EP3281221A1 - Device for holding, positioning, and moving an object - Google Patents
Device for holding, positioning, and moving an objectInfo
- Publication number
- EP3281221A1 EP3281221A1 EP16714394.0A EP16714394A EP3281221A1 EP 3281221 A1 EP3281221 A1 EP 3281221A1 EP 16714394 A EP16714394 A EP 16714394A EP 3281221 A1 EP3281221 A1 EP 3281221A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- carrier
- base
- magnetic bearing
- transport
- stators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0472—Active magnetic bearings for linear movement
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2370/00—Apparatus relating to physics, e.g. instruments
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2370/00—Apparatus relating to physics, e.g. instruments
- F16C2370/20—Optical, e.g. movable lenses or mirrors; Spectacles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/18—Handling tools for semiconductor devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
- F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
- F16C32/0465—Details of the magnetic circuit of stationary parts of the magnetic circuit with permanent magnets provided in the magnetic circuit of the electromagnets
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
- F16C32/0468—Details of the magnetic circuit of moving parts of the magnetic circuit, e.g. of the rotor
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
Definitions
- the present invention relates to a device for holding, positioning and / or moving an object, in particular of substrates.
- Air bearings are for high pure manufacturing environments only conditionally suitable, as this may result in unwanted air currents in the vicinity of the substrate, which may be contrary to compliance with required accuracies in the substrate treatment under certain circumstances.
- magnetic wafer stages or magnetic holding or positioning devices with a base and a support carrying an object.
- a plurality of magnetic bearings each with a distance sensor and a control loop, are typically provided which hold the carrier in a suspended state at a predetermined distance from the base.
- a generic wafer stage is known, for example, from US Pat. No. 7,868,488 B2.
- Known solutions for the non-contact mounting of a carrier to be moved along a stationary base for receiving an object, for example a substrate, can have a plurality of individual or discrete magnetic bearings spaced apart from one another in a transport direction.
- the magnetic bearings arranged stationarily on the base mechanically interact with the carrier, depending on the instantaneous position of the carrier.
- a magnetic bearing which comes into operative connection with the carrier in the transport direction is to be activated, whereas a magnetic bearing lying in the transport direction at a rear end of the carrier has to be correspondingly deactivated.
- the formation of vibration or resonance phenomena on the carrier can not be excluded.
- the base is also subject to any externally induced mechanical disturbing influences, or that the non-contact mounting of the carrier at the base leads to vibration excitation of the base.
- the non-contact storage and for the contactless transport of a carrier of a carrier along a predetermined path from the base and lateral or transverse guide means are provided.
- At least two types of magnetic bearings are often provided along a given from the base trajectory, namely those magnetic bearings which interact in vertical direction with the carrier to compensate for the weight of the carrier and other magnetic bearings, which act as so-called horizontal magnetic bearings by means of which side stabilization or a lateral guide can be provided perpendicular to the transport direction of the carrier.
- a drive is also provided. This can typically be designed in the form of a linear motor.
- the device should also be characterized by a particularly compact design.
- intended for the contactless transport of the carrier magnetic bearings should be particularly effective and multifunctional.
- the device provided so far is suitable for non-contact holding, positioning and for moving an object.
- the device has a stationary base and at least one relatively movable base for the carrier Object on.
- For the non-contact storage or for the contactless transport and the movement of the carrier along the base at least one magnetic bearing for generating a bearing or holding force between the base and the carrier is provided.
- the carrier is supported by the magnetic bearing without contact on the base.
- a drive acting without contact between the base and the carrier is provided for displacing the carrier along the base in at least one transport direction.
- the drive has, in particular, a linear motor with at least one stator and rotor, which are arranged on the base and on the carrier and which, in addition to a displacement force acting along the transport direction, form a further counterforce between the base and the carrier counteracting the bearing or holding force are.
- the linear motor for moving the carrier along the base consequently not only generates a displacement force in the direction of movement or in the transport direction, but additionally also a counter force which counteracts the at least one magnetic bearing.
- the magnetic bearing is designed, for example, as a vertical magnetic bearing for weight force compensation and for floating contactless holding of the carrier, then the drive or its linear motor produces a counterforce directed in the direction of the weight force of the carrier. In this way, improved lateral stabilization for the wearer can be achieved. Since the force originating from the drive acts on the carrier in addition to the weight force, a bearing or holding force emanating from the magnetic bearing must be correspondingly increased for a non-contact bearing. For a non-contact bearing with respect to the vertical direction, care must be taken to ensure that the holding force emanating from the magnetic bearing is approximately equal in magnitude to the sum of the weight of the carrier and the counterforce originating from the drive. An increase in drag and holding power may seem senseless at first glance.
- the requirement profile for a stabilization or lateral lateral guidance for the carrier at the base can be met much easier by the opposing force from the drive, the requirement profile for a stabilization or lateral lateral guidance for the carrier at the base.
- the driving effort for e.g. horizontally acting and provided for the lateral stabilization or lateral guidance of the carrier magnetic bearing can be simplified. As a result, manufacturing and operating costs of such devices can be reduced.
- the counterforce exerted by the drive causes an increased rigidity of the bearing or guide of the carrier to the base in the transverse direction, that is perpendicular to the transport direction predetermined by the base as well as perpendicular to the direction of the holding force emanating from the magnetic bearing.
- the increase in stiffness by applying a counterforce can be compared in a rash with a spring bearing, wherein the bearing substantially providing the spring is now provided with a higher spring constant.
- the at least one magnetic bearing is configured as an actively controllable magnetic bearing. It has an electromagnet which can be activated electrically and magnetically interacting with a counterpart, and a distance sensor and an electronic unit coupled thereto.
- the distance sensor and the electromagnet By means of the electronic unit, the distance sensor and the electromagnet, a predetermined relative position of base and carrier can be selectively adjusted.
- the magnetic bearing is equipped with a provided control loop, which, starting from the distance sensor detected distance measurement signals the solenoid such that the distance between the distance sensor and the counterpart remains far-reaching constant or within a predetermined range.
- the electronic unit coupled to the distance sensor and the electromagnet can then gradually or continuously reduce the current flow through the electromagnet so that a required distance between the distance sensor and the counterpart is established and maintained as a result of the regulation.
- the distance sensor is preferably arranged in the immediate vicinity of the electromagnet. A minimization of the distance between the distance sensor and the electric motor is particularly advantageous for increasing a degree of collocation.
- each magnetic bearing has its own control loop, comprising an electromagnet, a distance sensor, and a dedicated electronics unit. In this way, local changes in the distance between the base and the carrier in the region of the respective magnetic bearing can be precisely detected and selectively evaluated and used individually for a corresponding activation of the respectively affected electromagnets.
- the device according to the invention can provide a positioning and displacement accuracy of the carrier relative to the base in the range of a few micrometers or even in the submicrometer range.
- the device is designed vacuum suitable; that is, it is suitable for operation under vacuum conditions, such as vacuum or very low pressure vacuum processes, such as for the coating of substrates.
- the device according to the invention comprises a plurality of magnetic bearings, which are typically spaced apart in the transport direction or perpendicular thereto. At least one or some of the magnetic bearings is or are formed as vertical magnetic bearings for generating a vertical holding force counteracting the weight of the carrier.
- the weight of the carrier can be compensated and thus the carrier floating and non-contact are held at the base.
- the arrangement of magnetic bearing and counterpart can be distributed differently on the carrier and the base.
- For a vertical support of the carrier in the transport direction it is then necessary to provide at the base a plurality of spaced apart in the transport direction magnetic bearings, wherein the distance of those magnetic bearings in the transport direction must be smaller than the corresponding extent of the carrier or its counterpart in the transport direction.
- the distance between the vertical and in the transport direction spaced magnetic bearing is typically selected such that there are always at least two consecutive in the transport direction vertical magnetic bearing in the area of effect with the carrier.
- a number of discrete magnetic bearings can be arranged in the transport direction at the base.
- At least one magnetic bearing or at least one of the magnetic bearings is designed as a horizontal magnetic bearing for generating a horizontally acting holding force between the base and the carrier.
- Horizontal as well as Vertical magnetic bearings can each have their own control circuit each with an electromagnet, a distance sensor and an electronic unit. However, the directions of action of horizontal and vertical magnetic bearings are different. This can be achieved by the appropriate arrangement and orientation of electromagnets and magnetically engagable counterparts.
- the horizontal magnetic bearing is arranged along a guide enclosing the support laterally, and that in particular a plurality of horizontal magnetic bearings spaced apart in the transport direction are arranged on that lateral guide and similar to the vertical magnetic bearings in the course of a displacement movement of the support successively in the transport direction with the carrier magnetically enter and disengage.
- the drive acting between the base and the carrier is designed to form a counterforce acting counter to the magnetic bearing and thus provides an increased rigidity of the bearing, for example in the transverse direction, the requirements for horizontal magnetic bearings for the lateral guidance or transverse stabilization of the carrier can be reduced in an advantageous manner become.
- the drive can contribute to some extent to the operation of the horizontal magnetic bearings.
- the counterforce arising from the drive does not necessarily have to act in the vertical direction. This would always be the case when the drive counteracts the vertically acting holding force of a vertical magnetic bearing. According to an alternative embodiment, it is also conceivable that the counterforce originating from the drive counteracts a horizontally acting holding force of a horizontal magnetic bearing. In this case, the drive could contribute to the vertical stabilization of the magnetic bearing of the carrier, or a horizontal magnetic bearing or a series of horizontal magnetic bearings on one side of the carrier could be replaced by the action of the drive. The principle of the invention underlying principle of action remains the same. The counterforce originating from the drive would act only in the horizontal direction, consequently perpendicular to the weight of the carrier and an object arranged thereon.
- the horizontal magnetic bearing has at least one arranged on the base or on the carrier electromagnet which with the arranged on the carrier or on the base counterpart to the displacement of the carrier in a transverse direction cooperates.
- the transverse direction extends transversely, with respect to the transport direction, typically perpendicular to the transport direction and also perpendicular to the vertical direction.
- the electromagnet of the horizontal magnetic bearing is arranged on the base side, while the counterpart interacting magnetically with the electromagnet is arranged on the carrier.
- the electromagnet and the counterpart interacting therewith are arranged facing one another on the base or on the carrier, so that unimpeded magnetic interaction between them is possible.
- the counterpart on the carrier or on the base at least one row of alternately poled permanent magnets, which are obliquely spaced apart in the transverse direction or perpendicular to the transport direction.
- the permanent magnets may for example be designed as bar magnets, which are aligned with their longitudinal axis, for example in the transverse direction.
- the electromagnet of the horizontal magnetic bearing may comprise a coil wound iron core having a plurality of legs, one of which extends through the coil. The distance between the legs in the transverse direction is typically slightly less than the distance between the spaced-apart in the transverse direction permanent magnets.
- the free ends of the legs of the iron core wound with at least one coil are aligned with the permanent magnets arranged side by side in the transverse direction. Due to the interaction of the magnetic field that can be generated by the coil with the magnetic field of the permanent magnets, a resulting Lorentz force arises with a force component in the transverse direction.
- the force component in the transverse direction or the transverse force emanating from the horizontal bearing can be varied in terms of amount and in their direction.
- Such a configuration makes it possible in particular that the cooperating with the horizontal magnetic bearing counterpart is arranged in the vertical direction spaced from the electromagnet of the magnetic bearing. This also allows a vertically spaced arrangement of the electromagnet and the magnetically interacting counterpart at the base and on the carrier. This way you can Horizontal magnetic bearing can be realized without the need for a laterally along a travel distance of the carrier arranged rail or bracket for lateral guidance or non-contact storage must be provided.
- the region of the base lying in the transverse direction next to the carrier can be designed to be extensively barrier-free.
- the horizontal magnetic bearing magnetically interacts with an upper side or with a lower side of the carrier. It is advantageous that at least one or more horizontal magnetic bearings are arranged on the base side along a transport direction on the base. They are typically above the carrier or below the carrier. In particular, the upper side or the lower side of the carrier has at least one magnetically interacting counterpart with the horizontal magnetic bearing. This is accordingly arranged at the top or at the bottom of the carrier. In this way and due to the special design and mutual arrangement of counterpart and horizontal magnetic bearing, it is possible to design the side area, that is the area horizontal and perpendicular to the transport direction of the carrier far reaching barrier-free. On lateral guide rails, as they are usually provided for generic non-contact transport systems, can be dispensed with in an advantageous manner.
- all horizontal and all vertical magnetic bearings are arranged together on one and the same base, which is located for example above the carrier.
- the carrier can thus be suspended and guided by the magnetic interaction of the horizontal and the vertical magnetic bearing hanging on the base.
- the at least one magnetic bearing and the drive magnetically interact with mutually opposite sides of the carrier.
- the drive is arranged on a horizontal or vertical magnetic bearings opposite sides of the carrier. If, for example, the drive is intended to generate a vertical counterforce counteracting the vertical holding force, it is advantageously provided that the drive interacts with a lower side of the carrier, and that the vertical magnetic bearing engages magnetically with an upper side of the carrier. Accordingly but can also be provided that the drive interacts with a left side or outer edge of the carrier, while a horizontal magnetic bearing with an opposite right side edge of the carrier enters into magnetic interaction.
- the base has a plurality of spaced apart in the transport direction or in the transverse direction of magnetic bearings, which come to move the carrier along the base in the transport direction or in the transverse direction successively with at least one magnetic carrier operatively connected to the counterpart.
- the arrangement of multiple magnetic bearings on the base is advantageous for the vacuum capability of the device.
- the waste heat generated by the energization of the coils of the magnetic bearings can be dissipated comparatively well via the stationary and stationary base.
- the heat conduction in stationary arranged magnetic bearings is definitely easier and better to realize, as would be the case with carrier side arranged magnetic bearings.
- the heat transport of a vacuum-mounted contactless carrier is relatively complex and complex. It may further be provided that pairs of horizontal and vertical magnetic bearings are arranged at a distance from the base in the transport direction. Similarly, it is conceivable that vertical magnetic bearings and / or horizontal magnetic bearings are arranged transversely spaced from each other at the base. In this way it is possible in principle to move the carrier both in the transport direction and in the transverse direction relative to the base without contact.
- the base has two transport paths extending perpendicularly or obliquely to one another in the transport direction and in the transverse direction, each having a plurality of magnetic bearings, the transport paths adjoining one another in an intersection region.
- the main movement direction of the carrier relative to the base can be changed in the crossing regions.
- a transport path extending, for example, in the transport direction can lead to a further transport path extending in the transverse direction.
- one of the transport paths to form a T-junction is bluntly adjacent to another transport path, or that two continuous transport paths only intersect in the crossing area.
- a carrier moved along the transport direction along a first transport path undergoes a change of direction in the crossing region, thus initially following the first transport path in the transport direction until reaching the crossing region and then moving further along a second transport path in the transverse direction.
- the realization of several transport paths running differently in the horizontal plane and the realization of intersection areas for coupling different transport paths allows almost any two-dimensional movability of the carrier along different paths.
- a plurality of carriers can be guided past each other in a collision-free manner in different directions, which can prove to be extremely advantageous for the process steps and production processes to be treated and objects that can be arranged on the carriers.
- At least two differently oriented runners or stators of two linear drives are arranged on the carrier, one of which for moving the carrier relative to the base in the transport direction and of which the other for moving the carrier relative to the base is formed in the transverse direction.
- the support side to be provided component of the drive for example, designed as passive elements runners can be aligned according to the directions of each eligible transport paths.
- the carrier has a rotor of a first drive, which is designed to move the carrier along the transport direction and along a first transport path.
- the carrier can be provided with a further runner of a second drive, which is designed exclusively to move the carrier in the transverse direction, that is to say along a second transport path coinciding therewith.
- the carrier is located in an intersection area, which is also the base side with two sub- is provided differently oriented stators or runners of two drives, it is provided to change the direction of movement of the carrier to disable the stators of one drive in favor of the stators of the other drive, or to interchange the role of active stators of the two drives.
- At least two runners or stators aligned parallel to one another and the transport direction or in the transverse direction at a predetermined minimum distance from one another are arranged on the carrier.
- the components of the drive that is, the stators or rotor are so far arranged in the transport direction or in the transverse direction interrupted on the carrier.
- a plurality of discrete stators which are spaced apart from one another in the transport direction, are arranged for the displacement of the carrier in the transport direction, and that runners which can be brought into operative connection therewith are arranged on the carrier.
- the base-side stators as well as the carrier-side runners, when viewed in the transport direction, can each have a certain minimum distance from each other. The distances should be selected in such a way that at least at least one runner of the carrier is in operative connection with at least one stator of the base.
- the extent of rotor and stators on the carrier and on the base and their distances in the transport direction must be selected such that always at least one rotor of the carrier is in operative connection with at least one stator of the base.
- That arrangement can also be provided equally for an alternative embodiment in which the stators or the at least one stator are arranged on the carrier side and the runners or the at least one rotor are arranged on the base side.
- each of the transport paths in the transport direction or in the transverse direction spaced stators or runners on.
- the runners or stators of a transport path are arranged at the level of the spaces between the rotor or stators of the other transport path.
- the second base side provided transport path may equally comprise a plurality of spaced apart transversely stators.
- An imaginary connecting line of all stators of the second transport path intersects the first transport path in a gap between see the stators of the first transport path and vice versa. In this way, the stators of the first and second transport path can be arranged in one and the same plane without collision and without contact with each other.
- each of the transport paths has its own drive.
- there are two drives in the crossing region which are designed for the transport of the carrier in different directions. If the carrier is located in the crossing area, only one of the two drives acting in different horizontal directions is activated, while the other drive is deactivated.
- At least two magnetic bearings which are assigned to one of the two transport paths, can be activated in the crossing area, while two further magnetic bearings assigned to a different transport path can be correspondingly continuously deactivated. This is especially true for the vertical magnetic bearings.
- first and the second transport path have different vertical magnetic bearings and both are different types of vertical magnetic bearings in the crossing region
- it is necessary for a change of direction of the carrier in the crossing area for example, to deactivate the vertical magnetic bearings of a transport path in favor of the vertical magnetic bearings of the other transport path
- the deactivation and activation of vertical magnetic bearings located in the crossing area are in each case continuous and opposite, so that the carrier does not change position during the switching from vertical magnetic bearings of one transport path to the vertical magnetic bearings of another transport path.
- Such switching over from vertical magnetic bearings of a first transport path to those vertical magnetic bearings of a second transport path typically occurs in the case of a resting carrier.
- An analogous switching from horizontal magnetic bearings of a transport path to the horizontal magnetic bearings of another and adjacent to the crossing region transport path can be done in an analogous manner.
- the switching of the vertical magnetic bearings can be done in time and synchronously, but also offset in time for switching the horizontal magnetic bearings in the intersection area.
- the vertical magnetic bearings arranged in the intersection region equally belong to both adjacent transport paths. Then there are for a change of direction of the carrier in the crossing area no special precautions for the vertical magnetic bearings to make. Only when leaving the crossing region are those vertical magnetic bearings of that transport path to be activated along which the carrier moves straight along.
- Fig. 1 is a schematic representation of a provided with a control loop
- FIG. 2 shows a schematic representation of the functional principle of the device according to the invention with a drive, which in addition to a driving force further generates a counteracting the bearing or holding force of the magnetic bearing counterforce
- Fig. 3 shows a development of the embodiment shown in Fig. 2
- FIG. 4 shows a further embodiment with two vertical and horizontally spaced magnet bearings, a horizontal magnetic bearing and with a horizontal magnetic bearing opposite arranged drive,
- FIG. 5 shows a further embodiment of the device according to the invention, in which the horizontal magnetic bearing is arranged above the carrier,
- FIG. 6 is a schematic cross-sectional view of the drive designed as a linear motor,
- FIG. 7 is a plan view of a rotor of a horizontal magnetic bearing, a cross section through an embodiment of a horizontal magnetic bearing,
- FIG. 9 shows a plan view of the device according to the invention with a longitudinally extended base in the transport direction
- Fig. 1 1 is a plan view of two different types of counterparts on the
- Fig. 12 is a schematic representation of two mutually perpendicular
- Fig. 13 is a schematic representation of a configuration of transport paths and hereby resulting movement or displacement directions for the carrier and
- Fig. 14 shows a further embodiment of different transport paths together with resulting movement or displacement possibilities for the contactless mounted on the base carrier. Detailed description
- FIGS. 4 and 9 show, in a simplified and schematic representation, a device 1 according to the invention for holding, positioning and / or moving an object 52, which is arranged on a carrier 50.
- the device 1 can be configured, for example, as a wafer stage or as a transport system for the vacuum coating of displays.
- the device 1 has a stationary base 30, in the present case in the form of at least two guide rails, which extend in the illustration according to FIG. 9 in the transport direction (T) or in the z-direction.
- a plurality of magnetic bearings 10 are provided in the transport direction (T) on the base 30, spaced apart in the transport direction and aligned in the transport direction and in series.
- the magnetic bearings 10 provided in the present case with respect to the transport direction (T), left and right side edges of the carrier 50 are used for non-contact mounting of the carrier 50 on the stationary or stationary base 30.
- a linear motor 38 can be formed, which exerts on the carrier 50 a displacement force (V) directed in the transport direction during operation of the device 1. In this way, the carrier 50 can be mounted non-contact on the base 30 and also moved without contact along the base.
- the magnetic bearing 10 is base side, that is arranged on the stationary base 30. It has at least one electromagnet 12 with a coil 16 and with an iron core 14 or ferrite core. The free ends of the legs of the horseshoe-shaped iron core 14 are facing the carrier 50. On the carrier 50, the magnetic bearing 10 facing a magnetically interacting with the electromagnet 12 counterpart 18 is arranged.
- the magnetic bearing 10 also has a distance sensor 20 which measures a distance 26 between the carrier 50 and the magnetic bearing 10 arranged on the base side.
- the counterpart 18 may be designed ferromagnetic, permanent or permanent magnetic. It typically extends parallel to the base 30 or parallel to not shown guide rails of the base 30, along which the carrier 50 is movable without contact.
- the distance sensor 20, the electromagnet 12 and an electronics unit 15 forms a control loop 11, which is shown separately and somewhat in detail in FIG.
- the control circuit 1 1 also has a setpoint generator 25, a controller 22, an amplifier 24 and acting as an electromagnetic stator electromagnet 12.
- a controller 22 an amplifier 24 and acting as an electromagnetic stator electromagnet 12.
- other electromagnetic stators for example bi-directional Lorenz or TauchspulenStatoren be used.
- Control signals which can be generated by the controller 22 are amplified by means of the amplifier 24 and are accordingly supplied to the coil 16 for producing a holding force (H) acting on the counterpart 18.
- the distance sensor 20 is arranged, which permanently measures a distance 26 to the counterpart 18 or to the carrier 50.
- the distance 26 determined by the distance sensor 20 is supplied to the setpoint generator 25 in the form of a distance signal.
- setpoint and actual value are compared.
- a corresponding comparison signal is supplied to the controller 22, which generates therefrom a control signal provided for actuating the electromagnet 12 and supplies it to the amplifier 24.
- the amplified control signal supplied to the coil 16 is calculated and determined in such a way that a predetermined distance 26 between carrier 50 and base 30 is maintained, and that for deviations from the required distance, the force emanating from the electromagnetic stator or from the electromagnet 12 to maintain the Distance 26 is dynamically adjusted.
- the electronic components of the magnetic bearing 10 are typically combined in a single electronic unit 15. At least all Elektronikbautei- le, such as the amplifier 24, the controller 22 and the setpoint generator 25 may be on a common board, for example in the form of a single integrated circuit housed. The space required for the electronics unit and a cabling effort associated therewith can be reduced to a minimum.
- control circuit 1 1 may be provided with an acceleration or movement sensor 28, by means of which vibration excitations of the base 30 can be determined.
- the signals that can be generated by the motion sensor 28 are typically supplied to a vibration damping 23, which may be integrated into the controller 22, for example.
- control 29th By means of a coupled to the setpoint generator 25 control 29th different required distances 26 between the base 30 and the carrier 50 can be adjusted specifically and as needed.
- the magnetic bearing 10 shown schematically in FIGS. 1 and 2 is designed as a vertical magnetic bearing. It generates a holding force (H), in particular a vertical holding force (Hv), which compensates or applies at least the weight of the carrier 50 and an object 52 arranged thereon.
- H holding force
- Hv vertical holding force
- a drive 40 in the form of a linear motor 38 is provided on the underside of the carrier 50.
- the linear motor 38 in this case has at least one or more runners 41 arranged on the carrier 50, which interact with stators 43, which are arranged on the base 30, for moving the carrier 50 in the transport direction (T).
- the concrete geometric shape of the base 30 is not shown here. It goes without saying that the base-side arranged components of the drive, thus the stators 43 and the magnetic bearings 10, stationary and immovable to one another are arranged along a predetermined from the base 30 transport path 31.
- the structure of the drive 40 is shown schematically in Figs. 6 and 7.
- the designed in the manner of a linear motor 38 drive 40 has on the carrier 50 in the transport direction (T) at regular intervals arranged permanent magnets 42a, 42b with alternating polarity.
- the permanent magnet 42a is polarized in opposite directions to the adjacent permanent magnet 42b.
- the permanent magnet 42a following this in the direction of transport is poled in the same direction as the preceding permanent magnet 42a.
- the regular arrangement of alternately poled magnets 42a, 42b on the carrier 50 forms a longitudinally extended rotor 41, which can interact with an electrically controllable stator 43, which is arranged on the base 30.
- the stator 43 has an iron or ferrite core 44 provided with several limbs, wherein in the transport direction (T) every second or the next but one limb is connected to a ner coil 45, 46, 47 is wrapped.
- the coils 45, 46, 47 form the three phases of the stator 43 and can be acted upon alternately with electric current.
- the periodicity or the center distance of the individual equidistantly arranged limbs 44.1, 44.2, 44.3, 44.4, 44.5, 44.6 and 44.7 of the iron core 44 is slightly less than the center distance or the periodicity of the permanent magnets 42a, 42b arranged alternately in the transport direction (T) , 42a, 42b.
- the drive 40 thus fulfills a dual function. On the one hand, it generates a displacement force (V) for moving the carrier 50 in the transport direction (T). On the other hand, it generates a counterforce (G) counteracting the holding force (H) of the magnetic bearing 10.
- the drive 40 can contribute to an improved lateral stabilization of the carrier 50 with respect to a transverse direction (Q), namely in particular when the counterforce (G) acts perpendicularly or obliquely to the holding force (H) of the magnetic bearing 10.
- the permanent magnets 42a, 42b of the rotor 41 of the linear motor 38 are not exactly vertical, ie in the x-direction, but at a certain angle of inclination to the x-direction or to the transverse direction (Q) are aligned.
- the rotor 43, with its iron core 44 can, however, be aligned in accordance with a rectangular imaginary outer contour 60 formed by the permanent magnets 42a, 42b.
- the orientation of the permanent magnets 42a, 42b which is slightly inclined with respect to the transverse direction (Q), ensures that a translational movement of the rotor 41 relative to the stator 43 produces as homogeneous and constant a counterforce (G) as possible.
- This proves to control technology for the or the drive 40 opposite magnetic bearing 10, 100 at a movement of the carrier 50 in the transport direction (T) as advantageous.
- the drive 40 can furthermore be provided, as shown in FIG. 5, with a position sensor 48 and with a coding 49 corresponding thereto at the base and on the carrier 50 , The coding 49 extends in the transport direction (T).
- a position sensor 48 corresponding thereto, which is typically located in close proximity to the stators 43 of the drive 40.
- any disturbances or disturbing forces acting laterally on the carrier can be compensated for much more easily by the counterforce (G) acting, for example, downwards in the vertical direction on the carrier 50.
- G counterforce
- any disturbing influences occurring in the horizontal and in the transverse direction (Q) have far less effects on unwanted movement of the carrier 50 in the transverse direction (Q).
- two magnet bearings 100 arranged on the left and right side edges of the carrier 50 are provided in FIG.
- those magnetic bearings 100 are fixedly arranged on the base 30. They each cooperate with a lateral counterpart 1 18 facing them, which are each arranged on opposite sides of the carrier 50 facing the respective magnetic bearing 100.
- the operation and structure of the magnetic bearing 100 may be substantially identical or similar to that of the magnetic bearing 10.
- a lateral guidance or a transverse stabilization of the carrier 50 in the transverse direction (Q) can take place by means of the magnetic bearings 100 arranged on opposite sides of the carrier 50.
- a series of horizontal magnetic bearings 100 provided for lateral stabilization is not explicitly shown in FIG. 9, they extend them approximately analogously to the vertical magnetic bearings 100 shown there.
- a plurality of horizontal magnetic bearings 100 spaced from one another in the transport direction (T) are provided on both opposite sides, in this case both on the left side 55 and on the right side 57 of the carrier 50.
- electromagnets 12 which can only exert an attractive force on the carrier 50 or on its counterparts 118, guiding the carrier 50 in the transverse direction (Q) therefore requires horizontal magnetic bearings 100 arranged on both sides of the carrier 50 the further embodiment according to FIG.
- a horizontal magnetic bearing 100 is provided only on the right side 57 of the carrier 50, while on the opposite left side 55 of the drive 40 is arranged.
- two transverse in the transverse direction (Q) spaced vertical magnetic bearing 10 are also provided above the carrier 50.
- the object 52 to be held on the carrier is located on the underside 53 of the carrier 50.
- the drive 40 generates a horizontally acting counterforce (G) which corresponds to the lateral holding force (Hh) of the opposing horizontal magnetic bearing 100 counteracts.
- G horizontally acting counterforce
- Hh lateral holding force
- FIGS. 2, 3, 4 and 5 can merely reproduce, by way of example, a cross section through the device shown schematically in FIG. 9, and that all the magnetic bearings 10, 100 shown in cross section and the drive components runners 41 and Stator 43 in the transport direction (T), ie perpendicular to the paper plane of Fig. 2, 3, 4 and are arranged regularly or equidistantly recurring.
- the arrangement of two parallel and in the transverse direction (Q) spaced apart rows of individual magnetic bearings 10, as shown in Fig. 9 and 12, is not mandatory.
- the carrier 50 is quasi-selectively suspended from the base 30 hanging. Any oscillations or oscillations of the carrier 50 in the transverse direction (Q) can be compensated or at least damped by means of the counterforce (G) emanating from the linear drive 38.
- FIGS. 5 and 8 show a further embodiment of a horizontal magnetic bearing 100.
- This has, similar to the linear drive 38, a provided with a plurality of legs 144.1, 144.2 and 144.3 iron or ferrite core 1 14.
- a central leg 144.2 is wrapped by a coil 1 16 here.
- the iron core 1 14 and the coil 1 16 form insofar an electromagnet 1 12, which similar to the stator 43 of the linear motor 38 cooperates with a counterpart 1 18.
- the counterpart 1 18 has, similar to the rotor 41, a plurality, in the present case at least two or at least three alternately poled permanent magnets 1 18a, 1 18b, 1 18a, which in the embodiment shown in FIGS. 5 and 8 in the transverse direction (Q). spaced apart on the carrier 50 are arranged.
- the horizontal magnetic bearing 100 shown in FIG. 8 differs in this respect not only in terms of its arrangement and operation, but also in terms of its structure from the vertical magnetic bearing 10th
- the embodiment variant of a horizontal magnetic bearing 100 shown in FIGS. 5 and 8 is advantageous in that the magnetic bearing 100 acting in the horizontal direction or in the transverse direction (Q) can also be arranged outside the side region of the carrier 50 and thus above the carrier 50, for example ,
- the horizontal magnetic bearing 100 may be disposed between two transversely spaced (Q) vertical magnetic bearings 10 on the base.
- the horizontal magnetic bearing 100 may be further provided with a position sensor 120, which with a reference to the carrier 50 arranged on the reference portion 1 19 for determining the position in the transverse direction (Q) can cooperate.
- the position sensor 120 as well as the distance measuring sensors 20 measuring in the vertical direction can be implemented optically, capacitively or else magnetically.
- the embodiment of the horizontal magnetic bearing 100 shown in FIG. 8 can only effect a comparatively small stroke or a comparatively small movement of the carrier 50 in the transverse direction (Q). Due to the counterforce (G) emanating from the drive 40, which counteracts the vertical holding force (Hv) of the two vertical magnetic bearings 10 in the embodiment according to FIG. 5, such a small displacement of the carrier 50 in the transverse direction (Q) by means of the horizontal magnetic bearing 100 already be sufficient.
- the embodiment according to FIG. 5 is advantageous to the extent that, for the transverse stabilization and for the lateral guidance of the carrier 50 with respect to the transverse direction (Q), no structural provisions are to be provided laterally of the carrier 50. To the left and to the right of the carrier 50, so to speak accessibility prevails, so that the basic possibilities for movability of the carrier (T) both in the transport direction and in the transverse direction (Q) are now given in principle by the storage proposed here.
- the base can ultimately provide a plurality of differently oriented transport paths 31, 131, along which are provided for the corresponding movement of the carrier 50 magnetic bearing 10, 100 are arranged.
- transport paths 31 and 131 are conceivable, as shown in FIGS. 13 and 14, with the transport paths 31 extending in the transport direction (T) and the transport paths 131 extending in the transverse direction (Q).
- the transport paths 31, 131 are typically oriented perpendicular to each other in the horizontal plane.
- Figs. 13 and 14 show a plan view from above.
- the individual transport paths 31, 131 need not necessarily have two parallel rows of magnetic bearings 10 spaced apart in the transport direction (T) or transverse direction (Q), as shown for example in FIG.
- a transport path 31 may also consist of a single bearing rail with only a single row of discrete magnet spacers spaced apart in the transport direction (T) or transverse direction (Q). be stored 10, as indicated for example in Fig. 2 or Fig. 3.
- a single-row vertical storage is particularly suitable for a suspended arrangement and storage of the carrier 50 at the base 30.
- a left transport path 31 a is shown, which extends in the transport direction (T), and which in an intersection region 32 a to a for this purpose perpendicular further transport path 131 adjacent.
- At an end of the transport path 131 facing away from the crossing region 32a there is another crossing region 32b in which the transport path 131 again merges into a further transport path 31b extending in the transport direction (T).
- the two transport paths 31 a, 31 b which are spaced apart from each other in the transverse direction (Q), are connected to one another by two transport paths 131 a, 131 b spaced from each other in the transport direction (T).
- a carrier 50 can be moved almost arbitrarily between the crossing regions 32a, 32b, 32c, 32d along each one of the transport paths 31a, 31b, 131a, 131b.
- one of the crossing regions 32 is somewhat enlarged, but simplified in schematic form.
- a plurality of stators 43 of the drive 40 which are spaced apart from one another in the transport direction (T) are arranged on the base 30 along a transport path 31 extending in the transporting direction (T), each having runners 41 of the carrier 50 correspondingly provided on the underside 53 of the carrier 50 interact.
- Between the individual base side arranged stators 43 intermediate spaces 3 are provided.
- two transport paths 31, 131 oriented perpendicular to one another intersect, wherein the second transport path 131 extends in the transverse direction (Q).
- the transport path 131 on the carrier side is likewise equipped with stators 143 of a further drive 140. Intermediate spaces 103 are likewise provided between the stators 143 of the further drive 140 offset and spaced apart in the transverse direction (Q).
- the individual stators 43, 143 of the two drives 40, 140 are arranged such that an imaginary connecting line extends all the stators 43 of the first transport path 31 in a gap 103 between two successive stators 143 of the drive 140 in the transverse direction (Q).
- an imaginary connecting line of all stators 143 of the drive 140 extends through a gap 3 between stators 43 of the drive 40 which are adjacent in the transport direction (T).
- the interstices 3, 103 of the two transport paths 31, 131 may possibly overlap at least in regions.
- corresponding runners 41, 141 are provided on the underside of the carrier 50, each having previously arranged alternately arranged permanent magnets 42a, 42b and 142a, 142b.
- the orientation of the permanent magnets 42a, 42b of the rotor 41 is rotated by 90 ° to align the permanent magnets 142a, 142b of the rotor 141 of the drive 140.
- the runners 41, 141 are arranged next to one another and without overlapping on the underside 53 of the carrier 50.
- At the bottom 53 of the carrier 50 at least two runners 41 of a drive 40 are to be arranged at a distance from each other.
- Two runners 141 of one drive 140 are arranged at a minimum distance DQ from one another on the carrier 50 in the transverse direction (Q). The same applies to the mutually parallel aligned runners 41 of the other drive 40. These are spaced from each other in the transport direction (T) by a minimum distance DT on the carrier 50.
- a schematically indicated in Fig. 12 configuration in the crossing region 32 can be achieved, in which the rotor and stators 41, 43 of a drive 40 and the stators and rotor 141, 143 of the other drive 140 geometrically overlapping to each other come.
- the carrier 50 for example coming from the left from the transverse direction (Q)
- an activation of the stators 143 of the drive 140 is required, which runs along the second transport path 131.
- that drive 140 can be stopped.
- the stators 143 of the drive 140 can be deactivated and the stators 43 of the other drive 40 can be activated.
- the transport paths 31, 131 are each also provided with a series of vertical magnetic bearings 10 arranged regularly along the respective transport paths 31, 131 at the base and relative to the movement of the carrier 50 relative to be capitalized on a demand-based basis.
- FIG. 1 1 shows by way of example that individual counterparts 1, 18, 218 of two different horizontal magnetic bearings 100, 200 are arranged on the upper side 51 of the carrier 50.
- the in the transport direction (T) spaced from each other on the carrier 50 counterparts 1 18 each have two or more permanent magnets 1 18a, 1 18b, which are spaced from each other in the transverse direction (Q) and the longitudinal alignment is substantially parallel to the transport direction (T).
- the two arranged in the transport direction (T) front and rear of the carrier 50 counterparts 1 18 each cooperate with horizontal magnetic bearings 100 which are arranged in the transport direction (T) at regular intervals on the base 30, and which in the transverse direction (Q) can provide the carrier 50 performing horizontal holding force (Hh).
- the two further counterparts 218 arranged in the transverse direction (Q) at the front and rear of the carrier 50 cooperate with horizontal magnetic bearings 200 which are arranged at a distance from the base 30 in the transverse direction (Q) along the transport path 131 and which are arranged in the transport direction (FIG. T) can provide holding force (Hh) acting on the carrier. Accordingly, the permanent magnets 1 18a, 1 18b and 90 ° relative to the permanent magnets 218a, 218b of the counterparts 218 rotated on the carrier 50 are arranged.
- the horizontal magnetic bearing 100 associated with the transport path 31 should be deactivated, while the horizontal magnetic bearing 200 assigned to the other transport path 131 should be activated.
- the same is of course also for the vertical magnetic bearing 10 provided. If the vertical magnetic bearings 10 of the one transport path 31 are substantially identical to those of the other transport path 131, however, it may be sufficient if no double number of vertical magnetic bearings 10 of the two transport paths 31, 131 are provided in the intersection region 32 itself.
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Abstract
Description
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102015004582.2A DE102015004582B4 (en) | 2015-04-09 | 2015-04-09 | Device for holding, positioning and moving an object |
PCT/EP2016/057268 WO2016162288A1 (en) | 2015-04-09 | 2016-04-01 | Device for holding, positioning, and moving an object |
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EP3281221A1 true EP3281221A1 (en) | 2018-02-14 |
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EP16714394.0A Withdrawn EP3281221A1 (en) | 2015-04-09 | 2016-04-01 | Device for holding, positioning, and moving an object |
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US (1) | US20180350648A1 (en) |
EP (1) | EP3281221A1 (en) |
JP (2) | JP6538194B2 (en) |
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CN (1) | CN107567654B (en) |
DE (1) | DE102015004582B4 (en) |
WO (1) | WO2016162288A1 (en) |
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JP2022534713A (en) * | 2019-05-28 | 2022-08-03 | ベーウントエル・インダストリアル・オートメイション・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | Conveyor |
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JP2003189589A (en) * | 2001-12-21 | 2003-07-04 | Canon Inc | Movable magnet type linear motor, exposure unit and method for manufacturing device |
JP4471708B2 (en) * | 2004-03-31 | 2010-06-02 | キヤノンアネルバ株式会社 | Substrate transfer device |
US7296673B2 (en) * | 2005-06-10 | 2007-11-20 | Applied Materials, Inc. | Substrate conveyor system |
JP2008544485A (en) * | 2005-06-10 | 2008-12-04 | アプライド マテリアルズ インコーポレイテッド | Linear vacuum deposition system |
KR100745371B1 (en) | 2006-10-23 | 2007-08-02 | 삼성전자주식회사 | Device for cleaning wafer chuck of semiconductor stepper |
US8810082B2 (en) * | 2009-03-13 | 2014-08-19 | Hitachi, Ltd. | Linear motor |
DE102009038756A1 (en) * | 2009-05-28 | 2010-12-09 | Semilev Gmbh | Device for particle-free handling of substrates |
KR20140087677A (en) * | 2012-12-31 | 2014-07-09 | 한국기계연구원 | Magnetic levitation system having slanted permanent magnet |
DE102014003882B4 (en) * | 2014-03-19 | 2017-07-13 | Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) | Transport device for moving and / or positioning objects |
-
2015
- 2015-04-09 DE DE102015004582.2A patent/DE102015004582B4/en not_active Expired - Fee Related
-
2016
- 2016-04-01 US US15/562,319 patent/US20180350648A1/en not_active Abandoned
- 2016-04-01 WO PCT/EP2016/057268 patent/WO2016162288A1/en active Application Filing
- 2016-04-01 JP JP2017552826A patent/JP6538194B2/en active Active
- 2016-04-01 KR KR1020177032562A patent/KR102090950B1/en active IP Right Grant
- 2016-04-01 EP EP16714394.0A patent/EP3281221A1/en not_active Withdrawn
- 2016-04-01 CN CN201680020772.9A patent/CN107567654B/en active Active
-
2019
- 2019-06-04 JP JP2019104256A patent/JP2019205342A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US20180350648A1 (en) | 2018-12-06 |
CN107567654B (en) | 2020-11-06 |
JP2019205342A (en) | 2019-11-28 |
DE102015004582A1 (en) | 2016-10-13 |
JP2018518041A (en) | 2018-07-05 |
KR102090950B1 (en) | 2020-03-19 |
CN107567654A (en) | 2018-01-09 |
JP6538194B2 (en) | 2019-07-03 |
KR20170137159A (en) | 2017-12-12 |
DE102015004582B4 (en) | 2017-02-09 |
WO2016162288A1 (en) | 2016-10-13 |
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