EP1076667A1 - Preparation of co-and terpolymers of p-hydroxystyrene and alkyl acrylates - Google Patents
Preparation of co-and terpolymers of p-hydroxystyrene and alkyl acrylatesInfo
- Publication number
- EP1076667A1 EP1076667A1 EP99911412A EP99911412A EP1076667A1 EP 1076667 A1 EP1076667 A1 EP 1076667A1 EP 99911412 A EP99911412 A EP 99911412A EP 99911412 A EP99911412 A EP 99911412A EP 1076667 A1 EP1076667 A1 EP 1076667A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- set forth
- polymer
- alcoholic solvent
- monomer
- base catalyst
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/12—Hydrolysis
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/14—Esterification
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
- C08F2800/10—Copolymer characterised by the proportions of the comonomers expressed as molar percentages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
- C08F2800/20—Copolymer characterised by the proportions of the comonomers expressed as weight or mass percentages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2810/00—Chemical modification of a polymer
- C08F2810/50—Chemical modification of a polymer wherein the polymer is a copolymer and the modification is taking place only on one or more of the monomers present in minority
Definitions
- This invention relates to the selective hydrolysis of co- and ter-polymers of p-acetoxystyrene (ASM) and alkyl acrylates which are useful in photoresists and optical applications.
- ASM p-acetoxystyrene
- the resist compositions generally comprise a photosensitive acid generator and an acid sensitive polymer.
- the polymer has acid sensitive side chain (pendant) groups which are bonded to the polymer backbone and are reactive towards a proton.
- the photoacid generator produces a proton.
- the resist film is heated and, the proton causes catalytic cleavage of the pendant group from the
- the cleaved polymer is soluble in polar developers such as alcohol and aqueous base while the unexposed polymer is soluble in nonpolar organic solvents such as anisole.
- polar developers such as alcohol and aqueous base
- nonpolar organic solvents such as anisole.
- chemically amplified resist compositions generally have suitable lithographic sensitivity, in certain applications, their performance can be improved by (i) increasing their thermal stability in terms of thermal decomposition and plastic flow and (ii) increasing their stability in the presence of airborne chemical contaminants.
- post image development temperatures e.g. etching, implantation etc.
- Brunsvold et al., U.S. Pat. Nos. 4,939,070 (issued Jul. 3, 1990) and 4,931,379 issued Jun. 5, 1990 disclose chemically amplified, acid sensitive resist compositions having increased thermal stability in the post image development stage.
- Brunsvold's resist compositions form a hydrogen bonding network after cleavage of the acid sensitive side chain group to increase the thermal stability of the polymer.
- Brunsvold avoids hydrogen bonding moieties prior to the cleavage reaction because such hydrogen bonding is known to unacceptably destabilize the acid sensitive side chain.
- Brunsvold resists have suitable thermal stability, they also have lower sensitivity and therefore are unsuitable in certain applications.
- one of the problems with this composition was that the process of preparing the polymer as outlined in column 3, lines 10-30 and in Example 1 (of U.S. 5,625,020) results in poor conversion rates and chemical cleavage of some groups in the repeat units.
- one of the objects of the present invention is an improved process for preparing the polymers used in the photoresist compositions.
- U.S. 4,898,916 discloses a process for the preparation of poly(vinylphenol) from poly(acetoxystyrene by acid catalyzed transesterification.
- U.S. 5,239,015 discloses a process for preparing low optical density polymers and co-polymers for photoresists and optical applications.
- U.S. 5,625,007 discloses a process for making low optical polymers and co-polymers for photoresists and optical applications.
- U.S. 5,625,020 discloses a process for making a photoresist composition containing a photosensitive acid generator and a polymer comprising the reaction product of hydroxystyrene with acrylate, methacrylate or a mixture of acrylate and methacrylate.
- This invention relates to a novel, one-pot, cost efficient process for the preparation of co- and terpolymers of p-hydroxystyrene or substituted p- hydroxystyrene and alkyl acrylates.
- the process involves polymerization of esters of p-hydroxystyrene (or its substituted analogs), alkyl acrylate monomers and one or more of ethy lenically unsaturated monomers in an alcoholic solvent in the presence of a free radical initiator.
- terpolymers of p-hydroxystyrene without cleavage of the alkyl ester in the acrylate repeat unit.
- Preferred embodiments include copolymers of p-hydroxystyrene, tert-butyl acrylate and terpolymer of p-hydroxystyrene, tert-butyl acrylate and styrene. These polymers have a wide variety of applications including as photoresists in microelectronics industry.
- the present invention thus provides, in part, a novel process for producing polymers which are used in photoresist compositions.
- the process is an improvement over the prior art and is quite efficient.
- this invention provides a process for the preparation of a polymer of I,
- ethylenically unsaturated copolymerizable monomers selected from the group consisting of styrene, 4-methylstyrene, maleic anhydride, dialkyl maleate, dialkyl fumarate and vinyl chloride, wherein alkyl is having 1 to 4 carbon atoms, comprising the steps of: a) subjecting a monomer of formula III,
- n is an integer from 1 to 4
- x and y are integers from 0 to 2n+l , and the sum of x and y is
- R 3 is selected from the group consisting of: hydrogen; and methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl or ter-butyl; iii) R 4 is either iso-propyl or ter-butyl; and iv) R 5 is either methyl or ethyl.
- reaction mixture may also comprise an additional co-solvent.
- the co-solvent is selected from the group consisting of tetrahydrofuran, methyl ethyl ketone, acetone, and 1 ,4-dioxane.
- the alcoholic solvent is an alcohol having 1 to 4 carbon atoms and is selected from the group consisting of methanol, ethanol, isopropanol, tert-butanol, and combinations thereof.
- the amount of solvent (or co-solvent) used is not critical and can be any amount which accomplishes the desired end result.
- the free radical initiator may be any initiator which achieves the desired end result.
- the initiator may be selected from the group consisting of 2,2'- azobis(2,4-dimethylpentanenitrile), 2,2'-azobis(2-methylpropanenitrile), 2,2'- azobis(2-methylbutanenitrile), l,r-azobis(cyclohexanecarbonitrile), t-butyl peroxy-2-ethylhexanoate.
- t-butyl peroxypivalate t-amyl peroxypivalate, diisononanoyl peroxide, decanoyl peroxide, succinic acid peroxide, di(n-propyl) peroxydicarbonate, d ⁇ (sec-butyl) peroxydicarbonate, di(2-ethylhexyl) peroxydicarbonate, t-butylperoxyneodecanoate, 2,5-dimethyl-2,5-di(2-
- the initiator is selected from the group consisting of 2,2'-azobis(2,4-dimethylpentanenitrile), 2,2'-azobis(2-methylpropanenitrile), 2,2'-azobis(2-methylbutanenitrile), 1 ,1 '-azobis(cyclohexanecarbonitrile), t-butyl peroxy-2-ethylhexanoate, t-butyl peroxypivalate, t-amyl peroxypivalate, and combinations thereof.
- the amount of initiator is any amount which accomplishes the desired end result. However, as a preferred embodiment, said initiator is present to about three mole percent based upon the total moles of all of said monomers I, II, and said copolymerizable monomers.
- the polymerization conditions are not critical and can be any temperature and pressure which will produce the desired end result.
- the temperatures are from about 30°C to about 100°C, preferably from about 40°C to about 100°C, and most preferably from about 45°C to about 90°C.
- the pressure may be atmospheric, sub-atmospheric or super-atmospheric.
- the polymerization time is not critical, but generally will take place over a period of at least one minute in order to produce a polymer of corresponding composition.
- step (b) in a transesterification, the polymer step (a) is subjected to said transesterification conditions in said alcoholic solvent in the presence of catalytic amounts of a base catalyst.
- the base catalyst is such that it will not substantially react with said alkyl acrylate monomer II, or with said co-polymerizable monomers.
- the base catalyst is either an alkalic metal hydroxide or an alkalic metal alkoxide.
- the base catalyst is selected from the group consisting of lithium hydroxide, lithium methoxide, lithium ethoxide, lithium isopropoxide.
- the amount of base catalyst employed is from about 0.1 mole percent to about 2 mole percent based upon the atomic weight of the metal (e g. sodium) and the moles of monomer I present m said polymer.
- the base catalyst is added in step (b) by dissolving it in said alcoholic solvent.
- the temperature in step (b) is such that the transeste ⁇ fied by-product ester formed can be continually removed from the reaction mixture to form the polymer of I, II, and said copolymerizable monomer.
- Such temperatures can be from about 50°C to about 200°C.
- the transesterification reaction is carried out at reflux temperature of said alcoholic solvent.
- the ion exchange bed is an acidic ion exchange resin, preferably a strongly acidic cation exchange resm.
- An acidic ion exchange resm such as sulfonated styrene/divmylbenzene cation exchange resin is utilized in the present process.
- Suitable acidic exchange resins are available from Rohm and Haas Company, e.g. AMBERLYST 15 acidic ion exchange resm. These amberlyst resins typically contain as much as 80,000 to 200,000 ppb of sodium and iron.
- the ion exchange resin must be treated with water and then a mineral acid solution (acidic resm) to reduce the metal ion level.
- step (c) may be similar to those procedures disclosed in U.S. 5,284,930 and U.S. 5,288,850.
- step (d) the isolation may be accomplished by precipitation of said polymer from said reaction medium by adding said reaction medium to a non-solvent is selected from the group consisting of water, hexane, octane, petroleum ether, and combinations thereof.
- R 3 is hydrogen or methyl and R 4 is tert-butyl or iso-propyl.
- the initiator is selected from the group consisting of 2,2'-azobis(2,4- dimethylpentanenitrile), 2,2'-azobis(2-methylpropanenitrile), 2,2'-azobis(2- methylbutanenitrile), l,l '-azobis(cyclohexanecarbonitrile), t-butyl peroxy-2- ethy Ihexano ate, t-butyl peroxypivalate, t-amyl peroxypivalate, and combinations thereof.
- the alcoholic solvent is an alcohol having 1 to 4 carbon atoms selected from the group consisting of methanol, ethanol, isopropanol, tert-butanol, and combinations thereof. A preferred embodiment is where the alcoholic solvent is methanol.
- the base catalyst will not substantially react with said alkyl acrylate monomer II or with said copolymerizable monomers and is either alkali metal hydroxide or alkali metal alkoxide, and further is selected from the group consisting of lithium hydroxide, lithium methoxide, lithium ethoxide, lithium isopropoxide. sodium hydroxide, sodium methoxide, sodium ethoxide, sodium
- the base catalyst is sodium methoxide and is present in an amount of about 0.1 mole percent to about 2 mole percent based upon the atomic weight of sodium and moles of monomer IV present in said polymer.
- the said base catalyst is added in step b) by dissolving it in said alcoholic solvent, and the precipitation of said polymer is accomplished by adding said reaction medium to a non-solvent which is selected from the group consisting of water, hexane, octane, petroleum ether, and combinations thereof.
- a non-solvent which is selected from the group consisting of water, hexane, octane, petroleum ether, and combinations thereof.
- the preferred non-solvent is water.
- said polymer is a terpolymer of monomer IV, monomer II, and styrene.
- the initiator is selected from the group consisting of 2,2'-azobis(2,4-dimethylpentanenitrile), 2,2'-azobis(2- methylpropanenitrile), 2,2'-azobis(2-methylbutanenitrile), 1,1 '- azobis(cyclohexanecarbonitrile), t-butyl peroxy-2-ethylhexanoate, t-butyl peroxypivalate. t-amyl peroxypivalate, and combinations thereof.
- the alcoholic solvent is an alcohol having 1 to 4 carbon atoms selected from the group consisting of methanol. ethanol, isopropanol, tert-butanol, and combinations thereof.
- the base catalyst will not substantially react with said alkyl acrylate monomer II and is either
- alkali metal hydroxide or alkali metal alkoxide selected from the group consisting of lithium hydroxide, lithium methoxide, lithium ethoxide, lithium isopropoxide, sodium hydroxide, sodium methoxide, sodium ethoxide, sodium isopropoxide, potassium hydroxide, potassium methoxide, potassium ethoxide, potassium isopropoxide, cesium hydroxide, cesium methoxide, cesium ethoxide, cesium isopropoxide, and combinations thereof.
- the base catalyst e.g., can be sodium methoxide and is present in an amount of about 0.1 mole percent to about 2 mole percent based upon the atomic weight of the metal (e.g. sodium) and moles of monomer IV present in said polymer.
- NMR - Nuclear magnetic resonance spectroscopy usually of either proton, ⁇ ; and/or carbon 13, ⁇ C nuclei.
- UV-Vis - Ultraviolet-Visible Spectroscopy General Analytical Techniques Used for the Characterization: A variety of analytical techniques were used to characterize the co- and terpolymers of the present invention which included the following:
- GPC was performed on a Waters gel permeation chromatograph equipped with refractive index detection.
- GC analysis was performed on a Hewlett Packard Model 5890 series II gas chromatograph equipped with a DB-1 column.
- FTIR was recorded on a Mattson Genesis Series FTLR.
- a Perkin Elmer 7700 DSC was used to determine the T g (glass transition temperature) of the co- and terpolymers of this invention. The heating rate was maintained at 10°C/minute, generally, over a temperature range of 50°C to 400°C.
- the flow rate of nitrogen or air is maintained at 20 mL/min.
- UV-Vis of samples were taken using a Hewlett Packard Vectra 486/33 VL UV-Vis sp ectrophotometer
- Example 1 A four-neck 500 mL glass round-bottom flask fitted with a chilled water reflux condenser, a thermowell with thermocouple, a nitrogen inlet and outlet, an overhead stirrer, and an external heating mantle was charged with a reaction mixture of 73.1 grams (0.44 moles) of ASM, 15.9 grams (0.15 moles) of styrene, and 13.4 grams (0.10 moles) of t-butyl acrylate with stirring. To this mixture was then added 117 grams of methanol and the entire reaction mixture was heated to 66°C over a period of one hour.
- the polymerization was initiated by adding 11 grams (75% concentration; 7 mole percent based upon total number of moles of monomers) of t- BPP diluted in 11 grams of methanol. After one hour of polymerization, 0.66 grams of t-BPP diluted in 1 gram of methanol was added. At each hour, for the next 3 hours, 0.66 grams of t-BPP in 1 gram of methanol was added. After each addition, a sample of the polymer mixture was withdrawn from the reactor and analyzed for the unreacted monomers by capillary gas chromatography (GC). The polymerization reaction was continued for about a total period of 18 hours. At the end of this period, analysis of the final polymer mixture sample by capillary GC showed greater than
- reaction mixture was allowed to react until the solution turned clear in about 4 hours at which time the reaction mixture was cooled, precipitated in deionized water, and the precipitated polymer was isolated by filtration.
- a 13 C NMR analysis of the product indicated 86% conversion of the acetoxy groups to hydroxy groups.
- a 'H NMR analysis indicated that the t-butyl groups in the acrylate repeat units were intact and were not cleaved during the transesterification reaction.
- Example 2 Example 1 was repeated in this Example 2 except that the transesterification reaction with sodium methoxide at 2 mole percent level was carried out for a period of about 18 hours under reflux. The by-product methyl acetate was continuously removed and requisite amounts of fresh methanol was added to compensate for methanol/methyl acetate distilled as in Example 1. Analysis of the final polymer product by 13 C NMR indicated quantitative conversion of p-acetoxy groups to p-hydroxy groups and t-butyl groups of the acrylate repeat units were not cleaved as confirmed by 'H NMR analysis.
- Example 1 was repeated in this Example 3 with the exception that the amount of sodium methoxide used in the transesterification step was 0.43 grams as 25 weight percent solution in methanol. Of this amount 0.38 grams of sodium methoxide was used to neutralize acetic acid present in the ASM monomer. The remainder, 0.05 grams of sodium methoxide was used as the catalyst for transesterification, which amounted to 0.2 mole percent catalyst level. The transesterification reaction was carried out for a period of about of 52 hours under reflux. The solution was cloudy and the polymer precipitated when fresh methanol was added indicating that the transesterification reaction was very slow at this catalyst level.
- Example 4 Example 1 was repeated in this Example 4 with the exception that 1.4 grams of sodium methoxide was employed in the transesterification step, which amounted to four mole percent catalyst level after accounting for 0.38 grams of sodium methoxide needed to neutralize the acetic acid present in ASM. In addition, 15 grams of THF was charged into the reaction mixture in the transesterification step in order to improve the solubility of the polymer in methanol. After five and a half hours of refluxing in methanol, the polymer solution was completely clear at which time the reaction mixture was cooled.
- the polymer solution was precipitated in water and analyzed by NMR, which indicated quantitative conversion of p-acetoxy groups to p-hydroxy groups and the t-butyl groups were not cleaved.
- the remainder portion of the polymer solution was passed through an Amberlyst 15 ion exchange bed (2 inch diameter x 6 inch long), precipitated in deionized water, filtered and washed with deionized water.
- the white polymeric product was dried under vacuum at 65°C.
- the GPC analysis of the polymer showed weight-average molecular weight to be 9,700 and polydispersity of 2.1.
- the monomer composition of the polymer as determined by NMR was as follows: 61 mole% p-hydroxystyrene; 25 mole percent styrene; and 14 mole percent t-butyl acrylate.
- Example 1 was repeated in Example 5 except that the reaction was carried out in a 5 liter round-bottom flask reactor employing following amounts of materials:
- the polymer solution and the washings were then added dropwise into deionized water to precipitate the terpolymer.
- the polymer was filtered and dried under vacuum at 65°C.
- the GPC analysis of the polymer showed a weight-average molecular weight of 10,400 and polydispersity of 2.
- the polymer composition as determined by NMR analysis is as
- Example 6 Example 1 was repeated in Example 6 except that the reaction was carried out in a 5 liter round-bottom flask reactor employing following amounts of materials:
- the polymer was filtered and dried under vacuum at 65°C.
- the GPC analysis of the polymer showed a weight-average molecular weight of 10,400 and polydispersity of 2.
- the polymer was also analyzed for trace metals: aluminum 180 parts per billion(ppb); calcium 63 ppb; iron 120 ppb; sodium 270 ppb; zinc 21 ppb.
- the polymer composition as determined by NMR analysis is as follows: 62 mole percent p-hydroxystyrene; 24 mole percent styrene; and 15 mole percent t-butyl acrylate.
- Example 7 Example 1 was repeated in Example 7 except that the reaction was carried out in a 5 liter round-bottom flask reactor employing following amounts of materials:
- the cooled polymer solution was pumped through an Amberiyst 15 ion exchange bed at a rate of 150 mL/minute. 300 mL of cooled polymer solution was added dropwise into 3000 mL of deionized water to precipitate the polymer. The polymer was filtered and dried under vacuum at 65°C; final dried product 700 grams.
- the GPC analysis of the polymer showed a weight-average molecular weight of 19,800 and polydispersity of 2.1.
- the polymer composition as determined by NMR analysis is as follows: 62 mole percent p-hydroxystyrene; and 38 mole percent t-butyl acrylate.
- a UV-VIS scan showed a molar absorptivity of 82 L cm "1 mole "1 at 248 nm.
- the polymer exhibited a T g of 138.6°C as measured by DSC.
- Example 8 Example 1 was repeated in Example 8 except that the reaction was carried out in a 5 liter round-bottom flask reactor employing following amounts of materials:
- the polymer composition as determined by NMR analysis is as follows: 61 mole percent p-hydroxystyrene; and 39 mole percent t-butyl acrylate.
- a UV-VIS scan showed a molar absorptivity of 84 L cm " ' mole "1 at 248 nm.
- the polymer exhibited a T formula of 139.9°C as measured by DSC.
- Trace metal analysis showed the presence of following metals at the indicated levels: aluminum 69 ppb; calcium 57 ppb; iron 140 ppb; sodium 140 ppb; zinc 24 ppb.
- Example 9 Example 1 was repeated in Example 9 except that the reaction was carried out in a 5 liter round-bottom flask reactor employing following amounts of materials:
- the transesterification reaction was carried out for a total period of 8 1/2 hours by adding initially about 380 grams of methanol to the reaction mixture. Additional quantities of fresh methanol were added to the reaction mixture as methanol/methyl acetate was collected as distillate. Samples were taken every hour to determine the extent of transesterification reaction by NMR. At the end of 8 1/2 hours, the NMR analysis showed quantitative conversion of acetoxy groups to hydroxy groups at which time the reaction was stopped, and the reaction mixture was cooled to ambient temperature. The cooled polymer solution was pumped through an Amberiyst 15 ion exchange bed at a rate of 130 mL/minute.
- the cooled polymer solution was added dropwise into 3000 mL of deionized water to precipitate the polymer.
- the precipitated polymer was filtered and dried under vacuum at 65°C; yield 630 grams.
- the GPC analysis of the polymer showed a weight-average molecular weight of 18,000 and polydispersity of 2.3
- the polymer composition as determined by NMR analysis is as follows: 66 mole percent p-hydroxystyrene; and 34 mole percent t-butyl acrylate.
- a UV-VIS scan showed a molar absorptivity of 86 L cm "1 mole "1 at 248 nm.
- the polymer exhibited a T g of 149.1°C as measured by DSC.
- Example 10 Example 10 was repeated with the exception that sodium hydroxide was used as the catalyst. 0.07 grams of sodium hydroxide was used to neutralize the acetic acid present in ASM. 0.1 grams of sodium hydroxide was used as transesterification catalyst, which amounted to a catalyst level of 0.5 mole %. The transesterification reaction was carried out for a period of 4 hours under reflux in methanol while distilling-off methyl acetate/methanol and fresh methanol added to the reaction mixture as needed. At the end of this period, NMR analysis of the product indicated 70 percent of the acetoxy groups to hydroxy groups.
- Example 11 Comparative Example This Example demonstrate that large excess of triethylamine is needed to hydrolyze acetoxy groups to hydroxy groups.
- Example 1 was substantially repeated in Example 1 1 with the exception that triethylamine was used as the catalyst instead of sodium methoxide. 0.18 grams of triethylamine was used to neutralize the acetic acid in ASM and 0.48 grams of triethylamine was used for the transesterification reaction, which amounted to a catalyst level of 1 mole %. The reaction mixture was refluxed for 7 hours while removing continuously methanol/methyl acetate as distillate. The reaction was very slow and the polymer solution did not become clear during this time.
- Example 12 Comparative Example This Example demonstrate that 4-dimethylaminopyridine (4-DMAP) is not effective a catalyst for transesterification.
- Example 1 was substantially repeated in Example 12 with the exception that 4-DMAP was used as the catalyst instead of sodium methoxide. 0.09 grams (0.15 mole %) of 4-DMAP in three equal portions was charged into the reaction mixture as the transesterification catalyst over a period
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Abstract
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US7293698A | 1998-05-05 | 1998-05-05 | |
US72936 | 1998-05-05 | ||
PCT/US1999/005667 WO1999057163A1 (en) | 1998-05-05 | 1999-03-15 | Preparation of co- and terpolymers of p-hydroxystyrene and alkyl acrylates |
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EP1076667A1 true EP1076667A1 (en) | 2001-02-21 |
EP1076667B1 EP1076667B1 (en) | 2004-03-24 |
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EP (1) | EP1076667B1 (en) |
AT (1) | ATE262542T1 (en) |
AU (1) | AU3005899A (en) |
DE (1) | DE69915819T2 (en) |
HK (1) | HK1033467A1 (en) |
WO (1) | WO1999057163A1 (en) |
Families Citing this family (7)
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US6759483B2 (en) * | 1998-05-05 | 2004-07-06 | Chemfirst Electronic Materials L.P. | Preparation of homo-, co- and terpolymers of substituted styrenes |
KR100533364B1 (en) * | 1999-11-02 | 2005-12-06 | 주식회사 하이닉스반도체 | Photoresist composition for resist flow process and process for forming a contact hole using the same |
US6787611B2 (en) * | 2000-06-27 | 2004-09-07 | Chemfirst Electronic Materials L.P. | Purification means |
US6864324B2 (en) * | 2002-04-19 | 2005-03-08 | Chem First Electronic Materials L.P. | Anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity |
TWI284783B (en) * | 2003-05-08 | 2007-08-01 | Du Pont | Photoresist compositions and processes for preparing the same |
US7834113B2 (en) | 2003-05-08 | 2010-11-16 | E. I. Du Pont De Nemours And Company | Photoresist compositions and processes for preparing the same |
US7534837B2 (en) * | 2005-09-26 | 2009-05-19 | E.I. Du Pont De Nemours And Company | Random copolymers of ethylene and 4-vinylphenyl esters and method for preparing the same |
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US4636540A (en) * | 1985-07-08 | 1987-01-13 | Atlantic Richfield Company | Purification of polymer solutions |
US4689371A (en) * | 1986-07-07 | 1987-08-25 | Celanese Corporation | Process for the preparation of poly (vinylphenol) from poly (acetoxystyrene) |
EP0260104A3 (en) * | 1986-09-09 | 1989-03-15 | Celanese Corporation | Process for the preparation of poly (vinylphenol) by simultaneous methanolysis and polymerization of 4-acetoxystryene |
EP0277721A3 (en) * | 1987-01-28 | 1989-03-15 | Hoechst Celanese Corporation | Emulsion polymerization of 4-acetoxystyrene and hydrolysis to poly(p-vinylphenol) |
US4877843A (en) * | 1987-09-11 | 1989-10-31 | Hoechst Celanese Corporation | Selective hydrolysis of copolymers of para-acetoxy styrene and allyl esters of ethylenically unsaturated acids |
JPH0768296B2 (en) * | 1991-11-28 | 1995-07-26 | 丸善石油化学株式会社 | Method for removing metal from vinylphenol polymer |
EP0605089B1 (en) * | 1992-11-03 | 1999-01-07 | International Business Machines Corporation | Photoresist composition |
WO1994014858A1 (en) * | 1992-12-29 | 1994-07-07 | Hoechst Celanese Corporation | Metal ion reduction in polyhydroxystyrene and photoresists |
US5861231A (en) * | 1996-06-11 | 1999-01-19 | Shipley Company, L.L.C. | Copolymers and photoresist compositions comprising copolymer resin binder component |
-
1999
- 1999-03-15 AU AU30058/99A patent/AU3005899A/en not_active Abandoned
- 1999-03-15 DE DE69915819T patent/DE69915819T2/en not_active Expired - Lifetime
- 1999-03-15 AT AT99911412T patent/ATE262542T1/en not_active IP Right Cessation
- 1999-03-15 EP EP99911412A patent/EP1076667B1/en not_active Expired - Lifetime
- 1999-03-15 WO PCT/US1999/005667 patent/WO1999057163A1/en active Search and Examination
-
2001
- 2001-06-14 HK HK01104113A patent/HK1033467A1/en not_active IP Right Cessation
Non-Patent Citations (1)
Title |
---|
See references of WO9957163A1 * |
Also Published As
Publication number | Publication date |
---|---|
HK1033467A1 (en) | 2001-08-31 |
WO1999057163A1 (en) | 1999-11-11 |
ATE262542T1 (en) | 2004-04-15 |
DE69915819T2 (en) | 2005-01-27 |
EP1076667B1 (en) | 2004-03-24 |
DE69915819D1 (en) | 2004-04-29 |
AU3005899A (en) | 1999-11-23 |
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