D printing device.

FIG. 20 also shows an embodiment of the invention in which the input side does not have a plurality of laser beams but a laser radiation 31 with a linear intensity distribution, the line of the linear intensity distribution extending in the vertical direction of FIG. However, a lens array for dividing the laser radiation 31 is not used here. Rather, the deflection means 33 are arranged offset as in the embodiments according to FIGS. 17 and 18. By the deflection means 33 arranged on the left side in FIG. 20, the laser radiation 31 is subdivided into a plurality of partial beams 34. This is because a part of the laser radiation passes through the deflection means 33 and another part passes by the deflection means 33. FIGS. 21 and 22 show an embodiment in which

partially reflecting dividing means 35 are provided. Both

Dividing means 35 alternate side by side each reflecting surfaces 36, of which partial beams 34 of the laser radiation 31 can be reflected upward in Fig. 21, with gaps 37, through the Partial beams 34 'of the laser radiation 31 pass through unhindered. The unimpeded penetrated partial beams 34 'can then be deflected suitably by deflecting means 38 which are only schematically indicated, for example designed as transparent components

or modulated.

FIG. 22 shows that the partial beams 34 deflected upwards from the reflecting surfaces 36 are deflected or modulated by optionally further deflecting means 39 designed as transparent components and deflected by a mirror 44 to the right in FIG. 22. At the same time, the unhindered penetrated partial beams 34 'of the also as

deflected deflected means 38 deflected or modulated and deflected by a further mirror 45 upward in Fig. 22. From a dividing means 35

corresponding unifying means 40 with alternately arranged reflecting surfaces and gaps (not shown), all partial beams 34, 34 'are deflected to the right or transmitted.

Through targeted movements of the individual deflection means 38, 39, the laser radiation 31 can be suitably modulated in a suitable manner. As a result, this embodiment of a device according to the invention is also suitable, for example, for use in an SD printing device.

FIGS. 23 to 25 show an embodiment in which, as in FIG. 9, a fast-axis collimating lens 10 is subdivided behind a laser diode bar 7 into individual segments. In Fig. 23 and Figs. 24a and 24b, the individual segments of the fast-axis collimating lens 10 are each connected to a piezoactuator 5, from which they can be moved up and down in Figs. 23 to 24b. In this way, the targeted positioning of the individual segments Axis collimation lens 10 Smile compensation can be achieved. In the illustrated embodiment, the plurality of

Piezoactuators 5 arranged on a common bracket 41.

Fig. 24a shows the passage of a laser beam 2 through

Segment of the fast-axis collimating lens 10, wherein the output from the corresponding emitter 7 laser beam 2 obviously contributes to a Smile distortion. 24b shows the passage of the laser beam 2 through the segment already shown in FIG. 24a after a corresponding correction by a movement of the piezoactuator 5. In the corrected position shown in FIG. 24b, a segment between the fast axis collimation lens 10 and one designed, for example, as a glass rod

Fastener 9 befindlicher, for example, photosensitive adhesive 42 applied and / or activated. After setting and sticking all the positions of the segments of the fast-axis collimating lens 10 suitable for the smile compensation, the piezoactuators 5 can be removed together with the holder 41 (see FIG. 25).

From Fig. 26, a device can be seen, the two as

Mirror elements 46, 47 has formed deflection means. Between the two mirror elements 46, 47 only a very narrow gap is provided. In this case, the first, left in Fig. 26 left mirror element 46 is not movable or not provided with a piezoelectric actuator 5, whereas the second, in Fig. 26 right mirror element 47 is provided with a piezoelectric actuator 5 and therefore is movable relative to the first mirror element 46. The mirror elements 46, 47 can be produced, for example, by sawing or cutting a mirror into two parts. A laser beam 2 coming from the left in FIG. 26 impinges on first and second reflecting surfaces 48, 49 of the mirror elements 46, 47 at an angle of, for example, 45 ° and is reflected by these upward in FIG. 26. The laser beam 2 has

For example, as indicated in Fig. 26, a Gaussian profile 50. The upwardly-reflected laser beam 2 is focused by a lens 51 and has a Gaussian intensity distribution 52 with a central maximum 53 in the focal plane.

Fig. 27 shows the same device, in which, however, the second

Mirror element 47 by a distance D with is shifted relative to the first mirror element 46. In this case, λ is the wavelength of the laser beam 2. In this way, the second reflecting surface 49 of the second mirror element 47 is set back by D relative to the first surface 48 of the first mirror element 46. The part of the laser beam 2 reflected at the second surface 49 thereby undergoes a phase shift by π relative to the part of the laser beam 2 reflected at the first surface 48. This means that the optical path is that part of the laser beam reflected at the second surface 49 2 is larger by λ / 2 than the optical path traveled by the portion of the laser beam 2 reflected at the first surface 48.

This leads to a corresponding spatial coherence of the laser beam 2 that due to destructive interference in the

Intensity distribution 52 a central minimum 54 is formed. Of the deflecting means designed as mirror elements 46, 47, the intensity of individual laser beams 2 in a working plane can therefore be targeted can be significantly reduced to complete, so that a total of a plurality of laser beams 2 existing laser radiation can be suitably modulated. As a result, this is also suitable

Embodiment of a device according to the invention

For example, for use in a 3D printing device. The distance D can be suitably adjusted at 45 ° deviating entrance angles of the laser beam 2, so that a

Phase shift by π or an optical

Path difference of λ / 2 is formed.

Claims

claims:

1. Device for deflecting and / or modulating a

Laser radiation (31), in particular a plurality of

Laser beams (2) comprising a plurality of deflection means (33, 38, 39),

Movement means which can move the plurality of deflecting means (33, 38, 39) individually or in groups, characterized in that the moving means comprise at least one actuator, preferably a plurality of actuators,

in particular at least one piezoactuator (5), which can perform a translational movement.

2. Apparatus according to claim 1, characterized in that each of the deflection means (33, 38, 39) is associated with an actuator which can move the associated deflection means (33, 38, 39).

3. Device according to one of claims 1 or 2, characterized

in that the deflection means (33, 38, 39) can be displaced and / or pivoted about an axis (4).

4. Device according to one of claims 1 to 3, characterized

characterized in that the deflection means are designed as mirror elements (1, 25, 26, 46, 47).

5. Device according to one of claims 1 to 4, characterized

in that the deflecting means are constructed as a transparent component (13, 16, 17) through which the deflectors are to be deflected Laser radiation (31), in particular the deflected laser beam (2), can pass.

6. Apparatus according to claim 5, characterized in that the component (13) is a plane-parallel plate.

7. The device according to claim 5, characterized in that the component is a lens (10) or a lens segment (11, 12).

8. Device according to one of claims 1 to 7, characterized

characterized in that each of the deflection means comprises two opposing transparent components (16, 17) through which the laser radiation (31) to be deflected, in particular the laser beam (2) to be deflected, can pass, the two components (16, 17) moving relative to one another can be, in particular in a direction perpendicular to

Propagation direction of the laser radiation (31), in particular of the laser beam (2).

9. Apparatus according to claim 8, characterized in that the components (16, 17) corresponding contours (18, 19) which are arranged in particular on opposite sides of the components (16, 17).

10. Device according to one of claims 1 to 9, characterized

characterized in that the deflection means (33, 38, 39)

are arranged side by side, in particular in a direction perpendicular to the propagation direction of the laser radiation (31), in particular the laser beams (2).

11. Device according to one of claims 1 to 10, characterized

in that the laser radiation (31), in particular the laser beams (2), start from a laser diode bar (8), in particular, each of the emitters (7) of the

Laser diode bar (8) one of the laser beams (7) emits.

12. Device according to one of claims 1 to 10, characterized

in that the device can be used for the smile compensation of a laser diode bar (8).

13. Device according to one of claims 1 to 10, characterized

characterized in that the deflection means comprise mirror elements (46, 47) which are arranged so that during operation of the

Device on each of the two mirror elements (46, 47) each having a part of a laser beam (2) is reflected, wherein a second of the mirror elements (46, 47) of an actuator relative to a first of the mirror elements (46, 47) is movable, so that with appropriate position of the mirror elements (46, 47) to each other, the intensity of the laser beam (2) in one

Working level is reduced by destructive interference.

14. A method for smile compensation of a laser diode bar (8), characterized in that a plurality of deflection means (33, 38, 39) are transferred by means of movement individually or in groups in such a position and / or position that thereby the smile distortion of the laser diode bar ( 8) is corrected.

15. The method according to claim 13, characterized in that a device according to one of claims 1 to 12 is used for carrying out the method.

16. The method according to any one of claims 13 or 14, characterized

characterized in that the plurality of deflection means (33, 38, 39) after being transferred to the smile compensating position and / or position, so that the moving means are no longer needed.