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EP1040519A1 - Plastic composite body - Google Patents

Plastic composite body

Info

Publication number
EP1040519A1
EP1040519A1 EP98965611A EP98965611A EP1040519A1 EP 1040519 A1 EP1040519 A1 EP 1040519A1 EP 98965611 A EP98965611 A EP 98965611A EP 98965611 A EP98965611 A EP 98965611A EP 1040519 A1 EP1040519 A1 EP 1040519A1
Authority
EP
European Patent Office
Prior art keywords
particles
plastic
filler
size
composite body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP98965611A
Other languages
German (de)
French (fr)
Inventor
Alexandra Atzesdorfer
Achim Neu
Thies Janczek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP1040519A1 publication Critical patent/EP1040519A1/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293—Organic, e.g. plastic
    • H01L23/295—Organic, e.g. plastic containing a filler
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/12—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives
    • C08J5/124—Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives using adhesives based on a macromolecular component
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49503—Lead-frames or other flat leads characterised by the die pad
    • H01L23/49513—Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/778—Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • Y10S977/779—Possessing nanosized particles, powders, flakes, or clusters other than simple atomic impurity doping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/89—Deposition of materials, e.g. coating, cvd, or ald
    • Y10S977/893—Deposition in pores, molding, with subsequent removal of mold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Definitions

  • the invention relates to plastic composite bodies such as electrical components, which have a body made of a semiconductor material, for example a microchip.
  • ead frames It is known to attach microchips to a conductive carrier frame with a chip-attach adhesive layer, which are called ead frames. These ead frames are then attached to conductor tracks on a circuit board using conductive adhesive or by soldering.
  • plastic composite bodies such as semiconductor components, which have a base body made of metal, such as a lead frame, and a body made of semiconductor material, such as a microchip, undesirable failures often occur under real environmental conditions. This is also attributed to a lack of heat dissipation from the microchip.
  • a plastic mass is provided in particular for the firm connection of semiconductor bodies with other materials such as metal and / or for the encapsulation of semiconductor bodies.
  • the plastic mass has at least one plastic, which can be a thermoset or a thermoplastic, at least one filler being embedded in the plastic.
  • the filler has at least one of the fillers has nanoscale, in particular spherical, particles produced using a condensation process.
  • a new technology of physical evaporation makes it possible to produce particles that are smaller than 100 nm.
  • the particles are formed spherically by condensation, the type of connection being determinable through the use of certain process gases. In this way it is possible to produce oxides, nitrides etc. with a particularly small size.
  • the plastic composition according to the invention protects an electrical component from mechanical and chemical influences.
  • a semiconductor chip is encapsulated in a molding process together with its contacting, for example with a lead frame, with a molding compound based, for example, on epoxy resin under the action of pressure and temperature.
  • a molding compound based, for example, on epoxy resin under the action of pressure and temperature.
  • a high degree of filling can be ensured in the plastic composition according to the invention, so that only a small proportion of expensive base resin is necessary.
  • Good flow properties are advantageously provided in the mold, with the advantage that the package and the connecting wires are not damaged or displaced in the injection molding process.
  • the coordination of the tool design and the injection parameters can be significantly simplified.
  • the particles do not represent a mechanical obstacle compared to the epoxy resin, so that the flow behavior of the molding compound in the mold flow improves. There- This increases the service life of the mold tool, since the injection opening is exposed to little wear due to smaller particles.
  • the mechanical load on the wires and chips decreases because the particles flow more easily around the chip, which is an obstacle.
  • the degree of filling in the plastic composition according to the invention is increased through the use of nanosphericals, which results in a lower coefficient of thermal expansion.
  • the plastic composition according to the invention can also be used as a so-called die-bonding adhesive with a high degree of filling, as a result of which a high thermal conductivity is achieved, for example for the assembly of power semiconductor components on metallic lead frames. This saves technically difficult assembly techniques such as soldering or ligating.
  • the use of nanoscale fillers can enable higher fill levels in adhesives.
  • the thermal conductivity of an adhesive layer produced with a plastic composition according to the invention can also be varied, and targeted use in the case of a specific requirement for thermal conductivity is possible.
  • the size of the particles can preferably be in a range up to 1000% of the size of the oligomer compounds of the plastic, since this results in a particularly good incorporation of the particles into a plastic which is in the crosslinking process, which results in a tight packing of the plastic and at the same time closed resin covering of the particles is guaranteed.
  • An oligomer connection of the plastic shows an intermediate state between the monomeric state of the plastic and the polymeric or completely crosslinked state of the plastic.
  • typical particle sizes smaller than 1 ⁇ m and preferably in the range smaller than 40 nm are provided.
  • particles with a size of less than 10 can nm are provided. Smaller particles are conceivable.
  • plastic compound with an electrically insulating adhesive layer Aluminum oxides Al 2 O 3 , boron nitride BN and / or aluminum nitride A1N are preferably used. This results in an adhesive layer with good thermal conductivity, which is suitable for electrically isolating a semiconductor component from a lead frame.
  • the filler can also have metallic particles.
  • adhesive layers can be produced with the plastic mass according to the invention, by means of which a semiconductor component is connected in an electrically conductive manner to a lead frame.
  • the resistance of an adhesive layer can also be set, which ensures good thermal conductivity.
  • Silver, palladium and / or copper are currently preferably used as metal particles.
  • the invention is also implemented in a composite body, which in particular represents an integrated circuit.
  • Composite body has a base body, in particular made of a metal, and a chip made of a semiconductor material fastened over an adhesive layer on the base body, the adhesive layer being produced from the plastic composition according to the invention. Accordingly, the invention also encompasses the use of the plastic composition according to the invention in a manufacturing process for the firm connection of semiconductor bodies with other materials such as metal. This results in use as a thief adhesive with a high degree of filling.
  • the invention also encompasses a composite body and in particular an integrated circuit which comprises a chip Has semiconductor material, a base body, in particular made of metal, and a sheathing, the sheathing having a filler and a plastic, as are used in the plastic composition according to the invention.
  • the invention also encompasses the use of the plastic composition according to the invention for the encapsulation of semiconductor bodies in order to form a housing.
  • Packages are preferably produced here, the wrapping or housing of which consists of a biphenyl-based molding compound with a filler which has Si0 2 as a nanoscal spherical with a diameter of approximately 30 nm.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Polymers & Plastics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Die Bonding (AREA)

Abstract

An integrated circuit has a lead frame to which a chip made of a semiconductor material is secured by an adhesive layer. The adhesive layer contains at least one filler and one plastic material. The filler comprises nanoscale, in particular spherical particles produced by a condensation process and which can be conductive or insulating. It is also possible to provide the chip with a plastic sheath that contains such fillers.

Description

Beschreibungdescription

KunststoffverbundkörperPlastic composite body

Die Erfindung betrifft KunstStoffVerbundkörper wie elektrische Bauelemente, die einen Körper aus einem Halbleitermaterial, beispielsweise einen Mikrochip aufweisen.The invention relates to plastic composite bodies such as electrical components, which have a body made of a semiconductor material, for example a microchip.

Es ist bekannt, Mikrochips mit einer Chip-Attach- KlebstoffSchicht auf leitfähigen Trägerrahmen zu befestigen, die ead-Frame genannt werden. Diese ead-Frames werden dann mittels Leitkleber oder durch Lötung an Leiterbahnen auf einer Leiterplatte befestigt.It is known to attach microchips to a conductive carrier frame with a chip-attach adhesive layer, which are called ead frames. These ead frames are then attached to conductor tracks on a circuit board using conductive adhesive or by soldering.

Bei KunstStoffverbundkörpern wie bei Halbleiterbauelementen, die einen Grundkörper aus Metall wie beispielsweise ein Lead- Frame und einen Körper aus Halbleitermaterial wie beispielsweise einen Mikrochip aufweisen, treten unter realen Umweltbedingungen häufig unerwünschte Ausfälle auf. Dies wird auch auf eine mangelnde Wärmeableitung vom Mikrochip zurückgeführt .In plastic composite bodies such as semiconductor components, which have a base body made of metal, such as a lead frame, and a body made of semiconductor material, such as a microchip, undesirable failures often occur under real environmental conditions. This is also attributed to a lack of heat dissipation from the microchip.

Es ist daher Aufgabe der Erfindung, Lösungen bereitzustellen, die einen zuverlässigen Betrieb auch unter hoher Wärmebela- stung gewährleisten.It is therefore an object of the invention to provide solutions which ensure reliable operation even under high thermal loads.

Diese Aufgabe wird durch den Gegenstand der Hauptansprüche gelöst. Verbesserte Ausführungsformen ergeben sich aus den jeweiligen Unteransprüchen.This object is achieved by the subject matter of the main claims. Improved embodiments result from the respective subclaims.

Gemäß der Erfindung wird eine Kunststoffmasse insbesondere zur festen Verbindung von Halbleiterkörpem mit anderen Materialien wie Metall und/oder zur Umhüllung von Halbleiterkörpern bereitgestellt. Die Kunststoffmasse weist wenigstens ei- nen Kunststoff auf, der ein Duroplast oder ein Thermoplast sein kann, wobei wenigstens ein Füllstoff in den Kunststoff eingelagert ist. Dabei weist der Füllstoff bzw. wenigstens einer der Füllstoffe nanoskalige, insbesondere sphärische und mit einem Kondensationsverfahren hergestellte Partikel auf.According to the invention, a plastic mass is provided in particular for the firm connection of semiconductor bodies with other materials such as metal and / or for the encapsulation of semiconductor bodies. The plastic mass has at least one plastic, which can be a thermoset or a thermoplastic, at least one filler being embedded in the plastic. The filler has at least one of the fillers has nanoscale, in particular spherical, particles produced using a condensation process.

Eine neue Technologie des physikalischen Verdampfens ermöglicht es, Partikel herzustellen, die kleiner als 100 nm sind. Die Partikel entstehen sphärisch durch Kondensation, wobei die Art der Verbindung durch die Verwendung von bestimmten Prozeßgasen bestimmbar ist. Auf diese Weise ist es möglich, Oxide, Nitride etc. mit besonders kleiner Größe herzustellen.A new technology of physical evaporation makes it possible to produce particles that are smaller than 100 nm. The particles are formed spherically by condensation, the type of connection being determinable through the use of certain process gases. In this way it is possible to produce oxides, nitrides etc. with a particularly small size.

Durch die Verwendung in der erfindungsgemäßen Kunststoffmasse ergeben sich zahlreiche Vorteile.The use in the plastic composition according to the invention results in numerous advantages.

Beim Einsatz in der Halbleitertechnologie wird mit der erfin- dungsgemäßen Kunststoffmasse ein elektrisches Bauelement vor mechanischen und chemischen Einflüssen geschützt. Dabei wird ein Halbleiterchip in einem Moldprozeß samt seiner Kontaktie- rung beispielsweise mit einem Lead-Frame mit einer beispielsweise auf Epoxidharz basierenden Pressmasse unter Einwirkung von Druck und Temperatur umspritzt. Abschließend stehen aus dem so hergestellten Gehäuse nur noch die Anschlußdrähte heraus, die galvanisiert und umgebogen werden, um ein fertiges sogenanntes "Package" zu bilden.When used in semiconductor technology, the plastic composition according to the invention protects an electrical component from mechanical and chemical influences. Here, a semiconductor chip is encapsulated in a molding process together with its contacting, for example with a lead frame, with a molding compound based, for example, on epoxy resin under the action of pressure and temperature. Finally, only the connecting wires protrude from the housing produced in this way, which are galvanized and bent over to form a finished so-called "package".

Bei der erfindungsgemäßen Kunststoffmasse ist ein hoher Füllgrad gewährbar, so daß nur ein geringer Anteil von teurem Basisharz notwendig ist. Dabei werden vorteilhafterweise gute Fließeigenschaften im Moldwerkzeug bereitgestellt, wobei sich der Vorteil ergibt, daß das Package und die Anschlußdrähte im Spritzprozeß nicht beschädigt oder verschoben werden.A high degree of filling can be ensured in the plastic composition according to the invention, so that only a small proportion of expensive base resin is necessary. Good flow properties are advantageously provided in the mold, with the advantage that the package and the connecting wires are not damaged or displaced in the injection molding process.

Bei der Verwendung der erfindungsgemäßen Kunststoffmasse kann ein Optimieren der Füllstoffeinbindung in die Pressmasse, die Abstimmung des Tooldesigns und der Spritzparameter deutlich vereinfacht werden. Die Partikel stellen nämlich gegenüber dem Epoxidharz kein mechanisches Hindernis dar, so daß sich das Fließverhalten der Preßmasse im Moldflow verbessert. Da- durch steigt die Standzeit des Moldtools, da die Einspritzöffnung mit einem geringen Verschleiß durch kleinere Partikel ausgesetzt ist. Die mechanische Belastung der Drähte und Chips sinkt, da die Partikel leichter den ein Hindernis darstellenden Chip umfließen. Der Füllgrad bei der erfindungsgemäßen Kunststoffmasse ist durch die Verwendung von Nanosphäricals erhöht, wodurch sich ein geringerer Wärmeausdehnungskoeffizient ergibt.When using the plastic compound according to the invention, optimizing the incorporation of filler into the molding compound, the coordination of the tool design and the injection parameters can be significantly simplified. The particles do not represent a mechanical obstacle compared to the epoxy resin, so that the flow behavior of the molding compound in the mold flow improves. There- This increases the service life of the mold tool, since the injection opening is exposed to little wear due to smaller particles. The mechanical load on the wires and chips decreases because the particles flow more easily around the chip, which is an obstacle. The degree of filling in the plastic composition according to the invention is increased through the use of nanosphericals, which results in a lower coefficient of thermal expansion.

Die erfindungsgemäße Kunststoffmasse kann auch als sogenannter Diebondkleber mit hohem Füllgrad eingesetzt werden, wodurch eine hohe Wärmeleitfähigkeit beispielsweise zur Montage von Leistungshalbleiterbausteinen auf metallischen Lead- Frames erreicht wird. Dadurch kann man sich prozeßtechnisch schwierigere Montagetechniken wie Löten oder Ligieren ersparen. Durch die Verwendung von nanoskaligen Füllstoffen können nämlich höhere Füllgrade in Klebern ermöglicht werden. Zudem kann die Wärmeleitfähigkeit einer mit einer erfindungsgemäßen Kunststoffmasse hergestellten KlebstoffSchicht auch variiert werden und ein gezielter Einsatz bei einer bestimmten Anforderung an die Wärmeleitfähigkeit ist möglich.The plastic composition according to the invention can also be used as a so-called die-bonding adhesive with a high degree of filling, as a result of which a high thermal conductivity is achieved, for example for the assembly of power semiconductor components on metallic lead frames. This saves technically difficult assembly techniques such as soldering or ligating. The use of nanoscale fillers can enable higher fill levels in adhesives. In addition, the thermal conductivity of an adhesive layer produced with a plastic composition according to the invention can also be varied, and targeted use in the case of a specific requirement for thermal conductivity is possible.

Die Größe der Partikel können vorzugsweise in einem Bereich bis 1000 % der Größe von Oligomerverbindungen des Kunststof- fes gelegen sein, denn dadurch ergibt sich ein besonders guter Einbau der Partikel in einen sich im Vernetzungsprozeß befindlichen Kunststoff, wodurch sich eine dichte Packung des Kunststoffs bei gleichzeitig geschlossener Harzbedeckung der Partikel gewährleistet wird. Dabei ist unter einer Oligomer- Verbindung des Kunststoffs ein Zwischenzustand zwischen dem monomeren Zustand des Kunststoffs und dem polymeren bzw. komplett vernetzten Zustand des Kunststoffs zu sehen.The size of the particles can preferably be in a range up to 1000% of the size of the oligomer compounds of the plastic, since this results in a particularly good incorporation of the particles into a plastic which is in the crosslinking process, which results in a tight packing of the plastic and at the same time closed resin covering of the particles is guaranteed. An oligomer connection of the plastic shows an intermediate state between the monomeric state of the plastic and the polymeric or completely crosslinked state of the plastic.

Gemäß der Erfindung sind typische Partikelgrößen kleiner als 1 μm und vorzugsweise im Bereich kleiner als 40 nm vorgesehen. Derzeit können Partikel mit einer Größe von bis unter 10 nm bereitgestellt werden. Es sind noch kleinere Partikel denkbar .According to the invention, typical particle sizes smaller than 1 μm and preferably in the range smaller than 40 nm are provided. Currently, particles with a size of less than 10 can nm are provided. Smaller particles are conceivable.

Wenn der Füllstoff bzw. einer der Füllstoffe keramische Par- tikel aufweist, dann läßt sich mit der erfindungsgemäßenIf the filler or one of the fillers has ceramic particles, then with the invention

Kunststoffmasse eine elektrisch isolierende Kleberschicht bereitstellen. Vorzugsweise kommen Aluminiumoxide Al203, Bornitrid BN und/oder Aluminiumnitrid A1N zum Einsatz. Dadurch ergibt sich eine KlebstoffSchicht mit guter Wärmeleitfähigkeit, die dazu geeignet ist, einen Halbleiterbaustein von einem Lead-Frame elektrisch zu isolieren.Provide plastic compound with an electrically insulating adhesive layer. Aluminum oxides Al 2 O 3 , boron nitride BN and / or aluminum nitride A1N are preferably used. This results in an adhesive layer with good thermal conductivity, which is suitable for electrically isolating a semiconductor component from a lead frame.

Der Füllstoff kann auch metallische Partikel aufweisen. Dadurch lassen sich mit der erfindungsgemäßen Kunststoffmasse Kleberschichten herstellen, durch die ein Halbleiterbaustein elektrisch leitend mit einem Lead-Frame verbunden wird. Durch die Steuerung des Mischungsverhältnisses von elektrisch leitfähigen Partikeln zu elektrisch isolierenden Partikeln kann zudem der Widerstand einer KlebstoffSchicht eingestellt wer- den, wobei eine gute Wärmeleitfähigkeit gewährleistet ist.The filler can also have metallic particles. As a result, adhesive layers can be produced with the plastic mass according to the invention, by means of which a semiconductor component is connected in an electrically conductive manner to a lead frame. By controlling the mixing ratio of electrically conductive particles to electrically insulating particles, the resistance of an adhesive layer can also be set, which ensures good thermal conductivity.

Als Metallpartikel werden derzeit vorzugsweise Silber, Palladium und/oder Kupfer verwendet.Silver, palladium and / or copper are currently preferably used as metal particles.

Die Erfindung ist auch in einem Verbundkörper realisiert, der insbesondere einen integrierten Schaltkreis darstellt. DerThe invention is also implemented in a composite body, which in particular represents an integrated circuit. The

Verbundkörper weist einen Grundkörper insbesondere aus einem Metall sowie einen über einer Kleberschicht auf dem Grundkörper befestigten Chip aus einem Halbleitermaterial auf, wobei die Kleberschicht aus der erfindungsgemäßen Kunststoffmasse hergestellt ist. Dementsprechend umfaßt die Erfindung auch die Verwendung der erfindungsgemäßen Kunststoffmasse bei einem Herstellungsverfahren zur festen Verbindung von Halbleiterkörpern mit anderen Materialien wie Metall . Dadurch wird ein Einsatz als Diebondkleber mit hohem Füllgrad bewirkt.Composite body has a base body, in particular made of a metal, and a chip made of a semiconductor material fastened over an adhesive layer on the base body, the adhesive layer being produced from the plastic composition according to the invention. Accordingly, the invention also encompasses the use of the plastic composition according to the invention in a manufacturing process for the firm connection of semiconductor bodies with other materials such as metal. This results in use as a thief adhesive with a high degree of filling.

Die Erfindung umfaßt auch einen Verbundkörper und insbesondere einen integrierten Schaltkreis, der einen Chip aus einem Halbleitermaterial, einen Grundkörper insbesondere aus Metall sowie eine Umhüllung aufweist, wobei die Umhüllung einen Füllstoff sowie einen Kunststoff aufweist, wie sie in der erfindungsgemäßen Kunststoffmasse eingesetzt werden.The invention also encompasses a composite body and in particular an integrated circuit which comprises a chip Has semiconductor material, a base body, in particular made of metal, and a sheathing, the sheathing having a filler and a plastic, as are used in the plastic composition according to the invention.

Dementsprechend umfaßt die Erfindung auch die Verwendung der erfindungsgemäßen Kunststoffmasse zur Umhüllung von Halbleiterkörpern, um ein Gehäuse auszubilden.Accordingly, the invention also encompasses the use of the plastic composition according to the invention for the encapsulation of semiconductor bodies in order to form a housing.

Vorzugsweise werden hierbei Packages hergestellt, deren Umhüllung bzw. Gehäuse mit einer Pressmasse auf Biphenylbasis mit einem Füllstoff besteht, der Si02 als Nanoscal-sphärical mit ca. 30 nm Durchmessern aufweist. Packages are preferably produced here, the wrapping or housing of which consists of a biphenyl-based molding compound with a filler which has Si0 2 as a nanoscal spherical with a diameter of approximately 30 nm.

Claims

Patentansprücheclaims 1. Kunststoffmasse insbesondere zur festen Verbindung von Halbleiterkörpern mit anderen Materialien wie Metall und/oder zur Umhüllung von Halbleiterkörpern, die wenigstens einen Kunststoff, insbesondere ein Duroplast, sowie wenigstens einen Füllstoff aufweist, dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe nanoscalige, insbesondere sphärische und mit einem Kondensationsverfahren hergestellte Partikel aufweist.1. Plastic composition, in particular for the firm connection of semiconductor bodies with other materials such as metal and / or for the encapsulation of semiconductor bodies, which has at least one plastic, in particular a thermoset, and at least one filler, characterized in that the filler or at least one of the fillers is nanoscale , in particular spherical particles produced using a condensation process. 2. Kunststoffmasse nach Anspruch 1, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 1000% der2. Plastic composition according to claim 1, characterized in that the size of the particles in a range up to 1000% Größe von Oligomerverbindungen des Kunststoffs gelegen ist.Size of oligomer compounds of the plastic is located. Kunststoffmasse nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 40nm gelegen ist.Plastic mass according to claim 1 or 2, characterized in that the size of the particles is in a range up to 40nm. Kunststoffmasse nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe keramische Partikel aufweist.Plastic composition according to one of claims 1 to 3, characterized in that the filler or at least one of the fillers has ceramic particles. Kunststoffmasse nach Anspruch 4, dadurch gekennzeichnet, daß die Partikel Aluminiumoxid, Bornitrit und/oder Aluminiumnitrit aufweisen.Plastic composition according to claim 4, characterized in that the particles have aluminum oxide, boron nitride and / or aluminum nitrite. Kunststoffmasse nach einem der Ansprüche 1 bis 5 , d a d u r c h g e k e n n z e i c h n e t , d a ß der Füllstoff bzw. die Füllstoffe metallische Partikel aufweisen.Plastic mass according to one of claims 1 to 5, characterized in that ß the filler or fillers have metallic particles. 7. Kunststoffmasse nach Anspruch 6, dadurch gekennzeichnet, daß die Partikel Silber, Palladium und/oder Kupfer aufweisen.7. Plastic composition according to claim 6, characterized in that the particles have silver, palladium and / or copper. 8. Verbundkörper, insbesondere integrierter Schaltkreis, mit einem Grundkörper insbesondere aus einem Metall und mit einem über eine Kleberschicht auf dem Grundkörper befestigten Chip aus einem Halbleitermaterial, wobei die Kleberschicht wenigstens einen Füllstoff sowie einen Kunststoff, insbesondere ein Duroplast, aufweist dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe nanoscalige, insbesondere sphärische und mit einem Kondensationsverfahren hergestellte Partikel aufweist.8. Composite body, in particular integrated circuit, with a base body in particular made of a metal and with a chip attached to the base body via an adhesive layer made of a semiconductor material, the adhesive layer having at least one filler and a plastic, in particular a thermoset, characterized in that the Has filler or at least one of the fillers nanoscale, in particular spherical and produced by a condensation process. 9. Verbundkörper nach Anspruch 8 , dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 1000% der Größe von Oligomerverbindungen des Kunststoffs gelegen ist.9. Composite body according to claim 8, characterized in that the size of the particles is in a range up to 1000% of the size of oligomer compounds of the plastic. 10. Verbundkörper nach Anspruch 8 oder Anspruch 9, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 40nm gelegen ist.10. Composite body according to claim 8 or claim 9, characterized in that the size of the particles is in a range up to 40nm. 11. Verbundkörper nach einem der Ansprüche 8 bis 10, dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe keramische Partikel aufweist.11. Composite body according to one of claims 8 to 10, characterized in that the filler or at least one of the fillers has ceramic particles. 12. Verbundkörper nach Anspruch 11, dadurch gekennzeichnet, daß die Partikel Aluminiumoxid, Bornitrit und/oder Aluminiumnitrit aufweisen.12. Composite body according to claim 11, characterized in that the particles have aluminum oxide, boron nitride and / or aluminum nitrite. 13. Kunststoffmasse nach einem der Ansprüche 1 bis 3 , dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe metallische Partikel aufweist.13. Plastic composition according to one of claims 1 to 3, characterized in that the filler or at least one of the fillers has metallic particles. 14. Kunststoffmasse nach Anspruch 6, dadurch gekennzeichnet, daß die Partikel Silber, Palladium und/oder Kupfer aufweisen.14. Plastic composition according to claim 6, characterized in that the particles have silver, palladium and / or copper. 15.Verwendung von nanoscaligen, insbesondere sphärischen, mit einem Kondensationsverfahren hergestellte Partikel als Füllstoff in einer Kunststoffmasse bei einem Herstellungsverfahren zur festen Verbindung von Halbleiterkörpern mit anderen Materialien wie Metall und/oder zur Umhüllung von Halbleiterkörpern mit der Kunststoffmasse.15.Use of nanoscale, in particular spherical, particles produced using a condensation process as filler in a plastic mass in a manufacturing process for firmly connecting semiconductor bodies to other materials such as metal and / or for encasing semiconductor bodies with the plastic mass. 16. Verwendung eines Stoffs nach Anspruch 15, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 1000% der Größe von Oligomerverbindungen des Kunststoffs gelegen ist.16. Use of a substance according to claim 15, characterized in that the size of the particles is in a range up to 1000% of the size of oligomer compounds of the plastic. 17. Verwendung eines Stoffs nach Anspruch 15 oder Anspruch 16, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 40nm gelegen ist.17. Use of a substance according to claim 15 or claim 16, characterized in that the size of the particles is in a range up to 40nm. 18. Verwendung eines Stoffs nach einem der Ansprüche 15 bis 17, dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe keramische Partikel aufweist. 18. Use of a substance according to one of claims 15 to 17, characterized in that the filler or at least one of the fillers has ceramic particles. 19.Verwendung eines Stoffs nach Anspruch 18, dadurch gekennzeic net, daß die Partikel Aluminiumoxid, Bornitrit und/oder Aluminiumnitrit aufweisen.19.Use of a substance according to claim 18, characterized in that the particles have aluminum oxide, boron nitride and / or aluminum nitrite. 20.Verwendung eines Stoffs nach einem der Ansprüche 15 bis 19, dadurch gekennzeichnet, daß die Partikel metallische Partikel aufweist.20.Use of a substance according to one of claims 15 to 19, characterized in that the particle comprises metallic particles. 21.Verwendung eines Stoffs nach Anspruch 19, dadurch gekennzeichnet, daß die Partikel Silber, Palladium und/oder Kupfer aufweisen.21.Use of a substance according to claim 19, characterized in that the particles have silver, palladium and / or copper. 22. Verbundkörper, insbesondere integrierter Schaltkreis, mit einem Chip aus einem Halbleitermaterial, mit einem Grundkörper insbesondere aus Metall sowie mit einer Umhüllung, wobei die Umhüllung wenigstens einen Füllstoff sowie einen Kunststoff, insbesondere ein Duroplast, aufweist dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe nanoscalige, insbesondere sphärische und mit einem Kondensationsverfahren hergestellte Partikel aufweist.22. Composite body, in particular integrated circuit, with a chip made of a semiconductor material, with a base body, in particular made of metal, and with a covering, the covering having at least one filler and a plastic, in particular a thermoset, characterized in that the filler or at least one of the fillers has nanoscale, in particular spherical, particles produced using a condensation process. 23. Verbundkörper nach Anspruch 22, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 1000% der23. Composite body according to claim 22, characterized in that the size of the particles in a range up to 1000% Größe von Oligomerverbindungen des Kunststoffs gelegen ist.Size of oligomer compounds of the plastic is located. 24. Verbundkörper nach Anspruch 22 oder Anspruch 23, dadurch gekennzeichnet, daß die Größe der Partikel in einem Bereich bis 40nm gelegen ist.24. Composite body according to claim 22 or claim 23, characterized in that the size of the particles is in a range up to 40nm. 25. Verbundkörper nach einem der Ansprüche 22 bis 24, dadurch gekennzeichnet, daß der Füllstoff bzw. wenigstens einer der Füllstoffe keramische Partikel aufweist.25. Composite body according to one of claims 22 to 24, characterized in that the filler or at least one of the fillers has ceramic particles. 26. Verbundkörper nach Anspruch 25, dadurch gekennzeichnet, daß die Partikel Aluminiumoxid, Bornitrit und/oder Aluminiumnitrit aufweisen. 26. Composite body according to claim 25, characterized in that the particles have aluminum oxide, boron nitride and / or aluminum nitrite.
EP98965611A 1997-12-19 1998-12-14 Plastic composite body Ceased EP1040519A1 (en)

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DE19756887 1997-12-19
DE1997156887 DE19756887A1 (en) 1997-12-19 1997-12-19 Plastic composite body
PCT/DE1998/003661 WO1999033106A1 (en) 1997-12-19 1998-12-14 Plastic composite body

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