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EP1890124A4 - Ionization vacuum gauge - Google Patents

Ionization vacuum gauge

Info

Publication number
EP1890124A4
EP1890124A4 EP06746359A EP06746359A EP1890124A4 EP 1890124 A4 EP1890124 A4 EP 1890124A4 EP 06746359 A EP06746359 A EP 06746359A EP 06746359 A EP06746359 A EP 06746359A EP 1890124 A4 EP1890124 A4 EP 1890124A4
Authority
EP
European Patent Office
Prior art keywords
vacuum gauge
ionization vacuum
ionization
gauge
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06746359A
Other languages
German (de)
French (fr)
Other versions
EP1890124A1 (en
Inventor
Fumio Watanabe
Reiki Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ampere Inc
Original Assignee
Ampere Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ampere Inc filed Critical Ampere Inc
Publication of EP1890124A1 publication Critical patent/EP1890124A1/en
Publication of EP1890124A4 publication Critical patent/EP1890124A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
EP06746359A 2005-05-09 2006-05-08 Ionization vacuum gauge Withdrawn EP1890124A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005136760 2005-05-09
PCT/JP2006/309612 WO2006121173A1 (en) 2005-05-09 2006-05-08 Ionization vacuum gauge

Publications (2)

Publication Number Publication Date
EP1890124A1 EP1890124A1 (en) 2008-02-20
EP1890124A4 true EP1890124A4 (en) 2012-08-22

Family

ID=37396677

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06746359A Withdrawn EP1890124A4 (en) 2005-05-09 2006-05-08 Ionization vacuum gauge

Country Status (4)

Country Link
US (1) US7741852B2 (en)
EP (1) EP1890124A4 (en)
JP (1) JP5127042B2 (en)
WO (1) WO2006121173A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4935225B2 (en) * 2006-07-28 2012-05-23 株式会社島津製作所 Electronic component assembly
CN101266180A (en) * 2007-03-16 2008-09-17 清华大学 Ionization gage
JP5728728B2 (en) * 2008-02-21 2015-06-03 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Ionization gauge with operating parameters and shape designed for high pressure operation
US8227764B2 (en) 2008-07-25 2012-07-24 Perkinelmer Health Sciences, Inc. YTTRIA-metal thermionic filaments
DE112010001207B4 (en) * 2009-03-18 2016-05-04 Ulvac, Inc. A method of detecting oxygen or air in a vacuum processing apparatus and air leak detection method
US8904172B2 (en) * 2009-06-17 2014-12-02 Motorola Mobility Llc Communicating a device descriptor between two devices when registering onto a network
JPWO2011040625A1 (en) * 2009-09-29 2013-02-28 有限会社真空実験室 Vacuum measuring device with ion source
WO2011102117A1 (en) * 2010-02-17 2011-08-25 株式会社アルバック Quadrupolar mass spectrometer
JP5660529B2 (en) * 2010-05-14 2015-01-28 株式会社アルバック Oxygen detector, ionization vacuum gauge with oxygen detection function and mass spectrometer
JP5901142B2 (en) * 2011-05-18 2016-04-06 株式会社アルバック Hydrogen or helium detector, hydrogen or helium detection method, and leak detector
WO2013016551A1 (en) * 2011-07-26 2013-01-31 Mks Instruments, Inc. Cold cathode gauge fast response signal circuit
US9362078B2 (en) 2012-12-27 2016-06-07 Schlumberger Technology Corporation Ion source using field emitter array cathode and electromagnetic confinement
US8866068B2 (en) 2012-12-27 2014-10-21 Schlumberger Technology Corporation Ion source with cathode having an array of nano-sized projections
US20140183349A1 (en) * 2012-12-27 2014-07-03 Schlumberger Technology Corporation Ion source using spindt cathode and electromagnetic confinement
US9335231B2 (en) * 2014-03-25 2016-05-10 Mks Instruments, Inc. Micro-Pirani vacuum gauges
TWI739300B (en) * 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 Ionization gauge and method of making same
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
CN116200821A (en) * 2016-03-28 2023-06-02 应用材料公司 Base support
KR102703191B1 (en) * 2019-09-20 2024-09-04 인피콘 아크티엔게젤샤프트 Method for determining pressure and pressure sensor
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range
GB2621402A (en) * 2022-08-12 2024-02-14 Edwards Ltd Pressure gauge power supply unit

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2963601A (en) * 1957-08-07 1960-12-06 Westinghouse Electric Corp Ionization vacuum gauge
US3463956A (en) * 1966-05-17 1969-08-26 Janusz Groszkowski Ionization vacuum gauge with x-ray and ultraviolet ray shielding
JPS6249232A (en) * 1985-08-28 1987-03-03 Anelva Corp B-a type ionization vacuum meter

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR964341A (en) * 1947-04-08 1950-08-10
JPH01143928A (en) * 1987-11-30 1989-06-06 Tokuda Seisakusho Ltd Ion gauge
JPH10213509A (en) 1997-01-27 1998-08-11 Ulvac Japan Ltd Pressure measuring device
JP3746376B2 (en) 1998-07-22 2006-02-15 助川電気工業株式会社 Ion generation method by ion source
JP4196367B2 (en) 1999-05-21 2008-12-17 キヤノンアネルバ株式会社 Ionization gauge
JP4493139B2 (en) * 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 Ionization gauge
US6566884B2 (en) * 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
US6756785B2 (en) * 2002-07-25 2004-06-29 Mks Instruments, Inc. Pressure controlled degas system for hot cathode ionization pressure gauges

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2963601A (en) * 1957-08-07 1960-12-06 Westinghouse Electric Corp Ionization vacuum gauge
US3463956A (en) * 1966-05-17 1969-08-26 Janusz Groszkowski Ionization vacuum gauge with x-ray and ultraviolet ray shielding
JPS6249232A (en) * 1985-08-28 1987-03-03 Anelva Corp B-a type ionization vacuum meter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2006121173A1 *

Also Published As

Publication number Publication date
US7741852B2 (en) 2010-06-22
EP1890124A1 (en) 2008-02-20
US20090096460A1 (en) 2009-04-16
WO2006121173A1 (en) 2006-11-16
JPWO2006121173A1 (en) 2008-12-18
JP5127042B2 (en) 2013-01-23

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20071210

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB

RBV Designated contracting states (corrected)

Designated state(s): DE GB

DAX Request for extension of the european patent (deleted)
RBV Designated contracting states (corrected)

Designated state(s): DE GB

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: AMPERE INC.

A4 Supplementary search report drawn up and despatched

Effective date: 20120723

RIC1 Information provided on ipc code assigned before grant

Ipc: H01J 41/04 20060101ALI20120717BHEP

Ipc: G01L 21/32 20060101AFI20120717BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20170405