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EP1168006A2 - Method for bonding a plurality of optical elements to a base - Google Patents

Method for bonding a plurality of optical elements to a base Download PDF

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Publication number
EP1168006A2
EP1168006A2 EP01112204A EP01112204A EP1168006A2 EP 1168006 A2 EP1168006 A2 EP 1168006A2 EP 01112204 A EP01112204 A EP 01112204A EP 01112204 A EP01112204 A EP 01112204A EP 1168006 A2 EP1168006 A2 EP 1168006A2
Authority
EP
European Patent Office
Prior art keywords
base body
mirror
optical elements
elements
supporting structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01112204A
Other languages
German (de)
French (fr)
Other versions
EP1168006B1 (en
EP1168006A3 (en
Inventor
Frank Dipl.-Ing. Melzer
Ulrich Dipl.-Ing. Bingel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of EP1168006A2 publication Critical patent/EP1168006A2/en
Publication of EP1168006A3 publication Critical patent/EP1168006A3/en
Application granted granted Critical
Publication of EP1168006B1 publication Critical patent/EP1168006B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K28/00—Welding or cutting not covered by any of the preceding groups, e.g. electrolytic welding
    • B23K28/006—Welding metals by means of an electrolyte
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Definitions

  • the invention relates to a method for connecting a plurality of optical elements with a base body, in particular for making a faceted mirror.
  • the invention relates also a facet mirror produced by the process.
  • a method is known from US Pat. No. 4,277,141, according to which a Multifaceted mirror is manufactured in several steps, namely, in a first step, individual mirrors are created, the individual mirrors are then fixed and aligned and connected to a support body via an adhesive.
  • a facet mirror is described in US Pat. No. 4,195,913 a large number of individual mirrors on a spherical support structure is glued or screwed on.
  • the object of the present invention is a method for connecting a variety of optical elements of the to create the type mentioned, the variety of optical Elements with high accuracy, especially with regard to Position and angularity on which the base body is arranged can so that e.g. Jet mixtures and field images with high precision can be done.
  • the present invention is also based on the object a faceted mirror with a variety of individual optical To form mirror elements of a homogeneous lighting distribution or homogeneous illumination and a very exact Beam mixing and field mapping generated.
  • the object is characterized by Part of claim 1 mentioned method solved.
  • the method according to the invention allows a large number of individual optical elements that are completely identical can be done in a relatively simple way and very precisely the galvanizing process with each other and with a basic body get connected. Because exactly through the electroplating process understandable relationships can be created this way e.g. form a faceted mirror that reflects the homogeneous Illumination of a field enables, with which a corresponding good beam mixing and exact field mapping are possible.
  • a jet mixture can be mixed with the method according to the invention or achieve lighting that is disadvantageous higher light intensity in the middle area eliminated. This is especially in optical lithography with an EUV lighting system advantageous, e.g. on the reticle (Mask) have the largest possible homogeneously illuminated area would like to.
  • the process according to the invention practically turns it into a monolithic one Body formed by good heat transfer of the individual optical elements to the basic body an efficient Allows cooling of the optical element.
  • the following is a method for making a faceted mirror and a facet mirror made by the method described for example.
  • the procedure is basically but also for connecting or assembling other optical Elements such as Lenses and lens arrays, suitable.
  • In 1 shows the use of a facet mirror 1 in one Illumination system shown for EUV lithography.
  • the light from a source 2, e.g. of a laser, is over a Collector mirror 3 thrown on the facet mirror 1 where it is with the desired uniform illumination via a deflecting mirror 4 a reticle (mask) 5 is supplied.
  • the pattern of the reticle 5 is a not shown
  • Projection lens 6 a wafer 7 for imaging the image fed from reticle 5.
  • the production of the faceted mirror 1 with a correspondingly high level Precision and homogeneous or desired illumination takes place 2 on a base body 8.
  • the base body 8 can e.g. be galvanically molded, with its functional surface in terms of curvature, position and location of the requirements corresponds to that are placed on the finished facet mirror 1. Only the surface quality is still missing. The surface quality is now by individual mirror elements 9 as optical Elements realized.
  • the Making a faceted mirror also easier, simplified and inexpensive.
  • Bad qualities of mirror elements can be discarded beforehand or one can make a selection of mirror elements 9 that are identical or are almost identical, especially with regard to their optical Characteristics.
  • Galvanizing processes are well known, which is why here is not discussed in more detail. Basically, this is done in that the mirror elements 9 on the base body 8 in their position will be brought and the whole then in an electrolytic Bad is switched cathodically and as the anode desired material, e.g. Cu or Ni is used so that the parts can grow together into one unit. To this Way you can e.g. the growth of a copper layer with any Reach thickness.
  • anode desired material e.g. Cu or Ni
  • the mirror elements 9 placed on the base body 8 become connected to the base body 8 by a galvanoplastic joining, like this through an intermediate layer 10 between mirror elements 9 and the base body 8 is indicated.
  • an auxiliary structure 11 can be used according to FIG Positioning of the mirror elements 9 can be provided.
  • the Auxiliary structure can consist of several individual stamps for more precise adjustment 12a, 12b, 12c ... be put together, that together a surface in negative form for the facet mirror to be produced form and correspondingly with a spherical surface are at a distance from each other or gaps for reasons of space provide.
  • the mirror elements are e.g. through an adhesive or a Resin 13, with its mirrored side on the auxiliary structure 11 fixed.
  • an adhesive or a Resin 13 With its mirrored side on the auxiliary structure 11 fixed.
  • lens arrays When lens arrays are formed, the individual also become Lenses each with one of the optical surfaces on the Auxiliary structure 11 fixed.
  • the second optical surfaces must then be protected separately from contamination. lenses or non-conductive mirror elements must first be replaced by a appropriate coating can be made electrically conductive.
  • FIG. 14 After completion of a sufficiently strong supporting structure 14, can subsequently or in parallel with growing up Stiffening structures are installed by galvanic means or you let them grow up accordingly.
  • 4 is a honeycomb structure 15 (without Mirror elements) shown.
  • FIG can be seen that the support structure 14 with a cooling system in Form of cooling channels 16 may be provided.
  • the cooling channels 16 can during the electroplating process be molded. All that is required is that corresponding snake-shaped wax inserts are provided, which then be melted out.
  • Another solution can be to use a copper pipe hangs in a snake shape and this then during the galvanizing process ingrows. This way you get one very good heat transfer due to a metallic connection.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

The method involves positioning individual mirror elements (9) on a base body and joining them to the base body by using electroforming. The base body may itself be formed using electroforming. The mirror elements may be coalesced onto a support structure (14) forming the base body by electroforming their rear sides. The support structure may be reinforced using an integrated honeycomb structure. An Independent claim is included for a compound mirror manufactured using the method.

Description

Die Erfindung betrifft ein Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper, insbesondere zum Herstellen eines Facettenspiegels. Die Erfindung betrifft auch einen nach dem Verfahren hergestellten Facettenspiegel.The invention relates to a method for connecting a plurality of optical elements with a base body, in particular for making a faceted mirror. The invention relates also a facet mirror produced by the process.

Aus der US-PS 4 277 141 ist ein Verfahren bekannt, wonach ein Multifacettenspiegel in mehreren Schritten hergestellt wird, nämlich in einem ersten Schritt werden Einzelspiegel geschaffen, anschließend werden die Einzelspiegel fixiert und ausgerichtet und über einen Klebstoff mit einem Tragkörper verbunden.A method is known from US Pat. No. 4,277,141, according to which a Multifaceted mirror is manufactured in several steps, namely, in a first step, individual mirrors are created, the individual mirrors are then fixed and aligned and connected to a support body via an adhesive.

In der US-PS 4 195 913 ist ein Facettenspiegel beschrieben, bei dem eine Vielzahl von Einzelspiegeln auf einer sphärischen Trägerstruktur angeklebt oder angeschraubt wird.A facet mirror is described in US Pat. No. 4,195,913 a large number of individual mirrors on a spherical support structure is glued or screwed on.

In der DE 197 35 831 A1 ist eine Optikfassung für ein Optikbauteil beschrieben, wobei ein Innenteil mit einem Außenrahmen durch eine Mehrzahl von Federgelenkbalken verbunden ist. Die Federgelenkbalken sind galvanoplastisch hergestellt.DE 197 35 831 A1 describes an optical mount for an optical component described, wherein an inner part with an outer frame is connected by a plurality of spring joint beams. The Spring joint beams are made of galvanoplastic.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Verfahren zum Verbinden einer Vielzahl von optischen Elementen der eingangs erwähnten Art zu schaffen, wobei die Vielzahl der optischen Elemente mit hoher Genauigkeit, insbesondere bezüglich Position und Winkligkeit, auf dem Grundkörper angeordnet werden können, so daß z.B. Strahlmischungen und Feldabbildungen mit hoher Präzision erfolgen können.The object of the present invention is a method for connecting a variety of optical elements of the to create the type mentioned, the variety of optical Elements with high accuracy, especially with regard to Position and angularity on which the base body is arranged can so that e.g. Jet mixtures and field images with high precision can be done.

Der vorliegenden Erfindung liegt auch die Aufgabe zugrunde, einen Facettenspiegel mit einer Vielzahl von einzelnen optischen Spiegelelementen zu bilden, der eine homogene Beleuchtungsverteilung bzw. homogene Ausleuchtung und eine sehr exakte Strahlmischung und Feldabbildung erzeugt.The present invention is also based on the object a faceted mirror with a variety of individual optical To form mirror elements of a homogeneous lighting distribution or homogeneous illumination and a very exact Beam mixing and field mapping generated.

Erfindungsgemäß wird die Aufgabe durch das im kennzeichnenden Teil von Anspruch 1 genannte Verfahren gelöst. Ein nach dem erfindungsgemäßen Verfahren hergestellter Facettenspiegel ist in Anspruch 12 beschrieben.According to the invention, the object is characterized by Part of claim 1 mentioned method solved. One after the Faceted mirror produced according to the method of the invention described in claim 12.

Durch das erfindungsgemäße Verfahren können eine Vielzahl einzelner optischer Elemente, die völlig identisch ausgebildet sein können, auf relativ einfache Weise und sehr präzise durch den Galvanisierungsprozeß miteinander und mit einem Grundkörper verbunden werden. Da durch den Galvanisierungsprozeß exakt nachvollziehbare Verhältnisse geschaffen werden, läßt sich auf diese Weise z.B. ein Facettenspiegel bilden, der die homogene Ausleuchtung eines Feldes ermöglicht, womit eine entsprechend gute Strahlmischung und eine exakte Feldabbildung möglich werden.The method according to the invention allows a large number of individual optical elements that are completely identical can be done in a relatively simple way and very precisely the galvanizing process with each other and with a basic body get connected. Because exactly through the electroplating process understandable relationships can be created this way e.g. form a faceted mirror that reflects the homogeneous Illumination of a field enables, with which a corresponding good beam mixing and exact field mapping are possible.

Mit dem erfindungsgemäßen Verfahren lassen sich eine Strahlmischung bzw. eine Beleuchtung erreichen, die die nachteilige höhere Lichtintensität im mittleren Bereich beseitigt. Dies ist insbesondere in der optischen Lithographie mit einem EUV-Beleuch-tungssystem von Vorteil, wobei man z.B. auf dem Reticle (Maske) eine möglichst große homogen ausgeleuchtete Fläche haben möchte.A jet mixture can be mixed with the method according to the invention or achieve lighting that is disadvantageous higher light intensity in the middle area eliminated. This is especially in optical lithography with an EUV lighting system advantageous, e.g. on the reticle (Mask) have the largest possible homogeneously illuminated area would like to.

Die Realisierung des erfindungsgemäßen Verfahrens ist durch zwei Fertigungsprinzipien möglich:

  • 1. Die optischen Elemente können durch ein galvanoplastisches Fügen mit dem Grundkörper verbunden werden, wobei auch der Grundkörper galvanisch abgeformt werden kann. Bei einer galvanischen Abformung des Grundkörpers wird dieser so geschaffen, daß die Position und Lage der Facetten, nicht jedoch deren Oberflächengüte, auf dem Tragkörper enthalten ist. Die erforderliche Oberflächengüte wird dann durch die optischen Elemente, z.B. Spiegelelemente, realisiert, die nach der Belegung auf den Grundkörper durch ein galvanisches Zusammenwachsen mit diesem verbunden werden. Durch die galvanische Verbindung wird nicht nur eine präzise, vollflächige und damit sehr exakte Positionierung und Verbindung erreicht, sondern auch eine sehr gute Wärmeleitung zur schnellen Wärmeabfuhr von den Spiegelelementen in den Grundkörper.
  • 2. Auf einer Hilfsstruktur, die die Negativform des herzustellenden optischen Teiles, z.B. eines Facettenspiegels, darstellt, werden die optischen Elemente z.B. durch einen Kleber oder ein Harz fixiert, wobei bei der Herstellung eines Facettenspiegels aus Spiegelelementen deren verspiegelten Seiten zur Hilfsstruktur gerichtet sind. Durch die Hilfsstruktur wird dabei die exakte Position und Ausrichtung der optischen Elemente definiert. Durch diese Art der Fixierung werden auch die zur Hilfsstruktur gerichteten optischen Flächen, wie z.B. die Spiegelflächen, bei dem nachfolgenden Galvanisierungsprozeß vor Verunreinigungen geschützt. Sobald alle Elemente in Position und Lage gebracht sind, wird die komplette Einheit in einem Bade kathodisch geschaltet und die optischen Elemente werden in einen sich aufbauenden bzw. aufwachsenden Körper eingebunden.Bei Verwendung von Linsen als optische Elemente werden diese an einer der optischen Flächen fixiert. Die zweite optische Fläche muß in diesem Falle dann noch separat vor Verunreinigungen geschützt werden. Linsen oder nichtleitende Spiegelelemente müssen vorher durch eine entsprechende Beschichtung elektrisch leitend gemacht werden.
    • The method according to the invention can be implemented using two manufacturing principles:
  • 1. The optical elements can be connected to the base body by means of galvanoplastic joining, wherein the base body can also be galvanically molded. In the case of a galvanic impression of the base body, it is created in such a way that the position and location of the facets, but not their surface quality, is contained on the support body. The required surface quality is then realized by the optical elements, for example mirror elements, which are connected to the base body by means of a galvanic coalescence after it has been covered. The galvanic connection not only achieves precise, full-area and therefore very exact positioning and connection, but also very good heat conduction for rapid heat dissipation from the mirror elements into the base body.
  • 2. On an auxiliary structure, which represents the negative shape of the optical part to be produced, for example a facet mirror, the optical elements are fixed, for example by an adhesive or a resin, the mirrored sides of which are directed towards the auxiliary structure when producing a facet mirror from mirror elements. The exact position and orientation of the optical elements is defined by the auxiliary structure. This type of fixation also protects the optical surfaces facing the auxiliary structure, such as, for example, the mirror surfaces, from contamination in the subsequent electroplating process. As soon as all elements have been brought into position and position, the complete unit is cathodically connected in a bath and the optical elements are integrated in a body that builds up or grows up. When using lenses as optical elements, these are fixed to one of the optical surfaces. In this case, the second optical surface must then be separately protected against contamination. Lenses or non-conductive mirror elements must first be made electrically conductive by means of an appropriate coating.

    • In vorteilhaften Weiterbildungen der Erfindung kann vorgesehen sein, daß in den aufwachsenden Körper während des Galvanisierungsprozesses noch Kühl- und/oder Versteifungseinrichtungen eingebaut werden. In advantageous developments of the invention can be provided be that in the growing body during the electroplating process nor cooling and / or stiffening devices to be built in.

    Durch das erfindungsgemäße Verfahren wird praktisch ein monolithischer Körper gebildet, der durch einen guten Wärmeübergang der einzelnen optischen Elemente zum Grundkörper eine effiziente Kühlung des optischen Elements ermöglicht.The process according to the invention practically turns it into a monolithic one Body formed by good heat transfer of the individual optical elements to the basic body an efficient Allows cooling of the optical element.

    Weitere vorteilhafte Ausgestaltungen und Weiterbildungen der Erfindung ergeben sich aus den Unteransprüchen und aus den nachfolgend anhand der Zeichnung prinzipmäßig beschriebenen Ausführungsbeispielen.Further advantageous refinements and developments of Invention result from the dependent claims and from the described in principle below with reference to the drawing Embodiments.

    Es zeigt:

    Figur 1
    Prinzipdarstellung eines in einem EUV-Beleuchtungssystem für die Mikrolithographie angeordneten erfindungsgemäßen Facettenspiegels,
    Figur 2
    ein erstes Herstellungsverfahren für einen Facettenspiegel,
    Figur 3
    ein zweites Herstellungsverfahren für einen Facettenspiegel, und
    Figur 4
    einen Grundkörper für einen Facettenspiegel mit Versteifungen in Wabenstruktur und mit Kühlkanälen.
    It shows:
    Figure 1
    Schematic representation of a facet mirror according to the invention arranged in an EUV illumination system for microlithography,
    Figure 2
    a first manufacturing process for a facet mirror,
    Figure 3
    a second manufacturing process for a facet mirror, and
    Figure 4
    a basic body for a faceted mirror with stiffeners in a honeycomb structure and with cooling channels.

    Nachfolgend wird ein Verfahren zur Herstellung eines Facettenspiegels und ein nach dem Verfahren hergestellter Facettenspiegel beispielsweise beschrieben. Grundsätzlich ist das Verfahren jedoch auch zum Verbinden bzw. Zusammenfügen von anderen optischen Elementen, wie z.B. Linsen und Linsenarrays, geeignet. In der Figur 1 ist die Verwendung eines Facettenspiegels 1 in einem Beleuchtungssystem für die EUV-Lithographie dargestellt. Das Licht einer Quelle 2, z.B. eines Lasers, wird über einen Kollektorspiegel 3 auf den Facettenspiegel 1 geworfen, wo es mit der gewünschten gleichmäßigen Ausleuchtung über einen Umlenkspiegel 4 einem Reticle (Maske) 5 zugeführt wird. Das Muster des Reticles 5 wird über ein nicht näher dargestelltes Projektionsobjektiv 6 einem Wafer 7 zur Abbildung des Bildes vom Reticle 5 zugeleitet.The following is a method for making a faceted mirror and a facet mirror made by the method described for example. The procedure is basically but also for connecting or assembling other optical Elements such as Lenses and lens arrays, suitable. In 1 shows the use of a facet mirror 1 in one Illumination system shown for EUV lithography. The light from a source 2, e.g. of a laser, is over a Collector mirror 3 thrown on the facet mirror 1 where it is with the desired uniform illumination via a deflecting mirror 4 a reticle (mask) 5 is supplied. The pattern of the reticle 5 is a not shown Projection lens 6 a wafer 7 for imaging the image fed from reticle 5.

    Die Herstellung des Facettenspiegles 1 mit entsprechend hoher Präzision und homogener bzw. wunschgemäßer Ausleuchtung erfolgt gemäß Figur 2 auf einem Grundkörper 8. Der Grundkörper 8 kann z.B. auf galvanische Weise abgeformt sein, wobei dessen Funktionsfläche bezüglich Krümmung, Position und Lage den Forderungen entspricht, die an den fertigen Facettenspiegel 1 gestellt werden. Lediglich die Oberflächengüte fehlt noch. Die Oberflächengüte wird nun durch einzelne Spiegelelemente 9 als optische Elemente realisiert.The production of the faceted mirror 1 with a correspondingly high level Precision and homogeneous or desired illumination takes place 2 on a base body 8. The base body 8 can e.g. be galvanically molded, with its functional surface in terms of curvature, position and location of the requirements corresponds to that are placed on the finished facet mirror 1. Only the surface quality is still missing. The surface quality is now by individual mirror elements 9 as optical Elements realized.

    Bei der vorliegenden Erfindung werden in Abwandlung einer normalen Galvanoformung eine Vielzahl von Spiegelelementen, z.B. 200 bis 300 Stück, vorab durch einen herkömmlichen Fertigungsprozeß, wie z.B. fräsen, schleifen, polieren, hergestellt. Eine Vielzahl von gleichen Spiegelelementen wird anschließend auf dem Grundkörper 8 in Position und Ausrichtung gebracht und dann durch einen folgenden Galvanisierungsprozeß miteinander verbunden. Auf diese Weise ergibt sich am Ende ein Facettenspiegel als praktisch ein einziges monolithisches Teil in äußerst präziser Ausgestaltung.In the present invention, in a modification of a normal one Electroforming a variety of mirror elements, e.g. 200 to 300 pieces, in advance through a conventional manufacturing process, such as. milling, grinding, polishing, manufactured. A A large number of identical mirror elements are then displayed brought the base body 8 into position and orientation and then connected by a subsequent galvanizing process. This results in a faceted mirror in the end as practically a single monolithic part in extremely precise Design.

    Durch die Herstellung vieler gleicher Spiegelelemente wird die Herstellung eines Facettenspiegels weiterhin auch erleichtert, vereinfacht und kostengünstig gestaltet. Schlechte Qualitäten von Spiegelelementen können vorher ausgesondert werden bzw. man kann eine Auswahl von Spiegelelementen 9 treffen, die identisch oder nahezu identisch sind, insbesondere bezüglich ihrer optischen Eigenschaften.By producing many identical mirror elements, the Making a faceted mirror also easier, simplified and inexpensive. Bad qualities of mirror elements can be discarded beforehand or one can make a selection of mirror elements 9 that are identical or are almost identical, especially with regard to their optical Characteristics.

    Galvanisierungsprozesse sind allgemein bekannt, weshalb hier nicht näher darauf eingegangen wird. Grundsätzlich erfolgt dies dadurch, daß die Spiegelelemente 9 auf dem Grundkörper 8 in ihre Position gebracht werden und das ganze dann in einem elektrolytischen Bad kathodisch geschaltet wird und als Anode das gewünschte Material, z.B. Cu oder Ni, verwendet wird, so daß die Teile zu einer Einheit zusammenwachsen können. Auf diese Weise kann man z.B. das Anwachsen einer Kupferschicht mit beliebiger Dicke erreichen.Galvanizing processes are well known, which is why here is not discussed in more detail. Basically, this is done in that the mirror elements 9 on the base body 8 in their position will be brought and the whole then in an electrolytic Bad is switched cathodically and as the anode desired material, e.g. Cu or Ni is used so that the parts can grow together into one unit. To this Way you can e.g. the growth of a copper layer with any Reach thickness.

    Als Materialien für die Spiegel kommen prinzipiell alle leitenden Materialien oder Materialien, die durch Beschichtung leitend gemacht werden können, in Frage. Für EUV-Beleuchtungssysteme sollte außerdem noch die Polierbarkeit auf die geforderte Oberflächengüte (0,2 bis 0,3 nm RMS) gewährleistet sein. Außerdem sollte das Material gute Wärmeleitfähigkeiten besitzen. Aus den vorstehend genannten Gründen wird man im allgemeinen Kupfer mit Nickel beschichtet als Facettenmaterial verwenden.In principle, all conductive materials are used for the mirrors Materials or materials that are conductive by coating can be made into question. For EUV lighting systems should also polishability to the required Surface quality (0.2 to 0.3 nm RMS) can be guaranteed. The material should also have good thermal conductivity. For the reasons given above, one will generally Use copper coated with nickel as the facet material.

    Die auf den Grundkörper 8 aufgelegten Spiegelelemente 9 werden durch ein galvanoplastisches Fügen mit dem Grundkörper 8 verbunden, wie dies durch eine Zwischenschicht 10 zwischen Spiegelelementen 9 und dem Grundkörper 8 angedeutet ist.The mirror elements 9 placed on the base body 8 become connected to the base body 8 by a galvanoplastic joining, like this through an intermediate layer 10 between mirror elements 9 and the base body 8 is indicated.

    Alternativ dazu kann gemäß Figur 3 eine Hilfsstruktur 11 zur Positionierung der Spiegelelemente 9 vorgesehen werden. Die Hilfsstruktur kann zur genaueren Anpassung aus mehreren Einzelstempeln 12a, 12b, 12c ... zusammengesetzt sein, die zusammen eine Oberfläche in Negativform für den herzustellenden Facettenspiegel bilden und bei einer sphärischen Fläche entsprechend auf Abstand zueinander liegen bzw. Zwischenräume aus Platzgründen vorsehen.As an alternative to this, an auxiliary structure 11 can be used according to FIG Positioning of the mirror elements 9 can be provided. The Auxiliary structure can consist of several individual stamps for more precise adjustment 12a, 12b, 12c ... be put together, that together a surface in negative form for the facet mirror to be produced form and correspondingly with a spherical surface are at a distance from each other or gaps for reasons of space provide.

    Die Spiegelelemente werden, z.B. durch einen Kleber oder ein Harz 13, mit ihrer verspiegelten Seite auf der Hilfsstruktur 11 fixiert. Durch diese Art von Ausrichtung und der Fixierung werden die Spiegelflächen der Spiegelelemente 9 beim nachfolgenden Galvanisierungsprozeß vor Verunreinigungen geschützt. Sind alle Spiegelelemente 9 in Position und Lage gebracht, wird die komplette Vorrichtung in einem elektrolytischen Bad kathodisch geschaltet und die Elemente werden in einem aufwachsenden Körper, der damit eine Tragstruktur 14 für die einzelnen Spiegelelemente 9 bildet, miteinander verbunden bzw. in den entstehenden Körper eingebunden.The mirror elements are e.g. through an adhesive or a Resin 13, with its mirrored side on the auxiliary structure 11 fixed. Through this type of alignment and fixation the mirror surfaces of the mirror elements 9 in the following Galvanizing process protected from contamination. Are all Mirror elements 9 brought into position and position, the complete Device cathodic in an electrolytic bath switched and the elements are in a growing body, thus a support structure 14 for the individual mirror elements 9 forms, connected to each other or in the emerging Body involved.

    Bei einer Bildung von Linsenarrays werden ebenfalls die einzelnen Linsen jeweils mit einer der optischen Flächen auf der Hilfsstruktur 11 fixiert. Die zweiten optischen Flächen müssen dann noch separat vor Verunreinigungen geschützt werden. Linsen oder nicht leitende Spiegelelemente müssen vorher durch eine entsprechende Beschichtung elektrisch leitend gemacht werden.When lens arrays are formed, the individual also become Lenses each with one of the optical surfaces on the Auxiliary structure 11 fixed. The second optical surfaces must then be protected separately from contamination. lenses or non-conductive mirror elements must first be replaced by a appropriate coating can be made electrically conductive.

    Nach Fertigstellung einer genügend starken Tragstruktur 14, können anschließend noch oder auch parallel mit dem Aufwachsen Versteifungsstrukturen auf galvanischem Wege eingebaut werden oder man läßt sie entsprechend aufwachsen. In der Figur 4 ist zur Versteifung der Tragstruktur 14 eine Wabenstruktur 15 (ohne Spiegelelemente) dargestellt. Zusätzlich ist aus der Figur 4 ersichtlich, daß die Tragstruktur 14 mit einem Kühlsystem in Form von Kühlkanälen 16 versehen sein kann.After completion of a sufficiently strong supporting structure 14, can subsequently or in parallel with growing up Stiffening structures are installed by galvanic means or you let them grow up accordingly. 4 is a honeycomb structure 15 (without Mirror elements) shown. In addition, FIG can be seen that the support structure 14 with a cooling system in Form of cooling channels 16 may be provided.

    Die Kühlkanäle 16 können während des Galvanisierungsprozesses eingeformt werden. Hierzu ist es lediglich erforderlich, daß man entsprechende Wachseinlagen in Schlangenform vorsieht, welche anschließend ausgeschmolzen werden.The cooling channels 16 can during the electroplating process be molded. All that is required is that corresponding snake-shaped wax inserts are provided, which then be melted out.

    Eine weitere Lösung kann darin bestehen, daß man ein Kupferrohr schlangenförmig auflegt und dieses dann beim Galvanisierungsprozeß einwachsen läßt. Auf diese Weise erhält man dann einen sehr guten Wärmeübergang aufgrund einer metallischen Verbindung.Another solution can be to use a copper pipe hangs in a snake shape and this then during the galvanizing process ingrows. This way you get one very good heat transfer due to a metallic connection.

    Selbstverständlich sind auch Kombinationen möglich. Gleiches gilt z.B. für die Ausbildung der Tragstruktur 14 mit der Wabenstruktur 15, in die ebenfalls Kühlkanäle 16 eingeformt sein können bzw. wobei auch die Waben selbst zur Kühlung dienen können.Combinations are of course also possible. The same applies e.g. for the formation of the support structure 14 with the honeycomb structure 15, in which cooling channels 16 are also formed can or where the honeycombs themselves can serve for cooling.

    Claims (17)

    Verfahren zum Zusammenfügen einer Vielzahl von optischen Elementen (9) auf einem Grundkörper (8), insbesondere zum Herstellen eines Facettenspiegels, z.B. zur Strahlmischung und Feldabbildung für ein EUV-Beleuchtungssystem, wobei die einzelnen optischen Elemente (9) auf dem Grundkörper (8) positioniert und anschließend durch galvanoplastisches Fügen mit dem Grundkörper (8) verbunden werden.Method of assembling a variety of optical Elements (9) on a base body (8), in particular for Making a facet mirror, e.g. for jet mixing and field mapping for an EUV lighting system, the individual optical elements (9) on the base body (8) positioned and then by galvanoplastic joining be connected to the base body (8). Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß der Grundkörper (8) galvanisch abgeformt wird.Method according to claim 1, characterized in that the base body (8) is electroplated. Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper, insbesondere zum Herstellen eines Facettenspiegels, z.B. zur Strahlmischung und Feldabbildung für ein EUV-Beleuchtungssystem, wobei die Vielzahl der optischen Elemente auf einer Hilfsstruktur (11) ausgerichtet wird und wobei man anschließend die optischen Elemente (9) auf ihren Rückseiten unter Bildung einer Tragstruktur (14) als Grundkörper galvanoplastisch zusammenwachsen läßt.Method of connecting a plurality of optical elements with a base body, especially for manufacturing a facet mirror, e.g. for beam mixing and field mapping for an EUV lighting system, the variety the optical elements aligned on an auxiliary structure (11) and then the optical elements (9) on their backs to form a support structure (14) grow together as a base body by electroplating leaves. Verfahren nach Anspruch 3, dadurch gekennzeichnet, daß der aufgewachsene Grundkörper (Tragstruktur 14) mit Versteifungen versehen ist.Method according to claim 3, characterized in that the grown base body (supporting structure 14) is provided with stiffeners. Verfahren nach Anspruch 4, dadurch gekennzeichnet, daß die Versteifungen (15) auf galvanischem Wege integriert werden.Method according to claim 4, characterized in that the stiffeners (15) are integrated by galvanic means. Verfahren nach Anspruch 5, dadurch gekennzeichnet, daß zur Versteifung der aufgewachsenen Körper (Tragstruktur 14) als Wabenstruktur (15) ausgeführt wird.Method according to Claim 5, characterized in that the stiffened body (supporting structure 14) is designed as a honeycomb structure (15). Verfahren nach einem der Ansprüche 3 bis 6, dadurch gekennzeichnet, daß der aufgewachsene Grundkörper (Tragstruktur 14) mit Kühlkanälen (16) versehen wird. Method according to one of claims 3 to 6, characterized in that the grown base body (supporting structure 14) is provided with cooling channels (16). Verfahren nach Anspruch 7, dadurch gekennzeichnet, daß die Kühlkanäle (16) beim Galvanisierungsprozeß durch Kerne mit eingeformt werden, welche anschließend entfernt werden.A method according to claim 7, characterized in that the cooling channels (16) are formed in the galvanizing process by cores, which are then removed. Verfahren nach Anspruch 7, dadurch gekennzeichnet, daß die Kühlkanäle (16) durch eingelegte Rohre gebildet werden, die bei dem Galvanisierungsprozeß einwachsen.Method according to claim 7, characterized in that the cooling channels (16) are formed by inserted tubes which grow in during the electroplating process. Verfahren nach Anspruch 3, dadurch gekennzeichnet, daß die Hilfsstruktur (11) aus mehreren Teilen (Stempel 12a, 12b,..) mit dazwischen liegenden Abstands- oder Positionshaltern gebildet wird.Method according to Claim 3, characterized in that the auxiliary structure (11) is formed from a plurality of parts (stamps 12a, 12b, ..) with spacers or position holders located in between. Facettenspiegel zur Strahlmischung und Feldabbildung für ein Beleuchtungssystem, wobei eine Vielzahl von Spiegelelementen auf einem Grundkörper angeordnet sind, dadurch gekennzeichnet, daß die Spiegelelemente (9) durch galvanisches Fügen mit dem Grundkörper (8,14) verbunden sind.Faceted mirror for beam mixing and field imaging for an illumination system, a large number of mirror elements being arranged on a base body, characterized in that the mirror elements (9) are connected to the base body (8, 14) by galvanic joining. Facettenspiegel nach Anspruch 11, dadurch gekennzeichnet, daß der Grundkörper (8) galvanisch abgeformt ist.Faceted mirror according to claim 11, characterized in that the base body (8) is galvanically molded. Facettenspiegel nach Anspruch 1, dadurch gekennzeichnet, daß die Spiegelelemente (9) auf ihren Rückseiten mit einer Tragstruktur (14) als Grundkörper versehen sind, mit dem sie galvanoplastisch aufgewachsen sind.Faceted mirror according to claim 1, characterized in that the mirror elements (9) are provided on their rear sides with a supporting structure (14) as the base body with which they have been grown in a galvanoplastic manner. Facettenspiegel nach Anspruch 13, dadurch gekennzeichnet, daß der aufgewachsene Körper (Tragstruktur 14) mit Versteifungen versehen ist.Faceted mirror according to claim 13, characterized in that the grown body (supporting structure 14) is provided with stiffeners. Facettenspiegel nach Anspruch 14, dadurch gekennzeichnet, daß die Versteifungen auf galvanischem Wege hergestellt sind. Faceted mirror according to claim 14, characterized in that the stiffeners are produced by galvanic means. Facettenspiegel nach Anspruch 15, dadurch gekennzeichnet, daß die Versteifungen als Wabenstruktur (15) ausgeführt sind.Faceted mirror according to claim 15, characterized in that the stiffeners are designed as a honeycomb structure (15). Facettenspiegel nach einem der Ansprüche 13 bis 16, dadurch gekennzeichnet, daß der aufgewachsene Körper (Tragstruktur 14) mit Kühlkanälen (16) versehen ist.Faceted mirror according to one of claims 13 to 16, characterized in that the grown body (supporting structure 14) is provided with cooling channels (16).
    EP01112204A 2000-06-21 2001-05-18 Method for bonding a plurality of optical elements to a base Expired - Lifetime EP1168006B1 (en)

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