EP1866625A4 - Glass inspection systems and methods for using same - Google Patents
Glass inspection systems and methods for using sameInfo
- Publication number
- EP1866625A4 EP1866625A4 EP06749504A EP06749504A EP1866625A4 EP 1866625 A4 EP1866625 A4 EP 1866625A4 EP 06749504 A EP06749504 A EP 06749504A EP 06749504 A EP06749504 A EP 06749504A EP 1866625 A4 EP1866625 A4 EP 1866625A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- methods
- same
- inspection systems
- glass inspection
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
- G01N2021/1772—Array detector
- G01N2021/1774—Line array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
- G01N2201/0612—Laser diodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0635—Structured illumination, e.g. with grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0638—Refractive parts
Landscapes
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66917105P | 2005-04-06 | 2005-04-06 | |
PCT/US2006/013012 WO2006108137A2 (en) | 2005-04-06 | 2006-04-06 | Glass inspection systems and methods for using same |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1866625A2 EP1866625A2 (en) | 2007-12-19 |
EP1866625A4 true EP1866625A4 (en) | 2010-12-29 |
Family
ID=37074107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06749504A Withdrawn EP1866625A4 (en) | 2005-04-06 | 2006-04-06 | Glass inspection systems and methods for using same |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1866625A4 (en) |
JP (1) | JP2008536127A (en) |
KR (1) | KR20070121820A (en) |
CN (1) | CN101175986B (en) |
TW (1) | TWI360652B (en) |
WO (1) | WO2006108137A2 (en) |
Families Citing this family (53)
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JP5581563B2 (en) * | 2007-03-08 | 2014-09-03 | 株式会社日立製作所 | Illumination apparatus, defect inspection apparatus and method using the same, height measurement apparatus and method |
JP2010048745A (en) * | 2008-08-25 | 2010-03-04 | Asahi Glass Co Ltd | Defect inspection system and defect inspection method |
KR101292570B1 (en) * | 2008-12-31 | 2013-08-12 | 엘지디스플레이 주식회사 | System for testing distortion of liquid crystal display device |
EP2253949A1 (en) * | 2009-05-22 | 2010-11-24 | Dr. Schenk GmbH Industriemesstechnik | Device and method for detecting an optically diverting and/or polarisation-rotating error |
EP2261633A1 (en) * | 2009-06-10 | 2010-12-15 | Becton Dickinson France | Supporting device for a transparent article and method for putting said article under compression |
CN101650307B (en) * | 2009-07-17 | 2011-02-09 | 富美科技有限公司 | Scraper blade surface detection system |
CN101988908A (en) * | 2009-07-31 | 2011-03-23 | 法国圣-戈班玻璃公司 | Method and system for distinguishing fault of substrate |
CN102081047B (en) * | 2009-11-27 | 2015-04-08 | 法国圣-戈班玻璃公司 | Method and system for distinguishing defects of substrate |
BE1019378A3 (en) * | 2010-06-17 | 2012-06-05 | Agc Glass Europe | ANALYSIS OF DRYING BRANDS. |
WO2012081398A1 (en) * | 2010-12-15 | 2012-06-21 | 旭硝子株式会社 | Glass plate, method for inspecting glass plate, and method for manufacturing glass plate |
DE102012002174B4 (en) | 2012-02-07 | 2014-05-15 | Schott Ag | Apparatus and method for detecting defects within the volume of a transparent pane and using the apparatus |
CN102621149B (en) * | 2012-03-21 | 2015-07-22 | 深圳市华星光电技术有限公司 | Substrate detection device and method |
CN102608132B (en) * | 2012-04-09 | 2014-06-11 | 昆山胜泽光电科技有限公司 | Multi-type glass flaw detection device and detection method |
CN102645435A (en) * | 2012-04-19 | 2012-08-22 | 深圳市华星光电技术有限公司 | Method and device for detecting substrate |
CN102721692B (en) * | 2012-06-19 | 2015-11-25 | 深圳市华星光电技术有限公司 | The pick-up unit of glass substrate board box |
CN102778460A (en) * | 2012-07-31 | 2012-11-14 | 法国圣戈班玻璃公司 | Method for detecting internal flaw of substrate |
WO2014027375A1 (en) * | 2012-08-13 | 2014-02-20 | 川崎重工業株式会社 | Plate glass inspection unit and manufacturing facility |
EP2725348A1 (en) | 2012-10-29 | 2014-04-30 | Scientific Visual SARL | Optical quality control device |
CN103886573B (en) * | 2012-12-20 | 2018-10-12 | 联想(北京)有限公司 | Object detecting method and article detection device |
DE102013105693A1 (en) | 2013-06-03 | 2013-10-31 | Viprotron Gmbh | Method for optical error inspection of object, involves projecting light beams from illumination surface on projection surface arranged behind object, and detecting shadow impact generated on projection surface with optical detection unit |
CN104237137B (en) * | 2013-06-07 | 2016-12-28 | 昆山胜泽光电科技有限公司 | Measure glass different angles color, brightness and the device of reflectance spectrum |
DE102013107215B3 (en) | 2013-07-09 | 2014-10-09 | Heraeus Quarzglas Gmbh & Co. Kg | Method for producing a mirror substrate blank made of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank |
CN106461572A (en) * | 2013-12-23 | 2017-02-22 | 康宁股份有限公司 | Non-imaging coherent line scanner systems and methods for optical inspection |
CN103791835A (en) * | 2014-01-26 | 2014-05-14 | 扬州苏庆非标装备研发有限公司 | Profile and size detecting method of section of strip-shaped optical glass |
CN103868478A (en) * | 2014-04-01 | 2014-06-18 | 四川虹视显示技术有限公司 | Rapid detection method and device for flatness of transparent flat plate |
CN103913466A (en) * | 2014-04-08 | 2014-07-09 | 上海华力微电子有限公司 | Detection device and detection method for wafer defect |
KR101942260B1 (en) | 2014-07-03 | 2019-01-28 | (주)엘지하우시스 | Method of detecting corrosion of glass substrate |
KR101952617B1 (en) * | 2014-07-03 | 2019-02-28 | (주)엘지하우시스 | Method of detecting corrosion of glass substrate |
CN104297264A (en) * | 2014-11-03 | 2015-01-21 | 苏州精创光学仪器有限公司 | Glass surface blemish on-line detecting system |
JP6668353B2 (en) | 2014-12-19 | 2020-03-18 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | Method and apparatus for optically detecting a chromatographic sample |
WO2016205456A1 (en) * | 2015-06-19 | 2016-12-22 | Corning Incorporated | Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques |
CN105372253A (en) * | 2015-12-14 | 2016-03-02 | 陈艳 | Light tube defect detection system |
CN107132244B (en) * | 2016-02-29 | 2020-01-07 | 鞍钢股份有限公司 | Quantitative evaluation method for inclusions in steel |
CN105675617B (en) * | 2016-04-06 | 2020-05-01 | 东旭科技集团有限公司 | Method and apparatus for measuring surface granularity of plate glass |
WO2018085237A1 (en) | 2016-11-02 | 2018-05-11 | Corning Incorporated | Method and apparatus for inspecting defects on transparent substrate and method of emitting incident light |
KR102537558B1 (en) | 2016-11-02 | 2023-05-26 | 코닝 인코포레이티드 | Method and apparatus for inspecting defects on a transparent substrate |
CN106556573B (en) * | 2016-11-17 | 2018-01-12 | 仝宁瑶 | A kind of experimental provision for being used to determine glass refraction |
TWI622764B (en) * | 2017-01-11 | 2018-05-01 | 由田新技股份有限公司 | An automatic optical inspecting system for particle inspection from the surface |
WO2018158824A1 (en) * | 2017-02-28 | 2018-09-07 | 東洋ガラス株式会社 | Container inspection device and container inspection method |
JP6285597B1 (en) * | 2017-06-05 | 2018-02-28 | 大塚電子株式会社 | Optical measuring apparatus and optical measuring method |
CN107345918B (en) * | 2017-08-16 | 2023-05-23 | 广西大学 | Plate material quality detection device and method |
CN107515222A (en) * | 2017-09-20 | 2017-12-26 | 哈尔滨工程大学 | A kind of microstructure observation device of ice |
CN112534240A (en) | 2018-07-24 | 2021-03-19 | 玻璃技术公司 | System and method for measuring surface of contoured glass sheet |
CN111226110A (en) * | 2018-08-10 | 2020-06-02 | 合刃科技(深圳)有限公司 | Detection method and system |
CN109187550A (en) * | 2018-08-15 | 2019-01-11 | 苏州富鑫林光电科技有限公司 | A kind of defects detection imaging method based on grating image |
CN109827974B (en) * | 2018-08-30 | 2022-03-08 | 东莞市微科光电科技有限公司 | Resin optical filter film crack detection device and detection method |
CN110095590A (en) * | 2019-04-23 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | Glass substrate residual material method for detecting and device |
CN110044931B (en) * | 2019-04-23 | 2021-03-26 | 华中科技大学 | Detection apparatus for curved surface glass surface and internal defect |
CN110031481B (en) * | 2019-05-05 | 2021-11-12 | 苏州天准科技股份有限公司 | Square wave structured light illumination implementation method based on polarization |
CN112147710B (en) * | 2019-06-26 | 2022-02-18 | 上海微电子装备(集团)股份有限公司 | Detection method and detection device of wet-process optical cement device |
CN114796730B (en) * | 2022-03-29 | 2024-02-27 | 深圳市好克医疗仪器股份有限公司 | Bubble detection apparatus, bubble detection method, bubble detection device, and bubble detection program |
CN115338168A (en) * | 2022-07-28 | 2022-11-15 | 宜昌中威清洗机有限公司 | Crankshaft cleaning system |
CN116934752B (en) * | 2023-09-18 | 2023-12-08 | 山东国泰民安玻璃科技有限公司 | Glass detection method and system based on artificial intelligence |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4340304A (en) * | 1978-08-11 | 1982-07-20 | Rockwell International Corporation | Interferometric method and system |
JPS57120804A (en) * | 1981-01-20 | 1982-07-28 | Hitachi Metals Ltd | Inspecting method of surface defect |
SU1260773A1 (en) * | 1984-11-29 | 1986-09-30 | Специальное Конструкторско-Технологическое Бюро Института Радиофизики И Электроники Ан Усср | Device for detecting defects in transparent thin-film articles |
JPH04178545A (en) * | 1990-11-14 | 1992-06-25 | Fuji Photo Film Co Ltd | Method and apparatus for inspecting transparent band-like body |
JPH0579994A (en) * | 1991-09-21 | 1993-03-30 | Kowa Co | Transparent body defect inspecting device |
US6040900A (en) * | 1996-07-01 | 2000-03-21 | Cybernet Systems Corporation | Compact fiber-optic electronic laser speckle pattern shearography |
JP2001041719A (en) * | 1999-07-27 | 2001-02-16 | Canon Inc | Inspection device and method of transparent material and storage medium |
US20030210402A1 (en) * | 2002-05-07 | 2003-11-13 | Applied Materials Israel Ltd. | Apparatus and method for dual spot inspection of repetitive patterns |
WO2004017099A2 (en) * | 2002-08-19 | 2004-02-26 | Green Vision Systems Ltd. | Electro-optically inspecting a longitudinally moving rod of material |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6484139A (en) * | 1987-09-28 | 1989-03-29 | Teijin Ltd | Film flaw detecting device |
JPH06100555B2 (en) * | 1990-12-19 | 1994-12-12 | 東洋ガラス株式会社 | Defect inspection method and device for transparent object |
JP2795595B2 (en) * | 1992-06-26 | 1998-09-10 | セントラル硝子株式会社 | Defect detection method for transparent plate |
US5576827A (en) * | 1994-04-15 | 1996-11-19 | Micromeritics Instrument Corporation | Apparatus and method for determining the size distribution of particles by light scattering |
US5610391A (en) * | 1994-08-25 | 1997-03-11 | Owens-Brockway Glass Container Inc. | Optical inspection of container finish dimensional parameters |
CA2252308C (en) * | 1998-10-30 | 2005-01-04 | Image Processing Systems, Inc. | Glass inspection system |
JP4358955B2 (en) * | 2000-01-07 | 2009-11-04 | 株式会社堀場製作所 | Foreign matter inspection device |
US6404489B1 (en) * | 2000-03-29 | 2002-06-11 | Corning Incorporated | Inclusion detection |
US6633377B1 (en) * | 2000-04-20 | 2003-10-14 | Image Processing Systems Inc. | Dark view inspection system for transparent media |
JP2002090310A (en) * | 2000-09-19 | 2002-03-27 | Sekisui Chem Co Ltd | Sheet inspection device |
JP2003083902A (en) * | 2001-09-11 | 2003-03-19 | Fuji Photo Film Co Ltd | Method and device for inspecting specimen |
JP2004028785A (en) * | 2002-06-25 | 2004-01-29 | Fuji Photo Film Co Ltd | Parallel light generator, and web defect detector |
GB0219248D0 (en) * | 2002-08-17 | 2002-09-25 | Univ York | OPtical assembly and method for detection of light transmission |
US7142295B2 (en) * | 2003-03-05 | 2006-11-28 | Corning Incorporated | Inspection of transparent substrates for defects |
-
2006
- 2006-04-06 TW TW95112334A patent/TWI360652B/en not_active IP Right Cessation
- 2006-04-06 EP EP06749504A patent/EP1866625A4/en not_active Withdrawn
- 2006-04-06 JP JP2008505569A patent/JP2008536127A/en active Pending
- 2006-04-06 CN CN200680016105XA patent/CN101175986B/en not_active Expired - Fee Related
- 2006-04-06 KR KR1020077025683A patent/KR20070121820A/en not_active Application Discontinuation
- 2006-04-06 WO PCT/US2006/013012 patent/WO2006108137A2/en active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4340304A (en) * | 1978-08-11 | 1982-07-20 | Rockwell International Corporation | Interferometric method and system |
JPS57120804A (en) * | 1981-01-20 | 1982-07-28 | Hitachi Metals Ltd | Inspecting method of surface defect |
SU1260773A1 (en) * | 1984-11-29 | 1986-09-30 | Специальное Конструкторско-Технологическое Бюро Института Радиофизики И Электроники Ан Усср | Device for detecting defects in transparent thin-film articles |
JPH04178545A (en) * | 1990-11-14 | 1992-06-25 | Fuji Photo Film Co Ltd | Method and apparatus for inspecting transparent band-like body |
JPH0579994A (en) * | 1991-09-21 | 1993-03-30 | Kowa Co | Transparent body defect inspecting device |
US6040900A (en) * | 1996-07-01 | 2000-03-21 | Cybernet Systems Corporation | Compact fiber-optic electronic laser speckle pattern shearography |
JP2001041719A (en) * | 1999-07-27 | 2001-02-16 | Canon Inc | Inspection device and method of transparent material and storage medium |
US20030210402A1 (en) * | 2002-05-07 | 2003-11-13 | Applied Materials Israel Ltd. | Apparatus and method for dual spot inspection of repetitive patterns |
WO2004017099A2 (en) * | 2002-08-19 | 2004-02-26 | Green Vision Systems Ltd. | Electro-optically inspecting a longitudinally moving rod of material |
Also Published As
Publication number | Publication date |
---|---|
WO2006108137A3 (en) | 2006-11-16 |
JP2008536127A (en) | 2008-09-04 |
WO2006108137A2 (en) | 2006-10-12 |
TW200706859A (en) | 2007-02-16 |
CN101175986B (en) | 2010-10-13 |
KR20070121820A (en) | 2007-12-27 |
TWI360652B (en) | 2012-03-21 |
CN101175986A (en) | 2008-05-07 |
EP1866625A2 (en) | 2007-12-19 |
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Legal Events
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17P | Request for examination filed |
Effective date: 20071018 |
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Designated state(s): DE FR |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20101130 |
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Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
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