EP1519101A3 - Purgeable container - Google Patents
Purgeable container Download PDFInfo
- Publication number
- EP1519101A3 EP1519101A3 EP20040022387 EP04022387A EP1519101A3 EP 1519101 A3 EP1519101 A3 EP 1519101A3 EP 20040022387 EP20040022387 EP 20040022387 EP 04022387 A EP04022387 A EP 04022387A EP 1519101 A3 EP1519101 A3 EP 1519101A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- valve
- diaphragm
- valve seat
- container
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4402—Reduction of impurities in the source gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/05—Ultrapure fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
- F17C2223/033—Small pressure, e.g. for liquefied gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/04—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by other properties of handled fluid before transfer
- F17C2223/042—Localisation of the removal point
- F17C2223/043—Localisation of the removal point in the gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/04—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by other properties of handled fluid before transfer
- F17C2223/042—Localisation of the removal point
- F17C2223/046—Localisation of the removal point in the liquid
- F17C2223/047—Localisation of the removal point in the liquid with a dip tube
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/04—Methods for emptying or filling
- F17C2227/044—Methods for emptying or filling by purging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
- F17C2260/044—Avoiding pollution or contamination
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2931—Diverse fluid containing pressure systems
- Y10T137/3115—Gas pressure storage over or displacement of liquid
- Y10T137/3127—With gas maintenance or application
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
- Packages (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/669,942 US6966348B2 (en) | 2002-05-23 | 2003-09-24 | Purgeable container for low vapor pressure chemicals |
US669942 | 2003-09-24 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1519101A2 EP1519101A2 (en) | 2005-03-30 |
EP1519101A3 true EP1519101A3 (en) | 2007-02-21 |
EP1519101B1 EP1519101B1 (en) | 2014-12-03 |
Family
ID=34194812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20040022387 Expired - Lifetime EP1519101B1 (en) | 2003-09-24 | 2004-09-21 | Purgeable container |
Country Status (7)
Country | Link |
---|---|
US (1) | US6966348B2 (en) |
EP (1) | EP1519101B1 (en) |
JP (1) | JP4246680B2 (en) |
KR (1) | KR100638697B1 (en) |
CN (1) | CN100415587C (en) |
SG (1) | SG110186A1 (en) |
TW (1) | TWI257461B (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7198072B2 (en) * | 2004-07-13 | 2007-04-03 | David James Silva | Purgeable manifold system |
US7114531B2 (en) * | 2004-07-13 | 2006-10-03 | David James Silva | System and method for purging high purity interfaces |
US20070017596A1 (en) * | 2004-07-13 | 2007-01-25 | Silva David J | System for purging high purity interfaces |
JP2006128246A (en) * | 2004-10-27 | 2006-05-18 | Toshiba Corp | Semiconductor manufacturing device, solution container, and method of manufacturing semiconductor device |
US7723701B1 (en) | 2005-07-29 | 2010-05-25 | South Bay Technology, Inc. | Specimen preservation systems and methods |
US7293569B2 (en) * | 2005-12-13 | 2007-11-13 | Air Liquide Electronics U.S. Lp | Alkylsilanes as solvents for low vapor pressure precursors |
KR20110088564A (en) * | 2008-11-11 | 2011-08-03 | 프랙스에어 테크놀로지, 인코포레이티드 | Reagent dispensing apparatuses and delivery methods |
US8684208B2 (en) * | 2009-05-14 | 2014-04-01 | Chris Hotell | Reusable containers for storing foodstuffs or liquids |
US8403042B2 (en) | 2010-07-14 | 2013-03-26 | Schlumberger Technology Corporation | Method and apparatus for use with downhole tools having gas-filled cavities |
JP5810609B2 (en) | 2011-04-28 | 2015-11-11 | セイコーエプソン株式会社 | RECORDING DEVICE, RECORDING DEVICE CONTROL METHOD, AND PROGRAM |
WO2017070208A1 (en) * | 2015-10-20 | 2017-04-27 | Advion, Inc. | Inert atmospheric solids analysis probe system |
WO2018157020A1 (en) * | 2017-02-27 | 2018-08-30 | Intrepid Brands, LLC | Vaporizer pod |
US10578085B1 (en) * | 2017-05-01 | 2020-03-03 | Mark Lee Stang | Sealed modular fluid distribution system |
EP3912688A1 (en) * | 2020-05-19 | 2021-11-24 | L'air Liquide, Société Anonyme Pour L'Étude Et L'exploitation Des Procédés Georges Claude | Secure inerting device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6431229B1 (en) * | 2001-08-24 | 2002-08-13 | Air Products And Chemicals, Inc. | Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals |
EP1327603A2 (en) * | 2002-01-14 | 2003-07-16 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purge |
EP1365041A1 (en) * | 2002-05-23 | 2003-11-26 | Air Products And Chemicals, Inc. | Purgeable manifold |
Family Cites Families (39)
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US3696830A (en) * | 1971-03-04 | 1972-10-10 | Johnson Service Co | Flow control system employing a series reference resistor |
US3958720A (en) | 1975-05-19 | 1976-05-25 | Anderson Ralph F | Adjustable multiple container dispensing apparatus |
US4537660A (en) | 1978-06-28 | 1985-08-27 | Mccord James W | Vapor generating and recovering apparatus |
US4357175A (en) | 1980-04-10 | 1982-11-02 | Stauffer Chemical Company | Process for cleaning the interiors of vessels |
US4865061A (en) | 1983-07-22 | 1989-09-12 | Quadrex Hps, Inc. | Decontamination apparatus for chemically and/or radioactively contaminated tools and equipment |
US4570799A (en) | 1984-02-06 | 1986-02-18 | Universal Symetrics Corporation | Multiple container package |
US4832753A (en) | 1987-05-21 | 1989-05-23 | Tempress Measurement & Control Corporation | High-purity cleaning system, method, and apparatus |
JPH01134932A (en) | 1987-11-19 | 1989-05-26 | Oki Electric Ind Co Ltd | Cleansing process and clarifier of substrate |
US5051135A (en) | 1989-01-30 | 1991-09-24 | Kabushiki Kaisha Tiyoda Seisakusho | Cleaning method using a solvent while preventing discharge of solvent vapors to the environment |
US5195711A (en) | 1989-07-14 | 1993-03-23 | Prince Corporation | Multiple container holder |
US5115576A (en) | 1989-10-27 | 1992-05-26 | Semifab Incorporated | Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol |
US5304253A (en) | 1990-09-12 | 1994-04-19 | Baxter International Inc. | Method for cleaning with a volatile solvent |
US5106404A (en) | 1990-09-12 | 1992-04-21 | Baxter International Inc. | Emission control system for fluid compositions having volatile constituents and method thereof |
US5045117A (en) | 1990-09-18 | 1991-09-03 | Rockwell International Corporation | System for removing flux residues from printed wiring assemblies |
US5108582A (en) | 1990-11-19 | 1992-04-28 | Uop | Cleanup of hydrocarbon-conversion system |
US5538025A (en) | 1991-11-05 | 1996-07-23 | Serec Partners | Solvent cleaning system |
US5240507A (en) | 1991-11-05 | 1993-08-31 | Gray Donald J | Cleaning method and system |
US5425183A (en) | 1991-12-04 | 1995-06-20 | Vacon Technologies, Inc. | Method and apparatus for producing and delivering solvent vapor to vessel interiors for treating residue deposits and coatings |
JP3146465B2 (en) | 1992-03-13 | 2001-03-19 | 株式会社ニッショー | Chemical injection device |
CN2129726Y (en) * | 1992-06-16 | 1993-04-14 | 庄龙堂 | Clamp seat for tea water container |
US5339844A (en) | 1992-08-10 | 1994-08-23 | Hughes Aircraft Company | Low cost equipment for cleaning using liquefiable gases |
CN1091047A (en) * | 1993-02-18 | 1994-08-24 | 迟广生 | Plantar reflecting region massage magnetic therapeutic health-care shoe-pad |
EP0619450A1 (en) * | 1993-04-09 | 1994-10-12 | The Boc Group, Inc. | Zero Dead-Leg Gas Cabinet |
US5465766A (en) | 1993-04-28 | 1995-11-14 | Advanced Delivery & Chemical Systems, Inc. | Chemical refill system for high purity chemicals |
US5607002A (en) | 1993-04-28 | 1997-03-04 | Advanced Delivery & Chemical Systems, Inc. | Chemical refill system for high purity chemicals |
US5964254A (en) | 1997-07-11 | 1999-10-12 | Advanced Delivery & Chemical Systems, Ltd. | Delivery system and manifold |
US5878793A (en) | 1993-04-28 | 1999-03-09 | Siegele; Stephen H. | Refillable ampule and method re same |
US5398846A (en) | 1993-08-20 | 1995-03-21 | S. C. Johnson & Son, Inc. | Assembly for simultaneous dispensing of multiple fluids |
US5509431A (en) | 1993-12-14 | 1996-04-23 | Snap-Tite, Inc. | Precision cleaning vessel |
JPH07271168A (en) | 1994-03-30 | 1995-10-20 | Minolta Co Ltd | Developer supplying container |
US5565070A (en) | 1994-08-09 | 1996-10-15 | Morikawa Industries Corporation | Solvent vapor sucking method and solvent recovering apparatus |
US5472119A (en) | 1994-08-22 | 1995-12-05 | S. C. Johnson & Son, Inc. | Assembly for dispensing fluids from multiple containers, while simultaneously and instantaneously venting the fluid containers |
JP3247270B2 (en) | 1994-08-25 | 2002-01-15 | 東京エレクトロン株式会社 | Processing apparatus and dry cleaning method |
US5573132A (en) | 1994-11-25 | 1996-11-12 | Kanfer; Joseph S. | Dispensing container |
US5562883A (en) | 1995-05-05 | 1996-10-08 | Davidson Textron Inc. | Solvent flush reaction injection molding mixhead |
DE69738136T2 (en) | 1996-12-17 | 2008-06-12 | Advanced Technology Materials, Inc., Danbury | REAGENT TANK FOR CVD |
US5964230A (en) | 1997-10-06 | 1999-10-12 | Air Products And Chemicals, Inc. | Solvent purge mechanism |
JP3965512B2 (en) | 1998-03-31 | 2007-08-29 | 株式会社フジキン | Gasket retainer used in fluid coupling and fluid coupling |
WO1999064780A1 (en) | 1998-06-08 | 1999-12-16 | Advanced Delivery & Chemical Systems, Ltd. | Chemical delivery system having purge system utilizing multiple purge techniques |
-
2003
- 2003-09-24 US US10/669,942 patent/US6966348B2/en not_active Expired - Lifetime
-
2004
- 2004-09-15 SG SG200405601A patent/SG110186A1/en unknown
- 2004-09-21 TW TW93128626A patent/TWI257461B/en active
- 2004-09-21 EP EP20040022387 patent/EP1519101B1/en not_active Expired - Lifetime
- 2004-09-24 KR KR1020040077251A patent/KR100638697B1/en active IP Right Grant
- 2004-09-24 CN CNB2004100899324A patent/CN100415587C/en not_active Expired - Fee Related
- 2004-09-24 JP JP2004277751A patent/JP4246680B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6431229B1 (en) * | 2001-08-24 | 2002-08-13 | Air Products And Chemicals, Inc. | Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals |
EP1327603A2 (en) * | 2002-01-14 | 2003-07-16 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purge |
EP1365041A1 (en) * | 2002-05-23 | 2003-11-26 | Air Products And Chemicals, Inc. | Purgeable manifold |
Also Published As
Publication number | Publication date |
---|---|
KR100638697B1 (en) | 2006-10-30 |
EP1519101B1 (en) | 2014-12-03 |
JP2005223310A (en) | 2005-08-18 |
JP4246680B2 (en) | 2009-04-02 |
US20050051234A1 (en) | 2005-03-10 |
TW200519315A (en) | 2005-06-16 |
EP1519101A2 (en) | 2005-03-30 |
KR20050030235A (en) | 2005-03-29 |
CN100415587C (en) | 2008-09-03 |
SG110186A1 (en) | 2005-04-28 |
US6966348B2 (en) | 2005-11-22 |
CN1618682A (en) | 2005-05-25 |
TWI257461B (en) | 2006-07-01 |
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