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EP2177938A1 - Ausrichtungsstruktur und -verfahren einer optischen Faser auf einem optischen Wellenleiter - Google Patents

Ausrichtungsstruktur und -verfahren einer optischen Faser auf einem optischen Wellenleiter Download PDF

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Publication number
EP2177938A1
EP2177938A1 EP09173195A EP09173195A EP2177938A1 EP 2177938 A1 EP2177938 A1 EP 2177938A1 EP 09173195 A EP09173195 A EP 09173195A EP 09173195 A EP09173195 A EP 09173195A EP 2177938 A1 EP2177938 A1 EP 2177938A1
Authority
EP
European Patent Office
Prior art keywords
waveguide
optical
optical waveguide
light
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09173195A
Other languages
English (en)
French (fr)
Inventor
Christophe Kopp
Badhise Ben Bakir
Stéphane BERNABE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP2177938A1 publication Critical patent/EP2177938A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1223—Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element

Definitions

  • the present invention relates to an integrated optical circuit and, more particularly, to a device and a method for aligning an optical fiber and a waveguide formed on the surface of an integrated optical circuit.
  • Integrated optical circuits are increasingly used in the field of telecommunications, especially for the transmission, processing or storage of data.
  • the integrated optical circuits can have many functions, for example multiplexing, demultiplexing, modulation, demodulation, spectral routing, amplification, accumulation, filtering, resonator ...
  • Integrated optical or optoelectronic circuits are generally formed in and on semiconductor wafers similar to those used in microelectronics.
  • An integrated optical circuit comprises one or more elementary optical components carrying out a treatment on one or more light beams, the light beams being conveyed between the elementary optical components by optical waveguides.
  • waveguides When the waveguides are smaller than a micrometer, they are referred to as submicron or nanometric waveguides.
  • waveguides may have sections of the order of 0.5 x 0.2 ⁇ m 2 .
  • the preferred optical transport means is the optical fiber.
  • An optical fiber that can be used in the visible and near-infrared range currently has a diameter of between 10 ⁇ m and a few tens of micrometers. Therefore, it is necessary to use light coupling systems between optical fibers and submicron waveguides to compensate for the dimensional mismatch imposed by these structures.
  • the figure 1 is a perspective view illustrating a known coupling structure between an optical fiber and a submicron waveguide associated with an integrated optical circuit.
  • This anamorphosed inverted cone-shaped structure is commonly referred to in the art as the "reverse-taper” English expression.
  • the structure of the figure 1 is formed on a silicon support 1 covered with an insulating layer 3, for example silicon oxide.
  • an insulating layer 3 for example silicon oxide.
  • a wide waveguide 5 for example silicon oxide SiO X , having an optical index between 1.6 and 1.8.
  • the wide guide 5 typically has a section having dimensions of the order of a few micrometers, for example 3 ⁇ m in width and 1 ⁇ m in height, and is intended to be illuminated by an optical fiber (shown in FIG. figure 1 by an arrow 7) by a first of its ends substantially perpendicular to an edge of the support 1.
  • a submicron optical waveguide 9, formed on the surface of the layer 3, extends into the wide waveguide 5 and tapers therein gradually to form a tip 11 on the side of the first end of the waveguide. 5.
  • the submicronic waveguide 9 and the tip 11 may be silicon (having an optical index of 3.47). It will be noted that an insulating layer, not shown and for example stoichiometric silicon oxide with an optical index equal to 1.44, extends over the optical waveguides 5 and 9 to confine the light beams in these optical waveguides. wave.
  • a light beam of suitable wavelength and polarization penetrating into the wide waveguide 5 passes into the submicron waveguide 9. Conversely, a light beam transported by the submicron waveguide 9 passes in the wide waveguide 5.
  • the figure 2 illustrates a schematic example of optical inputs / outputs of a chip comprising an integrated optical circuit 13.
  • On a layer 3 of silicon oxide formed on a silicon support extend numerous wide waveguides 5 including first ends are located substantially at the edges of the chip.
  • Each wide waveguide 5 is coupled to a submicron waveguide 9.
  • the submicron waveguides 9 are connected to the integrated optical circuit 13, for example making one or more of the functions listed above.
  • the integrated optical circuit chip 3 may have an area of between 1 mm 2 and 4 cm 2 and the integrated optical circuit 13 may occupy almost all of this surface.
  • the wide waveguides 5 have sections of the order of a few square micrometers (for example between 1 and 4 ⁇ m side).
  • the coupling with an optical fiber typically having a diameter of the order of 10 ⁇ m is via an optical system comprising one or more lenses, or the end of each optical fiber is given a shape ensuring lens effect.
  • the integrated optical circuit may be provided to provide a light beam at the output of the wide waveguide 5 and the optical fiber is considered to be aligned when the amount of light received by it is maximum. It is also possible to illuminate the wide waveguide 5 with the optical fiber and to detect, in the submicron circuit, a maximum of luminous intensity.
  • the patent application is known WO 2004/088801 which has a device comprising, on the surface of a support, a first optical waveguide coupled to a second smaller waveguide at one of its ends.
  • a diffraction grating, formed on the surface of the first or second waveguide, is sized to filter beams having predetermined wavelengths.
  • An embodiment of the present invention provides a device and method for aligning a fiber optical on an optical waveguide overcomes at least some of the disadvantages of existing devices and methods.
  • an embodiment of the present invention provides an optical device comprising at least a first optical waveguide coupled to a second optical waveguide of smaller section which enters on the side of a first end, the first optical waveguide being adapted for coupling with an optical fiber on the side of a second end, a surface of the first optical waveguide comprising a diffraction grating adapted to the introduction-extraction-return of light in the first optical waveguide, independently of the second optical waveguide.
  • the diffraction grating is formed in a portion remote from the coupling region between the first and second optical waveguides.
  • An embodiment of the present invention further provides a method of aligning an optical fiber on a free end of a first optical waveguide coupled to a second optical waveguide of smaller section, the method comprising a step of introducing-extracting-returning light in a portion of the first optical waveguide, independently of the second optical waveguide.
  • the step is a step of introducing a light beam from a light source into the first optical waveguide using a coupling device of the present invention. light formed on the surface of the optical waveguide.
  • the step is a step of extracting a light beam from the first optical waveguide with the aid of a light coupling device formed on the surface of the first guide optical wave, the extracted light beam being detected by a photodetector.
  • the step is a step of returning, in the first optical waveguide, a light beam coming from the optical fiber using a coupling device of the invention. light formed on the surface of the optical waveguide.
  • the light coupling device is a diffraction grating.
  • the light beam introduced-extracted-returned has any wavelength in the visible or near infrared.
  • An embodiment of the present invention further provides a method of aligning a plurality of optical fibers on a plurality of optical waveguides, comprising a step of introducing a light beam from a light source into a first light guide. optical wave by means of a light coupling device formed on the surface of the first optical waveguide and comprising a step of separating the light beam into several light beams for each of the optical waveguides.
  • each optical fiber is aligned with the associated optical waveguide by detecting, at its output, a maximum of transmitted light energy.
  • the figure 3 is a perspective view of a device according to an embodiment of the present invention.
  • a wide waveguide 25 having for example a section of a few square micrometers and one end of which is intended to be illuminated by an optical fiber or to provide a light beam in the direction of an optical fiber ( direction of an arrow 27 in figure 3 ).
  • a submicron waveguide 29 having for example a width of about 0.5 microns and a height of about 0.2 microns. The submicron waveguide 29 terminates in a tip 31 facing the end of the waveguide 25 interfacing with the optical fiber.
  • the device further comprises, on the top of the wide waveguide 25, a diffraction grating 33 allowing optical coupling (light-input-extraction-return) with the wide waveguide 25.
  • the diffraction grating 33 is constituted, in the example shown, strips perpendicular to the direction of light and parallel to each other formed on the surface of the wide waveguide 25.
  • the diffraction grating 33 may also be formed by any other known technique, in particular by forming metal strips perpendicular to the direction of light and parallel to each other at the surface of the wide waveguide 25.
  • the diffraction grating may consist of gold strips having a thickness of about 200 nm, a length of 10 microns and a period of 1 micron for a filling ratio of 50%. Any other structure forming a network may also be used.
  • the diffraction grating 33 is preferably placed upstream of the tip of the submicron waveguide 29, away from the coupling region between the waveguides 25 and 29. This avoids the generation of losses at the level of the waveguide. point 31 where the light beam is confined or deflated between the wide waveguide 25 and the submicronic waveguide 29.
  • the diffraction grating 33 is located near the end of the guide wave opposite to that intended to be coupled to the optical fiber.
  • the lateral and upper insulations of the waveguides 25 and 29 have not been shown. These insulations may consist of an insulating layer, for example silicon oxide, having a thickness of about 2 microns and surrounding the waveguides 25 and 29. It will also be noted that any device may be used. known index matching between the optical fiber and the associated broad waveguide to limit the light losses between these elements, for example liquid structures.
  • the device of the figure 3 allows the alignment of an optical fiber on the waveguide 25 in several ways, some of which will be described hereinafter in connection with the Figures 4 to 6 .
  • the figure 4 is a sectional view illustrating a first method for aligning an optical fiber 35 and the broad waveguide 25 of the figure 3 .
  • a light source 37 for example a laser, provides a light beam 39 towards the surface of the diffraction grating 33. A portion of the light beam reaching the diffraction grating 33 is transmitted by the diffraction grating 33 in the wide waveguide 25.
  • the wide waveguide 25 transmits light to its end where it is desired to align the optical fiber 35.
  • the optical fiber 35 and the wide waveguide 25 are aligned when the optical fiber carries a maximum of light intensity from the wide waveguide.
  • it detects at the output thereof, the light intensity it carries and the alignment is obtained when the light intensity is maximum.
  • the light beam 37 may have any wavelength, for example visible range or infrared. Indeed, the light beam 37 does not have to have a particular wavelength to be at least partially coupled in the waveguide 25 by the diffraction grating.
  • the figure 5 illustrates another method of aligning an optical fiber 35.
  • the optical fiber 35 illuminates the wide waveguide 25.
  • the optical fiber 35 conveys the light provided by the optical fiber to the diffraction grating 33 which delivers a light beam outwardly to a photodetector 41.
  • the correct alignment of the optical fiber 35 to the wide waveguide 25 is detected.
  • the optical fiber may provide a light beam having a wavelength external to the operating bandwidth of the anamorphic coupling device.
  • the optical fiber carries a light beam whose polarization state is not coupled by the anamorphic device.
  • the figure 6 illustrates another method of aligning the optical fiber 35 with the wide waveguide 25.
  • the optical fiber 35 illuminates the optical waveguide 25 and detects the light reflected by the diffraction grating 33. Indeed, when a light beam passes through the wide waveguide 25 in the direction of the diffraction grating 33, part of this light beam is transmitted by the diffraction grating towards the outside of the device, a part continues its path in the wide waveguide 25 and a portion of the light is reflected in the wide waveguide 25 by the diffraction grating 33.
  • the optical fiber 35 is aligned when the light beam supplied by it passes through the wide waveguide 25, is reflected partially on the diffraction grating 33, goes back into the wide waveguide 25, and is recovered in the optical fiber 35.
  • the wavelength and / or the polarization of the light beam provided by the optical fiber 35 may be provided to minimize the optical coupling in the submicron waveguide 29. Any wavelength may also be used desired for alignment.
  • the figure 7 is a top view illustrating a variant of the above methods in which a single light-input-extraction diffraction grating is used to align an input optical fiber and an output optical fiber of an integrated optical circuit.
  • the device comprises an input optical fiber 43 which is coupled, by via a wide waveguide 45 and a submicron tip 47 formed on a support 48, to a submicron waveguide 49 formed on the same support.
  • the submicronic waveguide 49 is partially shown and comprises, on the surface of the support 48, a curved portion which leads to an integrated optical circuit not shown.
  • An output of the integrated optical circuit is connected at the input of a submicronic waveguide 51 which is coupled, via a submicronic tip 53 and a wide waveguide 55 formed on the support 48, to an output optical fiber 57.
  • the wide waveguides 45 and 55 meet on the support 48 and a diffraction grating 59, of any known type allowing the introduction of light into the wide waveguides 45 and 55, is formed on the surface of the guides. wide waves 45 and 55 at their intersection.
  • the diffraction grating 59 is illuminated by a light beam 61 coming from a light source, not shown, and the light beam 61 penetrates, via the diffraction grating, into the wide waveguides 45 and 55 towards the fibers Optics 43 and 57.
  • the position is detected in which the optical fibers receive a maximum of light intensity.
  • the light beam 61 does not need to be perfectly aligned on the diffraction grating for the alignment since it suffices that a part of this beam is coupled in the wide waveguides 45 and 55 to allow the alignment of the optical fibers 43 and 57.
  • the wavelength of the beam 61 may be different from that used in the integrated optical circuit.
  • the figure 8 illustrates, in top view, a variant for aligning a plurality of optical fibers on several large waveguides in a single step.
  • a support 80 On a support 80 are formed four optical fibers 81, 83, 85, 87 intended to be aligned on first ends of wide waveguides, respectively 89, 91, 93, 95.
  • each Wide waveguide 89, 91, 93, 95 is associated with a submicron waveguide, respectively 97, 99, 101, 103, via adapted points (reverse anamorphosers).
  • the second ends of the wide waveguides 89, 91, 93, 95 are connected, on the surface of the insulating support 80, to a beam splitter device 105.
  • the divider device 105 is not represented in detail in the figures 8 and 9 and that any type of known beam splitter device may be used to allow coupling between the waveguide 107 and the waveguides 89, 91, 93, 95.
  • a diffraction grating 109 formed on the surface of the wide waveguide 107, is used to couple light from a light source (arrow 111) to the wide waveguide 107.
  • a light source arrow 111
  • the diffraction grating (arrow 111) is illuminated, which transmits a part of this light to the wide waveguide 107.
  • the light beam then passes into the divider device 105 which routes it to each of the guide rods.
  • wide waves 89, 91, 93, 95 The alignment of the optical fibers 81, 83, 85, 87 is obtained in the same way as in the case of the figure 7 , when the optical fibers carry a maximum of luminous intensity.
  • the device of the figure 8 allows to align several optical fibers. It should be noted that a combination of the devices of figures 7 and 8 may allow the alignment of all optical fiber input / output of an integrated optical circuit, for example a circuit such as that of the figure 2 .
  • an introduction-extraction-light return system has been presented here in the form of a diffraction grating formed on the surface of the wide waveguide.
  • any other known device for introducing-extracting-returning light in a wide waveguide regardless of the presence of a submicron waveguide formed in the wide waveguide, may also be used in place of the diffraction grating. It will be noted, however, that the use of the diffraction grating allows a reduced bulk and optimized coupling.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
EP09173195A 2008-10-20 2009-10-15 Ausrichtungsstruktur und -verfahren einer optischen Faser auf einem optischen Wellenleiter Withdrawn EP2177938A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0857124A FR2937426B1 (fr) 2008-10-20 2008-10-20 Structure et procede d'alignement d'une fibre optique sur un guide d'ondes optique

Publications (1)

Publication Number Publication Date
EP2177938A1 true EP2177938A1 (de) 2010-04-21

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EP09173195A Withdrawn EP2177938A1 (de) 2008-10-20 2009-10-15 Ausrichtungsstruktur und -verfahren einer optischen Faser auf einem optischen Wellenleiter

Country Status (3)

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US (1) US8666211B2 (de)
EP (1) EP2177938A1 (de)
FR (1) FR2937426B1 (de)

Cited By (1)

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US11536606B2 (en) * 2018-07-31 2022-12-27 Boe Technology Group Co., Ltd. Optical device and spectral detection apparatus

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WO2014034458A1 (ja) * 2012-08-31 2014-03-06 日本電気株式会社 光モジュールと光コネクタとの接続構造
US8988770B2 (en) * 2013-03-14 2015-03-24 Oracle International Corporation Hybrid optical source with semiconductor reflector
US20150125110A1 (en) * 2013-11-04 2015-05-07 Cisco Technology, Inc. Passively Placed Vertical Optical Connector
US9435961B2 (en) * 2014-10-15 2016-09-06 Huawei Technologies Co., Ltd. Stacked photonic chip coupler for SOI chip-fiber coupling
FR3051561B1 (fr) * 2016-05-20 2019-07-12 Stmicroelectronics (Crolles 2) Sas Dispositif photonique integre a couplage optique ameliore
WO2018002675A1 (en) * 2016-06-30 2018-01-04 Mellanox Technologies, Ltd Method and apparatus for optical coupling of optical signals for a photonic integrated circuit
CN117452743A (zh) * 2019-04-26 2024-01-26 松下知识产权经营株式会社 光设备
US10983273B1 (en) * 2020-06-22 2021-04-20 Voyant Photonics, Inc. Integrated optical waveguide emitter

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11536606B2 (en) * 2018-07-31 2022-12-27 Boe Technology Group Co., Ltd. Optical device and spectral detection apparatus

Also Published As

Publication number Publication date
US8666211B2 (en) 2014-03-04
FR2937426A1 (fr) 2010-04-23
FR2937426B1 (fr) 2012-12-07
US20100098379A1 (en) 2010-04-22

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