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EP0933982B1 - Plasma generator device - Google Patents

Plasma generator device Download PDF

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Publication number
EP0933982B1
EP0933982B1 EP99890002A EP99890002A EP0933982B1 EP 0933982 B1 EP0933982 B1 EP 0933982B1 EP 99890002 A EP99890002 A EP 99890002A EP 99890002 A EP99890002 A EP 99890002A EP 0933982 B1 EP0933982 B1 EP 0933982B1
Authority
EP
European Patent Office
Prior art keywords
anode
cathode
chamber
module
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99890002A
Other languages
German (de)
French (fr)
Other versions
EP0933982A3 (en
EP0933982A2 (en
Inventor
Gerhard Schwankhart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inocon Technologie GmbH
Original Assignee
Inocon Technologie GmbH
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Filing date
Publication date
Application filed by Inocon Technologie GmbH filed Critical Inocon Technologie GmbH
Publication of EP0933982A2 publication Critical patent/EP0933982A2/en
Publication of EP0933982A3 publication Critical patent/EP0933982A3/en
Application granted granted Critical
Publication of EP0933982B1 publication Critical patent/EP0933982B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3478Geometrical details

Definitions

  • the invention relates to a plasma generator with holder, e.g. for a welding machine, according to the preamble of claim 1.
  • the cathode and the anode is usually connected with terminal connections to connecting cables and mechanically connected to each other via appropriate spacers, which also determine the chamber through which a corresponding gas is supplied to the burning between the anode and the cathode arc.
  • the cathode Due to the inevitable wear of the cathode, this must be reworked after a certain number of operating hours. For this purpose it is necessary to disassemble the plasma generator and to regrind the cathode. Thereafter, the cathode must again be set very accurately with respect to the anode to allow for the intended machining of a workpiece, e.g. the attachment of a weld or the application of a metal layer to perform. These adjustments are associated with a very considerable amount of time and cause significant downtime of the tool and thus production losses.
  • laser devices or electron beam devices e.g. used for welding or cutting, although these are considerably more expensive to manufacture than plasma-working devices, e.g. Welding equipment, and the required preparation of the workpieces to be welded is considerably more expensive, since just laser or electron beams can only generate heat by absorbing, but even no heat radiating, as is the case with the plasma.
  • US Pat. No. 5,328,516 A, US Pat. No. 5,258,599 A and EP 0 079 019 A1 disclose devices in which plasma generators are provided which operate with consuming cathodes and in which the anodes together with the holder are designed as modules and can be handled together are. This module can be removed from a holder, which also has the holder or guide for the consumable cathode.
  • the plasma generator has a very large length. Since, as a rule, the plasma generator is clamped at its end region remote from the nozzle orifice into a receptacle of a welding robot, correspondingly large inaccuracies in the guidance of the machining and the reproducibility, in particular after a change of the module, are decisive due to the unavoidable tolerances the nozzle.
  • the aim of the invention is to avoid these disadvantages and to propose a device with which a largely continuous use with high reproducibility of the settings even after a replacement of a module is possible.
  • the proposed measures make it possible to easily exchange the plasma generator designed as a module in a simple manner. It is sufficient to remove the module from the holder and replace it with a new one. This eliminates the previously required disassembly of the leads, since they are connected to the arranged in the holder pins.
  • the cathode can be set optimized for the intended use and fixed in their position. The latter can be done in any way.
  • the cathode may be operatively connected to the holding member in a non-releasable manner, e.g. be soldered.
  • the proposed measures also make it possible to exchange the plasma generator in a simple and rapid manner. At the same time also results in a very simple construction of the module, whereby the possibility is given to solve the cathode after disassembly of the module from the collet and regrind. It is also possible to make better use of the cathode whose two end portions conical, the cone angle is adapted to the particular application.
  • the adjustment of the cathode can be carried out after a revision of the cathode with a tailored to the particular application, or use of the module setting gauge. Since such a reworking of the cathode can be done after a replacement of the entire module, such work does not cause significant interruptions of production, e.g. in a production line.
  • the features of claim 6 may be provided, wherein the insert is suitably soldered into the mouth of the anode.
  • the features of claim 7 allow the anode to be easily exchanged, e.g. if this is worn out accordingly, or if for a particular use of the device, or specific work a different geometry of the anode is appropriate.
  • the contact pins for the production of the electrical connection can be used simultaneously for the supply of the coolant.
  • one of an electrically insulating material e.g. Ceramics produced substantially hollow cylindrical holder 1 is provided, in one end region of which also made of an insulating material insert 2 is pressed.
  • This insert 2 is penetrated by a central, a gas supply line 3 forming tube which terminates at the end face of the projecting beyond the front side of the holder 1 insert 2. Furthermore, the insert 2 still has two bores 4 located in a diametral plane, in which press-fit parts 7 serving as abutments are held, which in turn are interspersed with clearance by the cores 5 of connection lines 6.
  • connecting lines 6 are connected to a voltage supply, not shown, which is suitable to deliver in addition to the required for the work to be performed operating power also required for the ignition of the plasma ignition pulses.
  • the contact pins 9 which are soldered to the souls 5, push outward.
  • the contact pins 9 are provided at their free end with a frontal projection 10 which cooperates with a contact surface of a plasma generator 11 which is held in a arranged on the end face of the holder 1 fastening means 23, which is manufactured as a made of an electrically insulating material bracket is formed, in which the plasma generator 11 is inserted from above.
  • This plasma generator 11 has a connecting part 13 made of an electrically insulating material, e.g. Ceramic, which is conically tapered in its lower portion and has an opening 14 at its lower end face.
  • a connecting part 13 made of an electrically insulating material, e.g. Ceramic, which is conically tapered in its lower portion and has an opening 14 at its lower end face.
  • This opening 14 is penetrated by an annular anode 15, which is made in the usual way of an electrically conductive and thermally highly resilient material and has a nozzle opening 16 in its mouth region.
  • the anode 15 has an upwardly conically widening region, which rests on the inside of the connecting part 13 and which merges into a cylindrical region.
  • an intermediate part 17 which is annular and made of an electrically insulating material, e.g. Ceramic, is made.
  • the intermediate part 17 At the upper end side of the intermediate part 17 is made of a highly electrically conductive material, such as copper, produced holding part 18, in which a cathode 19 is pressed, consisting of an electrically conductive and thermally highly resilient material, such as a tungsten ceria -Alloy is made and in its nozzle opening 16 of the anode 15 near end region is conical.
  • a highly electrically conductive material such as copper
  • the anode 15, as well as the holding member 18 are adapted to define the mutual position of the cathode 10 and the nozzle opening 16 of the anode expediently in the connecting part 13.
  • the anode 15, the intermediate part 17 and the holding part 18 with the pressed-in cathode 19 together with the connecting part 13 form a module of the device, which can be easily installed in the holder and removed therefrom.
  • an insulating material pressure member 20 which has a cathode 19 with clearance receiving bore 21 and projects beyond the end face of the connecting part 13.
  • This pressure member 20 cooperates with a cover 22 which is screwed onto an in the upper end face of the connecting part 13 near the area arranged external thread 23.
  • the connecting part 13 is provided with three along a surface line arranged radial bores 24, 25, of which the holes 24 allow the passage of the lugs 10 of the contact pins 9 and in the region of the holding part 18, and the anode 15 are.
  • the bore 25 is disposed in the region of the intermediate part 17 and aligned with a radially extending inlet 26 of the intermediate part which leads to a limited by the inner wall of the intermediate part 17 chamber 27, which is penetrated by the cathode 19.
  • the bore 25 is aligned with the plasma generator used in the holder 1, which is constructed as a module, also with the gas supply line 3 provided in the holder 1.
  • connection lines 6 To install the plasma generator 11 constructed as a module, it suffices the connection lines 6, the insulating coats 28 are performed with play in the holes 4 of the insert 2 of the holder 1, withdraw and insert the plasma generator 11 from above into the bracket 12. Thereafter, the leads 6 can be released and the pins 9 engage in the holes 24 of the connecting part 13 and secure the position of the plasma generator 11 in the holder 1. At the same time they are with their faces by means of the springs 8 to the holding part 8, or the anode 15 is pressed and thus made a good electrical contact.
  • a plasma is formed, which emerges from the nozzle opening 16 and is e.g. can be used to make a weld or to cut materials.
  • a holder 1 ' is provided, the holes 4' for receiving the contact pins 9 ', wherein the contact pins 9' are pierced in the axial direction.
  • the contact pins 9 ' are provided in an area outside the holder 1' with an external thread 29, are screwed onto the terminal nuts 30, between which terminal lugs 31 of leads 8 (Fig. 4) are clamped.
  • the rear end of the contact pins 9 ' is designed for the connection of hoses through which cooling water can be supplied.
  • a gas supply line 3 ' is held in the holder 1', which, as can be seen from Fig. 4, via a radial channel 32 which is closed with a grub screw 33 to the outside, and an opening into this axial bore 34, in which a hose nozzle 35 is screwed in, is connected to a gas hose 36, via which a gas required for generating the plasma can be supplied.
  • the gas supply line 3 ' is secured by means of a screw 39 engaging in this position.
  • the contact pins 9 ' project beyond the end face 38 of the holder 1' in their spring-loaded rest position and engage in the lateral surface of a plasma generator 11 'constructed as a module.
  • the constructed as a module plasma generator 11 ' is held by means of a pipe clamp 40, which is held on the end face 38 of the holder 1' fixed part with pins 42.
  • the clamp 40 has a hinge 43, whose axis is perpendicular to the axis of the holder 1 '.
  • the holding part 18' of the cathode 19 ' is formed by a collet, which is made of a material with good electrical conductivity. This collet is held in a conventional manner in a receptacle 44 which is screwed into a contact part 45.
  • This contact part 45 is provided with a coolant chamber 46, which is connected via a radial channel 47 with a connection opening 48.
  • this connection opening 48 is aligned in the holder 1 'mounted plasma generator 11' with the contact pins 9 '.
  • a clamping nut 49 is provided, which is supported by two seals 50 on the upper end face of the receptacle 44, whereby a leakage of coolant is avoided, the receptacle 44 for sealing the coolant chamber 46 also via a seal 51 is supported on the contact part 45.
  • an O-ring 52 is provided, which is inserted in a groove of a bore 53 which is penetrated by the receptacle 44.
  • the clamping nut 49 is provided with a continuous threaded hole 90, is screwed into a stop 91 which engages in the collet 18 '.
  • This Stop 91 has a smooth head 94 in which a circumferential groove for receiving an O-ring 95 is incorporated, which serves to seal the interior of the collet 18 '.
  • a Kontramutter 92 is provided, the same time for a rotationally fixed connection between the stop 91, against which the cathode 19 ', and the clamping nut 49th provides.
  • the contact part 45 which serves to contact the cathode 19 ', lies with the interposition of a seal 54 on an intermediate part 55, which consists of an electrically insulating material, such as. Ceramic, is made.
  • This intermediate part 55 determines the chamber 27 'which is connected via a radial passage 56 with a connection opening 57.
  • the radial channels 47 and 56 are provided with circumferential grooves 58, in which O-rings 59 are arranged. These serve to seal the contact pins 9 'or the gas supply line 3' engaging in these channels.
  • a distribution ring 59' is arranged, which is provided with distributed over the circumference arranged holes 60 whose diameter increases in both directions with increasing angle to the radial channel 56.
  • the axial bore of the distribution ring 59 'of the cathode 19' passes.
  • an annular space 61 remains between the inner wall of the intermediate part 55 and the distribution ring 59 '.
  • the intermediate part 55 is supported via a seal 62 on an anode contact part 63.
  • a clamping sleeve 64 is screwed into an internal thread 65, wherein a seal 66 between the anode contact part 63 and the end face of the clamping sleeve 64 is interposed.
  • the clamping sleeve 64 has in the region of its one end a conical contact surface 67, against which a diametrically opposite conical surface 68 of a head 69 of an anode 15 'is applied, which, like the clamping sleeve 64 and the anode contact portion 63 made of a highly electrically conductive material is.
  • the anode 15 rests with its end facing away from the head 69 with a further head 70, which rests with the interposition of a seal 71 on a shoulder of the anode contact part 63. In this case, the anode 15 'passes through a coolant chamber 46 of the anode contact part 63.
  • the anode 15 ' is pierced in the axial direction, in which bore 72 a sleeve 73 is inserted, which is made of an electrically insulating material, e.g. Ceramic, is made, and is penetrated by the cathode 19 '.
  • an electrically insulating material e.g. Ceramic
  • a centering sleeve 74 is used, which is shown in more detail in FIG. 7 and whose provided on guide ribs 89 guide surfaces 75 abut the lateral surface of the cathode 19'.
  • the anode 15 ' has radially projecting guide ribs 76, which, as can be seen from FIG. 6, extend from the hexagonal-section anode 15' to the inner wall of the clamping sleeve 64 and perpendicular to the axis of the radial channel 47.
  • the guide ribs 76 extend away from the head 70 against the head 69 of the anode 15 ', but between the head 69 and the guide ribs 76, a flow path 77 remains.
  • the coolant chamber 46 which is bounded on the one hand by the anode contact part 63 and the clamping sleeve 64, divided by the guide ribs 76.
  • the two coolant chambers 46 of the contact part 45 and the anode contact part 63 are connected to one another via an overflow channel 78.
  • This overflow channel 78 consists essentially of axial bores 79 in the contact part 45, and the anode contact part 63 and radial, coaxial with the radial channels 47 holes 80, which open into the axial bores 79.
  • the intermediate part 55 is provided with a bore 81 aligned with the axial bores 81.
  • seals 82 are provided in the region of the bore 81 of the intermediate part.
  • an insert 83 made of a wear-resistant material, e.g. made of a tungsten-ceria alloy.
  • the two contact parts 45 and 63 are surrounded by rings 84 of an electrically insulated material, or these sit on collars 85.
  • gas for example helium, CO 2 or the like
  • gas for example helium, CO 2 or the like
  • the cathode 19 ' is tapered at both ends.
  • the two contact parts 45 and 63 and the intermediate part 55 are connected to one another by means of the screws 87 shown in FIG. 4 and constitute the connecting parts, by means of which a modular construction of the plasma generator 11 'is ensured.
  • the plasma generator 11' designed as a module can be removed by loosening the clamping screw 88 and opening the pipe clamp 40, after which the clamping nut 49 can be released and the cathode 19 'removed from the collet. Then the cathode can be turned or its tapered ends can be reground. Subsequently, the cathode can be adjusted with respect to the anode 15 'by means of a gauge. Subsequently, the stop 91 is set with the collet 18 'open and then the cathode 19' by means of the clamping nut 49 in the collet 18 ' fixed again, after which the module 11 'can be reinstalled.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

Die Erfindung bezieht sich auf einen Plasmaerzeuger mit Halter, z.B. für ein Schweißgerät, gemäß dem Oberbegriff des Anspruches 1.The invention relates to a plasma generator with holder, e.g. for a welding machine, according to the preamble of claim 1.

Bei den Plasmaerzeugern bekannter Geräte ist die Kathode und die Anode meist mit Klemmverbindungen an Anschlußkabeln angeschlossen und über entsprechende Abstandhalter miteinander mechanisch verbunden, die auch die Kammer bestimmen, über die ein entsprechendes Gas dem zwischen der Anode und der Kathode brennenden Lichtbogen zugeführt wird.In the plasma generators known devices, the cathode and the anode is usually connected with terminal connections to connecting cables and mechanically connected to each other via appropriate spacers, which also determine the chamber through which a corresponding gas is supplied to the burning between the anode and the cathode arc.

Aufgrund des unvermeidlichen Verschleißes der Kathode muß diese nach einer bestimmten Anzahl von Betriebsstunden nachgearbeitet werden. Dazu ist es notwendig den Plasmaerzeuger zu zerlegen und die Kathode nachzuschleifen. Anschließend muß die Kathode in Bezug auf die Anode wieder sehr genau eingestellt werden, um die vorgesehene Bearbeitung eines Werkstückes, z.B. das Anbringen einer Schweißnaht oder das Auftragen einer Metallschicht, durchführen zu können. Diese Einstellarbeiten sind mit einem sehr erheblichen Zeitaufwand verbunden und bedingen erhebliche Stillstandszeiten des Werkzeuges und damit Produktionsausfälle.Due to the inevitable wear of the cathode, this must be reworked after a certain number of operating hours. For this purpose it is necessary to disassemble the plasma generator and to regrind the cathode. Thereafter, the cathode must again be set very accurately with respect to the anode to allow for the intended machining of a workpiece, e.g. the attachment of a weld or the application of a metal layer to perform. These adjustments are associated with a very considerable amount of time and cause significant downtime of the tool and thus production losses.

Aus diesem Grund werden in der Massenfertigung für verschiedene Arbeiten Lasergeräte oder Elektronenstrahlgeräte, z.B. zum Schweißen oder Schneiden eingesetzt, obwohl diese in der Herstellung erheblich teurer sind als mit Plasma arbeitende Geräte, z.B. Schweißgeräte, und die erforderliche Vorbereitung der zu verschweißenden Werkstücke erheblich aufwendiger ist, da eben Laser- bzw. Elektronenstrahlen nur durch Absorbierung Wärme erzeugen können, selbst aber keine Wärme Abstrahlen, wie die beim Plasma der Fall ist.For this reason, in mass production, laser devices or electron beam devices, e.g. used for welding or cutting, although these are considerably more expensive to manufacture than plasma-working devices, e.g. Welding equipment, and the required preparation of the workpieces to be welded is considerably more expensive, since just laser or electron beams can only generate heat by absorbing, but even no heat radiating, as is the case with the plasma.

Weiters sind z.B. aus der US 5 328 516 A, der US 5 258 599 A und der EP 0 079 019 A1 Geräte bekannt bei denen Plasmaerzeuger vorgesehen sind, die mit verzehrenden Kathoden arbeiten und bei denen die Anoden samt Halter als Modul ausgebildet und gemeinsam handhabbar sind. Dieser Modul kann von einem Halter abgenommen werden, der auch die Halterung bzw. Führung für die verzehrbare Kathode aufweist.Furthermore, US Pat. No. 5,328,516 A, US Pat. No. 5,258,599 A and EP 0 079 019 A1 disclose devices in which plasma generators are provided which operate with consuming cathodes and in which the anodes together with the holder are designed as modules and can be handled together are. This module can be removed from a holder, which also has the holder or guide for the consumable cathode.

Bei diesen bekannten Lösungen ist eine axiale Zuführung der Kathode und auch der Versorgung mit Gas vorgesehen und auch der Anschluß der elektrischen Versorgung erfolgt in axialer Richtung der Kammer.In these known solutions, an axial supply of the cathode and also the supply of gas is provided and also the connection of the electrical supply takes place in the axial direction of the chamber.

Dabei ergibt sich jedoch der Nachteil, daß der Plasmaerzeuger eine sehr große Baulänge aufweist. Da in der Regel der Plasmaerzeuger an seinem von der Düsenmündung entfernten Endbereich in eine Aufnahme eines Schweißroboters eingespannt wird ergeben sich daher aufgrund der unvermeidlichen Toleranzen entsprechend große Ungenauigkeiten bei der Führung der für den Bearbeitungserfolg und die Reproduzierbarkeit, insbesondere nach einem Wechsel des Moduls, entscheidenden Mündung der Düse.However, there is the disadvantage that the plasma generator has a very large length. Since, as a rule, the plasma generator is clamped at its end region remote from the nozzle orifice into a receptacle of a welding robot, correspondingly large inaccuracies in the guidance of the machining and the reproducibility, in particular after a change of the module, are decisive due to the unavoidable tolerances the nozzle.

Außerdem ergeben sich bei Plasmaerzeugern für Stromstärken von mehr als 1000A sehr große Durchmesser der Plasmaerzeuger und daher sehr große Massen derselben. Außerdem lassen sich die für solche Stromstärken erforderliche Querschnitte der Strompfade kaum erreichen, sodaß mit sehr hohen Stromdichten gearbeitet werden muß, was zu einer entsprechenden Erwärmung der stromführenden Teile führt.In addition, in plasma generators for currents greater than 1000A, very large diameters of the plasma generators and therefore very large masses thereof are produced. In addition, the necessary for such currents cross sections of the current paths can hardly reach, so that you must work with very high current densities, resulting in a corresponding heating of the live parts.

Der bei solchen axial teilbaren Plasmaerzeugern bei schlanker Bauweise unvermeidliche enge Abstand der stromführenden Teile führt bei hohen Zündspannungen, wie sie insbesondere bei Heliumbetrieb erforderlich sind, zu inneren Überschlägen und damit zu Zündversagen.The inevitable in such axially divisible plasma generators in slim design close distance of the current-carrying parts leads at high ignition voltages, as required in particular in helium operation, to internal flashovers and thus to ignition failure.

Ziel der Erfindung ist es, diese Nachteile zu vermeiden und einen Gerät vorzuschlagen, mit dem ein weitgehend kontinuierlicher Einsatz mit hoher Reproduzierbarkeit der Einstellungen auch nach einem Tausch eines Moduls möglich ist.The aim of the invention is to avoid these disadvantages and to propose a device with which a largely continuous use with high reproducibility of the settings even after a replacement of a module is possible.

Erfindungsgemäß wird dies bei einem Gerät der eingangs erwähnten Art durch die kennzeichnenden Merkmale des Anspruches 1 erreicht.According to the invention this is achieved in a device of the type mentioned by the characterizing features of claim 1.

Durch die vorgeschlagenen Maßnahmen ist es auf einfache Weise möglich den als Modul ausgebildeten Plasmaerzeuger einfach auszutauschen. Dazu genügt es, den Modul aus dem Halter zu entnehmen und durch einen neuen auszutauschen. Dabei entfällt die bisher erforderliche Demontage der Anschlußleitungen, da diese an den im Halter angeordneten Kontaktstiften angeschlossen sind.The proposed measures make it possible to easily exchange the plasma generator designed as a module in a simple manner. It is sufficient to remove the module from the holder and replace it with a new one. This eliminates the previously required disassembly of the leads, since they are connected to the arranged in the holder pins.

Bei der Herstellung der Module kann die Kathode auf den vorgesehenen Einsatz hin optimiert eingestellt und in ihrer Lage fixiert werden. Letzteres kann in beliebiger Weise erfolgen. So kann bei Plasmaerzeugern mit kleineren Leistungen die Kathode betriebsfähig unlösbar mit dem Halteteil verbunden, z.B. eingelötet werden.In the production of the modules, the cathode can be set optimized for the intended use and fixed in their position. The latter can be done in any way. Thus, for smaller power plasma generators, the cathode may be operatively connected to the holding member in a non-releasable manner, e.g. be soldered.

Durch die radialen Anschlüsse für die Spannungs- und Gasversorgung ist eine sehr kompakte Bauweise des Moduls möglich, wobei dieser verglichen mit den herkömmlichen Lösungen sehr kurz gehalten werden kann. Außerdem können elektrische Anschlüsse mit relativ großen Querschnitten vorgesehen werden, ohne daß dies zu sehr voluminösen Modulen führt. Dabei können auch entsprechend große Abstände zwischen den elektrisch leitenden Teilen vorgesehen werden, sodaß sich auch keine Probleme bei höheren Zündspannungen ergeben.The radial connections for the voltage and gas supply a very compact design of the module is possible, which can be kept very short compared to the conventional solutions. In addition, electrical connections can be provided with relatively large cross-sections, without resulting in very bulky modules. In this case, correspondingly large distances between the electrically conductive parts can be provided, so that there are no problems with higher ignition voltages.

Durch die Ausrichtung des Halters senkrecht zur Düsenachse des Plasmaerzeugers ist auch auf einfache Weise eine sehr feste und sichere Halterung des Moduls möglich, wodurch eine exakte Führung der Mündung desselben gewährleistet ist.Due to the orientation of the holder perpendicular to the nozzle axis of the plasma generator a very firm and secure mounting of the module is possible in a simple manner, whereby an exact guidance of the mouth of the same is ensured.

Durch die Merkmale des Anspruches 2 ergibt sich eine in fertigungstechnischer Hinsicht sehr einfache Lösung, die sich besonders für kleinere Leistungen eignet, wobei ein solcher Plasmaerzeuger als Wegwerf-Bauteil konzipiert werden kann, der eben nach Gebrauch einer Recyklierung zugeführt wird.Due to the features of claim 2 results in a very simple manufacturing solution, which is particularly suitable for smaller power, wherein such a plasma generator can be designed as a disposable component, which is fed to a Recyklierung just after use.

Durch die Merkmale des Anspruches 3 ergibt sich ein einfacher Aufbau des Halters, wobei die Kontaktstifte für die Sicherung des Moduls in axialer Richtung sorgen.Due to the features of claim 3 results in a simple construction of the holder, wherein the contact pins for securing the module in the axial direction.

Für Geräte mit leistungsstärkeren Plasmaerzeugern gemäß dem Oberbegriff des Anspruches 4 ist es zweckmäßig die kennzeichnenden Merkmale des Anspruches 4 vorzusehen.For devices with more powerful plasma generators according to the preamble of claim 4, it is expedient to provide the characterizing features of claim 4.

Durch die vorgeschlagenen Maßnahmen ist es ebenfalls möglich den Plasmaerzeuger auf einfache und rasche Weise auszutauschen. Gleichzeitig ergibt auch ein sehr einfacher Aufbau des Moduls, wobei auch die Möglichkeit gegeben ist, die Kathode nach dem Zerlegen des Moduls aus der Spannzange zu lösen und nachzuschleifen. Dabei ist auch möglich, zur besseren Ausnutzung der Kathode deren beide Endbereiche konisch auszubilden, wobei der Kegelwinkel an den jeweiligen Einsatz angepaßt ist.The proposed measures also make it possible to exchange the plasma generator in a simple and rapid manner. At the same time also results in a very simple construction of the module, whereby the possibility is given to solve the cathode after disassembly of the module from the collet and regrind. It is also possible to make better use of the cathode whose two end portions conical, the cone angle is adapted to the particular application.

Die Einstellung der Kathode kann nach einer Überarbeitung der Kathode mit einer auf den jeweiligen Verwendungszweck, bzw. Einsatz des Moduls abgestimmten Einstellehre erfolgen. Da eine solche Überarbeitung der Kathode nach einem Austausch des gesamten Moduls erfolgen kann, bedingen solche Arbeiten keine nennenswerten Unterbrechungen der Produktion, z.B. in einer Fertigungsstraße.The adjustment of the cathode can be carried out after a revision of the cathode with a tailored to the particular application, or use of the module setting gauge. Since such a reworking of the cathode can be done after a replacement of the entire module, such work does not cause significant interruptions of production, e.g. in a production line.

Durch die Merkmale des Anspruches 5 ergibt sich der Vorteil einer sehr exakten Führung der Kathode, wobei gleichzeitig auch sichergestellt ist, daß ein Lichtbogen nur zwischen der Mündung der Anode und dem dieser nächsten Stirnseite der Zentrierhülse und damit nur in einem sehr eng begrenzten Bereich brennen kann. Damit ist auch ein sehr kontrollierter Betrieb des Plasmaerzeugers sichergestellt.Due to the features of claim 5, there is the advantage of a very precise guidance of the cathode, while also ensuring that an arc can only burn between the mouth of the anode and the next end face of the centering and thus only in a very narrow range , This ensures a very controlled operation of the plasma generator.

Um die Standzeit der Anode zu erhöhen, können die Merkmale des Anspruches 6 vorgesehen sein, wobei der Einsatz zweckmäßigerweise in die Mündung der Anode eingelötet ist.In order to increase the service life of the anode, the features of claim 6 may be provided, wherein the insert is suitably soldered into the mouth of the anode.

Die Merkmale des Anspruches 7 erlauben es, die Anode auf einfache Weise zu tauschen, z.B. wenn diese entsprechend abgenutzt ist, oder wenn für einen bestimmten Einsatz des Gerätes, bzw. bestimmte Arbeiten eine andere Geometrie der Anode zweckmäßig ist.The features of claim 7 allow the anode to be easily exchanged, e.g. if this is worn out accordingly, or if for a particular use of the device, or specific work a different geometry of the anode is appropriate.

Durch die Merkmale des Anspruches 8 ergibt sich ein sehr einfacher Aufbau, da für jede Kühlmittelkammer nur ein zu einer Anschlußöffnung führender Kanal erforderlich ist.Due to the features of claim 8 results in a very simple construction, since only one leading to a connection port channel is required for each coolant chamber.

Durch die Merkmale des Anspruches 9 ist eine vollständige Durchströmung der Kühlmittelkammer im Bereich der Anode sichergestellt, wobei Toträume vermieden sind.Due to the features of claim 9, a complete flow through the coolant chamber in the region of the anode is ensured, dead spaces are avoided.

Für einen einfachen Aufbau des Gerätes, insbesondere des Halters ist es vorteilhaft die Merkmale des Anspruches 10 vorzusehen. Dadurch können die Kontaktstifte für die Herstellung des elektrischen Anschlusses gleichzeitig zur Zufuhr des Kühlmittels verwendet werden.For a simple construction of the device, in particular of the holder, it is advantageous to provide the features of claim 10. As a result, the contact pins for the production of the electrical connection can be used simultaneously for the supply of the coolant.

Um ein einfaches Montieren, insbesondere größerer Module zu ermöglichen, ist es zweckmäßig die Merkmale des Anspruches 11 vorzusehen.In order to allow easy mounting, in particular larger modules, it is expedient to provide the features of claim 11.

Durch die Merkmale des Anspruches 12 ergibt sich eine sehr gleichmäßige Anströmung der Kathode mit Gas im Bereich der Kammer.Due to the features of claim 12 results in a very uniform flow of the cathode with gas in the chamber.

Durch die Merkmale des Anspruches 13 wird eine Änderung der axialen Lage der Kathode in Bezug auf die Anode beim Spannen der Spannzange sicher vermieden. Bei einer Nacharbeit der Kathode kann einfach deren Längenänderung gegenüber der vorherigen Einstellung ermittelt und der Anschlag um das entsprechende Maß weiter in die Spannmutter eingedreht und in dieser Lage gesichert werden.Due to the features of claim 13, a change in the axial position of the cathode with respect to the anode during clamping of the collet is reliably avoided. In a rework of the cathode can be easily determined their change in length compared to the previous setting and the stop screwed by the appropriate level in the clamping nut and secured in this position.

Die Erfindung wird nun anhand der Zeichnung näher erläutert. Dabei zeigen:

  • Fig. 1 schematisch einen Schnitt durch einen Halter mit Plasmaerzeuger eines erfindungsgemäßen Gerätes,
  • Fig. 2 einen Schnitt im vergrößerten Maßstab durch den Plasmaerzeuger nach der Fig. 1,
  • Fig. 3 einen Schnitt durch einen weitere Ausführungsform eines Halters mit einem Plasmaerzeuger nach einer weiteren Ausführungsform eines erfindungsgemäßen Gerätes,
  • Fig. 4 eine Draufsicht auf den Halter samt Plasmaerzeuger nach der Fig. 3,
  • Fig. 5 einen Schnitt durch den Plasmaerzeuger nach der Fig. 3 und 4 in vergrößertem Maßstab,
  • Fig. 6 einen Schnitt durch die Kühlmittelkammer des Anoden-Kontaktteiles und
  • Fig. 7 einen Schnitt durch die Zentrierhülse.
The invention will now be explained in more detail with reference to the drawing. Showing:
  • 1 shows schematically a section through a holder with plasma generator of a device according to the invention,
  • 2 shows a section on an enlarged scale through the plasma generator of FIG. 1,
  • 3 shows a section through a further embodiment of a holder with a plasma generator according to a further embodiment of a device according to the invention,
  • 4 is a plan view of the holder including the plasma generator of FIG. 3,
  • 5 shows a section through the plasma generator according to FIGS. 3 and 4 on an enlarged scale,
  • 6 shows a section through the coolant chamber of the anode contact part and
  • Fig. 7 is a section through the centering sleeve.

Bei der Ausführungsform nach den Fig. 1 und 2 ist ein aus einem elektrisch isolierenden Material, wie z.B. Keramik hergestellter im wesentlichen hohlzylindrischer Halter 1 vorgesehen, in dessen einem Endbereich ein ebenfalls aus einem Isoliermaterial hergestellter Einsatz 2 eingepreßt ist.In the embodiment of Figures 1 and 2, one of an electrically insulating material, e.g. Ceramics produced substantially hollow cylindrical holder 1 is provided, in one end region of which also made of an insulating material insert 2 is pressed.

Dieser Einsatz 2 ist von einem zentralen, eine Gaszuführleitung 3 bildenden Rohr durchsetzt, das an der Stirnseite des über die Stirnseite des Halters 1 vorragenden Einsatzes 2 endet. Weiters weist der Einsatz 2 noch zwei in einer diametralebene liegende Bohrungen 4, in denen als Widerlager dienende Einpreßteile 7 gehalten sind, die ihrerseits von den Seelen 5 von Anschlußleitungen 6 mit Spiel durchsetzt sind.This insert 2 is penetrated by a central, a gas supply line 3 forming tube which terminates at the end face of the projecting beyond the front side of the holder 1 insert 2. Furthermore, the insert 2 still has two bores 4 located in a diametral plane, in which press-fit parts 7 serving as abutments are held, which in turn are interspersed with clearance by the cores 5 of connection lines 6.

Diese Anschlußleitungen 6 sind an eine nicht dargestellte Spannungsversorgung angeschlossen, die geeignet ist, neben dem für die durchzuführenden Arbeiten erforderlichen Betriebsstrom auch die für die Zündung des Plasmas erforderlichen Zündimpulse zu liefern.These connecting lines 6 are connected to a voltage supply, not shown, which is suitable to deliver in addition to the required for the work to be performed operating power also required for the ignition of the plasma ignition pulses.

An diesen Einpreßteilen 7 stützen sich Druckfedern 8 ab, die Kontaktstifte 9, die mit den Seelen 5 verlötet sind, nach außen drängen. Dabei sind die Kontaktstifte 9 an ihrem freien Ende mit einem stirnseitigen Ansatz 10 versehen, der mit einer Kontaktfläche eines Plasmaerzeugers 11 zusammenwirkt, der in einer an der Stirnseite des Halters 1 angeordneten Befestigungseinrichtung 23 gehalten ist, die als ein aus einem elektrisch isolierenden Material hergestellter Bügel ausgebildet ist, in den der Plasmaerzeuger 11 von oben her eingesetzt ist.At this press-fit parts 7 are based on compression springs 8, the contact pins 9, which are soldered to the souls 5, push outward. In this case, the contact pins 9 are provided at their free end with a frontal projection 10 which cooperates with a contact surface of a plasma generator 11 which is held in a arranged on the end face of the holder 1 fastening means 23, which is manufactured as a made of an electrically insulating material bracket is formed, in which the plasma generator 11 is inserted from above.

Dieser Plasmaerzeuger 11 weist einen Verbindungsteil 13 aus einem elektrisch isolierenden Material, z.B. Keramik auf, der in seinem unteren Bereich kegelförmig verjüngend ausgebildet ist und an seiner unteren Stirnseite eine Öffnung 14 aufweist.This plasma generator 11 has a connecting part 13 made of an electrically insulating material, e.g. Ceramic, which is conically tapered in its lower portion and has an opening 14 at its lower end face.

Diese Öffnung 14 ist von einer ringförmigen Anode 15 durchsetzt, die in üblicher Weise aus einem elektrisch leitenden und thermisch hoch belastbaren Material hergestellt ist und in ihrem Mündungsbereich eine Düsenöffnung 16 aufweist.This opening 14 is penetrated by an annular anode 15, which is made in the usual way of an electrically conductive and thermally highly resilient material and has a nozzle opening 16 in its mouth region.

Die Anode 15 weist einen sich nach oben zu konisch erweiternden Bereich auf, der innen an dem Verbindungsteil 13 anliegt und der in einen zylindrischen Bereich übergeht.The anode 15 has an upwardly conically widening region, which rests on the inside of the connecting part 13 and which merges into a cylindrical region.

An der oberen Stirnseite der Anode 15 liegt ein Zwischenteil 17 an, der ringförmig ausgebildet und aus einem elektrisch isolierenden Material, z.B. Keramik, hergestellt ist.At the upper end side of the anode 15 there is an intermediate part 17 which is annular and made of an electrically insulating material, e.g. Ceramic, is made.

An der oberen Stirnseite des Zwischenteiles 17 liegt ein aus einem elektrisch gut leitenden Material, z.B. Kupfer, hergestellter Halteteil 18 an, in dem eine Kathode 19 eingepreßt ist, die aus einem elektrisch leitenden und thermisch hoch belastbaren Material, wie z.B. aus einer Wolfram-Ceroxid-Legierung hergestellt ist und in ihrem der Düsenöffnung 16 der Anode 15 nahen Endbereich konisch ausgebildet ist.At the upper end side of the intermediate part 17 is made of a highly electrically conductive material, such as copper, produced holding part 18, in which a cathode 19 is pressed, consisting of an electrically conductive and thermally highly resilient material, such as a tungsten ceria -Alloy is made and in its nozzle opening 16 of the anode 15 near end region is conical.

Die Anode 15, wie auch der Halteteil 18 sind zur Festlegung der gegenseitigen Lage der Kathode 10 und der Düsenöffnung 16 der Anode zweckmäßigerweise in den Verbindungsteil 13 eingepaßt.The anode 15, as well as the holding member 18 are adapted to define the mutual position of the cathode 10 and the nozzle opening 16 of the anode expediently in the connecting part 13.

Die Anode 15, der Zwischenteil 17 und der Halteteil 18 mit der eingepreßten Kathode 19 bilden dabei gemeinsam mit dem Verbindungsteil 13 einen Modul des Gerätes, der leicht in den Halter eingebaut und aus diesem wieder entfernt werden kann.The anode 15, the intermediate part 17 and the holding part 18 with the pressed-in cathode 19 together with the connecting part 13 form a module of the device, which can be easily installed in the holder and removed therefrom.

Auf der oberen Stirnseite des Halteteiles 18 liegt ein aus einem Isoliermaterial hergestellter Druckteil 20 an, der eine die Kathode 19 mit Spiel aufnehmende Bohrung 21 aufweist und über die Stirnseite des Verbindungsteiles 13 vorragt.On the upper end side of the holding member 18 is made of an insulating material pressure member 20 which has a cathode 19 with clearance receiving bore 21 and projects beyond the end face of the connecting part 13.

Dieser Druckteil 20 wirkt mit einem Deckel 22 zusammen der auf ein im der oberen Stirnseite des Verbindungsteiles 13 nahen Bereich angeordneten Außengewindes 23 aufgeschraubt ist.This pressure member 20 cooperates with a cover 22 which is screwed onto an in the upper end face of the connecting part 13 near the area arranged external thread 23.

Der Verbindungsteil 13 ist mit drei entlang einer Mantellinie angeordneten radialen Bohrungen 24, 25 versehen, von denen die Bohrungen 24 den Durchtritt der Ansätze 10 der Kontaktstifte 9 ermöglichen und im Bereich des Halteteiles 18, bzw. der Anode 15 liegen. Die Bohrung 25 ist im Bereich des Zwischenteiles 17 angeordnet und fluchtet mit einem radial verlaufenden Einlaß 26 des Zwischenteiles der zu einer durch die Innenwand des Zwischenteiles 17 begrenzten Kammer 27 führt, die von der Kathode 19 durchsetzt ist.The connecting part 13 is provided with three along a surface line arranged radial bores 24, 25, of which the holes 24 allow the passage of the lugs 10 of the contact pins 9 and in the region of the holding part 18, and the anode 15 are. The bore 25 is disposed in the region of the intermediate part 17 and aligned with a radially extending inlet 26 of the intermediate part which leads to a limited by the inner wall of the intermediate part 17 chamber 27, which is penetrated by the cathode 19.

Dabei fluchtet die Bohrung 25 bei in den Halter 1 eingesetztem Plasmaerzeuger, der als Modul aufgebaut ist, auch mit der im Halter 1 vorgesehenen Gaszuführleitung 3.In this case, the bore 25 is aligned with the plasma generator used in the holder 1, which is constructed as a module, also with the gas supply line 3 provided in the holder 1.

Zum Einbau des als Modul aufgebauten Plasmaerzeugers 11 genügt es die Anschlußleitungen 6, deren Isoliermäntel 28 mit Spiel in den Bohrungen 4 des Einsatzes 2 des Halters 1 geführt sind, zurückzuziehen und den Plasmaerzeuger 11 von oben in den Bügel 12 einzusetzen. Danach können die Anschlußleitungen 6 losgelassen werden und die Kontaktstifte 9 rasten in die Bohrungen 24 des Verbindungsteiles 13 ein und sichern die Lage des Plasmaerzeugers 11 im Halter 1. Gleichzeitig werden sie mit ihren Stirnflächen mittels der Federn 8 an den Halteteil 8, bzw. die Anode 15 angepreßt und so ein guter elektrischer Kontakt hergestellt.To install the plasma generator 11 constructed as a module, it suffices the connection lines 6, the insulating coats 28 are performed with play in the holes 4 of the insert 2 of the holder 1, withdraw and insert the plasma generator 11 from above into the bracket 12. Thereafter, the leads 6 can be released and the pins 9 engage in the holes 24 of the connecting part 13 and secure the position of the plasma generator 11 in the holder 1. At the same time they are with their faces by means of the springs 8 to the holding part 8, or the anode 15 is pressed and thus made a good electrical contact.

Beim Betrieb des Plasmaerzeugers 11 wird über die Gaszuführleitung 3 ein Gas, z.B. Helium, CO2 u.a., in die Kammer 27 eingeleitet, das die Kathode 19 umspült und diese im Betrieb gleichzeitig kühlt. Dieses Gas strömt über die Düsenöffnung 16 aus.In the operation of the plasma generator 11, a gas via the gas supply line 3, for example, helium, CO 2, inter alia, introduced into the chamber 27, flows around the cathode 19 and cools it simultaneously in operation. This gas flows out via the nozzle opening 16.

Wird nun mittels eines Hochspannungsimpulses ein Lichtbogen zwischen der Anode 15 und der Kathode 19 gezündet, so bildet sich ein Plasma aus, das aus der Düsenöffnung 16 austritt und z.B. zum Herstellen einer Schweißnaht oder zum Schneiden von Materialien verwendet werden kann.If now an arc between the anode 15 and the cathode 19 is ignited by means of a high voltage pulse, a plasma is formed, which emerges from the nozzle opening 16 and is e.g. can be used to make a weld or to cut materials.

Ist die Kathode 19, bzw. deren kegeliger Endbereich soweit verschlissen, daß ein ordnungsgemäßer Betrieb des Plasmaerzeugers nicht mehr gewährleistet ist, so wird der als Modul aufgebaute Plasmaerzeuger 11 einfach ausgetauscht und durch einen neuen ersetzt. Der ausgetauschte Plasmaerzeuger 11 kann dann einem Recycleverfahren zugeführt werden.If the cathode 19, or its conical end region worn so far that proper operation of the plasma generator is no longer guaranteed, so constructed as a module plasma generator 11 is easily replaced and replaced by a new one. The exchanged plasma generator 11 can then be supplied to a recycle process.

Bei der Ausführungsform nach der Fig. 3 ist ein Halter 1' vorgesehen, der Bohrungen 4' zur Aufnahme der Kontaktstifte 9' aufweist, wobei die Kontaktstifte 9' in axialer Richtung durchbohrt sind. Dabei sind die Kontaktstifte 9' in einem außerhalb des Halters 1' liegenden Bereich mit einem Außengewinde 29 versehen, auf dem Anschlußmuttern 30 aufgeschraubt sind, zwischen denen Kabelschuhe 31 von Anschlußleitungen 8 (Fig. 4) geklemmt sind.In the embodiment of FIG. 3, a holder 1 'is provided, the holes 4' for receiving the contact pins 9 ', wherein the contact pins 9' are pierced in the axial direction. In this case, the contact pins 9 'are provided in an area outside the holder 1' with an external thread 29, are screwed onto the terminal nuts 30, between which terminal lugs 31 of leads 8 (Fig. 4) are clamped.

Das hintere Ende der Kontaktstifte 9' ist für den Anschluß von Schläuchen ausgebildet, über die Kühlwasser zuführbar ist.The rear end of the contact pins 9 'is designed for the connection of hoses through which cooling water can be supplied.

Weiters ist im Halter 1' eine Gaszuführleitung 3' gehalten, die, wie aus der Fig. 4 zu ersehen ist, über einen radialen Kanal 32, der mit einer Madenschraube 33 nach außen abgeschlossen ist, und eine in diese mündende axiale Bohrung 34, in der eine Schlauchtülle 35 eingeschraubt ist, mit einem Gasschlauch 36 verbunden ist, über den ein zur Erzeugung des Plasmas erforderliches Gas zuführbar ist.Furthermore, a gas supply line 3 'is held in the holder 1', which, as can be seen from Fig. 4, via a radial channel 32 which is closed with a grub screw 33 to the outside, and an opening into this axial bore 34, in which a hose nozzle 35 is screwed in, is connected to a gas hose 36, via which a gas required for generating the plasma can be supplied.

Dabei weist die Gaszuführleitung 3' im Bereich des radialen Kanals 32 Schlitze 37 auf, über die das Gas in das Innere der Gaszuführleitung 3' einströmen kann. Dabei ist die Gaszuführleitung 3' mittels einer in diese eingreifende Schraube 39 in ihrer Lage gesichert ist.In this case, the gas supply line 3 'in the region of the radial channel 32 slots 37 through which the gas into the interior of the Gas supply line 3 'can flow. In this case, the gas supply line 3 'is secured by means of a screw 39 engaging in this position.

Wie aus der Fig. 3 zu ersehen ist, ragen die Kontaktstifte 9' in ihrer federbelasteten Ruhestellung über die Stirnfläche 38 des Halters 1' hinaus und greifen in die Mantelfläche eines als Modul aufgebauten Plasamerzeugers 11' ein. Gleiches gilt auch für die Gaszuführleitung 3', die bei montiertem Plasmaerzeuger 11' in diesen eingreift.As can be seen from FIG. 3, the contact pins 9 'project beyond the end face 38 of the holder 1' in their spring-loaded rest position and engage in the lateral surface of a plasma generator 11 'constructed as a module. The same applies to the gas supply line 3 ', which engages with mounted plasma generator 11' in this.

Der als Modul aufgebauter Plasmaerzeuger 11' ist mittels einer Rohrschelle 40 gehalten, deren an der Stirnseite 38 des Halters 1' gehaltene feste Teil mit Stiften 42 gehalten ist. Dabei weist die Rohrschelle 40 ein Gelenk 43 auf, deren Achse senkrecht zur Achse des Halters 1' verläuft.The constructed as a module plasma generator 11 'is held by means of a pipe clamp 40, which is held on the end face 38 of the holder 1' fixed part with pins 42. In this case, the clamp 40 has a hinge 43, whose axis is perpendicular to the axis of the holder 1 '.

Beim Plasmaerzeuger 11' ist der Halteteil 18' der Kathode 19' durch eine Spannzange gebildet, die aus einem elektrisch gut leitenden Material hergestellt ist. Diese Spannzange ist in üblicher Weise in einem Aufnehmer 44 gehalten, der in einen Kontaktteil 45 eingeschraubt ist.In the plasma generator 11 ', the holding part 18' of the cathode 19 'is formed by a collet, which is made of a material with good electrical conductivity. This collet is held in a conventional manner in a receptacle 44 which is screwed into a contact part 45.

Dieser Kontaktteil 45 ist mit einer Kühlmittelkammer 46 versehen, die über einen radialen Kanal 47 mit einer Anschlußöffnung 48 verbunden ist. Dabei fluchtet diese Anschlußöffnung 48 bei im Halter 1' montiertem Plasmaerzeuger 11' mit den Kontaktstiften 9'.This contact part 45 is provided with a coolant chamber 46, which is connected via a radial channel 47 with a connection opening 48. In this case, this connection opening 48 is aligned in the holder 1 'mounted plasma generator 11' with the contact pins 9 '.

Zum Spannen und Lösen der Spannzange 18' ist eine Spannmutter 49 vorgesehen, die über zwei Dichtungen 50 an der oberen Stirnfläche der Aufnahme 44 abgestützt ist, wodurch ein Austritt von Kühlflüssigkeit vermieden wird, wobei die Aufnahme 44 zur Abdichtung der Kühlmittelkammer 46 ebenfalls über eine Dichtung 51 an dem Kontaktteil 45 abgestützt ist.For clamping and releasing the collet 18 ', a clamping nut 49 is provided, which is supported by two seals 50 on the upper end face of the receptacle 44, whereby a leakage of coolant is avoided, the receptacle 44 for sealing the coolant chamber 46 also via a seal 51 is supported on the contact part 45.

Zur weiteren Abdichtung der Kühlmittelkammer des Kontaktteiles 45 ist ein O-Ring 52 vorgesehen, der in einer Nut einer Bohrung 53 eingesetzt ist, die von der Aufnahme 44 durchsetzt ist.For further sealing of the coolant chamber of the contact part 45, an O-ring 52 is provided, which is inserted in a groove of a bore 53 which is penetrated by the receptacle 44.

Zur Sicherung der axialen Einstellung der Kathode 19' beim Spannen der Spannzange 18' ist die Spannmutter 49 mit einer durchgehenden Gewindebohrung 90 versehen, in ein Anschlag 91 eingeschraubt ist, der in die Spannzange 18' eingreift. Dieser Anschlag 91 weist einen glatten Kopf 94 auf, in dem eine umlaufende Nut zur Aufnahme eines O-Ringes 95 eingearbeitet ist, der zur Abdichtung des Inneren der Spannzange 18'dient.To secure the axial adjustment of the cathode 19 'during clamping of the collet 18', the clamping nut 49 is provided with a continuous threaded hole 90, is screwed into a stop 91 which engages in the collet 18 '. This Stop 91 has a smooth head 94 in which a circumferential groove for receiving an O-ring 95 is incorporated, which serves to seal the interior of the collet 18 '.

Zur Sicherung der Lage des Anschlages 91, der mittels eines in den stirnseitigen Schlitz 93 eingesetzten Schraubendrehers einstellbar ist, ist eine Kontramutter 92 vorgesehen, die gleichzeitig für eine drehfeste Verbindung zwischen dem Anschlag 91, an dem die Kathode 19' anliegt, und der Spannmutter 49 sorgt.To secure the position of the stop 91, which is adjustable by means of a screwdriver inserted into the frontal slot 93, a Kontramutter 92 is provided, the same time for a rotationally fixed connection between the stop 91, against which the cathode 19 ', and the clamping nut 49th provides.

Durch den Anschlag 91 ist sichergestellt, daß beim Spannen der Spannzange die Kathode 19' von der Spannzange 18' nicht mehr gegenüber der Anode 15' axial bewegt werden kann, da die Spannmutter 49 an der Stirnfläche des Kontaktteiles 45 anliegt und die Anode 15'gegenüber dieser festgelegt ist.By the stop 91 it is ensured that when clamping the collet, the cathode 19 'of the collet 18' can no longer be moved relative to the anode 15 'axially, since the clamping nut 49 bears against the end face of the contact member 45 and the anode 15' against this is fixed.

Der Kontaktteil 45, der zur Kontaktierung der Kathode 19' dient, liegt unter Zwischenlage einer Dichtung 54 auf einem Zwischenteil 55, der aus einem elektrisch isolierenden Material, wie z.B. Keramik, hergestellt ist. Dieser Zwischenteil 55 bestimmt die Kammer 27' die über einen radialen Kanal 56 mit einer Anschlußöffnung 57 verbunden ist.The contact part 45, which serves to contact the cathode 19 ', lies with the interposition of a seal 54 on an intermediate part 55, which consists of an electrically insulating material, such as. Ceramic, is made. This intermediate part 55 determines the chamber 27 'which is connected via a radial passage 56 with a connection opening 57.

Dabei sind die radialen Kanäle 47 und 56 mit umlaufenden Nuten 58 versehen, in denen O-Ringe 59 angeordnet sind. Diese dienen zur Abdichtung der in diese Kanäle eingreifenden Kontaktstiften 9' bzw. der Gaszuführleitung 3'.The radial channels 47 and 56 are provided with circumferential grooves 58, in which O-rings 59 are arranged. These serve to seal the contact pins 9 'or the gas supply line 3' engaging in these channels.

In der Kammer 27' ist ein Verteilring 59' angeordnet, der mit über den Umfang verteilt angeordnete Bohrungen 60 versehen, deren Durchmesser sich in beiden Drehrichtungen mit größer werdendem Winkel zum dem radialen Kanal 56 vergrößert. Dabei ist die axiale Bohrung des Verteilringes 59' von der Kathode 19' durchsetz. Dabei verbleibt zwischen der Innenwand des Zwischenteiles 55 und dem Verteilring 59' ein Ringraum 61.In the chamber 27 ', a distribution ring 59' is arranged, which is provided with distributed over the circumference arranged holes 60 whose diameter increases in both directions with increasing angle to the radial channel 56. In this case, the axial bore of the distribution ring 59 'of the cathode 19' passes. In this case, an annular space 61 remains between the inner wall of the intermediate part 55 and the distribution ring 59 '.

Der Zwischenteil 55 ist über eine Dichtung 62 auf einen Anoden-Kontaktteil 63 abgestützt. In diesen Anoden-Kontaktteil 63 ist eine Spannhülse 64 in ein Innengewinde 65 eingeschraubt, wobei eine Dichtung 66 zwischen dem Anoden-Kontaktteil 63 und der Stirnfläche der Spannhülse 64 zwischengelegt ist.The intermediate part 55 is supported via a seal 62 on an anode contact part 63. In this anode contact part 63, a clamping sleeve 64 is screwed into an internal thread 65, wherein a seal 66 between the anode contact part 63 and the end face of the clamping sleeve 64 is interposed.

Die Spannhülse 64 weist im Bereich ihres einen Endes eine konische Anlagefläche 67 auf, an der eine gegengleiche kegelige Mantelfläche 68 eines Kopfes 69 einer Anode 15' anliegt, die ebenso wie die Spannhülse 64 und der Anoden-Kontaktteil 63 aus einem elektrisch gut leitenden Material hergestellt ist.The clamping sleeve 64 has in the region of its one end a conical contact surface 67, against which a diametrically opposite conical surface 68 of a head 69 of an anode 15 'is applied, which, like the clamping sleeve 64 and the anode contact portion 63 made of a highly electrically conductive material is.

Die Anode 15 liegt mit ihrem vom Kopf 69 abgekehrten Ende mit einem weiteren Kopf 70 auf, der unter Zwischenlage einer Dichtung 71 an einer Schulter des Anoden-Kontaktteiles 63 anliegt. Dabei durchsetzt die Anode 15' eine Kühlmittelkammer 46 des Anoden-Kontaktteiles 63.The anode 15 rests with its end facing away from the head 69 with a further head 70, which rests with the interposition of a seal 71 on a shoulder of the anode contact part 63. In this case, the anode 15 'passes through a coolant chamber 46 of the anode contact part 63.

Die Anode 15' ist in axialer Richtung durchbohrt, wobei in diese Bohrung 72 eine Hülse 73 eingesetzt ist, die aus einem elektrisch isolierenden Material, z.B. Keramik, hergestellt ist, und von der Kathode 19' durchsetzt ist.The anode 15 'is pierced in the axial direction, in which bore 72 a sleeve 73 is inserted, which is made of an electrically insulating material, e.g. Ceramic, is made, and is penetrated by the cathode 19 '.

Weiters ist in der Bohrung 72 im der Mündung der Anode 15' nahen Bereich eine Zentrierhülse 74 eingesetzt, die in der Fig. 7 näher dargestellt ist und deren an Führungsrippen 89 vorgesehenen Führungsflächen 75 an der Mantelfläche der Kathode 19' anliegen.Furthermore, in the bore 72 in the mouth of the anode 15 'near area a centering sleeve 74 is used, which is shown in more detail in FIG. 7 and whose provided on guide ribs 89 guide surfaces 75 abut the lateral surface of the cathode 19'.

Die Anode 15' weist, wie aus der Fig. 6 zu ersehen ist radial abstehende Leitrippen 76 auf, die sich, wie aus der Fig. 6 zu ersehen ist, von der einen sechseckigen Querschnitt aufweisenden Anode 15' bis zur Innenwand der Spannhülse 64 erstrecken und senkrecht zur Achse des radialen Kanals 47 stehen. Dabei erstrecken sich die Leitrippen 76 vom Kopf 70 weg gegen den Kopf 69 der Anode 15', wobei jedoch zwischen dem Kopf 69 und den Leitrippen 76 ein Strömungsweg 77 verbleibt.As can be seen from FIG. 6, the anode 15 'has radially projecting guide ribs 76, which, as can be seen from FIG. 6, extend from the hexagonal-section anode 15' to the inner wall of the clamping sleeve 64 and perpendicular to the axis of the radial channel 47. In this case, the guide ribs 76 extend away from the head 70 against the head 69 of the anode 15 ', but between the head 69 and the guide ribs 76, a flow path 77 remains.

Dadurch wird die Kühlmittelkammer 46, die einerseits vom Anoden-Kontaktteil 63 und der Spannhülse 64 begrenzt wird, durch die Leitrippen 76 unterteilt.Thereby, the coolant chamber 46, which is bounded on the one hand by the anode contact part 63 and the clamping sleeve 64, divided by the guide ribs 76.

Die beiden Kühlmittelkammern 46 des Kontaktteiles 45 und des Anoden-Kontaktteiles 63 sind über einen Überströmkanal 78 miteinander verbunden.The two coolant chambers 46 of the contact part 45 and the anode contact part 63 are connected to one another via an overflow channel 78.

Dieser Überströmkanal 78 setzt sich im wesentlichen aus axialen Bohrungen 79 in dem Kontaktteil 45, bzw. dem Anoden-Kontaktteil 63 und radialen, zu den radialen Kanälen 47 koaxialen Bohrungen 80 zusammen, die in die axialen Bohrungen 79 münden.This overflow channel 78 consists essentially of axial bores 79 in the contact part 45, and the anode contact part 63 and radial, coaxial with the radial channels 47 holes 80, which open into the axial bores 79.

Dabei ist der Zwischenteil 55 mit einer mit den axialen Bohrungen 79 fluchtenden Bohrung 81 versehen.In this case, the intermediate part 55 is provided with a bore 81 aligned with the axial bores 81.

Dabei sind im Bereich der Bohrung 81 des Zwischenteiles 55 Dichtungen 82 vorgesehen.In this case, 55 seals 82 are provided in the region of the bore 81 of the intermediate part.

Im Mündungsbereich der Anode 15' ist ein Einsatz 83 vorgesehen, der aus einem verschleißfesten Material hergestellt ist, z.B. aus einer Wolfram-Ceroxid-Legierung hergestellt ist.In the mouth region of the anode 15 'is provided an insert 83 made of a wear-resistant material, e.g. made of a tungsten-ceria alloy.

Die beiden Kontaktteile 45 und 63 sind von Ringen 84 aus einem elektrisch isolierten Material umgeben, bzw. diese sitzen auf Krägen 85 auf.The two contact parts 45 and 63 are surrounded by rings 84 of an electrically insulated material, or these sit on collars 85.

Wie aus der Fig. 3 zu ersehen ist, weist die Rohrschelle 40 im Bereich der Krägen 85 der Kontaktteile 45 und 63 Ausnehmungen 86 auf, wodurch ein Kurzschluß zwischen den beiden Kontaktteilen 45 und 63 vermieden wird.As can be seen from Fig. 3, the pipe clamp 40 in the region of the collars 85 of the contact parts 45 and 63 recesses 86, whereby a short circuit between the two contact parts 45 and 63 is avoided.

Beim Betrieb wird Gas, z.B. Helium, CO2 od. dgl. in die Kammer 27' eingeblasen und ein Lichtbogen zwischen der Kathode 19' und der Anode 15' durch einen Hochspannungsimpuls gezündet. Das sich auf die Weise ausbildende Plasma tritt durch die Düsenöffnung 16' aus.During operation, gas, for example helium, CO 2 or the like, is blown into the chamber 27 'and an arc between the cathode 19' and the anode 15 'is ignited by a high voltage pulse. The plasma forming in this way exits through the nozzle opening 16 '.

Die Kathode 19' ist an ihren beiden Enden kegelig ausgebildet.The cathode 19 'is tapered at both ends.

Die beiden Kontaktteile 45 und 63 und der Zwischenteil 55 sind mittels der aus der Fig. 4 ersichtlichen Schrauben 87 miteinander verbunden und stellen die Verbindungsteile dar, durch die ein modularer Aufbau des Plasmaerzeugers 11' sichergestellt ist.The two contact parts 45 and 63 and the intermediate part 55 are connected to one another by means of the screws 87 shown in FIG. 4 and constitute the connecting parts, by means of which a modular construction of the plasma generator 11 'is ensured.

Sobald die Kathode 19' abgenutzt ist, so kann der als Modul ausgebildete Plasmaerzeuger 11' durch Lösen der Spannschraube 88 und Öffnen der Rohrschelle 40 ausgebaut werden, wonach die Spannmutter 49 gelöst und die Kathode 19' aus der Spannzange entnommen werden kann. Anschließend kann die Kathode gewendet, oder deren kegelige Enden nachgeschliffen werden. Anschließend kann die Kathode in Bezug auf die Anode 15' mittels einer Lehre eingestellt wird. Anschließend wird der Anschlag 91 bei geöffneter Spannzange 18' eingestellt und danach die Kathode 19' mittels der Spannmutter 49 in der Spannzange 18' wieder fixiert, wonach der Modul 11' wieder montiert werden kann.As soon as the cathode 19 'is worn out, the plasma generator 11' designed as a module can be removed by loosening the clamping screw 88 and opening the pipe clamp 40, after which the clamping nut 49 can be released and the cathode 19 'removed from the collet. Then the cathode can be turned or its tapered ends can be reground. Subsequently, the cathode can be adjusted with respect to the anode 15 'by means of a gauge. Subsequently, the stop 91 is set with the collet 18 'open and then the cathode 19' by means of the clamping nut 49 in the collet 18 ' fixed again, after which the module 11 'can be reinstalled.

Claims (13)

  1. A plasma generator with a holder, with the plasma generator (11, 11') comprising a non-consuming cathode (19, 19') which penetrates a chamber (27, 27') connected to a gas connection and is in connection with an electric connection and is held in a holding part (18, 18') made of an electrically well conducting material, with the holding part (18, 18') and an annular anode (15, 15') enclosing an end region of the cathode (19, 19') with an annular gap being in electrically conductive connection with contact surfaces cooperating with contact pins (9, 9') which are in connection with electric connecting leads (6), and a bore of the anode (15, 15') which is aligned coaxially with the cathode (19, 19') and is in mechanical connection with the cathode (19, 19') in an electrically insulated manner, delimits a nozzle (16, 16') connected with the chamber (27, 27'), and the anode (15, 15') is joined together with an intermediate part (17, 55) delimiting the chamber (27, 27') and at least one connecting part (13, 87) into a module (11, 11') which can be handled as a unit, characterized in that the holding part (18, 18') with the cathode (19, 19') is also a part of the module (11, 11') and can be handled jointly with the same, with the module being clamped into the holder (1, 1') whose axis stands substantially perpendicular to the axis of the cathode (19, 19') and in which the contact pins (9, 9') are held in an axially resiliently displaceable manner, with the holder (1, 1') comprising a detachable fastening device (12, 40) for receiving the module (11, 11') and a gas feed line (3, 3') which is in alignment with a radially extending inlet (26, 56) of the chamber (27, 27') when the module (11, 11') is mounted.
  2. A device according to claim 1, characterized in that the anode (15) expands conically at least in one section directly adjacent to its nozzle region and rests with its one face side on an electrically insulating intermediate part (17) which comprises the inlet (26) of the chamber (27), and with the holding part (18) of the cathode (19) resting on its second face side, with a pressure part (20) made of insulating material resting on said holding part, and said parts are enclosed on the outside by a connecting part (13) which is made from an electrically insulating material and onto which a cover (22) can be screwed which presses against the pressure part (20).
  3. A device according to claim 1 or 2, characterized in that the holder (1) comprises a bracket (12) for receiving the module (11) and the contact pins (9) are provided in the bracket (12) for fixing the axial position of the module (11), which pins penetrate radial bores (24) of the connecting part (13) when the module is inserted into the bracket (12), with the connecting part (13) further comprising a radial bore (25) which is in alignment with the radially extending inlet (26) of the chamber (27) and which, when the module (11) is mounted in the holder (1), is in alignment with the gas feed line (3) of the holder (1).
  4. A device according to claim 1, in which at least one cooling chamber (46) is provided which can be flowed through by a cooling medium, especially water, characterized in that the holding part (18') of the cathode (19') is formed by tongs whose receiver (44) is inserted into a contact part (45) comprising a coolant chamber (46) and on whose one face side rests an intermediate part (55) made of an insulating material, which intermediate part delimits the chamber (27') penetrated by the cathode (19'), and on whose second face side rests an anode contact part (63) which holds the anode (15') at least indirectly and comprises a further coolant chamber (46) and is penetrated by the cathode (19'), with the two contact parts (45, 63) and the intermediate part (55) being clamped together in the axial direction to the module (11') and the anode (15') projects into the coolant chamber (46), and the two coolant chambers (46) and the chamber (27') of the intermediate part (55) are connected to connection openings (48, 57) via radially extending channels (47, 56), which openings are in alignment with feed and discharge lines arranged in the holder (1') when the module (11') is inserted into a holder (1').
  5. A device according to claim 4, characterized in that a sleeve (73) made of an electrically insulating material, preferably ceramic material, is inserted into the continuous axial bore (72) of the anode (15'), which sleeve reaches up into the chamber (27') of the intermediate part (55), projects beyond the face side of the anode (15') facing the same, and encloses the cathode (19') with play, and a centering sleeve (74) made of an electrically insulating material, preferably ceramic material, is inserted close to the free face side of the anode (15') whose inwardly facing guide ribs (89) rest on the cathode (19').
  6. A device according to claim 4 or 5, characterized in that an insert (83) preferably made of a tungsten alloy such as a tungsten-thorium alloy is inserted in the orifice region of the anode (15').
  7. A device according to one of the claims 4 to 6, characterized in that the anode (15') comprises in its region close to its orifice (16') a head (69) with a substantially conical jacket surface (68) which rests on a substantially diametrically opposed clamping sleeve (64) which can be screwed into the anode contact part (63) and delimits its coolant chamber (46) at least in part.
  8. A device according to one of the claims 4 to 7, characterized in that the two coolant chambers (46) are connected with each other by way of an overflow channel (78) penetrating the intermediate part (55).
  9. A device according to one of the claims 4 to 8, characterized in that the anode (15') is provided with guide ribs (76) which project outwardly in a substantially diagonal manner, extend up to the inner wall of the coolant chamber (46), are arranged between the overflow channel (78) and the channel (47) leading to the connection opening (48), and extend over a portion of the axial extension of the coolant chamber (46).
  10. A device according to one of the claims 4 to 9, characterized in that the feed and discharge lines for the coolant are formed by hollow, spring-loaded contact pins (9') which are held in the holder (1') in an axial displaceable manner and engage in extensions of the channels (47) when the module (11') is mounted.
  11. A device according to one of the claims 4 to 9, characterized in that the holder (1') comprises pipe bracket (40) for receiving the module (11').
  12. A device according to one of the claims 1 to 11, characterized in that a distributor ring (59') is arranged in the chamber (27'), which ring delimits an annular space about the cathode (19') and is enclosed at least over a portion of its outer jacket surface by an annular space (61) remaining between the inside wall of the chamber (27') and is provided with radial bores (60) which are arranged in a distributed manner over the circumference and whose diameter increases with an angular position increasing in the two rotational directions with respect to the channel (56) leading to the chamber (27').
  13. A device according to one of the claims 4 to 12, characterized in that the adjusting nut (49) is provided with a continuous threaded bore (90) into which a stop (91) is screwed which projects into the tongs (18') and on which the cathode (19') rests, with the stop being fixable in the adjusting nut (49).
EP99890002A 1998-01-28 1999-01-08 Plasma generator device Expired - Lifetime EP0933982B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT13598 1998-01-28
AT0013598A AT406243B (en) 1998-01-28 1998-01-28 DEVICE WITH A PLASMA MACHINE

Publications (3)

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EP0933982A2 EP0933982A2 (en) 1999-08-04
EP0933982A3 EP0933982A3 (en) 2002-05-08
EP0933982B1 true EP0933982B1 (en) 2006-10-25

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EP99890002A Expired - Lifetime EP0933982B1 (en) 1998-01-28 1999-01-08 Plasma generator device

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US (1) US6080955A (en)
EP (1) EP0933982B1 (en)
AT (1) AT406243B (en)
CA (1) CA2260505C (en)
CZ (1) CZ296337B6 (en)
DE (1) DE59913939D1 (en)
ES (1) ES2273471T3 (en)

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US6080955A (en) 2000-06-27
CA2260505C (en) 2007-12-04
CZ9900008A3 (en) 2001-06-13
EP0933982A3 (en) 2002-05-08
ES2273471T3 (en) 2007-05-01
CA2260505A1 (en) 1999-07-28
ATA13598A (en) 1999-08-15
EP0933982A2 (en) 1999-08-04
CZ296337B6 (en) 2006-02-15
DE59913939D1 (en) 2006-12-07
AT406243B (en) 2000-03-27

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