EP1257968A2

EP1257968A2 - Method for producing a marking device and apparatus for carrying out said method

Info

Publication number: EP1257968A2
Application number: EP01907435A
Authority: EP
Inventors: Wolfgang Eberhardt; Jan Morenzin; Daniel Schondelmaier
Original assignee: Forschungszentrum Juelich GmbH
Current assignee: Forschungszentrum Juelich GmbH
Priority date: 2000-02-22
Filing date: 2001-01-10
Publication date: 2002-11-20
Also published as: US20030118719A1; US20030107832A1; AU2001225147A1; ATE439648T1; DE50115032D1; WO2001063552A2; EP1266351A2; WO2001063554A3; EP1266351B1; AR027462A1; WO2001063552A3; AR027463A1; US20030091867A1; US7055758B2; WO2001063554A2; WO2001063553A2; WO2001063553A3; EP1266352A2; DE10008097A1; AU2001235407A1

Abstract

The invention relates to a method for producing a marking device (1), according to which a coding coating is applied to the surface of a support (2). The coding coating comprises at least one magnetic base layer (3), at least one magnetic coding layer (5) and a non-magnetic intermediate layer (4) placed therebetween. Said intermediate layer is composed in such a way that areas of non-parallel or anti-parallel magnetic coupling occur. The invention is characterized in that zones on the surface of the support (2) are roughened, before the coding coating is applied. The invention also relates to apparatus for carrying out said method.

Description

Description:

Method for producing a marking device and device for carrying out the method

The invention relates to a method for producing a marking device in which on the surface of a carrier a coding coating with at least one magnetic base layer and at least one magnetic coding layer and at least in regions with a non-magnetic intermediate layer arranged therebetween, which in regions has such a nature that Areas of non-parallel or anti-parallel coupling result. The invention further relates to an apparatus for performing this method.

DE 198 52 268 AI = WO 00/30029 discloses a marking device for attachment to objects such as credit cards, access cards or the like, in which a coding coating is applied to a carrier, which can be a film or a rigid base, for example , which in the simplest case consists of three layers, namely a magnetic base layer applied to the carrier, a non-magnetic intermediate layer built thereon, for example with the aid of vapor deposition, and a magnetic coding layer, in turn, applied thereon. layer exists. As materials for the base layer and the coding layer come Fe, Co or Ni and their alloys with other elements, in particular rare earths or their oxides, and for the intermediate layer z. B. Cu, Cr, Ru or Rh in question. In order to make use of the known effect of the magnetic interlayer coupling, the interlayer has a thickness in some areas such that a non-parallel, preferably antiparallel coupling occurs, while in the other areas the base layer and the coding coating couple in parallel. The intermediate layer can be limited to the areas of the non-parallel or anti-parallel coupling, since this results in a particularly clear magnetic structuring of the coding.

The above-described marking device has the advantage of a very characteristic behavior which deviates from the usual magnetic markings when external magnetic fields are applied, which is particularly evident in the fact that the non-parallel or anti-parallel coupling breaks up under the influence of a saturation magnetic field, but the original magnetization, however, after removal of the external magnetic field. The coding cannot therefore be deleted by external magnetic fields. In addition, the effect can be used, for example, to reactivate weakened or even lost magnetic codes due to longer storage times by exposing them to a saturation magnetic field. The invention has for its object to provide a method and an apparatus for producing marking devices of the type described above.

This object is achieved in that the surface of the carrier is provided with areas of different roughness prior to the application of the coding coating. The invention is based on the observation that the roughness of the support has a significant influence on the growth of the layers above and thus also on the interfaces of the intermediate layer. Appropriate settings of the roughness distribution will adjust the interfaces of the intermediate layer so that areas arise where there is a non-parallel or anti-parallel coupling of the base layer and the coding coating, and areas where this coupling does not take place. This creates the desired coding in the sense of the teaching according to DE 198 52 368 AI.

In the simplest embodiment of the method according to the invention, the surface of the carrier should be provided with at least one region that has a first roughness and at least one region that has a second roughness. This does not exclude that even districts with more than two roughness are provided in order to make the coding more complex. The method according to the invention allows the intermediate layer to be applied uniformly and over the entire surface of the base layer. However, there is also the possibility of applying the intermediate layer only in regions and also non-uniformly, provided that regions of non-parallel or anti-parallel coupling on the one hand and regions of parallel coupling on the other hand occur by using the method according to the invention.

Different roughnesses can be achieved in different ways. Thus, the surface of the carrier can be smoothed and / or roughened by means of surface processing, for example by etching, sputtering by means of ion bombardment, etc. In the latter case, the ion bombardment can be carried out locally using a focused ion beam. As an alternative to this, however, there is also the possibility that the ion bombardment takes place over a wide area and an inhomogeneous electric charge field is generated in the region of the carrier, which repels the ions in regions, so that the ions only reach the carrier where there is no repelling electrical charge or an attractive electrical charge Charge is present.

This can be done, for example, by charging the carrier itself inhomogeneously. However, an electrically chargeable base can also be electrically charged inhomogeneously and the support placed on this base, the ion bombardment being carried out on the support. A carrier film is expediently drawn off from a supply and with a continuously moving one Charge film brought together and the carrier film is charged with ion bombardment. Then they are separated again. The charge film can also be removed from a supply and then charged and taken up into a memory after the ion bombardment. Alternatively, it is provided that the charge foil is circulated through an ion bombardment station and the charge foil is charged in front of the ion bombardment station and discharged after the ion bombardment station, or the electrical charge is homogenized.

In addition or in combination with this, there is the possibility of coating the surface of the carrier in regions or providing regions with differently rough coatings. This can be done by means of printing, lithography or vapor deposition, for example sputtering.

If the districts with different roughness are generated by coating, a method is provided according to the invention in which a carrier film and a mask film are continuously withdrawn and brought together from a supply and in which the coating is applied from the side of the mask film and the Masking film is again separated from the carrier film and this is then provided with the base layer. The masking film can be provided with recesses before it is introduced into the supply. Alternatively, however, it is possible to provide the mask film with recesses, for example with the aid of a recess, only after deduction from the supply and before being brought together with the carrier film Laser. The above-described method with the aid of a mask film can also be used for ion bombardment in order to limit flat ion bombardment to areas of the wearer determined by the recesses in the mask film.

Since the layers can be made relatively thin so that the magnetic effects described occur, it is advisable to use the vapor deposition technology for the layer structure, that is to say to use thermal vapor deposition, sputtering or the like. It is expedient if the base layer and the coding layer are applied under the action of a magnetic field in order to thereby generate anisotropy in the individual layers and thus to ensure stable magnetization, especially in the areas in which no coupling takes place. A suitable protective layer, for example made of them or DLC (diamond-like carbon), can then also be applied to the coding layer, this also being done by vapor deposition.

The above-described method can be carried out with a device which is characterized by:

a) a storage for a carrier film;

b) a supply store for a mask film; c) a surface treatment station for treating the carrier film;

d) a recording memory for recording the mask film;

e) a recording memory for receiving the carrier film;

f) guiding devices and a drive for guiding the carrier film from the storage unit through the surface treatment station to the receiving memory and for bringing together carrier film and mask film in front of the surface treatment station and for separating the carrier film and mask film in front of their recording memories.

With the aid of this device, a correspondingly treated carrier film can be produced, which is then removed from this device and introduced into a device for applying the base layer, intermediate layer and coding layer, in which case corresponding coating stations are then present. However, it may be expedient to carry out the surface treatment of the carrier film and its coating in a single device by supplementing the device described above with the following device parts: a) a first coating station for applying a base layer of magnetizable material to the carrier film;

b) a second coating station for applying an intermediate layer of non-magnetizable material to the base layer;

c) a third coating station for applying a coding layer of magnetizable material to the intermediate layer;

d) a recording memory for recording the marking device;

e) guiding devices and a drive for guiding the carrier film from the storage tank through the surface treatment station and the coating stations to the receiving memory and for bringing together the carrier film and mask film in front of the surface treatment station and for separating the carrier film and mask film in front of the first coating station.

The coating stations can be provided with devices for generating a sufficiently strong magnetic field, which ensures anisotropy and thus stable magnetization, especially in the areas in which no coupling takes place. The devices are then designed so that directly above the support between the coating station and the carrier film and at the point of impact of the material on the carrier film, a sufficiently large magnetic field is generated to effect the anisotropy.

Such a device enables the marking device to be produced quickly and economically, the carrier film subsequently being able to be assembled according to the respective intended use. The surface treatment station and the coating station can also be combined to form a station with several treatment and / or coating devices. It is also possible for the surface treatment station to have a plurality of treatment devices in succession and for each treatment device to be assigned a storage memory for a mask film and a recording memory for receiving the mask film.

If the mask film initially has no recesses, a mask formation station for forming recesses in the mask film should be arranged between the storage memory for the mask film and the union of mask film and carrier film, the mask formation station preferably having a laser burning device. In this case there should be a control device for variable local control of the laser burning device.

The surface treatment station can have at least one coating device, for example in the form of a Steaming device or a printing device. Instead, a device for etching the surface of the carrier film can also be used.

The surface treatment station can also be designed as an ion bombardment station for the ion beam exposure to the carrier film, since the roughness of the surface can also be influenced with ion bombardment. There are two alternatives for the ion bombardment station. On the one hand, the station can generate a focused ion beam and a control device can be provided for the targeted control of the ion beam. Such a focused ion beam can be dispensed with, i. H. The ion bombardment can take place over a wide area if an electrically chargeable carrier film is guided through the ion bombardment station and is provided with an inhomogeneous electrical charge via a charging device. The same can also be achieved in that an electrically chargeable charge foil, which is provided with an inhomogeneous electrical charge, is passed through the ion bombardment station, and in that the guide device bring the carrier foil and charge foil together in front of the ion bombardment station. Due to the pattern of electrical charge, the ion beam is repelled where the electrical charge corresponds to the charge of the ions, so that the ion beam strikes the carrier film only in those areas where the carrier film or charge film is provided without an electrical charge or with an opposite charge.

ΛO In an embodiment of the above proposal, a storage device for the charge film in front of the ion bombardment station and a storage device after the ion bombardment station and a charging device for applying a pattern of electrical charge between the storage device and the ion bombardment station can be provided. As an alternative, however, there is also the possibility of designing the charge film endlessly and guiding it together with the carrier film through the ion bombardment station via the guide device, with a charging device in front of the ion bombardment station and a quenching device for extinguishing or homogenizing the charge between the ion bombardment station and the charging device can. In this embodiment, the charge foil is continuously discharged or provided with a homogeneous charge after it has passed through the ion bombardment station, and it is then rewritten again, and the description can be done individually.

The charge film can be guided over several deflecting rollers. However, there is also the possibility of mounting the charge film on a support roller which is assigned to the ion bombardment station and via whose roll shell the carrier film is guided past the ion bombardment station, the roll shell being selectively chargeable with electrical charge and a charging device being provided for applying a pattern of electrical charge which is equal to the charge of the ion beam, so such as an extinguishing device for homogenizing the electrical charge or for discharging. The extinguishing device and the charging device can be arranged one after the other in the direction of rotation of the support roller in the region of the roller shell which is free of the carrier film.

According to a further feature of the invention, it is provided that a further coating station is provided for applying a protective layer to the coding layer. The coating stations preferably have vapor deposition devices, since very thin layers can be achieved with them. Thermal vapor deposition or sputtering are particularly suitable for vapor deposition.

The storage store (s) and the storage storage (s) are expediently designed as supply rolls or storage rolls. Carrier rolls can be arranged in the coating stations and the surface treatment station, the carrier film being guided over the roll shell of the latter, so that the surface treatment station can act favorably on them.

The above-mentioned object is also achieved by a method which is characterized in that at least one mask is used to cover the areas where no intermediate layer is to be built up when the intermediate layer is applied. This can be done, for example, in such a way that a single mask for building up an intermediate layer is used only in the areas in which a non-parallel or anti-parallel coupling is to be produced, so that the other areas remain free of an intermediate layer. However, there is also the possibility that two layers and in this case one layer of intermediate layer without a mask and then at least one further layer of intermediate layer can be applied in regions using a mask, the two steps also being able to be carried out several times. It can also be provided that a first layer of intermediate layer is applied in regions using a first mask and then a second layer of intermediate layer is used in regions using a second mask covering the first layer, the layers being given different thicknesses. It is always important that this type of construction of the intermediate layer results in areas of non-parallel or anti-parallel coupling and areas with parallel coupling.

In order to be able to manufacture the marking device in a continuous process, it is provided according to the invention that a carrier film and a mask film are continuously withdrawn from a supply and brought together after application of the base layer, that the intermediate layer is then applied from the side of the mask film and the mask film is again guided away from the carrier film and this is then provided with the coding layer. The masking film is provided with recesses

43 see, which are molded in before or after the withdrawal from the stock, but at the latest before being brought together with the carrier film. The intermediate layer - like the base layer and coding layer - can be built up by means of vapor deposition technology, for example by means of thermal vapor deposition or sputtering. Here, too, a protective layer should be applied to the coding layer, in particular by vapor deposition.

A device for carrying out the above-described method can be designed similarly to the device that has been proposed for the regional coating of the carrier film. In a departure from this device, the mask film is guided through the second coating station so that the intermediate layer is built up on the base layer only in the areas left free by the mask film. In this case, the second coating station can have a plurality of coating devices in succession, and each coating device can be assigned a storage memory for a mask film and a recording memory for receiving the mask film.

A mask forming station for forming recesses in the mask film should be arranged between the storage reservoir for the mask film and the combination of mask film and carrier film, unless a mask film that has already been provided with recesses is used. The mask formation station can use a laser

Λ have direction and a control device for variable local control of the laser burning device.

The object can also be achieved by a method in which the intermediate layer is applied over a large area and then at least one partial layer of the intermediate layer is removed in certain areas. With this method it is possible to first apply the intermediate layer in a constant thickness, the thickness being such that a non-parallel or anti-parallel coupling is achieved after the application of the coding layer. By removing the intermediate layer locally, areas are formed which do not couple in parallel or anti-parallel after application of the coding layer, but in parallel, so that a desired signature (coding) is produced. The layer structure can, however, also take place in such a way that the thickness is dimensioned such that after the coding layer has been applied, a parallel coupling is achieved and a non-parallel or anti-parallel coupling only occurs in the areas where local removal is carried out.

The removal can take place, for example, by means of chemical etching, the areas not to be etched being covered with the aid of lithography technology. Instead, an ion sputter etching or ion etching can also be carried out, which is particularly suitable for an ongoing process using a carrier film. The latter method can be carried out by means of a device which is similar to the device described above, in which the carrier film is roughened in regions by means of ion bombardment. In contrast to this device, the ion bombardment station is now arranged between the second and third coating stations in order to remove the intermediate layer in certain areas. The ion bombardment can be restricted to individual areas using the same means as described above, for example by the action of a focused ion beam or by limiting the action of a flat ion bombardment, for example with the aid of a mask, also in foil form, or by impressing an inhomogeneous electrical one Charge in the area of the carrier. The latter can be done by means of an electrically chargeable carrier film or with the charge film already described above, which is brought together with the carrier film in the area of the ion bombardment station and ensures a correspondingly inhomogeneous electric field which repels the ion beam in some areas so that it does not become one in these areas Removal of the intermediate layer comes.

The object can also be achieved by a method in which the intermediate layer is applied galvanically, ie from a solution containing the coating material in the form of metal ions, and the application is controlled in terms of location and thickness by an inhomogeneous electric field. This is then such that the metal ions for the intermediate layer through the electrical Fields are repelled in regions and attracted in regions, in such a way that regions with a positive and regions with a negative electrical charge are generated on the surface provided with the intermediate layer. Where the charge is negative, the positively charged metal ions will accumulate to form the interlayer in areas, while being repelled in the areas of positive charge.

The methods described above intervene during the production of the coding coating. However, there is also the possibility of producing areas of different magnetic coupling only after the coding coating has been built up. Such a method is characterized in that the coding coating is locally heated to such a temperature that the magnetic coupling is changed there, in particular a non-parallel or anti-parallel coupling is converted into a parallel coupling. As a result, the intermediate layer is locally destroyed, with the result that a parallel coupling occurs where the heating has been carried out.

The method described above allows a uniformly thick intermediate layer to be produced in the production of the coding coating, which causes a non-parallel or anti-parallel coupling. It is particularly suitable for continuous coating processes. Local heating is preferably generated using a laser.

1T The aforementioned method can be carried out particularly economically by means of a device which is characterized by:

a) a storage for a carrier film;

b) a heating station for locally heating the code coating;

c) a recording memory for recording the marking device;

d) guide devices and a drive for guiding the carrier film from the storage tank through the heating station to the recording memory.

With the aid of this device, a carrier film provided with a base layer, intermediate layer and coding layer can be locally heated. In this case, it is expedient if the layer structure and the local heating are carried out in a single device, in that the device described above is supplemented by the following device parts:

a) a first coating station for applying a base layer of magnetizable material to the carrier film;

1S b) a second coating station for applying an intermediate layer of non-magnetizable material to the base layer;

d) guide devices and a drive for guiding the carrier film from the supply store through the coating stations and through the heating station to the storage device.

The device has similarities to the previously described devices, except that a heating station is arranged behind the third coating station. If the heating station has a locally heating laser, masking of the coding coating can be dispensed with.

A change in the magnetic coupling can also be achieved, for example, by means of local ion bombardment. This form of producing a signature by means of areas of non-parallel or anti-parallel coupling on the one hand and parallel coupling on the other hand is suitable for continuous manufacturing processes of the type described above. As far as the device is concerned, only the heating station in the device described last has to be replaced by an ion bombardment station which can be designed in the same way as in the devices described above, where the ion bombardment takes place elsewhere.

The above-described methods and devices for producing the marking devices according to the invention can also be combined with one another. The methods and devices for this are somewhat more complex. With the help of such combined methods and devices, however, even more complex codings can be produced, whereby random generators can ensure that such codings are unique, so that it is practically impossible to imitate them.

In the drawing, the invention is illustrated in more detail using exemplary embodiments. Show it:

1 shows a cross section through a

Marking device with representation of the magnetization structure;

Figure 2 shows a cross section through the

Marking device according to Figure 1 with magnetization in the saturation range;

FIG. 3 shows a graph which illustrates the dependence of the anti-parallel coupling strength on the layer thickness of the intermediate layer; Figure 4 shows a device for applying the intermediate layer with mask technology and

Figure 5 shows a device for applying a

Interlayer and area-wise removal with ion bombardment.

The marking device _{1 shown} in FIGS. 1 and 2 has a carrier layer 2, for example made of Si / SiO ₂ . It can have any thickness suitable for the respective application. A permanent magnetic base layer 3, for example made of cobalt with a thickness of 40 nm, is applied to the carrier layer 2. On this base layer 3, an intermediate layer 4 is applied selectively, in some areas, for example on copper with a thickness of 0.8 nm. A coding layer 5, for example made of Co, is then applied to the areas without and with intermediate layer 4 in a thickness of about 25 nm , which is coated on the top with a protective layer 6, for example a 50 nm thick Cu layer or a polymeric protective lacquer such as 10 μm PMMA.

The arrows on base layer 3 and coding layer 5 qualitatively illustrate the direction and strength of the magnetization. However, the direction of the magnetization is shown rotated by 90 ° for technical reasons. With the material combination Co / Cu / Co described here - as with most other possible material combinations - the directions of magnetization lie in the planes of base layer 3 and coding layer 5, partly in parallel and partly in anti-parallel.

In Figure 1 it can be seen that the base layer 3 is magnetized evenly over the surface. The coding layer 5 is also magnetized, even though the saturation magnetization is smaller than in the base layer 3 due to the smaller thickness. In the regions where there is no intermediate layer 4, the magnetization in the coding layer 5 is parallel and rectified. Where an intermediate layer 4 is present, an anti-parallel coupling of the magnetization is effected, i.e. the magnetization of base layer 3 and coding layer 5 is directed in the opposite direction and is therefore antiparallel. Above the marking device 1, the strength of the resulting magnetic field is shown in a box by arrows and the corresponding readout signal is shown in a curve. It can be seen that the magnetization of the base layer 3 is increased by the coding layer 5 in the regions where there is no intermediate layer 4. Where an intermediate layer 4 is applied, however, the resulting magnetic field of the entire layer arrangement is weakened due to anti-parallel coupling. This creates a coding structure with very different resulting field strengths on the surface, which can be detected and analyzed with the aid of suitable sensors.

11 FIG. 2 shows the state of the marking device 1 in an external magnetic field in the saturation range. It can be seen that the anti-parallel coupling has broken down, so that now those regions of the coding layer 5 which are separated from the base layer 3 by an intermediate layer 4, like the adjacent regions are magnetized in parallel and in the same direction without separation by an intermediate layer 4. This means that all areas are magnetized evenly, ie the variation of the magnetic signal disappears. Coding is no longer available. After removal of the external magnetic field and thus in remanence, however, the state shown in FIG. 1, with parallel and anti-parallel coupling, is spontaneously restored. The marking device 1 can thus be differentiated from other marking devices which are produced using conventional magnetization techniques and in which the coding would be deleted by applying an external magnetic field.

3, the thickness of the intermediate layer 4 is plotted on the abscissa and the antiferromagnetic coupling strength is plotted on the ordinate, for an example in which the base layer 3 and coding layer 5 consist of cobalt and each have a thickness of 40 nm. It can be seen that the strength of the antiferromagnetic coupling varies with the thickness of the intermediate layer 4. The highest coupling strength is reached at approx. 0.8 nm. Between the extremes there are

1 rich, in which no anti-parallel coupling occurs, but a coupling by less than 180 °, for example by 90 ° up to a parallel ferromagnetic coupling. These areas can also be used to obtain a desired magnetization and thus coding structure with high complexity, so that not only then

As in the example according to FIG. 1, there are two different total magnetizations, but a plurality or a large number of different magnetizations.

A marking device with the layer structure according to FIGS. 1 and 2 can be produced with the aid of a device 11 which - which is not shown in more detail here

- Is arranged in a housing under high vacuum. The device 11 has three steaming stations 12, 13, 14, each steaming station 12, 13, 14 having a support roller 15, 16, 17 which is flanked in the lower region by deflection rollers 18, 19 or 20, 21 or 22, 23, respectively are. A steaming device 24, 25 is arranged above each of the first and second support rollers 15, 16. The third support roller 17 is assigned two vapor deposition devices 26, 27.

In front of the first steaming station 12 there is a supply roll 28 on which a carrier film 29 is rolled up. A further supply roll 30 is arranged between the first and second vapor deposition stations 12, 13, on which a mask film 31 is rolled up. A laser device 33 is assigned to the supply roll 30, with the aid of which

2 Mungen - designated 34 by way of example - can be burned out of the mask film 31.

During coating, the carrier film 29 is pulled off its supply rolls 28 and rotates around the first deflection roll 18 and is carried along by the support roller 15. It passes through the first coating station 12, where a base layer 32 is evaporated. The carrier film 29 then passes under the deflection roller 19 and merges with the mask film 32 in front of the deflection roller 20. Both are carried along by the support roller 16, the mask film 31 resting on the outside on the carrier film 29. Before that, a pattern of recesses - designated 34 by way of example - is burned into the mask film 31 with the aid of the laser device 33. By appropriately controlling the laser beam generated by the laser device 33 - there may also be several - for example with the aid of a random generator, a constantly changing pattern can be generated.

Mask film 31 and carrier film 29 are guided past the second vapor deposition device 25 in the upper region of the support roller 16, the vapor deposition device 25 sputtering with the material provided for an intermediate layer 35. Due to the partial covering by the masking film 31, the material reaches the base layer 32 only in the area of the recess 34 in the masking film 31, so that the intermediate layer 35 is formed only there.

2.5 After the deflection roller 21 rotates, the mask foil 31 is guided away from the carrier foil 29 upwards and rolled onto a storage roller 36. The carrier film 29 now has a pattern of the base layer 30 and the intermediate layer 35 corresponding to the recesses 34 in the mask film 31 on the upper side - which is not shown in more detail here.

The carrier film 29 runs horizontally to the next deflecting roller 22 and then rotates around the support roller 17. With the aid of the two vapor deposition devices 26, 27, the base layer 30 and the intermediate layer 35 are made with a coding layer 37 made of ferromagnetic material and a protective layer 38 z. B. from DLC or SiC. In the areas in which there is no intermediate layer 35, the base layer 30 and the coding layer 37 couple in parallel. Where the intermediate layer 35 is present, the coupling is anti-parallel, because the intermediate layer 35 in the vapor deposition station 13 has such a thickness that the anti-parallel coupling occurs.

Subsequently, the carrier film 29 wrapped with the coding coating of the base layer 30, intermediate layer 35, coding layer 37 and protective layer 38 still wraps around the deflection roller 23 and is rolled up onto a storage roller 39. It can then be assembled according to its respective use.

2.6 FIG. 5 shows a further device 41 for producing a marking device according to FIGS. 1 and 2. It is also surrounded by a housing that is under high vacuum. It has a first steaming station 42, an ion bombardment station 43 and a second steaming station 44 in the order of passage. The stations 42, 43, 44 have support rollers 45, 46, 47, each of which has two deflection rollers 48, 49 and 50 in the lower region , 51 and 52, 53 are flanked.

The first steaming station 42 is provided with two steaming devices 54, 55 arranged above the support roller 45. The second steaming station 44 likewise has two steaming devices 56, 57 arranged next to one another in the upper region. An ion bombardment device 58 is arranged in the ion bombardment station 43 above the support roller 46. Below the support roller 46 and between the associated deflection rollers 50, 51, a charge distribution device 59 is arranged on the left-hand side, with which areas with positive and / or areas with negative electrical charge can be generated on the support roller 46. This can be done, for example, according to the principle of the laser printer in such a way that an initially homogeneously applied charge is partially removed by local exposure of the surface of the support roller 46. To the right of the charge distribution device 59 there is an extinguishing device 60 which either completely discharges the surface of the support roller 46 or provides it with a homogeneous electrical charge.

1 A carrier film 62 is rolled up on a supply roll 61. In operation, the carrier film 62 is pulled off the supply roll 61 and rotates around the first deflection roll 48 and reaches the circumference of the first support roll 45, where it is carried by it. In doing so, it runs past the first vapor deposition device 54 and is there provided with a base layer 63 over the whole area by means of sputtering. An intermediate layer 64 made of non-magnetic material is sputtered over the entire surface of the base layer 63 by means of the second vapor deposition device 55. The carrier film 62 thus equipped runs around the subsequent deflection rollers 49, 50 and then runs onto the jacket of the second support roller 46 and wraps around it. In doing so, it runs past the ion bombardment device 58, which bombardes the intermediate layer 64 across the entire width. Due to the charge distribution on the surface of the support roller 46, which was previously generated by the charge distribution device 59, areas have been created on the surface of the intermediate layer 64 with potential for repelling and / or attracting the ions from the ion bombardment device 58. The intermediate layer 64 is removed in the regions with an attractive potential, so that only parts of the intermediate layer 64 remain. The support roller 46 is homogenized in front of the extinguishing device 60, that is, either completely discharged or provided with a homogeneous charge, so that the charge distribution device 59 can repeatedly charge a new distribution pattern onto the support roller 46.

2.S After the deflection rollers 51, 52 have been rotated, the carrier film 62 reaches the second vapor deposition station 44, again being guided over the circumference of the support roller 47. There, the pattern of the base layer 63 and the intermediate layer 64 is provided over the entire surface with the aid of the vaporization device 56 with a coding layer 65 made of ferromagnetic material and then the coding layer 65 is provided on the outside with a protective layer 66 by means of the further vaporization device 57. A parallel coupling of the base layer 63 and the coding layer 65 occurs in the regions without an intermediate layer 64, while an anti-parallel coupling occurs where an intermediate layer 64 is present, since the intermediate layer 64 has been applied in the first vapor deposition station 42 in a thickness, which causes such a coupling.

After passing through the second evaporation station 44, the carrier film 61 provided with the coding coating runs around the last deflection roller 53 and is then taken up by a storage roller 67. It can then be separated.

2.9

Claims

Expectations :

Method for producing a marking device and device for carrying out the method

Method for producing a marking device (1), in which a coding coating with at least one magnetic base layer (3) and at least one magnetic coding layer (5) and with a non-magnetic intermediate layer (4) arranged between them is applied to the surface of a carrier (2) which has such a nature that areas of non-parallel or anti-parallel coupling result, characterized in that the surface of the carrier (2) is provided with areas of different roughness prior to the application of the coding coating.

Method according to Claim 1, characterized in that the surface of the carrier (2) is provided with at least one area which has a first roughness and at least one area which has a second roughness.

A method according to claim 1 or 2, characterized in that the intermediate layer (4) is applied evenly.

4. The method according to claim 1 or 2, characterized in that the intermediate layer (4) is applied over the entire surface of the base layer (3).

5. The method according to any one of claims 1 to 4, characterized in that the surface of the carrier (2) is coated in regions using the lithography technique.

6. The method according to any one of claims 1 to 4, characterized in that the surface of the carrier (2) is smoothed in regions and / or roughened by means of surface processing.

7. The method according to claim 6, characterized in that the surface of the carrier (2) is roughened by means of etching and / or ion bombardment.

8. The method according to claim 7, characterized in that the ion bombardment is carried out with the aid of a focused ion beam.

9. The method according to claim 7, characterized in that the ion bombardment takes place over a wide area and an inhomogeneous electric charge field is generated in the region of the carrier (2).

W

10. The method according to claim 9, characterized in that an electrically chargeable carrier is charged inhomogeneously before the ion bombardment.

11. The method according to claim 9, characterized in that an electrically chargeable base is electrically charged inhomogeneously and that the carrier is placed on this base and the ion bombardment is carried out on the carrier.

12. The method according to claim 11, characterized in that a carrier film is withdrawn from a supply and brought together with a continuously moving charge film and the carrier film is subjected to ion bombardment.

13. The method according to claim 12, characterized in that the carrier film and the charge film are separated after the ion bombardment.

14. The method according to claim 12 or 13, characterized in that the charge film is removed from a supply and then charged and is taken up after the ion bombardment in a memory.

15. The method according to claim 12 or 13, characterized in that the charge film is circulated through an ion bombardment station and the charge film is charged in front of the ion bombardment station and after 1st discharged from the ion bombardment station or the electrical charge is homogenized.

16. The method according to any one of claims 1 to 4, characterized in that the surface of the carrier (2) is coated in regions or is provided with differently rough coatings in regions.

17. The method according to claim 16, characterized in that the surface of the carrier (2) is printed.

18. The method according to claim 16, characterized in that the surface of the carrier (2) is vaporized in regions.

19. The method according to claim 6 or one of claims 16 to 18, characterized in that a carrier film and a mask film are continuously withdrawn from a supply and brought together and that the coating or ion bombardment is then carried out from the side of the mask film and the masking film is separated again from the carrier film and this is then provided with the base layer.

20. The method according to claim 19, characterized in that the masking film is provided with recesses after deduction from the supply and before merging with the carrier film.

I

21. The method according to any one of claims 1 to 20, characterized in that the base layer (3), intermediate layer (4) and coding layer (5) are evaporated.

22. The method according to any one of claims 1 to 21, characterized in that the application of the base layer (3) and the coding layer (5) takes place under the action of a magnetic field.

23. The method according to any one of claims 1 to 22, characterized in that a protective layer is applied to the coding layer, in particular by vapor deposition.

24. Device for carrying out the method according to one of claims 1 to 23, characterized by:

a) a storage for a carrier film;

b) a supply store for a mask film;

c) a surface treatment station for treating the carrier film;

d) a recording memory for recording the mask film;

Vt e) a recording memory for receiving the carrier film.

25. The device according to claim 24, characterized by

d) a recording memory for recording the marking device; ι $ e) guiding devices and a drive for guiding the carrier film from the storage tank through the surface treatment station and the coating stations to the receiving memory and for bringing together the carrier film and mask film in front of the surface treatment station and for separating the carrier film and mask film in front of the first coating station.

26. The apparatus of claim 24 or 25, characterized in that the surface treatment station has a plurality of treatment devices in a row and each treatment device is assigned a storage memory for a mask film and a recording memory for receiving the mask film.

27. The device according to any one of claims 24 to 26, characterized in that a mask forming station for forming recesses in the masking film is arranged between the storage for the masking film and the combination of masking film and carrier film.

28. The apparatus according to claim 27, characterized in that the mask formation station has a laser burning device.

29. The device according to claim 28, characterized in that the mask formation station a Steuerein- 6th Direction for variable local control of the laser burning device.

30. Device according to one of claims 24 to 29, characterized in that the surface treatment station has at least one coating device.

31. The device according to claim 30, characterized in that the coating device is designed as a vapor deposition device.

32. Apparatus according to claim 31, characterized in that the coating device is designed as a printing device.

33. Apparatus according to claim 22 to 29, characterized in that the surface treatment station has a device for etching the surface of the carrier film.

34. Device according to claims 24 to 32, characterized in that the surface treatment station is designed as an ion bombardment station.

35. Device for carrying out the method according to claim 7, characterized by:

a) a storage for a carrier film; l- b) an ion bombardment station for the ion beam exposure to the carrier film;

c) a recording memory for the carrier film;

d) guiding devices and a drive for guiding the carrier film from the supply store through the ion bombardment station to the receiving store.

36. Device according to claim 35, characterized by:

d) a recording memory for the marking device;

e) guide devices and a drive for guiding the carrier film from the storage device through the ion bombardment station and the coating stations to the recording memory.

37. Apparatus according to claim 35 or 36, characterized in that the ion bombardment station generates a focused ion beam and a control device is provided for the targeted control of the ion beam.

38. Apparatus according to claim 35 or 36, characterized in that an electrically chargeable carrier film is guided through the ion bombardment station and is provided with an inhomogeneous electrical charge via a charging device.

39. Apparatus according to claim 35 or 36, characterized in that an electrically chargeable charge film is guided through the ion bombardment station and is provided with an inhomogeneous electrical charge via a charging device, and that the guide devices bring together the carrier film and charge film in front of the ion bombardment station.

40. Apparatus according to claim 39, characterized in that a storage memory for the charge film in front of the ion bombardment station and a storage memory after the ion bombardment station and a charging device for inhomogeneous charging of the charge are provided between the storage tank and the ion bombardment station.

41. Apparatus according to claim 39, characterized in that the charge film is endless and is guided via the guide devices together with the carrier film through the ion bombardment station and that the charging device is seen in the direction of travel of the carrier film in front of the ion bombardment station and an extinguishing device for discharging or homogenizing the electrical charge are provided between the ion bombardment station and the charging device.

42. Apparatus according to claim 41, characterized in that the charge film is clamped onto a support roller which is assigned to the ion bombardment station.

43. Apparatus according to claim 35 or 36, characterized in that the ion bombardment station is assigned a support roller, over the roller jacket of which the carrier film is guided past the ion bombardment station, and that the roller jacket can be charged with electric charge, a charging device being provided for charging the roll jacket , which is equal to the charge of the ion beam, and an extinguishing device for discharging or homogenizing the roll shell are provided. -σ

44. Apparatus according to claim 43, characterized in that the roller shell has a coating which can be charged with electric charge.

45. Device according to one of claims 42 to 44, characterized in that the extinguishing device and the charging device are arranged one after the other in the direction of rotation of the support roller in the region of the roller shell which is free of the carrier film.

46. Device according to one of claims 25 to 45, characterized in that a further coating station is provided for applying a protective layer on the coding layer.

47. Device according to one of claims 25 to 46, characterized in that the coating stations have vapor deposition devices.

48. Device according to one of claims 24 to 47, characterized in that the one or more storage stores and the one or more storage stores are designed as supply rolls or storage rolls.

49. Device according to one of claims 25 to 48, characterized in that the surface treatment station or the ion bombardment station and the coating stations have carrier rollers, over the roller jacket of which the carrier film is guided.

<M

50. Method for producing a marking device, in which a coding coating with at least one magnetic base layer (30) and at least one magnetic coding layer (37) and with a non-magnetic intermediate layer (35) arranged between them is applied to the surface of a carrier (29) which is of such a nature that regions of non-parallel or anti-parallel coupling result, characterized in that at least one mask (32) is used when covering the intermediate layer (35) to cover the regions where no intermediate layer is to be built up.

51. The method according to claim 50, characterized in that a single mask (32) for building up the intermediate layer (35) is used only in those areas in which a non-parallel or anti-parallel coupling is to be produced.

52. The method according to claim 51, characterized in that two layers and thereby a layer without a mask and a layer are partially applied using a mask on the carrier.

53. The method according to claim 50, characterized in that to build up the intermediate layer a first layer in some areas using a first mask and then a second layer in some areas using A second mask covering the first layer can be applied, the thickness of one of the two layers being such that there is no non-parallel or anti-parallel coupling.

54. The method according to any one of claims 50 to 53, characterized in that a carrier film (30) and at least one mask film (32) are continuously withdrawn from a supply (28, 31) and brought together after application of the base layer (30), and that the intermediate layer (35) is then applied from the side of the masking film (32) and the masking film (s) (32) is again separated from the carrier film (29) and this is then provided with the coding layer (37).

55. The method according to claim 54, characterized in that the mask film (32) after deduction from the supply (31) and before being brought together with the carrier film (29) is provided with recesses (34).

56. The method according to any one of claims 50 to 55, characterized in that the base layer (30), the intermediate layer (35) and the coding layer (37) is applied by means of vapor deposition.

57. The method according to any one of claims 50 to 56, characterized in that the application of the base layer (30) and the coding layer (37) takes place under the action of a magnetic field.

M

58. The method according to any one of claims 50 to 57, characterized in that a protective layer is applied to the coding layer, in particular by vapor deposition.

59. Device for carrying out the method according to one of claims 50 to 58, characterized by:

a) a storage reservoir (28) for a carrier film (29);

b) a first coating station (12) for applying a base layer (32) made of magnetizable material;

c) a supply store (30) for a mask film (31);

d) a second coating station (13) for applying an intermediate layer (35) made of non-magnetizable material to the base layer (32) in the areas left free by the masking film (31);

e) a recording memory (36) for receiving the mask film (31); t \ -h f) a third coating station (14) for applying a coding layer (37) made of magnetizable material to the pattern of the base layer (32) and intermediate layer (35);

g) a recording memory (39) for receiving the marking device;

h) guide devices (15 to 23) and a drive for guiding the carrier film (29) from the supply store (28) through the coating stations (12, 13, 14) to the receiving memory (39) and for bringing together the carrier film (29) and mask film (n) (31) between the first and second coating stations (12, 13) and for separating the carrier film (29) and masking film (31) between the second and third coating stations (13, 14).

60. Apparatus according to claim 59, characterized in that the second coating station has a plurality of coating devices in succession and each coating device is assigned a storage memory for a mask film and a recording memory for receiving the mask film.

61. Apparatus according to claim 59 or 60, characterized in that between the storage reservoir (30) for the mask film (31) and the combination of mask film (31) and carrier film (29) a mask image

H-ζ tion station (33) for forming recesses (34) in the masking film (31) is arranged.

62. Apparatus according to claim 61, characterized in that the mask formation station has a laser burning device (33).

63. Apparatus according to claim 62, characterized in that the mask formation station (33) has a control device for variable local control of the laser burning device.

64. Device according to one of claims 59 to 63, characterized in that a further coating station (27) for applying a protective layer (38) to the intermediate layer (35) is provided.

65. Device according to one of claims 59 to 64, characterized in that the coating stations (12, 13, 14) have vapor deposition devices.

66. Device according to one of claims 59 to 65, characterized in that the storage and receiving storage are designed as supply rolls (28, 31) or storage rolls (36, 39).

67. Device according to one of claims 59 to 66, characterized in that the coating stations (12, 13) have carrier rollers (15, 16, 17),

6 the carrier film (29) is guided over the roll shell.

68. Method for producing a marking device, in which a coding coating with at least one magnetic base layer (63) and at least one magnetic coding layer (65) and with a non-magnetic intermediate layer (64) arranged therebetween is applied to the surface of a carrier (62) which is of such a nature that areas of non-parallel or anti-parallel coupling result, characterized in that the intermediate layer (64) is initially applied over a large area and then at least a partial layer of the intermediate layer (64) is removed in certain areas.

69. The method according to claim 68, characterized in that the intermediate layer (64) is applied in a constant thickness.

70. The method according to claim 68 or 69, characterized in that the removal takes place by means of etching.

71. The method according to any one of claims 68 to 70, characterized in that a lithographic method is used for the removal.

4

72. The method according to claim 68 or 69, characterized in that the removal takes place by means of ion bombardment (41).

73. The method according to claim 72, characterized in that the ion bombardment is carried out with the aid of a focused ion beam.

74. The method according to claim 72, characterized in that the ion bombardment (58) takes place over a wide area and an inhomogeneous electric charge field is generated in the region of the carrier (62).

75. The method according to claim 74, characterized in that an electrically chargeable carrier is inhomogeneously charged electrically before the ion bombardment.

76. The method according to claim 74, characterized in that an electrically chargeable base (46) is charged inhomogeneously and that the carrier (62) is placed on this base (46) and the ion bombardment (58) takes place on the carrier (62).

77. The method according to claim 76, characterized in that a carrier film is withdrawn from a supply and brought together with a continuously moving charge film as a base and both are subjected to ion bombardment. F-8

78. The method according to claim 77, characterized in that the carrier film and the charge film are separated after the ion bombardment.

79. The method according to claim 77 or 78, characterized in that the charge film is withdrawn from a supply and then electrically charged and is taken up in a memory after the ion bombardment.

80. The method according to claim 77 or 78, characterized in that the charge film is circulated through an ion bombardment station and that the charge film is electrically charged before the ion bombardment station and discharged after the ion bombardment station or its electrical charge is homogenized.

81. The method according to claim 73 or 74, characterized in that a carrier film and a mask film are continuously withdrawn and brought together from a respective supply and that the ion bombardment then takes place from the side of the mask film and the mask film is again separated from the carrier film and this then with the coding layer is provided.

82. The method according to claim 81, characterized in that the masking film is provided with recesses after deduction from the supply and before being brought together with the carrier film.

W

83. The method according to any one of claims 68 to 82, characterized in that the base layer (63), intermediate layer (64) and coding layer (65) are evaporated.

84. The method according to any one of claims 68 to 83, characterized in that the application of the base layer (63) and the coding layer (65) takes place under the action of a magnetic field.

85. The method according to any one of claims 68 to 84, characterized in that a protective layer (66) is applied to the coding layer (65), in particular by vapor deposition.

86. Device for carrying out the method according to one of claims 68 to 85, characterized by:

a) a storage memory (60) for a carrier film (61);

b) a first coating station (54) for applying a base layer (63) made of magnetizable material;

c) a second coating station (5) for applying an intermediate layer (64) is not magnetizable material on the base layer (63);

d) an ion bombardment station (43) for the partial ion beam exposure of the intermediate layer (64);

e) a third coating station (44) for applying a coding layer (65) made of magnetizable material to the combination of intermediate layer (64) and the base layer (63);

f) a recording memory (67) for the marking device;

g) guide devices (45 to 53) and a drive for guiding the carrier film (62) from the storage unit (61) through the first and second coating stations (54, 55), the ion bombardment station (43) and the third coating station (44) to the storage memory (67).

17. The apparatus according to claim 86, characterized in that the ion bombardment station generates a focused ion beam and a control device is provided for the targeted control of the ion beam.

88. Apparatus according to claim 86 or 87, characterized in that an electrically chargeable carrier film is guided through the ion bombardment station and is provided with an inhomogeneous electrical charge via a charging device.

89. Apparatus according to claim 86 or 87, characterized in that an electrically chargeable charge film is guided through the ion bombardment station and is provided with an inhomogeneous electrical charge, and that the guiding devices bring together the carrier film and charge film in front of the ion bombardment station.

90. Apparatus according to claim 89, characterized in that a supply store for the charge film in front of the ion bombardment station and a storage store after the ion bombardment station and a charging device for inhomogeneous charging of the charge film between the supply store and ion bombardment station are provided.

91. Apparatus according to claim 89, characterized in that the charge film is endless and is guided via the guide devices together with the carrier film through the ion bombardment station and that an Au charging device seen in the running direction of the carrier film in front of the ion bombardment station and an extinguishing device for unloading or homo- Genization of the electrical charge are provided after the ion bombardment station.

92. Apparatus according to claim 91, characterized in that the charge film is clamped onto a support roller which is assigned to the ion bombardment station.

93. Apparatus according to claim 86 or 87, characterized in that a support roller (46) is assigned to the ion bombardment station (43), over the roller shell of which the carrier film (61) is guided past the ion bombardment station (43), and in that the roller shell is charged with electricity is chargeable, a charging device (59) for charging the roll jacket being provided, which is equal to the charge of the ion beam, and an extinguishing device (60) for discharging or homogenizing the roll jacket.

94. Apparatus according to claim 93, characterized in that the erasing device (59) and writing device (58) are arranged one after the other in the direction of rotation of the support roller (46) in the regions of the roller shell which is free of the carrier film (61).

95. Apparatus according to claim 93 or 94, characterized in that the roller shell has a coating which can be charged with electric charge.

96. Apparatus according to claim 86 or 87, characterized in that a mask film is guided through the ion bombardment station and that the guide device bring together the carrier film and mask film in front of the ion bombardment station in such a way that the ion bombardment takes place from the side of the mask film, and in that the guiding devices separate the carrier film and mask film after the ion bombardment station.

97. Apparatus according to claim 96, characterized in that a mask formation station for forming recesses in the masking film is arranged between a supply store for the masking film and the combination of masking film and carrier film.

98. Apparatus according to claim 97, characterized in that the mask formation station has a laser burning device.

99. Apparatus according to claim 98, characterized in that the mask formation station has a control device for variable location control of the laser burning device.

100. Device according to one of claims 86 to 99, characterized in that a further coating station (57) for applying a protective

5 ^ Layer (66) is provided on the coding layer (65).

101. Device according to one of claims 86 to 100, characterized in that the coating station (42, 44) have vapor deposition devices (54, 55).

102. Device according to one of claims 86 to 101, characterized in that the supply store is designed as a supply roll (60) and the receiving store is designed as a storage roll (66).

103. Device according to one of claims 86 to 102, characterized in that the coating stations (42, 44) and the ion bombardment station (43) have carrier rollers (45, 46, 47), over the roller jacket of which the carrier film (61) is guided.

104 or antiparallel coupling, characterized in that the intermediate layer is applied galvanically

Sζ and the job is controlled in terms of location and thickness by an inhomogeneous electric field.

105. The method according to claim 104, characterized in that areas with positive and / or areas with negative electrical charge are generated during the galvanic application on the surface to be provided with the intermediate layer.

106. A method for producing a marking device, in which a coding coating with at least one magnetic base layer and at least one magnetic coding layer and with an interposed non-magnetic intermediate layer is applied to the surface of a carrier, which has such a nature that areas do not parallel or anti-parallel coupling, characterized in that the coding coating is locally heated to such a temperature after its production that the magnetic coupling is changed there.

107. The method according to claim 106, characterized in that the coding coating is locally heated to such a temperature that a non-parallel or anti-parallel coupling is converted into a parallel coupling.

108. The method according to claim 106 or 107, characterized in that a uniformly thick intermediate layer is produced in the production of the coding coating, which causes a non-parallel or anti-parallel coupling.

109. The method according to any one of claims 106 to 108, characterized in that the base layer, intermediate layer and coding layer are evaporated.

110. The method according to any one of claims 106 to 109, characterized in that the application of the base layer and the coding layer takes place under the action of a magnetic field.

111. The method according to any one of claims 106 to 110, characterized in that a protective layer is applied to the intermediate layer, in particular by vapor deposition.

112. Device for carrying out the method according to one of claims 106 to 111, characterized by:

a) a storage for a carrier film;

b) a heating station for locally heating the code coating;

5? - c) a recording memory for recording the marking device;

Device according to claim 112, characterized by:

114. Device according to claim 112 or 113, characterized in that the heating station has a laser.

115. Apparatus according to claim 113 or 114, characterized in that a further coating station is provided for applying a protective layer to the coding layer.

116. Device according to one of claims 113 to 115, characterized in that the coating stations have vapor deposition devices.

117. Device according to one of claims 112 to 116, characterized in that the supply store is designed as a supply roll and the receiving store as a storage roll.

118. Device according to one of claims 113 to 117, characterized in that the coating stations and the heating station have carrier rollers, over the roller jacket of which the carrier film is guided.

119. Method for producing a marking device, in which a coding coating with at least one magnetic base layer and at least one magnetic coding layer and with a non-magnetic intermediate layer arranged between them is provided on the surface of a carrier is applied, which has such a nature that areas of non-parallel or anti-parallel coupling result, characterized in that the coding coating is subjected to ion bombardment locally after its production in such a way that the magnetic coupling is changed there.

120. The method according to claim 119, characterized in that the coding coating is subjected to ion bombardment locally after its production in such a way that a non-parallel or anti-parallel coupling is converted there into a parallel coupling.

121. The method according to claim 119 or 120, characterized in that a uniformly thick intermediate layer is produced during production, which produces a non-parallel or anti-parallel coupling.

122. The method according to any one of claims 119 to 121, characterized in that the ion bombardment is carried out with the aid of a focused ion beam.

123. The method according to any one of claims 119 to 121, characterized in that the ion bombardment takes place over a wide area and an inhomogeneous electric charge field is generated in the region of the carrier.

124. The method according to claim 123, characterized in that an electrically chargeable carrier is inhomogeneously charged electrically before the ion bombardment.

125. The method according to claim 123, characterized in that an electrically chargeable base is inhomogeneously electrically charged and that the carrier is placed on this base and the ion bombardment is carried out on the combination of base and carrier.

126. The method according to claim 125, characterized in that a carrier film is withdrawn from a supply and, after coating, is brought together as a base with a continuously moving charge film and both are subjected to ion bombardment.

127. The method according to claim 126, characterized in that the carrier film and the charge film are separated after the ion bombardment.

128. The method according to claim 126 or 127, characterized in that the charge film is withdrawn from a supply and then charged and, after ion bombardment, is taken up in a memory.

129. The method according to claim 126 or 127, characterized in that a charge film as a base is circulated through an ion bombardment station and the charge foil is charged in front of the ion bombardment station and discharged after the ion bombardment station or the electrical charge is homogenized.

130. The method according to any one of claims 119 to 121, characterized in that a carrier film and a mask film are continuously withdrawn from a supply and brought together and that the ion bombardment then takes place from the side of the mask film and the mask film is separated again from the carrier film.

131. Apparatus according to claim 130, characterized in that the masking film is provided with recesses after deduction from the supply and before being brought together with the carrier film.

132. The method according to any one of claims 119 to 131, characterized in that the base layer, intermediate layer and coding layer are evaporated.

133. The method according to any one of claims 119 to 132, characterized in that the application of the base layer and the coding layer takes place under the action of a magnetic field.

134. The method according to any one of claims 119 to 133, characterized in that on the intermediate layer a protective layer is applied in particular by vapor deposition.

135. Device for carrying out the method according to one of claims 119 to 134, characterized by:

a) a storage for a carrier film;

b) an ion bombardment station for the ion beam exposure of the coding coating;

c) a recording memory for the marking device;

136. Device for carrying out the method according to claim 135, characterized by:

6} c) a third coating station for applying a coding layer of magnetizable material to the intermediate layer;

d) a guiding device and a drive for guiding the carrier film from the supply store through the coating stations and the ion bombardment station to the receiving store.

137. Apparatus according to claim 135 or 136, characterized in that the ion bombardment station generates a focused ion beam and a control device is provided for the targeted control of the ion beam.

138. Device according to one of claims 135 to 137, characterized in that an electrically chargeable carrier film is guided through the ion bombardment station and is provided with an inhomogeneous electrical charge in a charging device.

139. Device according to one of claims 135 or 137, characterized in that an electrically chargeable charge film is guided through the ion bombardment station, which is provided with an inhomogeneous electrical charge, and that the guide devices bring together the carrier film and charge film in front of the ion bombardment station.

140. Apparatus according to claim 139, characterized in that a supply store for the charge film in front of the ion bombardment station and a recording store after the ion bombardment station and a charging device for inhomogeneous charging of the charge film between the supply store and ion bombardment station are provided.

141. Apparatus according to claim 139, characterized in that the charge film is endless and is guided via the guide devices together with the carrier film through the ion bombardment station and that the charging device seen in the direction of travel of the carrier film in front of the ion bombardment station and an extinguishing device for discharging or homogenizing the electrical Charge between the ion bombardment station and charger are provided.

142. Apparatus according to claim 141, characterized in that the charge film is stretched onto a support roller which is assigned to the ion bombardment station.

143. Device according to one of claims 135 to 136, characterized in that the ion bombardment station is assigned a back-up roll, over the roll shell of which the carrier film is guided past the ion bombardment station, and in that the roll shell electric charge is chargeable, wherein a charging device is provided for applying a pattern of electric charge which is equal to the charge of the ion beam, and an extinguishing device is provided for homogenizing the electric charge or for discharging.

144. Apparatus according to claim 143, characterized in that the erasing device and writing device are arranged one after the other in the direction of rotation of the support roller in the region of the roller shell which is free of the carrier film.

145. Apparatus according to claim 143 or 144, characterized in that the roller shell has a coating which can be charged with electrical charge.

146. Device according to one of claims 135 to 137, characterized in that a mask film is guided through the ion bombardment station and that the guiding device brings together the carrier film and mask film in front of the ion bombardment station in such a way that the ion bombardment takes place from the side of the mask film, and that the guiding devices separate the carrier film and mask film after the ion bombardment station.

147. Apparatus according to claim 146, characterized in that between a supply store for the mask film and the combination of mask film and Carrier film a mask formation station for forming recesses is arranged in the mask film.

148. Apparatus according to claim 147, characterized in that the mask formation station has a laser burning device.

149. Apparatus according to claim 148, characterized in that the mask formation station has a control device for variable location control of the laser burning device.

150. Device according to one of claims 135 to 149, characterized in that a further coating station is provided for applying a protective layer to the coding layer.

151. Device according to one of claims 135 to 150, characterized in that the coating stations have vapor deposition devices.

152. Device according to one of claims 135 to 151, characterized in that the supply store is designed as a supply roll and the receiving store as a storage roll.

153. Device according to one of claims 135 to 152, characterized in that the coating stations and the ion bombardment station carrier rollers

6 have, over the roll shell of the carrier film is guided.

6