EP1730738A1

EP1730738A1 - Flexible indented membrane

Info

Publication number: EP1730738A1
Application number: EP05744606A
Authority: EP
Inventors: Serge Gidon; Olivier Lemonnier
Original assignee: Commissariat a lEnergie Atomique CEA
Current assignee: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date: 2004-04-01
Filing date: 2005-03-25
Publication date: 2006-12-13
Also published as: FR2868411B1; JP2007531197A; US7505394B2; US20070211612A1; WO2005098845A1; FR2868411A1; JP4762974B2

Abstract

The flexible membrane (1) comprises at least one thin layer with a plurality of indentations (2) formed therein, wherein bearing points (3) for actuating elements are disposed between said indentations in order to locally deform the membrane. The thus open-worked membrane (1) is more flexible in a cross direction. The open-worked membrane (1) can act as a support for the recording of data, cooperating with a micro-point bi-dimensional network.

Description

Soft membrane with notches

Technical field of the invention

The invention relates to a flexible membrane, in particular intended to constitute the memory support of a data recording device.

State of the art

The Applicant's international patent application, filed on October 1, 2003 under the number PCT / FR2003 / 002879, proposes using a flexible membrane to constitute the memory support of a data recording device. This comprises a two-dimensional network of micro-tips, the apex of which is generally of nanometric dimensions, arranged in a plane, facing the storage medium constituted by the flexible membrane, carried by a frame forming a plurality of cells, associated each with at least one micro-tip. The flexibility of the membrane makes it possible to compensate for the dispersions in the height of the microtips. The flexible membrane can be formed by a layer or by a stack of extremely thin layers, of the order of a few nanometers to a few micrometers. It deforms locally under the action of local forces applied perpendicularly to its surface by micro-tips, under the control of electronic addressing and micro-tip control means, to allow recording of data on the support of memory. It is thus possible to achieve very high memory densities. However, it may be important, in particular for questions of tribology, to reduce as much as possible the stiffness of the memory medium under the microdots, without however limiting the dimensional stability of the memory medium in its plane.

Subject of the invention

The invention aims to remedy the above drawbacks.

According to the invention, this object is achieved by a flexible membrane according to the appended claims and, more particularly by a flexible membrane comprising at least one thin layer in which are formed a plurality of notches, between which are located support points. for mechanical actuating elements intended to locally deform the membrane with which they come into contact at the support points.

According to a development of the invention, the notches are arranged periodically in the plane of the membrane.

According to a preferred embodiment, the notches are arranged in the form of rows and columns, each comprising alternately first notches arranged in a first direction and second notches arranged in a second direction, which can advantageously be substantially orthogonal to the first.

The notches may be linear, T-shaped, H-shaped or notched and have enlarged ends, of substantially circular section. According to a development of the invention, the membrane constitutes a data recording medium intended to cooperate with a two-dimensional network of micro-tips coming into contact with the membrane at said support points.

Brief description of the drawings

Other advantages and characteristics will emerge more clearly from the description which follows of particular embodiments of the invention given by way of nonlimiting examples and represented in the appended drawings, in which:

FIG. 1 illustrates a particular embodiment of a flexible membrane according to the invention.

Figures 2 to 5 show a pattern of a flexible membrane according to the invention with different embodiments of the notches.

Figures 6 and 8 illustrate a particular method of manufacturing a membrane according to the invention. FIGS. 9 and 10 illustrate the use of a membrane according to the invention in micro-tip data recording devices.

Description of particular embodiments

As shown in FIG. 1, a flexible membrane 1 comprises, in the plane of the membrane 1, a plurality of notches 2, or grooves, between which are arranged support points 3 for actuating elements intended to deform locally and selectively the membrane 1. In a preferred embodiment, the notches 2 pass through the entire thickness of the membrane 1, which can be a monolayer or multilayer membrane.

In FIG. 1, the support points 3 form a two-dimensional network of 3 rows and 5 columns, with a predetermined periodicity. The step p1 separating two adjacent support points 3 from a row can be identical or different from the step p2 separating two adjacent support points 3 from a column.

The notches 2 are arranged periodically, preferably in at least one direction of the plane of the membrane, that is to say parallel to each other. The notches 2 can also constitute subassemblies arranged in distinct directions in the plane of the membrane 1. In a preferred embodiment, the notches 2a of a first subset are substantially perpendicular to the notches 2b of a second subset.

In the particular embodiment illustrated in Figure 1, the notches 2 are staggered relative to the support points 3, in the form of lines and columns each comprising alternately vertical notches 2a and horizontal notches 2b. The vertical notches 2a of two adjacent columns are thus offset vertically with respect to each other and the step p3 separating two vertical notches 2a adjacent to one and the same line is preferably substantially equal to twice the corresponding step p1, separating in the same direction, that is to say horizontally, two adjacent support points 3. Similarly, the horizontal cuts 2b of two adjacent lines are offset horizontally with respect to each other and the step p4 separating two adjacent horizontal cuts 2b of a same column is preferably substantially equal to twice the corresponding pitch p2 separating, in the same direction, that is to say vertically, two adjacent support points 3.

More generally, the rows and columns are not necessarily horizontal and vertical respectively. The rows and the columns then each alternately comprise first notches (2a) arranged in a first direction and second notches (2b) arranged in a second direction. As before, the step (p3) separating two first adjacent notches (2a) of the same line is preferably substantially equal to twice the step (p1) separating, in the second direction, two support points (3) adjacent, the pitch (p4) separating two adjacent second notches (2b) of the same column being substantially equal to twice the pitch (p2) separating, in the first direction, two adjacent support points 3.

By way of nonlimiting example, the different steps mentioned above can be of the order of 100 μm for p1 and p2 and of the order of 200 μm for p3 and p4, the length of the notches being of the order of 120 μm to 150 μm.

The membrane 1 thus perforated has increased flexibility in the transverse direction, without reducing the precision and the geometric quality of the membrane in its plane. Under the action of an actuating element exerting a force on a fulcrum 3, the membrane deforms transversely to its plane and has tears at the location of the notches 2 adjacent to said fulcrum. This increase in flexibility is all the more important as the notches 2 are long and leave little material constituting the membrane between them. A limit to the transverse flexibility of the membrane is however constituted by the loss of geometric rigidity of the membrane in its plane. The staggered structure described above provides good support of the ends of the elementary patterns, avoiding surface raising effects during the stages of production of the membrane consisting in releasing the surfaces.

Although the periodic arrangement of the notches, adapted to the pitch of the actuating elements is preferred, the arrangement of the notches can be arbitrary. It is in particular possible to use structures in the form of square, rectangular meshes (for example illustrated in FIGS. 1 and 2), in rhombus, etc.

The shape of the notches can also be arbitrary. By way of example, the notches can be linear, as shown in FIG. 1, possibly with enlarged ends, for example of substantially circular section, as shown in FIG. 2. Other geometric shapes are possible, in particular notches T-shaped, H-shaped, notched, as shown in Figures 3 to 5 respectively, or by a combination of these shapes on the same membrane. Of course, the widening of the ends of the notches, illustrated in FIG. 2, can be used whatever the shape of the notch (linear, T, H, square, etc.). In the particular embodiment shown in FIG. 3, a vertical notch 2a connected to a horizontal notch 2b adjacent to the same line constitute a single complex notch, in the form of a lying T. Similarly, in Figure 4, two horizontal notches 2b connected by a vertical notch 2a of the same column form a single complex notch, in the shape of a coated H.

The number and / or dimensions of the notches are adapted to the minimum rigidity necessary for the membrane to play the role assigned to it.

A particular method of manufacturing an openwork membrane is illustrated in FIGS. 6 to 8. A sacrificial layer 4, for example made of silica, is formed on a substrate 5. A layer 6, for example made of silicon nitride intended to constitute the membrane 1, is then deposited on the sacrificial layer 4. A mask 7, corresponding to the desired pattern for the notches, is formed, for example by photo- lithography in a resin layer, deposited on layer 6 (Figure 6). The stack of layers 4 to 6 can also consist of silicon on insulator (SOI), which incorporates a layer of silica constituting an insulator and which can serve as a sacrificial layer 4. In this case, the silica layer can optionally, in known manner, also ensuring a separation layer function for a possible transfer of the membrane for assembly in accordance with Smartcut ™ technology.

The notches 2 are then formed in the layer 6, by anisotropic etching, preferably up to the level of the sacrificial layer 4 in silica (FIG. 7). This anisotropic etching can be carried out, in a known manner, by ion bombardment or by selective chemical attack, for example by potassium hydroxide (KOH) if the layer constituting the membrane is made of silicon.

The sacrificial layer 4 is then attacked, for example by selective isotropic etching in the aqueous phase, with hydrofluoric acid, by means of the notches 2 (FIG. 8). The membrane structure is thus released, by isotropic chemical attack stopped after a predetermined time, long enough to release the membrane. The latter remains fixed to the substrate 5 by the remaining part of the sacrificial layer 4, constituting a support frame for the membrane. The resin mask can then be removed, in a known manner, and possible additional layers of the membrane can then be deposited on the etched and released membrane.

The openwork flexible membrane 1 according to the invention can be used in all structures with flexible membranes requiring great flexibility transverse and, more particularly in all structures in which a flexible membrane is intended to cooperate with a mechanical actuating structure bearing on the membrane at a number of support points 3, which can be movable in the plane of the membrane.

An openwork membrane 1 can in particular be used as a memory medium in the field of data processing or in the field of multimedia. The membrane then serves as a data recording medium cooperating with a two-dimensional network of microtips. In this case, as described in the aforementioned patent application PCT / FR2003 / 002879 and as shown in FIG. 9, the flexible membrane 1 can be carried by a frame 8 forming a plurality of adjacent cells. Each cell then cooperates with at least one microtip 9. The two-dimensional network of microtips is, for example, formed on a base 10 disposed opposite the membrane 1, parallel to the latter. A relative movement of the micro-tips 9 and of the membrane 1 constituting the memory medium can be printed on the membrane and / or on the micro-tips by actuators (not shown), themselves controlled by microcomputer. The control and addressing or multiplexing of the micro-tips 9 in the reading or writing position is carried out by any appropriate means, preferably by an electronic circuit produced in technology integrated in the base 10. The use of the perforated membrane according to the invention not only makes it possible to compensate for possible differences in height of the micro-tips and possible deformations of the base supporting the micro-tips, but also to reduce the bearing force of the micro-tips on the membrane 1 .

The flexible perforated membrane 1 described above can also be used to form elementary membranes 1 a and 1 b, in a data recording device of the type described in the patent application. PCT / FR2003 / 002879 cited above and shown in Figure 10. The particular embodiment shown in Figure 10 allows to limit the side effects related to the use of a frame. In this device, the flexible membrane comprises a first elementary membrane 1a, associated with the frame 8 as in FIG. 9, and a second elementary membrane 1b, intended to come into contact with the network of microtips 9. The two elementary membranes 1a and 1b are separated by a network of spacers 11, which is offset laterally with respect to the frame 8. The spacers 11 have a thickness sufficient to avoid contact between the two elementary membranes during their deformation.

The perforated membrane according to the invention can also be used, supported on studs, in the field of adaptive optics or to produce space modulators with deformable mirror. In this case, the flexibility introduced by the notches 2 is used to facilitate the tilting by a network of actuators of the elements of a mirror constituted by the membrane, which then comprises a reflective layer.

Claims

claims

1. Flexible membrane characterized in that it comprises at least one thin layer (6) in which are formed a plurality of notches (2), between which are located support points (3) for actuating elements (9) mechanical intended to locally deform the membrane (1) with which they come into contact at the support points.

2. Membrane according to claim 1, characterized in that the notches (2) pass through the entire thickness of the membrane (1).

3. Membrane according to one of claims 1 and 2, characterized in that the notches (2) are arranged periodically in the plane of the membrane (1).

4. Membrane according to any one of claims 1 to 3, characterized in that the notches (2) are parallel to each other.

5. Membrane according to any one of claims 1 to 4, characterized in that it comprises first and second subsets of notches arranged in distinct directions in the plane of the membrane (1).

6. Membrane according to claim 5, characterized in that the notches (2a) of the first subset are substantially perpendicular to the notches (2b) of the second subset.

7. Membrane according to any one of claims 1 to 6, characterized in that the arrangement of the notches (2) is periodic.

8. Membrane according to any one of claims 1 to 7, characterized in that the notches (2) are staggered relative to the support points (3).

9. Membrane according to claim 8, characterized in that the notches (2) are arranged in the form of lines and columns, each comprising alternately first notches (2a) arranged in a first direction and second notches (2b) arranged in a second direction.

10. Membrane according to claim 9, characterized in that the second direction is substantially orthogonal to the first.

11. Membrane according to one of claims 9 and 10, characterized in that the pitch (p3) separating two first notches (2a) adjacent to the same line is substantially equal to twice the pitch (p1) separating, according to the second direction, two adjacent support points (3), the step (p4) separating two second notches (2b) adjacent to the same column is substantially equal to twice the step (p2) separating, in the first direction, two points d 'adjacent support (3).

12. Membrane according to any one of claims 1 to 11, characterized in that the notches (2) are linear, T-shaped, H-shaped or slot-shaped.

13. Membrane according to claim 12, characterized in that the notches (2) have enlarged ends, of substantially circular section.

14. Membrane according to any one of claims 1 to 13, characterized in that the membrane (1) constitutes a data recording medium intended to cooperate with a two-dimensional network of micro-tips (9) coming into contact with the membrane (1) at said support points (3).