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EP2929759B1 - Method and control device for operating a plasma generating apparatus - Google Patents

Method and control device for operating a plasma generating apparatus Download PDF

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Publication number
EP2929759B1
EP2929759B1 EP13795530.8A EP13795530A EP2929759B1 EP 2929759 B1 EP2929759 B1 EP 2929759B1 EP 13795530 A EP13795530 A EP 13795530A EP 2929759 B1 EP2929759 B1 EP 2929759B1
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EP
European Patent Office
Prior art keywords
ignition
plasma
voltage
anode
cathode
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EP13795530.8A
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German (de)
French (fr)
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EP2929759A1 (en
Inventor
Florian LIECHTI
Albert FRIEDERY
Hartmut KOSCHNITZKE
René GRÖBER
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Oerlikon Metco AG
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Oerlikon Metco AG
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Definitions

  • the invention relates to a method for operating a plasma generating device according to the preamble of claim 1 and to a control device for operating a plasma generating device according to the preamble of claim 15.
  • Applicants offer plasma coating systems for substrates in which a plasma is produced in a so-called plasma torch between an anode and a cathode, into which a spray material in powder form is injected.
  • the plasma is formed by the ionization of a gas flowing between the anode and the cathode, which flings the injected powder onto the substrate surface.
  • a plasma torch may be considered as a plasma generating device.
  • a pre-settable number of voltage pulses several thousand volts high and lasting in the millisecond range are applied as an ignition voltage between the anode and the cathode. If the ignition attempt was unsuccessful, another attempt is started.
  • a check is continuously carried out during the ignition process as to whether the ignition of the plasma has taken place.
  • the ignition voltage is increased from an initial ignition voltage and upon detection of a successful ignition of the plasma, the voltage between anode and cathode is reduced to the sustain voltage.
  • the ignition voltage can be designed as a DC voltage, AC voltage of any frequency or as a pulsed DC voltage with arbitrary pulse pause ratio and any pulse shape
  • a control device for operating a plasma generating device which is intended to apply a sustaining voltage between an anode and a cathode, between which a plasma is to be formed, and for igniting the plasma between the anode and the cathode Apply ignition voltage.
  • a control device for operating a plasma generating device which is intended to apply a sustaining voltage between an anode and a cathode, between which a plasma is to be formed, and for igniting the plasma between the anode and the cathode Apply ignition voltage.
  • it is intended to continuously perform a test during the ignition process, whether the ignition of the plasma has occurred, to increase the ignition voltage from an initial ignition voltage and after detection of a successful ignition of the plasma to the voltage between the anode and cathode to the maintenance voltage to reduce.
  • the ignition voltage is applied only as long as necessary for the ignition process and also no unnecessarily high, but only the ignition voltage actually required for the ignition of the plasma is applied.
  • the application of high voltage pulses can lead to damage to the plasma generating device, so for example a plasma torch.
  • Such voltage pulses are when using the inventive method or the inventive control device avoided, so that damage due to voltage pulses are avoided and thus a gentle operation of the plasma generating device is made possible.
  • electromagnetic waves are generated by repetitive voltage pulses, which can interfere with the operation of electronic devices in the vicinity of the plasma generating device sensitive. When using the method according to the invention or the control device according to the invention, repetitive voltage pulses are avoided so that no or at least no disturbing electromagnetic waves are generated.
  • the plasma generating device is designed in particular as a plasma torch of a system for plasma coating of substrates. However, it may also be embodied, for example, as part of an apparatus for arc welding, plasma cutting, high speed flame spraying, flame wire spraying or flame powder spraying. It is also possible to use the plasma generating device for igniting combustion processes.
  • the sustaining voltage is generated in particular by a maintenance voltage source and the ignition voltage from a separate ignition voltage source, both of which are controlled by a controller of the plasma generating device. But it is also possible that only one voltage source is provided, which generates both the maintenance voltage, so also the ignition voltage.
  • the maintenance voltage is applied in particular before or at the same time as the start of the ignition process.
  • a current flowing between the anode and the cathode is measured.
  • a so-called ignition current can be measured, that is, a current that flows on the basis of the ignition voltage.
  • anode and Cathode electrically isolated from each other.
  • a completed ignition of the plasma is detected in particular when the measured current exceeds a definable current threshold.
  • the recognition may still depend on the condition that said current threshold must be exceeded for a definable period of time without interruption.
  • the ignition voltage is no longer increased but rather reduced to the sustain voltage.
  • the reduction takes place in particular abruptly after the detection of the ignition. But it is also possible that the ignition voltage is reduced along a predetermined course.
  • the initial ignition voltage is in particular 0 V, but it can also have a different value.
  • the ignition voltage is increased to ignite the plasma in particular strictly monotonically increasing.
  • the increase takes place, in particular, with a constant gradient, which can be, for example, between 100 V / ms and 10000 V / ⁇ s. But it is also possible that the ignition voltage is increased in other ways, for example, it can be increased gradually.
  • the ignition voltage is applied by an ignitor, which is separated after ignition from the anode and / or cathode.
  • the separation takes place in particular by opening one or two switches, which are arranged between the ignitor and the anode or the cathode.
  • the said switches are in particular also actuated by the mentioned control device of the plasma generating device. Due to the separation of the igniter from the anode and / or the cathode, there can be no disturbing interactions between the ignitor and the other components of the plasma generator.
  • an identification parameter is assigned to the anode-cathode pair used, and the ignition of the plasma is carried out as a function of the identification parameter.
  • the ignition can be tuned to the actual existing anode-cathode pair, so for example matched to the actual existing plasma torch.
  • a tuned initial ignition voltage, a coordinated course of the ignition voltage can be used in the increase and / or the lowering of the maintenance voltage.
  • the identification parameter identifies a plasma torch and may be embodied, for example, as a serial number or serial number of the plasma torch.
  • the identification parameter can in particular be determined automatically, for example, the plasma torch can have its own burner control device in which the identification parameter is stored and can be read out by the control device of the plasma generating device. However, it is also possible for the identification parameter to be entered manually in the control device of the plasma generation device.
  • At least one parameter of the course of the ignition voltage is detected until the ignition of the plasma, stored and evaluated.
  • a so-called end ignition voltage ie the ignition voltage at the time of detection of the ignition is stored.
  • other parameters such as, for example, the slope of the ignition voltage can be stored instead or in addition. From the stored parameters can be drawn conclusions about the state of the plasma generating device.
  • the parameters can be further processed, in particular after storage. For example, averages can be calculated or filtering performed.
  • the named identification parameter is stored together with the mentioned parameter.
  • the stored parameters can, for example, for the described, matched to the actual existing anode-cathode pair implementation of the ignition be used.
  • the identification parameter of the anode-cathode pair used is determined in particular before the ignition of the plasma, and the ignition then takes place as a function of the characteristic variable stored for this anode-cathode pair.
  • a time profile of the stored parameter is evaluated. This is to be understood in particular as meaning that the characteristic quantities ascertained and stored during different ignition processes are compared with one another. From the changes in the parameters can be drawn conclusions about changes in the properties of the plasma generating device.
  • the changes in the parameter are determined in particular in relation to an associated comparative value. For this purpose, it is monitored whether a currently determined characteristic variable deviates from the associated comparison value by a definable measure. If this is the case, for example, it can be concluded that the plasma generator must be checked and, if necessary, parts repaired or replaced. For this purpose, a message can be displayed by the control device of the plasma generating device or an alarm can be triggered.
  • the named measure can be embodied, for example, as a definable absolute limit, for example a voltage limit for the change in the ignition voltage or, for example, as a definable percentage deviation from the associated comparison value.
  • the aforementioned comparison value can be set and stored, for example, for a specific type of plasma generation device.
  • the comparison value can also be determined and stored in particular from stored parameters.
  • This comparison value can be embodied, for example, as the first determined characteristic variable, that is to say, for example, the first ignition voltage required for the ignition of the plasma.
  • a plasma generating device 10 which can be embodied for example as part of a plasma torch of a system for plasma coating substrates, has an anode-cathode pair 11 with an anode 12 and a cathode 13 between which a plasma is to be formed.
  • a gas such as argon, helium, hydrogen, nitrogen, or a mixture thereof, which is ionized upon formation of the plasma, flows between anode 12 and cathode 13.
  • argon or nitrogen is used for the formation of the plasma. Only after ignition, if necessary, other gases are added.
  • the anode 12 and the cathode 13 are electrically connected to both a sustain voltage source 14 and an ignition voltage source 15.
  • the sustain voltage source 14 and the ignition voltage source 15 are driven by a controller 16 of the plasma generating device 10.
  • the anode-cathode pair 11 also has a burner control device 17 in which inter alia an identification parameter in the form of a serial number of the anode-cathode pair 11 is stored.
  • the burner control device 17 is in signal communication with the controller 16, so that the controller 16 can read out said serial number and perform the driving of the sustain voltage source 14 and / or the ignition voltage source 15 depending on the serial number.
  • a first switch 18 and between the ignition voltage source 15 and the cathode 13 a second switch 19 is arranged, by means of which the connections between the anode 12 and the cathode 13 and the ignition voltage source 15 can be interrupted.
  • the switches 18 and 19 are also controlled by the controller 16.
  • Fig. 2 the waveforms of an ignition voltage U z generated by the ignition voltage source 15 and a sustaining voltage U A generated by the sustaining voltage source 14 during ignition of the plasma in the plasma generating device 10 over time are shown, the curves are shown only qualitatively and not to scale.
  • the control device 16 reads out the serial number of the anode-cathode pair 11, that is to say an identification parameter of the anode-cathode pair 11 from the burner control device 17.
  • this information is required in order to adapt the course of the ignition process to the actually present anode-cathode pair 11; on the other hand, a parameter of the course of the ignition voltage U z is detected until the ignition of the plasma has taken place and stored assigned to the serial number.
  • the sustaining voltage source U In preparation for the actual ignition operation, at the time t0, the sustaining voltage source U generates the constant sustaining voltage U A which is applied to the anode-cathode pair 11 and thus between the anode and the cathode.
  • the sustaining voltage U A is, for example, about 100 V.
  • the switches 18 and 19 Provided the switches 18 and 19 are opened are, they are driven at the time t0 so that they close and so the anode-cathode pair 11 is electrically connected to the ignition voltage source 15.
  • the ignition voltage source 15 starting from an initial ignition voltage U ZA of 0 V, starts to generate the ignition voltage U z which, in addition to the sustaining voltage U A, is applied to the anode-cathode pair 11 and thus between the anode and cathode.
  • the ignition voltage U z is increased along a straight line with a constant slope and thus strictly monotonically increasing.
  • the slope used is selected in particular depending on the above-mentioned serial number of the anode-cathode pair 11.
  • a table is stored in the control device 16, in which slopes of the ignition voltage are assigned to the serial numbers.
  • a current flowing via the ignition voltage source 15, a so-called ignition current is measured by means of a current measuring device which is integrated in the ignition voltage source 15 and not separately illustrated.
  • a definable current threshold which may likewise depend on the abovementioned serial number of the anode-cathode pair 11
  • the ignition voltage U z is abruptly reduced to 0 V, so that then between the anode 12 and cathode 13 only the sustaining voltage U A is applied.
  • the switches 18 and 19 are driven so that they open and so the anode-cathode pair 11 is electrically disconnected from the ignition voltage source 15.
  • the end ignition voltage U ZE produced at the time t Z by the ignition voltage source 15 and thus applied between the anode 12 and the cathode 13 is detected by the ignition voltage source 15 and forwarded to the control device 16.
  • the final ignition voltage U ZE is for example between 6 kV and 21 kV. It can be regarded as a parameter of the course of the ignition voltage UZ until ignition of the plasma has taken place.
  • the final ignition voltage UZE is common with the above serial number of the anode-cathode pair 11 stored in the control device 16.
  • the control device 16 evaluates the time profile of the end ignition voltage UZE. For this purpose, the current end ignition voltage UZE is compared with a comparison value. If the actual end ignition voltage UZE deviates by a definable difference value, which can be, for example, between approximately 5 kV and 30 kV, a problem is identified at the current anode-cathode pair 11, for example, excessive wear, and a corresponding one Note on a not separately shown screen of the controller 16 shown.
  • a definable difference value which can be, for example, between approximately 5 kV and 30 kV
  • said reference value may be fixed for a specific type of anode-cathode pair.
  • the comparison value can also be designed as the first end ignition voltage determined after the current anode-cathode pair or the plasma generation device has been put into operation.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Arc Welding Control (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Description

Die Erfindung betrifft ein Verfahren zum Betrieb einer Plasmaerzeugungseinrichtung gemäß dem Oberbegriff des Anspruchs 1 und eine Steuerungseinrichtung zum Betrieb einer Plasmaerzeugungseinrichtung gemäß dem Oberbegriff des Anspruchs 15.The invention relates to a method for operating a plasma generating device according to the preamble of claim 1 and to a control device for operating a plasma generating device according to the preamble of claim 15.

Von der Anmelderin werden Anlagen zum Plasmabeschichten von Substraten angeboten, bei denen in einem so genannten Plasmabrenner zwischen einer Anode und einer Kathode ein Plasma erzeugt wird, in das ein Spritzwerkstoff in Pulverform injiziert wird. Das Plasma entsteht durch die Ionisierung eines zwischen der Anode und der Kathode durchströmenden Gases, das das injizierte Pulver auf die Substratoberfläche schleudert. Ein derartiger Plasmabrenner kann als eine Plasmaerzeugungseinrichtung angesehen werden.Applicants offer plasma coating systems for substrates in which a plasma is produced in a so-called plasma torch between an anode and a cathode, into which a spray material in powder form is injected. The plasma is formed by the ionization of a gas flowing between the anode and the cathode, which flings the injected powder onto the substrate surface. Such a plasma torch may be considered as a plasma generating device.

Zum Zünden des Plasmas werden eine vorher einstellbare Anzahl von Spannungsimpulsen mit einer Höhe von mehreren Tausend Volt und einer Dauer im Millisekundenbereich als eine Zündspannung zwischen Anode und Kathode angelegt. War der Zündversuch nicht erfolgreich, so wird ein weiterer Versuch gestartet.To ignite the plasma, a pre-settable number of voltage pulses several thousand volts high and lasting in the millisecond range are applied as an ignition voltage between the anode and the cathode. If the ignition attempt was unsuccessful, another attempt is started.

Zur Aufrechterhaltung des Plasmas wird bereits vor dem Starten der Zündung des Plasmas eine konstante, gegenüber der Zündspannung deutlich geringere Aufrechterhaltungsspannung, beispielsweise im Bereich von ca. 55 bis 300 V zwischen der Anode und der Kathode angelegt.To maintain the plasma, a constant, compared to the ignition voltage significantly lower maintenance voltage, for example, in the range of about 55 to 300 V between the anode and the cathode is applied even before starting the ignition of the plasma.

Ein Beispiel der Steuerung einer derartigen Plasmaerzeugungseinrichtung ist im Dokument US-A-5717293 offenbart. Demgegenüber ist es die Aufgabe der Erfindung, ein Verfahren und Steuerungseinrichtung zum Betrieb einer Plasmaerzeugungseinrichtung vorzuschlagen, welche einen schonenden Betrieb der Plasmaerzeugungseinrichtung ermöglichen. Erfindungsgemäß wird diese Aufgabe mit einem Verfahren mit den Merkmalen des Anspruchs 1 und eine Steuerungseinrichtung mit den Merkmalen des Anspruchs 15 gelöst.An example of the control of such a plasma generating device is in the document US-A-5717293 disclosed. In contrast, it is the object of the invention to provide a method and control device for operating a plasma generating device, which enable gentle operation of the plasma generating device. According to the invention this Problem solved by a method having the features of claim 1 and a control device having the features of claim 15.

Erfindungsgemäss wird während des Zündvorgangs laufend eine Prüfung durchgeführt, ob die Zündung des Plasmas erfolgt ist. Zusätzlich wird die Zündspannung ausgehend von einer Anfangs-Zündspannung erhöht und nach Erkennung einer erfolgten Zündung des Plasmas wird die Spannung zwischen Anode und Kathode auf die Aufrechterhaltungsspannung reduziert.According to the invention, a check is continuously carried out during the ignition process as to whether the ignition of the plasma has taken place. In addition, the ignition voltage is increased from an initial ignition voltage and upon detection of a successful ignition of the plasma, the voltage between anode and cathode is reduced to the sustain voltage.

Die Zündspannung kann als Gleichspannung, Wechselspannung beliebiger Frequenz oder als gepulste Gleichspannung mit beliebigem Pulspausen-Verhältnis und beliebiger Pulsform ausgeführt seinThe ignition voltage can be designed as a DC voltage, AC voltage of any frequency or as a pulsed DC voltage with arbitrary pulse pause ratio and any pulse shape

Die genannte Aufgabe wird auch mit einer Steuerungseinrichtung zum Betrieb einer Plasmaerzeugungseinrichtung gelöst, welche dazu vorgesehen ist, eine zwischen einer Anode und einer Kathode, zwischen welchen sich ein Plasma ausbilden soll, eine Aufrechterhaltungsspannung anzulegen und zum Zünden des Plasmas zwischen der Anode und der Kathode eine Zündspannung anzulegen. Erfindungsgemäss ist sie dazu vorgesehen, während des Zündvorgangs laufend eine Prüfung durchzuführen, ob die Zündung des Plasmas erfolgt ist, die Zündspannung ausgehend von einer Anfangs-Zündspannung zu erhöhen und nach Erkennung einer erfolgten Zündung des Plasmas die Spannung zwischen Anode und Kathode auf die Aufrechterhaltungsspannung zu reduzieren.Said object is also achieved with a control device for operating a plasma generating device, which is intended to apply a sustaining voltage between an anode and a cathode, between which a plasma is to be formed, and for igniting the plasma between the anode and the cathode Apply ignition voltage. According to the invention, it is intended to continuously perform a test during the ignition process, whether the ignition of the plasma has occurred, to increase the ignition voltage from an initial ignition voltage and after detection of a successful ignition of the plasma to the voltage between the anode and cathode to the maintenance voltage to reduce.

Durch das erfindungsgemässe Verfahren und die Verwendung der erfindungsgemässen Steuerungseinrichtung wird die Zündspannung nur so lange wie für den Zündvorgang notwendig angelegt und ausserdem wird auch keine unnötig hohe, sondern nur die tatsächlich für das Zünden des Plasmas benötigte Zündspannung angelegt. Das Anlegen von hohen Spannungsimpulsen kann zu Schädigungen der Plasmaerzeugungseinrichtung, also beispielsweise eines Plasmabrenners führen. Derartige Spannungsimpulse werden beim Einsatz des erfindungsgemässen Verfahrens bzw. der erfindungsgemässen Steuerungseinrichtung vermieden, so dass Schädigungen auf Grund von Spannungsimpulsen vermieden werden und so ein schonender Betrieb der Plasmaerzeugungseinrichtung ermöglicht wird. Ausserdem werden durch sich wiederholende Spannungsimpulse elektromagnetische Wellen erzeugt, die den Betrieb von elektronischen Geräten in der Umgebung der Plasmaerzeugungseinrichtung empfindlich stören können. Beim Einsatz des erfindungsgemässen Verfahrens bzw. der erfindungsgemässen Steuerungseinrichtung werden sich wiederholende Spannungsimpulse vermieden, so dass keine oder zumindest keine störenden elektromagnetischen Wellen erzeugt werden.By the inventive method and the use of the inventive control device, the ignition voltage is applied only as long as necessary for the ignition process and also no unnecessarily high, but only the ignition voltage actually required for the ignition of the plasma is applied. The application of high voltage pulses can lead to damage to the plasma generating device, so for example a plasma torch. Such voltage pulses are when using the inventive method or the inventive control device avoided, so that damage due to voltage pulses are avoided and thus a gentle operation of the plasma generating device is made possible. In addition, electromagnetic waves are generated by repetitive voltage pulses, which can interfere with the operation of electronic devices in the vicinity of the plasma generating device sensitive. When using the method according to the invention or the control device according to the invention, repetitive voltage pulses are avoided so that no or at least no disturbing electromagnetic waves are generated.

Die Plasmaerzeugungseinrichtung ist insbesondere als ein Plasmabrenner einer Anlage zum Plasmabeschichten von Substraten ausgeführt. Sie kann aber beispielsweise auch als ein Teil einer Vorrichtung zum Lichtbogen-Schweissen, Plasmaschneiden, Hochgeschwindigkeits-Flammspritzen, Flamm-Draht-Spritzen oder Flamm-Pulver-Spritzen ausgeführt sein. Es ist ausserdem möglich, die Plasmaerzeugungseinrichtung zum Zünden von Verbrennungsprozessen zu nutzen.The plasma generating device is designed in particular as a plasma torch of a system for plasma coating of substrates. However, it may also be embodied, for example, as part of an apparatus for arc welding, plasma cutting, high speed flame spraying, flame wire spraying or flame powder spraying. It is also possible to use the plasma generating device for igniting combustion processes.

Die Aufrechterhaltungsspannung wird insbesondere von einer Aufrechterhaltungsspannungsquelle und die Zündspannung von einer separaten Zündspannungsquelle erzeugt, die beide von einer Steuerungseinrichtung der Plasmaerzeugungseinrichtung angesteuert werden. Es ist aber auch möglich, dass nur eine Spannungsquelle vorgesehen ist, die sowohl die Aufrechterhaltungsspannung, also auch die Zündspannung erzeugt.The sustaining voltage is generated in particular by a maintenance voltage source and the ignition voltage from a separate ignition voltage source, both of which are controlled by a controller of the plasma generating device. But it is also possible that only one voltage source is provided, which generates both the maintenance voltage, so also the ignition voltage.

Die Aufrechterhaltungsspannung wird insbesondere bereits vor oder gleichzeitig mit dem Beginn des Zündvorgangsgangs angelegt.The maintenance voltage is applied in particular before or at the same time as the start of the ignition process.

Für die Prüfung, ob die Zündung des Plasmas bereits erfolgt ist, wird insbesondere ein zwischen Anode und Kathode fliessender Strom gemessen. Dabei kann insbesondere ein so genannter Zündstrom gemessen werden, also ein Strom der auf Grund der Zündspannung fliesst. Solange sich noch kein Plasma zwischen Anode und Kathode ausbildet, sind Anode und Kathode voneinander elektrisch isoliert. Durch die Ionisierung des Gases zwischen Anode und Kathode werden Ladungsträger frei, welche einen Stromfluss zwischen Anode und Kathode ermöglichen. Eine erfolgte Zündung des Plasmas wird insbesondere dann erkannt, wenn der gemessene Strom eine festlegbare Stromschwelle überschreitet. Zusätzlich kann die Erkennung noch von der Bedingung abhängen, dass die genannte Stromschwelle eine festlegbare Zeitspanne ohne Unterbrechung überschritten sein muss.In order to check whether the ignition of the plasma has already taken place, in particular a current flowing between the anode and the cathode is measured. In particular, a so-called ignition current can be measured, that is, a current that flows on the basis of the ignition voltage. As long as there is no plasma between anode and cathode, anode and Cathode electrically isolated from each other. By the ionization of the gas between the anode and cathode charge carriers are released, which allow a current flow between the anode and cathode. A completed ignition of the plasma is detected in particular when the measured current exceeds a definable current threshold. In addition, the recognition may still depend on the condition that said current threshold must be exceeded for a definable period of time without interruption.

Sobald erkannt wurde, dass eine Zündung des Plasmas erfolgt ist, wird die Zündspannung nicht mehr erhöht, sondern vielmehr auf die Aufrechterhaltungsspannung reduziert. Die Reduktion erfolgt insbesondere schlagartig nach der Erkennung der Zündung. Es ist aber auch möglich, dass die Zündspannung entlang eines vorgegebenen Verlaufs reduziert wird.Once it has been detected that ignition of the plasma has occurred, the ignition voltage is no longer increased but rather reduced to the sustain voltage. The reduction takes place in particular abruptly after the detection of the ignition. But it is also possible that the ignition voltage is reduced along a predetermined course.

Die Anfangs-Zündspannung beträgt insbesondere 0 V, sie kann aber auch einen anderen Wert aufweisen.The initial ignition voltage is in particular 0 V, but it can also have a different value.

Die Zündspannung wird zum Zünden des Plasmas insbesondere streng monoton steigend erhöht. Die Erhöhung erfolgt insbesondere mit konstanter Steigung, die beispielsweise zwischen 100 V/ms und 10000 V/µs betragen kann. Es ist aber auch möglich, dass die Zündspannung auf andere Art und Weise erhöht wird, beispielsweise kann sie stufenweise erhöht werden.The ignition voltage is increased to ignite the plasma in particular strictly monotonically increasing. The increase takes place, in particular, with a constant gradient, which can be, for example, between 100 V / ms and 10000 V / μs. But it is also possible that the ignition voltage is increased in other ways, for example, it can be increased gradually.

In Ausgestaltung der Erfindung wird die Zündspannung von einem Zündgerät aufgebracht, das nach erfolgter Zündung von der Anode und/oder Kathode getrennt wird. Die Trennung erfolgt insbesondere durch Öffnung eines oder zweier Schalter, die zwischen dem Zündgerät und der Anode bzw. der Kathode angeordnet sind. Die genannten Schalter werden insbesondere auch von der genannten Steuerungsreinrichtung der Plasmaerzeugungseinrichtung angesteuert. Durch die Trennung des Zündgeräts von der Anode und/oder der Kathode kann es zu keinen störenden Wechselwirkungen zwischen dem Zündgerät und den anderen Bauteilen der Plasmaerzeugungseinrichtung kommen.In an embodiment of the invention, the ignition voltage is applied by an ignitor, which is separated after ignition from the anode and / or cathode. The separation takes place in particular by opening one or two switches, which are arranged between the ignitor and the anode or the cathode. The said switches are in particular also actuated by the mentioned control device of the plasma generating device. Due to the separation of the igniter from the anode and / or the cathode, there can be no disturbing interactions between the ignitor and the other components of the plasma generator.

In Ausgestaltung der Erfindung ist dem verwendeten Anode-Kathode-Paar ein Identifikations-Parameter zugeordnet und die Zündung des Plasmas wird in Abhängigkeit des Identifikations-Parameters durchgeführt. Damit kann die Zündung abgestimmt auf das tatsächlich vorhandene Anode-Kathode-Paar erfolgen, also beispielsweise abgestimmt auf den tatsächlich vorhandenen Plasmabrenner. Beispielsweise kann eine abgestimmte Anfangs-Zündspannung, ein abgestimmter Verlauf der Zündspannung bei der Erhöhung und/oder der Absenkung auf die Aufrechterhaltungsspannung verwendet werden. Der Identifikations-Parameter kennzeichnet insbesondere einen Plasmabrenner und kann beispielsweise als eine fortlaufende Nummer oder eine Seriennummer des Plasmabrenners ausgeführt sein. Der Identifikations-Parameter kann insbesondere automatisch ermittelt werden, beispielsweise kann der Plasmabrenner über eine eigene Brenner-Steuerungseinrichtung verfügen, in der der Identifikations-Parameter abgelegt ist und von der Steuerungseinrichtung der Plasmaerzeugungseinrichtung ausgelesen werden kann. Es ist aber auch möglich, dass der Identifikations-Parameter von Hand in der Steuerungseinrichtung der Plasmaerzeugungseinrichtung eingegeben wird.In an embodiment of the invention, an identification parameter is assigned to the anode-cathode pair used, and the ignition of the plasma is carried out as a function of the identification parameter. Thus, the ignition can be tuned to the actual existing anode-cathode pair, so for example matched to the actual existing plasma torch. For example, a tuned initial ignition voltage, a coordinated course of the ignition voltage can be used in the increase and / or the lowering of the maintenance voltage. In particular, the identification parameter identifies a plasma torch and may be embodied, for example, as a serial number or serial number of the plasma torch. The identification parameter can in particular be determined automatically, for example, the plasma torch can have its own burner control device in which the identification parameter is stored and can be read out by the control device of the plasma generating device. However, it is also possible for the identification parameter to be entered manually in the control device of the plasma generation device.

In Ausgestaltung der Erfindung wird wenigstens eine Kenngrösse des Verlaufs der Zündspannung bis zur erfolgten Zündung des Plasmas erfasst, abgespeichert und ausgewertet. Insbesondere wird eine so genannte End-Zündspannung, also die Zündspannung zum Zeitpunkt der Erkennung der erfolgten Zündung abgespeichert. Es können aber stattdessen oder zusätzlich auch andere Kenngrössen, wie beispielsweise die Steigung der Zündspannung abgespeichert werden. Aus den abgespeicherten Kenngrössen können Rückschlüsse auf den Zustand der Plasmaerzeugungseinrichtung gezogen werden. Die Kenngrössen können insbesondere nach dem Abspeichern weiterverarbeitet werden. Beispielsweise können Mittelwerte berechnet oder Filterungen durchgeführt werden.In an embodiment of the invention, at least one parameter of the course of the ignition voltage is detected until the ignition of the plasma, stored and evaluated. In particular, a so-called end ignition voltage, ie the ignition voltage at the time of detection of the ignition is stored. However, other parameters, such as, for example, the slope of the ignition voltage can be stored instead or in addition. From the stored parameters can be drawn conclusions about the state of the plasma generating device. The parameters can be further processed, in particular after storage. For example, averages can be calculated or filtering performed.

Insbesondere wird der genannte Identifikations-Parameter gemeinsam mit der genannten Kenngrösse abgespeichert. Damit können die abgespeicherten Kenngrössen beispielsweise für die beschriebene, auf das tatsächlich vorhandene Anode-Kathode-Paar abgestimmte Durchführung der Zündung verwendet werden. Dazu wird insbesondere vor dem Zünden des Plasmas der Identifikations-Parameter des verwendeten Anode-Kathode-Paars ermittelt und die Zündung erfolgt dann in Abhängigkeit der zu diesem Anode-Kathode-Paar abgespeicherten Kenngrösse.In particular, the named identification parameter is stored together with the mentioned parameter. Thus, the stored parameters can, for example, for the described, matched to the actual existing anode-cathode pair implementation of the ignition be used. For this purpose, the identification parameter of the anode-cathode pair used is determined in particular before the ignition of the plasma, and the ignition then takes place as a function of the characteristic variable stored for this anode-cathode pair.

In Ausgestaltung der Erfindung wird ein zeitlicher Verlauf der abgespeicherten Kenngrösse ausgewertet. Darunter soll insbesondere verstanden werden, dass die bei verschiedenen Zündvorgängen ermittelten und abgespeicherten Kenngrössen miteinander verglichen werden. Aus den Änderungen der Kenngrössen können Rückschlüsse auf Änderungen der Eigenschaften der Plasmaerzeugungseinrichtung gezogen werden.In an embodiment of the invention, a time profile of the stored parameter is evaluated. This is to be understood in particular as meaning that the characteristic quantities ascertained and stored during different ignition processes are compared with one another. From the changes in the parameters can be drawn conclusions about changes in the properties of the plasma generating device.

Die Änderungen der Kenngrösse werden insbesondere in Bezug zu einem zugehörigen Vergleichswert ermittelt. Dazu wird überwacht, ob eine aktuell ermittelte Kenngrösse um ein festlegbares Mass von dem zugehörigen Vergleichswert abweicht. Wenn dies der Fall ist, kann beispielsweise darauf geschlossen werden, dass die Plasmaerzeugungseinrichtung überprüft und gegebenenfalls Teile repariert oder getauscht werden müssen. Dazu kann von der Steuerungseinrichtung der Plasmaerzeugungseinrichtung ein Hinweis dargestellt oder ein Alarm ausgelöst werden. Das genannte Mass kann beispielsweise als eine festlegbare absolute Grenze, beispielsweise eine Spannungsgrenze für die Änderung der Zündspannung oder beispielsweise als eine festlegbare prozentuale Abweichung vom zugehörigen Vergleichswert ausgeführt sein.The changes in the parameter are determined in particular in relation to an associated comparative value. For this purpose, it is monitored whether a currently determined characteristic variable deviates from the associated comparison value by a definable measure. If this is the case, for example, it can be concluded that the plasma generator must be checked and, if necessary, parts repaired or replaced. For this purpose, a message can be displayed by the control device of the plasma generating device or an alarm can be triggered. The named measure can be embodied, for example, as a definable absolute limit, for example a voltage limit for the change in the ignition voltage or, for example, as a definable percentage deviation from the associated comparison value.

Der genannte Vergleichswert kann beispielsweise für eine bestimmte Art von Plasmaerzeugungseinrichtungen festgelegt und abgespeichert werden.The aforementioned comparison value can be set and stored, for example, for a specific type of plasma generation device.

Der Vergleichswert kann insbesondere auch aus abgespeicherten Kenngrössen ermittelt und abgespeichert. Dieser Vergleichswert kann beispielsweise als die erste ermittelte Kenngrösse, also beispielsweise die erste für die Zündung des Plasmas erforderliche Zündspannung ausgeführt sein. Es ist beispielsweise aber auch möglich, als Vergleichswert einen Mittelwert einer festlegbaren Anzahl von Kenngrössen nach Inbetriebnahme der Plasmaerzeugungseinrichtung zu verwenden.The comparison value can also be determined and stored in particular from stored parameters. This comparison value can be embodied, for example, as the first determined characteristic variable, that is to say, for example, the first ignition voltage required for the ignition of the plasma. For example, it is also possible to use a comparison value Mean value of a definable number of parameters after commissioning of the plasma generating device to use.

Weitere Vorteile, Merkmale und Einzelheiten der Erfindung ergeben sich anhand der nachfolgenden Beschreibung von Ausführungsbeispielen sowie anhand der Zeichnungen, in welchen gleiche oder funktionsgleiche Elemente mit identischen Bezugszeichen versehen sind.Further advantages, features and details of the invention will become apparent from the following description of exemplary embodiments and with reference to the drawings, in which the same or functionally identical elements are provided with identical reference numerals.

Dabei zeigen:

Fig. 1
eine schematische Darstellung einer Plasmaerzeugungseinrichtung und
Fig. 2
Darstellungen von Spannungsverläufen beim Zünden einer Plasmaerzeugungseinrichtung gemäss Fig. 1.
Showing:
Fig. 1
a schematic representation of a plasma generating device and
Fig. 2
Representations of voltage curves when igniting a plasma generating device according to Fig. 1 ,

Gemäss Fig. 1 weist eine Plasmaerzeugungseinrichtung 10, welche beispielsweise als ein Teil eines Plasmabrenners einer Anlage zum Plasmabeschichten von Substraten ausgeführt sein kann, ein Anode-Kathode-Paar 11 mit einer Anode 12 und einer Kathode 13 auf, zwischen denen sich ein Plasma ausbilden soll. Bei der Anwendung der Plasmaerzeugungseinrichtung 10 in einem Plasmabrenner strömt zwischen Anode 12 und Kathode 13 ein Gas, beispielsweise Argon, Helium, Wasserstoff, Stickstoff oder ein Gemisch davon, welches bei der Bildung des Plasmas ionisiert wird. Für die Bildung des Plasmas wird entweder Argon oder Stickstoff verwendet. Erst nach erfolgter Zündung werden bei Bedarf andere Gase hinzugemischt.According to Fig. 1 For example, a plasma generating device 10, which can be embodied for example as part of a plasma torch of a system for plasma coating substrates, has an anode-cathode pair 11 with an anode 12 and a cathode 13 between which a plasma is to be formed. When the plasma generator 10 is used in a plasma torch, a gas such as argon, helium, hydrogen, nitrogen, or a mixture thereof, which is ionized upon formation of the plasma, flows between anode 12 and cathode 13. For the formation of the plasma either argon or nitrogen is used. Only after ignition, if necessary, other gases are added.

Die Anode 12 und die Kathode 13 sind elektrisch sowohl mit einer Aufrechterhaltungsspannungsquelle 14 und als auch mit einer Zündspannungsquelle 15 verbunden. Die Aufrechterhaltungsspannungsquelle 14 und die Zündspannungsquelle 15 werden von einer Steuerungseinrichtung 16 der Plasmaerzeugungseinrichtung 10 angesteuert. Das Anode-Kathode-Paar 11 verfügt ausserdem über eine Brenner-Steuerungseinrichtung 17, in welchem unter anderem ein Identifikations-Parameter in Form einer Seriennummer des Anode-Kathode-Paars 11 gespeichert ist. Die Brenner-Steuerungseinrichtung 17 steht in Signalverbindung mit der Steuerungseinrichtung 16, so dass die Steuerungseinrichtung 16 die genannte Seriennummer auslesen und die Ansteuerung der Aufrechterhaltungsspannungsquelle 14 und/oder der Zündspannungsquelle 15 in Abhängigkeit der Seriennummer durchführen kann.The anode 12 and the cathode 13 are electrically connected to both a sustain voltage source 14 and an ignition voltage source 15. The sustain voltage source 14 and the ignition voltage source 15 are driven by a controller 16 of the plasma generating device 10. The anode-cathode pair 11 also has a burner control device 17 in which inter alia an identification parameter in the form of a serial number of the anode-cathode pair 11 is stored. The burner control device 17 is in signal communication with the controller 16, so that the controller 16 can read out said serial number and perform the driving of the sustain voltage source 14 and / or the ignition voltage source 15 depending on the serial number.

Zwischen der Zündspannungsquelle 15 und der Anode 12 ist ein erster Schalter 18 und zwischen der Zündspannungsquelle 15 und der Kathode 13 ist ein zweiter Schalter 19 angeordnet, mittels welchen die Verbindungen zwischen der Anode 12 bzw. der Kathode 13 und der Zündspannungsquelle 15 unterbrochen werden können. Die Schalter 18 und 19 werden ebenfalls von der Steuerungseinrichtung 16 angesteuert.Between the ignition voltage source 15 and the anode 12, a first switch 18 and between the ignition voltage source 15 and the cathode 13, a second switch 19 is arranged, by means of which the connections between the anode 12 and the cathode 13 and the ignition voltage source 15 can be interrupted. The switches 18 and 19 are also controlled by the controller 16.

In Fig. 2 sind die Verläufe einer von der Zündspannungsquelle 15 erzeugten Zündspannung Uz und einer von der Aufrechterhaltungsspannungsquelle 14 erzeugten Aufrechterhaltungsspannung UA beim Zünden des Plasmas in der Plasmaerzeugungseinrichtung 10 über der Zeit dargestellt, wobei die Verläufe nur qualitativ und nicht massstäblich dargestellt sind.In Fig. 2 the waveforms of an ignition voltage U z generated by the ignition voltage source 15 and a sustaining voltage U A generated by the sustaining voltage source 14 during ignition of the plasma in the plasma generating device 10 over time are shown, the curves are shown only qualitatively and not to scale.

Vor dem Start des Zündvorgangs liest die Steuerungseinrichtung 16 die Seriennummer des Anode-Kathode-Paars 11, also einen Identifikations-Parameter des Anode-Kathode-Paars 11 aus der Brenner-Steuerungseinrichtung 17 aus. Diese Information wird einerseits benötigt, um den Ablauf des Zündvorgangs an das tatsächlich vorhandene Anode-Kathode-Paar 11 anzupassen, anderseits wird eine Kenngrösse des Verlaufs der Zündspannung Uz bis zur erfolgten Zündung des Plasmas erfasst und zugeordnet zur Seriennummer abgespeichert.Before the start of the ignition process, the control device 16 reads out the serial number of the anode-cathode pair 11, that is to say an identification parameter of the anode-cathode pair 11 from the burner control device 17. On the one hand, this information is required in order to adapt the course of the ignition process to the actually present anode-cathode pair 11; on the other hand, a parameter of the course of the ignition voltage U z is detected until the ignition of the plasma has taken place and stored assigned to the serial number.

Als Vorbereitung des eigentlichen Zündvorgangs wird zum Zeitpunkt t0 von der Aufrechterhaltungsspannungsquelle 14 die konstante Aufrechterhaltungsspannung UA erzeugt, die am Anode-Kathode-Paar 11 und damit zwischen Anode und Kathode anliegt. Die Aufrechterhaltungsspannung UA beträgt beispielsweise ca. 100 V. Sofern die Schalter 18 und 19 geöffnet sind, werden sie zum Zeitpunkt t0 so angesteuert, dass sie sich schliessen und so das Anode-Kathode-Paar 11 mit der Zündspannungsquelle 15 elektrisch verbunden ist.In preparation for the actual ignition operation, at the time t0, the sustaining voltage source U generates the constant sustaining voltage U A which is applied to the anode-cathode pair 11 and thus between the anode and the cathode. The sustaining voltage U A is, for example, about 100 V. Provided the switches 18 and 19 are opened are, they are driven at the time t0 so that they close and so the anode-cathode pair 11 is electrically connected to the ignition voltage source 15.

Zum Zeitpunkt t1 startet die Zündspannungsquelle 15 beginnend von einer Anfangs-Zündspannung UZA von 0 V die Zündspannung Uz zu erzeugen, die zusätzlich zur Aufrechterhaltungsspannung UA am Anode-Kathode-Paar 11 und damit zwischen Anode und Kathode anliegt. Die Zündspannung Uz wird entlang einer Geraden mit konstanter Steigung und damit streng monoton steigend erhöht. Die verwendete Steigung wird insbesondere in Abhängigkeit der oben genannten Seriennummer des Anode-Kathode-Paars 11 ausgewählt. Dazu ist in der Steuerungseinrichtung 16 eine Tabelle abgelegt, in der Steigungen der Zündspannung den Seriennummern zugeordnet sind.At the time t1, the ignition voltage source 15, starting from an initial ignition voltage U ZA of 0 V, starts to generate the ignition voltage U z which, in addition to the sustaining voltage U A, is applied to the anode-cathode pair 11 and thus between the anode and cathode. The ignition voltage U z is increased along a straight line with a constant slope and thus strictly monotonically increasing. The slope used is selected in particular depending on the above-mentioned serial number of the anode-cathode pair 11. For this purpose, a table is stored in the control device 16, in which slopes of the ignition voltage are assigned to the serial numbers.

Beginnend zum Zeitpunkt t1 wird ausserdem laufend geprüft, ob die Zündung des Plasmas erfolgt ist. Dazu wird ein über die Zündspannungsquelle 15 fliessender Strom, ein so genannter Zünd-Strom mittels eines in der Zündspannungsquelle 15 integrierten, nicht separat dargstellten Strommessgeräts, gemessen. Sobald der Zünd-Strom eine festlegbare Stromschwelle überschreitet, welche ebenfalls von der oben genannten Seriennummer des Anode-Kathode-Paars 11 abhängig sein kann, wird darauf geschlossen, dass die Zündung des Plasmas erfolgt ist. Dies ist in der Fig. 2 zum Zeitpunkt tZ der Fall. Als Folge davon wird die Zündspannung Uz schlagartig auf 0 V reduziert, so dass dann zwischen Anode 12 und Kathode 13 nur noch die Aufrechterhaltungsspannung UA anliegt. Ausserdem werden die Schalter 18 und 19 so angesteuert, dass sie sich öffnen und so das Anode-Kathode-Paar 11 von der Zündspannungsquelle 15 elektrisch getrennt wird.Starting at time t1, it is also continuously checked whether the ignition of the plasma has occurred. For this purpose, a current flowing via the ignition voltage source 15, a so-called ignition current, is measured by means of a current measuring device which is integrated in the ignition voltage source 15 and not separately illustrated. As soon as the ignition current exceeds a definable current threshold, which may likewise depend on the abovementioned serial number of the anode-cathode pair 11, it is concluded that the ignition of the plasma has taken place. This is in the Fig. 2 at time t Z the case. As a result, the ignition voltage U z is abruptly reduced to 0 V, so that then between the anode 12 and cathode 13 only the sustaining voltage U A is applied. In addition, the switches 18 and 19 are driven so that they open and so the anode-cathode pair 11 is electrically disconnected from the ignition voltage source 15.

Die zum Zeitpunkt tZ von der Zündspannungsquelle 15 erzeugte und damit zwischen Anode 12 und Kathode 13 anliegende End-Zündspannung UZE wird von der Zündspannungsquelle 15 erfasst und an die Steuerungseinrichtung 16 weitergeleitet. Die End-Zündspannung UZE beträgt beispielsweise zwischen 6 kV und 21 kV. Sie kann dabei als eine Kenngrösse des Verlaufs der Zündspannung UZ bis zur erfolgten Zündung des Plasmas angesehen werden. Die End-Zündspannung UZE wird gemeinsam mit der oben genannten Seriennummer des Anoden-Kathoden-Paars 11 in der Steuerungseinrichtung 16 abgespeichert.The end ignition voltage U ZE produced at the time t Z by the ignition voltage source 15 and thus applied between the anode 12 and the cathode 13 is detected by the ignition voltage source 15 and forwarded to the control device 16. The final ignition voltage U ZE is for example between 6 kV and 21 kV. It can be regarded as a parameter of the course of the ignition voltage UZ until ignition of the plasma has taken place. The final ignition voltage UZE is common with the above serial number of the anode-cathode pair 11 stored in the control device 16.

Nach erfolgter Zündung des Plasmas wertet die Steuerungseinrichtung 16 den zeitlichen Verlauf der End-Zündspannung UZE aus. Dazu wird die aktuelle End-Zündspannung UZE mit einem Vergleichswert verglichen. Wenn die aktuelle End-Zündspannung UZE um einen festlegbaren Differenzwert, der beispielsweise zwischen ca. 5 kV und 30 kV betragen kann, abweicht, wird auf ein Problem am aktuellen Anode-Kathode-Paar 11, beispielsweise auf zu starke Verschleiss, geschlossen und ein entsprechender Hinweis auf einem nicht separat dargestellten Bildschirm der Steuerungseinrichtung 16 dargestellt.After the ignition of the plasma, the control device 16 evaluates the time profile of the end ignition voltage UZE. For this purpose, the current end ignition voltage UZE is compared with a comparison value. If the actual end ignition voltage UZE deviates by a definable difference value, which can be, for example, between approximately 5 kV and 30 kV, a problem is identified at the current anode-cathode pair 11, for example, excessive wear, and a corresponding one Note on a not separately shown screen of the controller 16 shown.

Der genannte Vergleichswert kann beispielsweise für einen bestimmten Typ des Anode-Kathode-Paars fest vorgeben sein. Der Vergleichswert kann auch als die erste nach Inbetriebnahme des aktuellen Anoden-Kathoden-Paars oder der Plasmaerzeugungseinrichtung ermittelte End-Zündspannung ausgeführt sein. Es ist aber auch möglich, als Vergleichswert einen Mittelwert einer festlegbaren Anzahl von End-Zündspannungen nach Inbetriebnahme des aktuellen Anoden-Kathoden-Paars oder der Plasmaerzeugungseinrichtung zu verwenden.For example, said reference value may be fixed for a specific type of anode-cathode pair. The comparison value can also be designed as the first end ignition voltage determined after the current anode-cathode pair or the plasma generation device has been put into operation. However, it is also possible to use as comparison value an average value of a definable number of final ignition voltages after commissioning of the current anode-cathode pair or of the plasma generation device.

Claims (15)

  1. A method of operating a plasma generation apparatus wherein a maintenance voltage (UA) is applied between an anode (12) and a cathode (13) between which a plasma should be formed; and an igniting voltage (Uz) is applied between the anode (12) and the cathode (14) for igniting the plasma, characterized in that
    the ignition voltage (Uz) for igniting the plasma is increased starting from a start ignition voltage (UZA); and a continuous check is carried out during the ignition process, whether the ignition of the plasma has been effected; and when the ignition voltage (Uz) required for the ignition of the plasma is reached and thus recognizing an effected ignition of the plasma, the voltage between anode (12) and the cathode (13) is not further increased, but reduced to the maintenance voltage (UA) .
  2. A method in accordance with claim 1, characterized in that a current flowing between the anode (12) and the cathode (13) is measured for the checking of whether the ignition of the plasma has been effected.
  3. A method in accordance with claim 1 or claim 2, characterized in that the initial ignition voltage (UZA) amounts to 0 V.
  4. A method in accordance with claim 1, claim 2 or claim 3, characterized in that the ignition voltage (Uz) is increased increasing in a strongly monotonously manner.
  5. A method in accordance with claim 4, characterized in that the ignition voltage (Uz) is increased with a constant gradient.
  6. A method in accordance with one of the claims 1 to 5, characterized in that the ignition voltage (Uz) is applied by an ignition device (15), which is separated from the anode (12) and/or the cathode (13) after the ignition has been effected.
  7. A method in accordance with any one of the preceding claims 1 to 6, characterized in that an identification parameter is associated with a used anode-cathode-pair (11) and the ignition of the plasma is carried out in dependence on the identification parameter.
  8. A method in accordance with any one of the preceding claims 1 to 7, characterized in that at least one parameter of the extent of the ignition voltage (Uz) up to the effected ignition of the plasma is detected and stored.
  9. A method in accordance with claim 8, characterized in that an end ignition voltage (UZE) at which the ignition of the plasma was recognized is detected, stored and evaluated.
  10. A method in accordance with claim 7 and claim 8 or claim 9, characterized in that the said identification parameter is stored together with the said parameter.
  11. A method in accordance with any one of the claims 7 and 10, characterized in that prior to the ignition of the plasma, the identification parameter of the used anode-cathode-pair (11) is determined and the ignition is carried out in dependence on the stored parameter associated with this anode-cathode-pair.
  12. A method in accordance with any one of the claims 7 to 10,
    characterized in that a timely extent of the stored parameter is evaluated.
  13. A method in accordance with claim 12,
    characterized in that it is monitored whether a current determined parameter deviates by a predetermined degree from an associated comparison value.
  14. A method in accordance with claim 13,
    characterized in that the said comparison value is determined from stored parameters and stored.
  15. A control unit for operating a plasma generation unit which is provided for the purpose of applying a maintenance voltage (UA) between an anode (12) and a cathode (13) between which a plasma should be formed; and applying an ignition voltage (Uz) between the anode (12) and the cathode (13) for igniting the plasma,
    characterized in that it is provided for the purpose of to increase the ignition voltage (Uz) for igniting the plasma starting from an initial ignition voltage (UZA), and continuously carrying out a check during the ignition process whether the ignition of the plasma has been effected, and when the ignition voltage (Uz) required for the ignition of the plasma is reached and thus recognizing an effected ignition of the plasma, not further to increase the voltage between the anode (12) and the cathode (13), but to reduce to the maintenance voltage (UA).
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US9756713B2 (en) 2017-09-05
JP6807154B2 (en) 2021-01-06
JP2016506025A (en) 2016-02-25
CN104969665B (en) 2018-04-13
ES2647851T3 (en) 2017-12-26
CN104969665A (en) 2015-10-07
CA2888299A1 (en) 2014-06-12
EP2929759A1 (en) 2015-10-14
JP2019192647A (en) 2019-10-31
WO2014086636A1 (en) 2014-06-12
US20150319834A1 (en) 2015-11-05
CA2888299C (en) 2021-08-10

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